JPH04292782A - Baking furnace - Google Patents
Baking furnaceInfo
- Publication number
- JPH04292782A JPH04292782A JP3054389A JP5438991A JPH04292782A JP H04292782 A JPH04292782 A JP H04292782A JP 3054389 A JP3054389 A JP 3054389A JP 5438991 A JP5438991 A JP 5438991A JP H04292782 A JPH04292782 A JP H04292782A
- Authority
- JP
- Japan
- Prior art keywords
- space
- furnace
- temperature
- heat
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims abstract description 30
- 238000010304 firing Methods 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims description 4
- 238000009413 insulation Methods 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 abstract 1
- 230000005855 radiation Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 229910000601 superalloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003779 heat-resistant material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Furnace Details (AREA)
- Ceramic Capacitors (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、セラミックコンデンサ
等のセラミック電子部品等の製造に使用される焼成炉に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a firing furnace used for manufacturing ceramic electronic components such as ceramic capacitors.
【0002】0002
【従来の技術】一般に、セラミック電子部品の製造に使
用される焼成炉としては、トンネル式の連続焼成炉やバ
ッチ式の焼成炉が周知である。2. Description of the Related Art In general, tunnel type continuous firing furnaces and batch type firing furnaces are well known as firing furnaces used for manufacturing ceramic electronic parts.
【0003】従来のこの種のバッチ式の焼成炉の一例を
図8に示す。図8の焼成炉1は炉床昇降式のもので、炉
本体2の下部開口3に嵌合する炉床4が、炉本体2の下
部開口3に対して昇降する。この炉床4を貫通して固定
された棒状の支持部材5の上端に、炉床4の床面に対し
てギャップgをおいて支持されてなる台板6の上には、
焼成するセラミック成形体(図示せず。)を収容して匣
鉢を積み重ねてなる匣組み7が載置される。そして、上
記セラミック成形体は、炉本体2の内部に配置された炭
化ケイ素(SiC)等のヒータ8,8,…により加熱さ
れ、所定の焼成プログラムに従って焼成される。この焼
成の過程で、上記炉本体2の内部の焼成空間9内には、
炉本体2の側壁に設けられた雰囲気ガス供給管11から
雰囲気ガスが供給されるとともに、炉本体2の降温過程
で冷却空気が導入される。また、上記焼成の過程で焼成
空間9内で発生した排気ガスは、台板6と炉床4の間の
上記ギャプgから炉床4に形成された排気口12を通り
、炉本体2の外部に排出される。An example of a conventional batch-type firing furnace of this type is shown in FIG. The firing furnace 1 shown in FIG. 8 is of a hearth raising/lowering type, in which a hearth 4 fitted into a lower opening 3 of a furnace body 2 moves up and down with respect to the lower opening 3 of the furnace body 2. A base plate 6 is supported on the upper end of a rod-shaped support member 5 fixed through the hearth 4 with a gap g relative to the floor surface of the hearth 4.
A sagger assembly 7 made up of stacked saggers containing a ceramic molded body (not shown) to be fired is placed. Then, the ceramic molded body is heated by heaters 8, 8, etc. made of silicon carbide (SiC) arranged inside the furnace main body 2, and fired according to a predetermined firing program. During this firing process, inside the firing space 9 inside the furnace body 2,
Atmospheric gas is supplied from an atmospheric gas supply pipe 11 provided on the side wall of the furnace body 2, and cooling air is introduced in the process of cooling the furnace body 2. Furthermore, the exhaust gas generated in the firing space 9 during the firing process passes through the gap g between the base plate 6 and the hearth 4 through the exhaust port 12 formed in the hearth 4, and passes through the exhaust port 12 formed in the hearth 4 to the outside of the furnace body 2. is discharged.
【0004】0004
【発明が解決しようとする課題】ところで、上記のよう
な構成を有する従来のバッチ式の焼成炉1では、炉本体
2内から炉本体2の外部に逃げる熱をできるだけ少なく
してヒータ8,8,…の消費電力を少なくするため、上
記炉本体2を構成している断熱材からなる断熱層を厚く
すると、炉本体2内の温度を所定の高温に保持した後、
ヒータ8,8,…の電源を切っても、炉本体2内の温度
はなかなか降下せず、降温時間が長くなり、炉の稼動率
が低くなるという問題があった。By the way, in the conventional batch type firing furnace 1 having the above-mentioned configuration, the heat escaping from the inside of the furnace body 2 to the outside of the furnace body 2 is minimized so that the heaters 8, 8 ,... In order to reduce the power consumption of the furnace body 2, the heat insulating layer made of the heat insulating material constituting the furnace body 2 is made thicker.After the temperature inside the furnace body 2 is maintained at a predetermined high temperature,
Even when the power to the heaters 8, 8, . . . is turned off, the temperature inside the furnace body 2 does not drop easily, resulting in a problem that the temperature drop time becomes long and the operating rate of the furnace decreases.
【0005】一方、炉本体2の降温時間を短くするため
に、上記炉本体2を構成している断熱層を薄くすると、
炉壁からの放熱量が大きくなり、ヒータ8,8,…の消
費電力が大きくなる。また、炉本体2の急昇温、急降温
を行なうと、炉本体2の断熱層内の温度勾配が大きくな
り、炉本体2内の温度均一性がわるくなり、炉本体2内
のすべての被焼成物について均一な温度状態を保って、
昇温および降温することが困難であるといった問題もあ
った。On the other hand, in order to shorten the cooling time of the furnace body 2, if the heat insulating layer constituting the furnace body 2 is made thinner,
The amount of heat dissipated from the furnace wall increases, and the power consumption of the heaters 8, 8, . . . increases. Furthermore, if the temperature of the furnace body 2 is rapidly increased or decreased, the temperature gradient within the heat insulating layer of the furnace body 2 becomes large, the temperature uniformity within the furnace body 2 deteriorates, and all the coatings within the furnace body 2 become Maintaining a uniform temperature condition for the fired product,
There was also the problem that it was difficult to raise and lower the temperature.
【0006】従来の焼成炉におけるこのような問題を解
消するため、図9に示すような構成を有する焼成炉21
も提案されている。図9に示す焼成炉21は、炉本体2
2が内側断熱層23とその外側に配置された外側断熱層
24とからなるものである。降温時には、これら内側断
熱層23と外側断熱層24との間にて空間25を画成す
る空間画成部材26内に冷却空気を送り込んで炉本体2
2内部の温度の降下時間を短くするようにしている。In order to solve these problems in the conventional firing furnace, a firing furnace 21 having a configuration as shown in FIG.
has also been proposed. The firing furnace 21 shown in FIG.
2 is composed of an inner heat insulating layer 23 and an outer heat insulating layer 24 disposed outside of the inner heat insulating layer 23. When the temperature drops, cooling air is sent into the space defining member 26 that defines a space 25 between the inner heat insulating layer 23 and the outer heat insulating layer 24 to cool the furnace body 2.
2. The time for the internal temperature to drop is shortened.
【0007】図9の焼成炉では、炉本体22を構成する
内側断熱層23と外側断熱層24との間に空間25を画
成する空間画成部材26は高温となるので、高温下でも
高い強度を有する高価な超合金を使用して構成する必要
があり、焼成炉22の材料コストが高くなるばかりでな
く、上記空間画成部材26の内部は単なる空間であるた
め、炉本体22の冷却効率はあまり高いものではなく、
空間25の内部で上下方向に熱の対流が生じ、焼成空間
9内の温度が不均一になるという問題もあった。In the firing furnace shown in FIG. 9, the space defining member 26 that defines the space 25 between the inner heat insulating layer 23 and the outer heat insulating layer 24 constituting the furnace body 22 has a high temperature. It needs to be constructed using an expensive superalloy with strength, which not only increases the material cost of the firing furnace 22, but also makes it difficult to cool the furnace body 22 since the interior of the space-defining member 26 is just a space. Efficiency is not very high,
There was also a problem in that heat convection occurred in the vertical direction inside the space 25 and the temperature within the firing space 9 became non-uniform.
【0008】本発明の目的は、昇温速度および降温速度
が速く、しかも高温保持状態でのエネルギ消費量が少な
く、降温時における精度の高い温度制御が可能であり、
均一な炉内温度を得ることができるコストの低い焼成炉
を提供することである。[0008] The object of the present invention is to have a high temperature increase rate and a temperature decrease rate, consume less energy in a high temperature holding state, and enable highly accurate temperature control when lowering the temperature.
It is an object of the present invention to provide a low-cost firing furnace that can obtain a uniform temperature inside the furnace.
【0009】[0009]
【課題を解決するための手段】上記目的を達成するため
、本発明は、被焼成物を内部に収容して焼成を行なう炉
本体が内側断熱層とその外側に配置された外側断熱層と
からなり、降温時にこれら内側断熱層と外側断熱層との
間にて空間を画成する空間画成部材内に冷却空気を送り
込んで炉本体内部の温度を降下させるようにした焼成炉
であって、上記空間の内部に空間画成部材に接続されて
空間画成部材の熱を上記冷却空気に伝熱する伝熱部材を
備えたことを特徴としている。[Means for Solving the Problems] In order to achieve the above object, the present invention provides that a furnace body in which a material to be fired is housed and fired is made up of an inner heat insulating layer and an outer heat insulating layer disposed outside the inner heat insulating layer. A firing furnace configured to lower the temperature inside the furnace main body by sending cooling air into a space defining member that defines a space between the inner heat insulating layer and the outer heat insulating layer when the temperature falls, The present invention is characterized in that a heat transfer member is provided inside the space, the heat transfer member being connected to the space defining member and transmitting the heat of the space defining member to the cooling air.
【0010】0010
【作用】上記空間画成部材内部の伝熱部材には、炉本体
内部の焼成空間の熱が内側断熱層から空間画成部材を通
して伝熱される。そして、上記炉本体の冷却時に、空間
画成部材内部の空間に冷却空気が導入されると、冷却空
気は伝熱部材に大きな接触面積で接触し、伝熱部材から
冷却空気に熱が伝熱される。これにより、炉本体内部の
熱が冷却空気に伝熱されて外部に排出され、炉本体が冷
却される。[Operation] Heat from the firing space inside the furnace body is transferred from the inner heat insulating layer to the heat transfer member inside the space defining member. When cooling air is introduced into the space inside the space defining member during cooling of the furnace body, the cooling air contacts the heat transfer member with a large contact area, and heat is transferred from the heat transfer member to the cooling air. It will be done. As a result, the heat inside the furnace body is transferred to the cooling air and discharged to the outside, thereby cooling the furnace body.
【0011】[0011]
【発明の効果】本発明によれば、空間画成部材が画成す
る空間は内部に伝熱部材を有しており、炉本体内部の焼
成空間の熱が内側断熱層から空間画成部材を通して伝熱
されるので、炉本体の冷却時に、空間画成部材内部の空
間に冷却空気が導入されると、冷却空気は伝熱部材に大
きな接触面積で接触し、伝熱部材から冷却空気に熱が伝
熱され、特性を変化させることなく急速冷却が可能とな
る。According to the present invention, the space defined by the space-defining member has a heat transfer member inside, and the heat in the firing space inside the furnace body passes through the space-defining member from the inner heat insulating layer. Since heat is transferred, when cooling air is introduced into the space inside the space defining member when cooling the furnace body, the cooling air contacts the heat transfer member with a large contact area, and heat is transferred from the heat transfer member to the cooling air. Heat is transferred and rapid cooling is possible without changing properties.
【0012】また、空間画成部材は内部の伝熱部材によ
り補強されるので、超合金等の材料に比較して強度の低
い、コストの低い材料を使用することができ、焼成炉の
コストを引き下げることができる。Furthermore, since the space-defining member is reinforced by the internal heat transfer member, it is possible to use materials that are lower in strength and cost than materials such as superalloys, and the cost of the firing furnace can be reduced. can be lowered.
【0013】さらに、本発明によれば、空間画成部材の
内部には、伝熱部材が配置されているので、上下方向の
熱の対流の発生がなく、炉本体内部の焼成空間内の温度
均一性を確保することができる。Further, according to the present invention, since the heat transfer member is disposed inside the space defining member, there is no occurrence of heat convection in the vertical direction, and the temperature in the firing space inside the furnace body is reduced. Uniformity can be ensured.
【0014】[0014]
【実施例】以下に、添付の図面を参照して本発明の実施
例を説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
【0015】本発明に係るバッチ式の焼成炉の一実施例
の縦断面を図1に示す。この焼成炉31は、図9にて説
明した焼成炉21において、炉本体22の空間画成部材
32として、耐熱強度の高い超合金よりも材料コストの
低い耐熱合金材料により形成し、この空間画成部材32
に、伝熱部材として多数の放熱フィン33,33,…を
取り付けたものである。なお、図1において図9に対応
する部分には対応する符号を付して示し、重複した説明
は省略する。FIG. 1 shows a longitudinal section of an embodiment of a batch type firing furnace according to the present invention. In the firing furnace 21 described in FIG. 9, the space defining member 32 of the furnace body 22 is made of a heat-resistant alloy material whose material cost is lower than that of a superalloy with high heat-resistant strength. component 32
A large number of heat dissipating fins 33, 33, . . . are attached as heat transfer members. Note that in FIG. 1, parts corresponding to those in FIG. 9 are shown with corresponding symbols, and duplicate explanations will be omitted.
【0016】上記各放熱フィン33は空間画成部材32
と同じ耐熱合金材料からなり、水平方向にほぼ一定の幅
を有して、上記空間画成部材32の内側断熱層23およ
び外側断熱層24に接する部分を互いにブリッジするよ
うに設けられる。上記各放熱フィン33はまた、図2に
図1のB−B線断面を示すように、空間画成部材32の
内部で、上下で隣合うものどうしの位相が異なるように
配置される。Each of the radiation fins 33 is connected to the space defining member 32.
It is made of the same heat-resistant alloy material as , has a substantially constant width in the horizontal direction, and is provided so as to bridge the portions of the space defining member 32 that are in contact with the inner heat insulating layer 23 and the outer heat insulating layer 24 . Each of the radiation fins 33 is arranged inside the space defining member 32 so that the phases of the radiating fins 33 that are adjacent to each other are different from each other, as shown in FIG.
【0017】上記炉本体22の空間画成部材32の空間
25には、図3に示すように、炉本体22の片対角位置
にそれぞれ形成された冷却空気の導入口34および排出
口35がそれぞれ開口している。In the space 25 of the space defining member 32 of the furnace body 22, as shown in FIG. Each is open.
【0018】このような構成であれば、放熱フィン23
は、内側断熱層23と外側断熱層24と接する空間画成
部材32の部分間をブリッジしているので、空間画成部
材32の強度を補強する機能を有している。したがって
、空間画成部材32としては、強度的に超合金よりも強
度が低くコストの低い耐熱合金を用いることができる。
また、炉本体22の冷却時に、上記冷却空気の導入口3
4から冷却空気を炉本体22の空間画成部材32内の空
間25に投入すると、冷却空気は図3において矢印A1
からA3で示す方向に、上記空間25内を水平に流れて
、その過程で多数の放熱フィン33,33,…に接触し
、炉本体22の焼成空間9から内側断熱層23を通して
上記空間画成部材32に伝熱された熱を受けた後、上記
排出口35から空間25の外に持ち出される。これによ
り、炉本体22が迅速に冷却される。上記のように、冷
却空気は、放熱フィン33,33,…に沿って流れ、上
記空間画成部材32内の空間25を水平方向に流れるの
で、上下方向の熱の対流は生じることがなく、降温時の
炉本体22の焼成空間9内での温度均一性が確保される
。With such a configuration, the radiation fins 23
Since it bridges the portion of the space defining member 32 that is in contact with the inner heat insulating layer 23 and the outer heat insulating layer 24, it has the function of reinforcing the strength of the space defining member 32. Therefore, as the space defining member 32, it is possible to use a heat-resistant alloy that is lower in strength and cost than a superalloy. Also, when cooling the furnace body 22, the cooling air inlet 3
4 into the space 25 in the space defining member 32 of the furnace body 22, the cooling air flows as shown by the arrow A1 in FIG.
, flows horizontally within the space 25 in the direction indicated by A3, and in the process comes into contact with a large number of radiation fins 33, 33, . After receiving the heat transferred to the member 32, it is taken out of the space 25 through the discharge port 35. Thereby, the furnace body 22 is quickly cooled. As mentioned above, the cooling air flows along the radiation fins 33, 33, . Temperature uniformity within the firing space 9 of the furnace body 22 is ensured when the temperature decreases.
【0019】冷却用空気は、図3のように、炉本体22
の片対角位置に設けた冷却空気の導入口34および排出
口35により行なうほか、図4に示すように、炉本体2
2の各コーナ部に設けた開口36を隔壁37により分割
し、冷却用空気の導入口38と排出口39とすることも
でき、また、図5に示すように、炉本体22の各コーナ
部に設けた開口36を隔壁37により分割するとともに
、炉本体22の外側断熱層24に冷却用空気の導入口3
8を設けるようにすることもできる。As shown in FIG. 3, the cooling air is supplied to the furnace body 22.
As shown in FIG.
The openings 36 provided at each corner of the furnace body 22 can be divided by a partition wall 37 to serve as an inlet 38 and an outlet 39 for cooling air. The opening 36 provided in
8 may also be provided.
【0020】次に、本発明に係る焼成炉の他の2つの実
施例を図6および図7に示す。図6に示す焼成炉41は
、図1の焼成炉31において、放熱フィン33に代えて
、セラミック等の耐熱材料からなるハニカム構造を有す
る伝熱部材42を、空間画成部材32に接続して、空間
画成部材32の内部の空間25内に配置したものである
。また、図7に示す焼成炉45は、図1の焼成炉31に
おいて、放熱フィン33に代えて、セラミック等の耐熱
材料からなる格子構造を有する伝熱部材43を、空間画
成部材32に接続して、空間画成部材32の内部の空間
25内に配置したものである。なお、図6および図7に
おいて、図1に対応する部分には対応する符号を付して
示し、重複した説明は省略する。Next, two other embodiments of the firing furnace according to the present invention are shown in FIGS. 6 and 7. A firing furnace 41 shown in FIG. 6 is constructed by connecting a heat transfer member 42 having a honeycomb structure made of a heat-resistant material such as ceramic to the space defining member 32 in place of the heat radiation fins 33 in the firing furnace 31 shown in FIG. , is arranged in the space 25 inside the space defining member 32. Furthermore, in the firing furnace 45 shown in FIG. 7, a heat transfer member 43 having a lattice structure made of a heat-resistant material such as ceramic is connected to the space defining member 32 in place of the radiation fins 33 in the firing furnace 31 of FIG. It is arranged in the space 25 inside the space defining member 32. Note that in FIGS. 6 and 7, parts corresponding to those in FIG. 1 are denoted by corresponding symbols, and redundant explanations will be omitted.
【0021】図6および図7の焼成炉も図1の焼成炉と
同様の効果を奏することができる。The firing furnaces shown in FIGS. 6 and 7 can also produce the same effects as the firing furnace shown in FIG. 1.
【図1】本発明に係る焼成炉の一実施例の構造を示す縦
断面図である。FIG. 1 is a longitudinal sectional view showing the structure of an embodiment of a firing furnace according to the present invention.
【図2】図1の焼成炉のB−B線に沿う断面図である。FIG. 2 is a cross-sectional view of the firing furnace of FIG. 1 taken along line BB.
【図3】図1の焼成炉の冷却用空気の循環説明図である
。FIG. 3 is an explanatory diagram of circulation of cooling air in the firing furnace of FIG. 1;
【図4】図1の焼成炉の冷却用空気の循環説明図である
。FIG. 4 is an explanatory diagram of circulation of cooling air in the firing furnace of FIG. 1;
【図5】図1の焼成炉の冷却用空気の循環説明図である
。FIG. 5 is an explanatory diagram of circulation of cooling air in the firing furnace of FIG. 1;
【図6】本発明に係る焼成炉のいま一つの実施例の構造
を示す縦断面図である。FIG. 6 is a longitudinal sectional view showing the structure of another embodiment of the firing furnace according to the present invention.
【図7】本発明に係る焼成炉のさらにいま一つの実施例
の構造を示す縦断面図である。FIG. 7 is a longitudinal sectional view showing the structure of yet another embodiment of the firing furnace according to the present invention.
【図8】従来の焼成炉の構造を示す縦断面図である。FIG. 8 is a longitudinal cross-sectional view showing the structure of a conventional firing furnace.
【図9】従来のいま一つの焼成炉の構造を示す縦断面図
である。FIG. 9 is a longitudinal sectional view showing the structure of another conventional firing furnace.
4 炉床 7 匣組み 8 ヒータ 9 焼成空間 11 雰囲気ガス供給管 12 排気口 22 炉本体 23 内側断熱層 24 外側断熱層 25 空間 31 空間画成部材 33 放熱フィン 34 導入口 35 排出口 36 開口 37 隔壁 38 導入口 39 排出口 42 伝熱部材 43 伝熱部材 4 Hearth 7 Box assembly 8 Heater 9 Baking space 11 Atmosphere gas supply pipe 12 Exhaust port 22 Furnace body 23 Inner insulation layer 24 Outer insulation layer 25 Space 31 Space defining member 33 Heat dissipation fin 34 Introduction port 35 Discharge port 36 Opening 37 Partition wall 38 Introduction port 39 Discharge port 42 Heat transfer member 43 Heat transfer member
Claims (1)
う炉本体が内側断熱層とその外側に配置された外側断熱
層とからなり、降温時にこれら内側断熱層と外側断熱層
との間にて空間を画成する空間画成部材内に冷却空気を
送り込んで炉本体内部の温度を降下させるようにした焼
成炉であって、上記空間の内部に空間画成部材に接続さ
れて空間画成部材の熱を上記冷却空気に伝熱する伝熱部
材を備えたことを特徴とする焼成炉。Claim 1: A furnace body in which a material to be fired is housed and fired is composed of an inner heat insulating layer and an outer heat insulating layer disposed outside the inner heat insulating layer, and when the temperature decreases, the furnace body is made up of an inner heat insulating layer and an outer heat insulating layer disposed outside the inner heat insulating layer. A firing furnace configured to lower the temperature inside the furnace body by sending cooling air into a space defining member that defines a space, the firing furnace having a space defining member connected to the space defining member inside the space. A firing furnace characterized by comprising a heat transfer member that transfers heat from the formed member to the cooling air.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3054389A JPH04292782A (en) | 1991-03-19 | 1991-03-19 | Baking furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3054389A JPH04292782A (en) | 1991-03-19 | 1991-03-19 | Baking furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04292782A true JPH04292782A (en) | 1992-10-16 |
Family
ID=12969335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3054389A Pending JPH04292782A (en) | 1991-03-19 | 1991-03-19 | Baking furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04292782A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11201650A (en) * | 1998-01-06 | 1999-07-30 | Takuma Co Ltd | Furnace wall structure of electric melting furnace and cooling method for furnace body |
JP2011180570A (en) * | 2010-02-02 | 2011-09-15 | Kyoto Univ | Fluorescence microscope device |
JP2016210634A (en) * | 2015-04-30 | 2016-12-15 | 日本電気硝子株式会社 | Manufacturing apparatus of sheet glass, and manufacturing method of sheet glass |
JP2018151100A (en) * | 2017-03-10 | 2018-09-27 | 日新製鋼株式会社 | Sealed container for steam treatment |
-
1991
- 1991-03-19 JP JP3054389A patent/JPH04292782A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11201650A (en) * | 1998-01-06 | 1999-07-30 | Takuma Co Ltd | Furnace wall structure of electric melting furnace and cooling method for furnace body |
JP2011180570A (en) * | 2010-02-02 | 2011-09-15 | Kyoto Univ | Fluorescence microscope device |
JP2016210634A (en) * | 2015-04-30 | 2016-12-15 | 日本電気硝子株式会社 | Manufacturing apparatus of sheet glass, and manufacturing method of sheet glass |
JP2018151100A (en) * | 2017-03-10 | 2018-09-27 | 日新製鋼株式会社 | Sealed container for steam treatment |
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