JPH04282407A - Measuring device of three-dimensional shape - Google Patents
Measuring device of three-dimensional shapeInfo
- Publication number
- JPH04282407A JPH04282407A JP4632491A JP4632491A JPH04282407A JP H04282407 A JPH04282407 A JP H04282407A JP 4632491 A JP4632491 A JP 4632491A JP 4632491 A JP4632491 A JP 4632491A JP H04282407 A JPH04282407 A JP H04282407A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- light
- laser beam
- light receiving
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 51
- 238000005259 measurement Methods 0.000 claims description 46
- 238000001228 spectrum Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 abstract 1
- 238000005476 soldering Methods 0.000 abstract 1
- 238000010183 spectrum analysis Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は三次元形状測定装置に関
し、特に表面状態が鏡面に近い物から、凹凸や傾斜のあ
る面まで混在する物の三次元形状測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional shape measuring device, and more particularly to a three-dimensional shape measuring device for objects whose surface conditions range from near-mirror to uneven and inclined surfaces.
【０００２】0002
【従来の技術】図９は、従来の三次元形状測定装置を説
明する斜視図である。2. Description of the Related Art FIG. 9 is a perspective view illustrating a conventional three-dimensional shape measuring device.
【０００３】図９の三次元形状測定装置は一軸ステージ
を有する測定台５０に裁置された測定対象物５５を走査
する走査光学系を備えている。The three-dimensional shape measuring apparatus shown in FIG. 9 is equipped with a scanning optical system that scans a measurement object 55 placed on a measurement table 50 having a uniaxial stage.
【０００４】この走査光学系は、レーザ５１と、レーザ
５１のビーム径を所要のビーム径に拡大するビーム拡大
器５２と、レーザ光を測定台５０の真上から測定台５０
の送り方向と直交する方向に走査させるガルバノミラー
５３と、ガルバノミラー５３で走査されたレーザ光を測
定台５０の測定面上で所要のビーム径に集光させかつ定
速度で走査させるｆθレンズ５４とを有する。This scanning optical system includes a laser 51, a beam expander 52 that expands the beam diameter of the laser 51 to a required beam diameter, and a laser beam that is directed from directly above the measurement table 50 to the measurement table 50.
a galvano mirror 53 that scans in a direction perpendicular to the feeding direction of the galvano mirror 53; and an fθ lens 54 that focuses the laser beam scanned by the galvano mirror 53 to a required beam diameter on the measurement surface of the measurement table 50 and scans it at a constant speed. and has.
【０００５】走査されたレーザ光の測定対象物５５の反
射光の中で走査方向に直交する方向に反射する光の一部
を斜め上方から集光レンズ５７で集光し、集光レンズ５
７を通過したレーザ光をシリンドリカルレンズ５８で走
査方向に集光し、さらにこのレーザ光を集光レンズ５７
と、シリンドリカルレンズ５８の焦点位置に置かれた受
光素子５９で受光する。Among the reflected light of the scanned laser beam from the object to be measured 55, a part of the light reflected in the direction perpendicular to the scanning direction is condensed from diagonally above by the condenser lens 57.
7 is condensed in the scanning direction by a cylindrical lens 58, and further this laser beam is condensed by a condensing lens 57.
Then, the light is received by the light receiving element 59 placed at the focal position of the cylindrical lens 58.
【０００６】図１０は、測定対象物５５の高さ測定の原
理を説明するための平面図である。FIG. 10 is a plan view for explaining the principle of measuring the height of the object 55 to be measured.
【０００７】測定対象物５５に真上からレーザ光を当て
測定対象物５５からの反射光をレーザの入射方向から角
度θ傾いた方向で集光レンズ５７を介して受光素子５９
で受光した場合、集光レンズ５７の倍率をｍとすると、
測定対象物５５の高さｔと受光素子５９上での距離ｄ（
高さｔからの反射光の受光位置と測定台５０の表面から
の反射光での受光位置との間の距離）との関係はA laser beam is applied to the object to be measured 55 from directly above, and the reflected light from the object to be measured 55 is transmitted to the light receiving element 59 through the condenser lens 57 at an angle θ from the direction of incidence of the laser.
When light is received at , if the magnification of the condensing lens 57 is m, then
The height t of the measurement object 55 and the distance d on the light receiving element 59 (
The relationship between the distance between the receiving position of the reflected light from the height t and the receiving position of the reflected light from the surface of the measuring table 50 is
【００
０８】00
08]
【０００９】で与えられる。従って受光素子５９上の受
光位置の変位を測ることで測定対象物５５の高さが測定
できる。It is given by: Therefore, by measuring the displacement of the light receiving position on the light receiving element 59, the height of the object to be measured 55 can be measured.
【００１０】図１１（ａ），（ｂ）は、面が粗い測定対
象物５５′と、鏡面に近い測定対象物５５″それぞれの
レーザ光６０の反射の様子を示した平面図である。FIGS. 11A and 11B are plan views showing how the laser beam 60 is reflected by a measurement object 55' having a rough surface and a measurement object 55'' having a nearly mirror surface, respectively.
【００１１】図１１（ａ）のように面が粗い測定対象物
５５′の場合、レーザ光は乱反射するため、斜めに設定
された受光方向６１へ比較的多くの反射が起こるが、図
１１（ｂ）のように面が鏡面に近い測定対象物５５″の
場合、正反射成分が多くなり受光方向６１への反射が少
なくなる。従って図９に示す従来の三次元形状測定装置
では、鏡面に近い面の高さ測定はＳ／Ｎ比が悪くなり測
定が困難である。In the case of a measurement object 55' with a rough surface as shown in FIG. 11(a), the laser beam is diffusely reflected, so a relatively large amount of reflection occurs in the obliquely set light receiving direction 61. In the case of a measuring object 55'' whose surface is close to a mirror surface as shown in b), the specular reflection component increases and the reflection in the receiving direction 61 decreases.Therefore, in the conventional three-dimensional shape measuring device shown in FIG. It is difficult to measure the height of a nearby surface because the S/N ratio deteriorates.
【００１２】0012
【発明が解決しようとする課題】この従来の三次元形状
測定装置では、レーザを測定対象物の真上から走査し斜
め上方から乱反射光の一部を利用して高さ測定を行って
いるため、表面が鏡面に近い測定対象物は受光方向への
乱反射成分が少なく反射光量のＳ／Ｎ比が悪くなり測定
が困難であるという課題があった。[Problem to be Solved by the Invention] This conventional three-dimensional shape measuring device scans the laser from directly above the object to be measured and measures the height by using part of the diffusely reflected light from diagonally above. However, there is a problem in that a measurement object whose surface is close to a mirror surface has a small amount of diffusely reflected components in the receiving direction, resulting in a poor S/N ratio of the amount of reflected light, making measurement difficult.
【００１３】[0013]
【課題を解決するための手段】本発明の三次元形状測定
装置は、（Ａ）測定対象物を裁置し一方向にステップ送
りされる測定台と、（Ｂ）レーザと、前記レーザのビー
ム径を所要のビーム径に拡大するビーム拡大器と、前記
ビーム拡大器を通過したレーザ光を前記測定台の送り方
向と直交する方向に走査するスキャナと、前記スキャナ
で走査されたレーザ光を最終的に前記測定台の測定面上
で所要のビーム径に集光しかつ走査速度を一定するｆθ
レンズと、前記ｆθレンズを通過したレーザ光の光路を
２方向に前記スキャナの走査に同期して切換えるガルバ
ノミラーと、前記ガルバノミラーの切換運動の一終点で
反射されたレーザ光を前記測定台の真上から鉛直下方に
走査軌跡が前記測定台の送り方向と直交するように反射
する第１の反射ミラーと、前記ガルバノミラーの切換運
動の他終点で反射されたレーザ光を前記測定台の斜め上
方から走査軌跡が前記第１の反射ミラーによる走査軌跡
と一致するように反射しかつ前記ガルバノミラーから前
記測定台の測定面上までの光路長が前記第１の反射ミラ
ーでの同光路長と等しくなるように反射する第２の反射
ミラーとで構成される走査光学系と、（Ｃ）前記第２の
反射ミラーによるレーザ入射角に大きさが等しい角度の
反射角方向に反射するレーザ光を集光する集光レンズと
、前記集光レンズの光軸上にあり前記集光レンズを通過
したレーザ光を走査方向に集光するシリンドリカルレン
ズと、前記集光レンズと前記シリンドリカルレンズの焦
点位置に置かれレーザ光を受光する受光素子とで構成さ
れる受光光学系と、（Ｄ）前記スキャナの走査に同期し
て走査毎に前記測定台をステップ送りするステージ制御
回路とレーザ光を前記第１の反射ミラーで反射して走査
した時の前記受光素子の受光位置から測定対象物の高さ
を求める第１の高さ演算回路と、レーザ光を前記第２の
反射ミラーで反射して走査した時の前記受光素子の受光
位置から測定対象物の高さを求める第２の高さ演算回路
と前記第１および第２の反射ミラーで反射されたレーザ
光で走査した時の同一位置における前記受光素子の受光
量を比較し受光量の多い方の前記第１または第２の反射
ミラーで反射した時の前記第１または第２の高さ演算回
路の高さ演算結果を選択する高さ判定回路とで構成され
る信号処理回路とを備えている。[Means for Solving the Problems] The three-dimensional shape measuring device of the present invention includes (A) a measuring table on which an object to be measured is placed and fed stepwise in one direction, (B) a laser, and a beam of the laser. a beam expander that expands the beam diameter to a required beam diameter; a scanner that scans the laser beam that has passed through the beam expander in a direction perpendicular to the feeding direction of the measurement table; fθ that focuses the beam to the required beam diameter on the measurement surface of the measurement table and keeps the scanning speed constant.
a galvanometer mirror that switches the optical path of the laser light that has passed through the fθ lens in two directions in synchronization with the scanning of the scanner; A first reflecting mirror that reflects vertically downward from directly above so that the scanning locus is orthogonal to the feeding direction of the measuring table, and a laser beam reflected at the end point of the switching movement of the galvano mirror is reflected diagonally on the measuring table. Reflected from above so that the scanning locus coincides with the scanning locus of the first reflecting mirror, and the optical path length from the galvanometer mirror to the measurement surface of the measuring table is the same optical path length at the first reflecting mirror. a scanning optical system composed of a second reflecting mirror that reflects the light equally, and (C) a laser beam that is reflected in the direction of a reflection angle whose magnitude is equal to the laser incident angle by the second reflecting mirror; a condenser lens that condenses light; a cylindrical lens that is on the optical axis of the condenser lens and condenses the laser beam that has passed through the condenser lens in the scanning direction; (D) a stage control circuit that moves the measuring table step by step for each scan in synchronization with the scanning of the scanner; a first height calculation circuit that calculates the height of the object to be measured from the light receiving position of the light receiving element when the laser beam is reflected by the second reflecting mirror and scanned; a second height calculation circuit that calculates the height of the object to be measured from the light receiving position of the light receiving element at the time; and the light receiving at the same position when scanning with laser light reflected by the first and second reflecting mirrors. a height determination circuit that compares the amount of light received by the element and selects the height calculation result of the first or second height calculation circuit when reflected by the first or second reflecting mirror, whichever receives a larger amount of light; and a signal processing circuit consisting of.
【００１４】本発明の三次元形状測定装置は、（Ａ）測
定対象物を裁置する測定台と、（Ｂ）第１のレーザと、
前記第１のレーザのビーム径を所要のビーム径に拡大す
る第１のビーム拡大器と、前記第１のレーザと波長の異
なる第２のレーザと、前記第２のレーザのビーム径を所
要のビーム径に拡大する第２のビーム拡大器と、前記第
１のビーム拡大器および前記第２のビーム拡大器で拡大
された２本のレーザ光を１本に重ね合わせる重ね合わせ
光学系と、この重ね合わせ光学系により重ね合わせされ
たレーザ光を前記測定台の送り方向と直交する方向に走
査するスキャナと、前記スキャナで走査されたレーザ光
を最終的に前記測定台の測定面上で所要のビーム径に集
光しかつ走査速度を一定にするｆθレンズと、前記ｆθ
レンズを通過した前記第１のレーザのレーザ光と前記第
２のレーザのレーザ光のいずれか一方のレーザ光を透過
し他方のレーザ光を前記測定台の斜め上方から走査軌跡
が前記測定台の送り方向と直交するように反射する第１
のフィルタと、前記第１のフィルタを通過した一方のレ
ーザ光を前記測定台の真上から鉛直下方に走査軌跡が前
記第１のレーザ光の軌跡と一致するように反射する反射
ミラーとで構成される走査光学系と、（Ｃ）前記第１の
フィルタで反射された他のレーザ光の入斜角に大きさが
等しい角度の反射角方向に反射するレーザ光を集光する
集光レンズと、前記集光レンズの光軸上にあり前記集光
レンズを通過したレーザ光を走査方向に集光するシリン
ドリカルレンズと、前記シリンドリカルレンズを通過し
た前記一方および他方のレーザ光を分光する第２のフィ
ルタと、前記第２のフィルタで分光された前記一方およ
び他方のレーザ光をそれぞれ前記集光レンズおよび前記
シリンドリカルレンズの焦点位置で受光する第１および
第２の受光素子とで構成される受光光学系と、（Ｄ）前
記第１の受光素子の受光位置から高さを求める第１の高
さ演算回路と、前記第２の受光素子の受光位置から高さ
を求める第２の高さ演算回路と、前記第１の受光素子と
前記第２の受光素子の受光量を比較し受光量の多い方の
受光素子の信号を受ける前記第１また第２の高さ演算回
路の高さ演算結果を選択する高さ判定回路とで構成され
る信号処理回路とを備えている。The three-dimensional shape measuring device of the present invention includes (A) a measuring table on which an object to be measured is placed, (B) a first laser,
a first beam expander that expands the beam diameter of the first laser to a required beam diameter; a second laser that has a different wavelength from the first laser; and a second laser that expands the beam diameter of the second laser to the required beam diameter. a second beam expander that expands to a beam diameter; a superposition optical system that superimposes two laser beams expanded by the first beam expander and the second beam expander into one; A scanner that scans laser beams superimposed by a superimposing optical system in a direction perpendicular to the feeding direction of the measuring table; an fθ lens that focuses light to a beam diameter and keeps the scanning speed constant;
Either the laser light of the first laser or the laser light of the second laser that has passed through the lens is transmitted, and the other laser light is scanned from diagonally above the measuring table so that the scanning locus is on the measuring table. The first reflected perpendicular to the feeding direction
and a reflecting mirror that reflects one of the laser beams that has passed through the first filter vertically downward from directly above the measurement table so that the scanning trajectory matches the trajectory of the first laser beam. (C) a condensing lens that condenses the laser beam reflected in a reflection angle direction having a magnitude equal to the incident angle of the other laser beam reflected by the first filter; , a cylindrical lens that is on the optical axis of the condensing lens and condenses the laser beam that has passed through the condensing lens in the scanning direction; and a second cylindrical lens that separates the one and the other laser beams that have passed through the cylindrical lens. Light-receiving optics comprising a filter, and first and second light-receiving elements that receive the one and the other laser beams separated by the second filter at focal positions of the condenser lens and the cylindrical lens, respectively. (D) a first height calculation circuit that calculates the height from the light receiving position of the first light receiving element; and a second height calculating circuit that calculates the height from the light receiving position of the second light receiving element. and a height calculation result of the first or second height calculation circuit which compares the amount of light received by the first light receiving element and the second light receiving element and receives the signal from the light receiving element which receives a larger amount of light. and a signal processing circuit configured with a height determination circuit for selection.
【００１５】本発明の三次元形状測定装置は、（Ａ）測
定対象物を裁置する測定台と、（Ｂ）レーザと、前記レ
ーザのビーム径を所要のビーム径に拡大するビーム拡大
器と、このビーム拡大器により拡大されたレーザ光を前
記測定台の送り方向と直交する方向に走査するスキャナ
と、前記スキャナで走査されたレーザ光を最終的に前記
測定台の測定面上で所要のビーム径に集光しかつ走査速
度を一定にするｆθレンズと、前記ｆθレンズを通過し
たレーザ光を分光する第１の偏光ビームスプリッタと、
前記偏光ビームスプリッタを通過したＰ偏光のレーザ光
を前記測定台の真上から鉛直下方に走査軌跡が前記測定
台の送り方向と直交するように反射する第１の反射ミラ
ーと、前記偏光ビームスプリッタで反射されＳ偏光のレ
ーザ光を前記測定台の斜め上方から走査軌跡が前記第１
の反射ミラーの走査軌跡と一致するように反射しかつ前
記偏光ビームスプリッタから前記測定台の測定面までの
光路長が前記第１の反射ミラーによる前記Ｐ偏光のレー
ザ光の光路長と等しくなるように反射する第２の反射ミ
ラーとで構成される走査光学系と、（Ｃ）前記第２の反
射ミラーにより反射された前記Ｓ偏光のレーザ光の入斜
角に大きさが等しい角度の反射角方向に反射するレーザ
光を集光する集光レンズと、前記集光レンズの光軸上に
あり前記集光レンズを通過したレーザ光を走査方向に集
光するシリンドリカルレンズと、前記シリンドリカルレ
ンズを通過したレーザ光を分光する第２の偏光ビームス
プリッタと、前記第２の偏光ビームスプリッタで分光さ
れたＰ偏光のレーザ光およびＳ偏光のレーザ光それぞれ
を前記集光レンズおよび前記シリンドリカルレンズの焦
点位置で受光する第１および第２の受光素子とで構成さ
れる受光光学系と、（Ｄ）前記第１の受光素子の受光位
置から高さを求める第１の高さ演算回路と、前記第２の
受光素子の受光位置から高さを求める第２の高さ演算回
路と、前記第１の受光素子の前記第２の受光素子の受光
量を比較し受光量の多い方の受光素子の信号を受ける前
記第１または第２の高さ演算回路の高さ演算結果を選択
する高さ判定回路とで構成される信号処理回路とを備え
ている。The three-dimensional shape measuring device of the present invention includes (A) a measuring table on which an object to be measured is placed, (B) a laser, and a beam expander for expanding the beam diameter of the laser to a required beam diameter. , a scanner that scans the laser beam expanded by the beam expander in a direction perpendicular to the feeding direction of the measuring table; and a scanner that scans the laser beam expanded by the beam expander in a direction perpendicular to the feeding direction of the measuring table; an fθ lens that focuses the light to a beam diameter and keeps the scanning speed constant; a first polarizing beam splitter that separates the laser beam that has passed through the fθ lens;
a first reflecting mirror that reflects the P-polarized laser beam that has passed through the polarizing beam splitter vertically downward from directly above the measuring table so that the scanning locus is orthogonal to the feeding direction of the measuring table; and the polarizing beam splitter. The scanning locus of the S-polarized laser beam reflected by
The beam is reflected so as to match the scanning trajectory of the reflecting mirror, and the optical path length from the polarizing beam splitter to the measurement surface of the measuring table is equal to the optical path length of the P-polarized laser beam by the first reflecting mirror. (C) a reflection angle having a magnitude equal to the incident angle of the S-polarized laser beam reflected by the second reflection mirror; a condenser lens that condenses laser light reflected in the direction; a cylindrical lens that is on the optical axis of the condenser lens and condenses the laser beam that has passed through the condenser lens in the scanning direction; a second polarizing beam splitter that separates the polarized laser beam, and a P-polarized laser beam and an S-polarized laser beam separated by the second polarized beam splitter, respectively, at focal positions of the condenser lens and the cylindrical lens. (D) a first height calculation circuit that calculates the height from the light receiving position of the first light receiving element; A second height calculation circuit that calculates the height from the light receiving position of the light receiving element compares the amount of light received by the second light receiving element of the first light receiving element and receives a signal from the light receiving element that receives a larger amount of light. and a signal processing circuit configured with a height determination circuit that selects a height calculation result of the first or second height calculation circuit.
【００１６】[0016]
【実施例】次に本発明について図面を参照して説明する
。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be explained with reference to the drawings.
【００１７】図１および図２はそれぞれ本発明の一実施
例を示す斜視図および信号処理回路のブロック図である
。FIGS. 1 and 2 are a perspective view and a block diagram of a signal processing circuit, respectively, showing an embodiment of the present invention.
【００１８】本実施例は一軸ステージを有する測定台１
に裁置された測定対象物６を走査する走査光学系ならび
にこの走査光学系により走査されたレーザ光の測定対象
物からの反射光を受光する受光光学系を備えている。In this embodiment, a measuring table 1 having a uniaxial stage is used.
It is equipped with a scanning optical system that scans the measuring object 6 placed on the surface of the measuring object 6, and a light-receiving optical system that receives the reflected light from the measuring object of the laser beam scanned by the scanning optical system.
【００１９】この走査光学系は、レーザ２と、レーザ２
のビーム径を所要のビーム径に拡大するビーム拡大器３
と、ビーム拡大器３を通過したレーザ光を測定台１と平
行な面内で測定台１の送り方向と直交する方向に走査す
る第１のガルバノミラー４と、第１のガルバノミラー４
で走査されたレーザ光を最終的に測定台１の測定面上で
所要のビーム径に収束しかつ走査速度を一定にするｆθ
レンズ５と、ｆθレンズ５を通過したレーザ光の光路を
間欠的に正逆の回転運動をして２方向にガルバノミラー
４による走査に同期して周期的に切換える第２のガルバ
ノミラー６と、ガルバノミラー６の回転運動の一終点で
反射されたレーザ光を測定台１の真上から鉛真下方に走
査軌跡が測定台１の送り方向と直交するように反射する
第１の反射ミラー７と、第２のガルバノミラー６の回転
運動の他終点で反射されたレーザ光を測定台１の斜め上
方から走査軌跡が第１の反射ミラー７による走査軌跡と
一致するように反射し、かつ第２のガルバノミラー６か
ら測定台１の測定面上までの光路長が第１の反射ミラー
７での同光路長と等しい第２の反射ミラー８を有する。This scanning optical system includes a laser 2 and a laser 2
Beam expander 3 that expands the beam diameter to the required beam diameter
, a first galvano mirror 4 that scans the laser beam that has passed through the beam expander 3 in a plane parallel to the measurement table 1 in a direction perpendicular to the feeding direction of the measurement table 1;
fθ to make the laser beam scanned by finally converge to the required beam diameter on the measurement surface of the measurement table 1 and keep the scanning speed constant.
a second galvanometer mirror 6 that periodically rotates the optical path of the laser beam that has passed through the lens 5 and the fθ lens 5 in two directions in synchronization with the scanning by the galvanometer mirror 4 by rotating forward and backward intermittently; a first reflecting mirror 7 that reflects the laser beam reflected at one end point of the rotational movement of the galvanometer mirror 6 from directly above the measuring table 1 vertically downward so that the scanning locus is perpendicular to the feeding direction of the measuring table 1; , reflects the laser beam reflected at the other end point of the rotational movement of the second galvanometer mirror 6 from diagonally above the measuring table 1 so that the scanning locus coincides with the scanning locus of the first reflecting mirror 7, and The second reflecting mirror 8 has an optical path length from the galvanometer mirror 6 to the measurement surface of the measuring table 1 that is equal to the optical path length at the first reflecting mirror 7.
【００２０】受光光学系は、測定台１に対し第２の反射
ミラー８によるレーザ入射角に等しい反射角方向に反射
するレーザ光を集光する集光レンズ１１と、集光レンズ
１１の光軸上にあり集光レンズ１１を通過したレーザ光
を走査方向に集光するシリンドリカルレンズ１２と、集
光レンズ１１およびシリンドリカルレンズ１２の焦点位
置に置かれレーザ光を受光する受光素子１３とを有する
。The light-receiving optical system includes a condenser lens 11 that condenses the laser beam reflected by the second reflection mirror 8 in the direction of a reflection angle equal to the laser incidence angle with respect to the measurement table 1, and an optical axis of the condenser lens 11. It includes a cylindrical lens 12 located above and condensing the laser beam that has passed through the condenser lens 11 in the scanning direction, and a light receiving element 13 placed at the focal position of the condenser lens 11 and the cylindrical lens 12 and receiving the laser beam.
【００２１】図２に示す信号処理回路は、第１のガルバ
ノミラー４の走査に同期して２走査毎に測定台１をステ
ップ送りさせるステージ制御回路１４と、第１の反射ミ
ラー７で走査した時の受光素子１３の受光位置から測定
対象物９の高さを求める第１の高さ演算回路１６と、第
２の反射ミラー８で走査した時の受光素子１３の受光位
置から測定対象物９の高さを求める第２の高さ演算回路
１７と、第１のガルバノミラー４に同期して第１の高さ
演算回路１６と第２の高さ演算回路１７とを切換える切
換え回路１５と、第１の反射ミラー７および第２の反射
ミラー８で走査した時の同一位置における受光素子１３
の受光量を比較し受光量の多い方で求めた高さ演算結果
を選択する高さ判定回路１８とを有する。The signal processing circuit shown in FIG. 2 includes a stage control circuit 14 that moves the measuring table 1 step by step every two scans in synchronization with the scanning of the first galvanometer mirror 4, and a first reflecting mirror 7 that performs scanning. A first height calculation circuit 16 calculates the height of the object to be measured 9 from the light receiving position of the light receiving element 13 at the time, and a height calculation circuit 16 calculates the height of the object to be measured 9 from the light receiving position of the light receiving element 13 when scanning with the second reflecting mirror 8. a second height calculation circuit 17 that calculates the height of , and a switching circuit 15 that switches between the first height calculation circuit 16 and the second height calculation circuit 17 in synchronization with the first galvanometer mirror 4; Light receiving element 13 at the same position when scanning with the first reflecting mirror 7 and the second reflecting mirror 8
and a height determination circuit 18 that compares the amount of received light and selects the height calculation result obtained based on the amount of received light.
【００２２】この信号処理回路の制御により、測定台１
の各位置においてレーザ光のガルバノミラー４の走査を
２回ずつ行い、その２回の走査のうちの１回の走査中は
レーザ光がガルバノミラー６から反射ミラー７を介して
測定台１を真上から入射し、受光素子１３の出力を演算
回路１６に伝えるように切換えるようにし、他の１回の
走査中は、レーザ光がガルバノミラー６から反射ミラー
８を介して測定台１を斜めから入射し受光素子１３の出
力を演算回路１７に伝えるようにする。また判定回路１
８は上記の１回の走査での受光素子１３の受光量が他の
１回の走査での受光素子１３の受光量より多い時は演算
回路１６の演算結果を、逆の時は演算回路１７の演算結
果を測定対象物９の高さとして選択する。By controlling this signal processing circuit, the measuring table 1
The laser beam scans the galvano mirror 4 twice at each position, and during one of the two scans, the laser beam travels directly from the galvano mirror 6 to the measuring table 1 via the reflection mirror 7. The laser beam enters from above and is switched so that the output of the light receiving element 13 is transmitted to the arithmetic circuit 16. During one other scan, the laser beam passes from the galvanometer mirror 6 to the reflection mirror 8, and then passes through the measuring table 1 from an angle. The output of the light receiving element 13 is transmitted to the arithmetic circuit 17. Also, the judgment circuit 1
8 indicates the calculation result of the arithmetic circuit 16 when the amount of light received by the light receiving element 13 in one scan is greater than the amount of light received by the light receiving element 13 in another scan, and the calculation result of the arithmetic circuit 17 in the opposite case. The calculation result is selected as the height of the measurement object 9.
【００２３】図３は垂直入射および斜め入射光学系の高
さ測定原理を説明するための平面図である。FIG. 3 is a plan view for explaining the height measurement principle of the vertical incidence and oblique incidence optical systems.
【００２４】反射ミラー８で反射して入射されるレーザ
光の入射角度および集光レンズ１１を通して受光するレ
ーザ光の受光角度をθ、測定対象物９の受光素子１３に
おける像の倍率をｍとすれば測定対象物９の高さｔは、
Let θ be the incident angle of the laser beam reflected by the reflecting mirror 8 and the acceptance angle of the laser beam received through the condenser lens 11, and m be the magnification of the image of the object to be measured 9 on the light receiving element 13. For example, the height t of the measurement object 9 is
【００２５】[0025]
【００２６】で与えられる。演算回路１６は上記の式（
１）に従い測定対象物９の高さを求め、演算回路１７は
式（２）に従い測定対象物９の高さを求める。It is given by: The arithmetic circuit 16 calculates the above equation (
1), and the arithmetic circuit 17 calculates the height of the measurement object 9 according to equation (2).
【００２７】図４（ａ），（ｂ）は斜面での反射を説明
するための平面図である。FIGS. 4(a) and 4(b) are plan views for explaining reflection on a slope.
【００２８】図４（ａ）は垂直入射、図４（ｂ）は斜め
入射の場合である。測定面２０が角度αの傾きを持って
いた場合の受光方向２１と最も強い反射方向２２，２２
′とのずれ角△θ１，△θ２は
垂直入射：△θ１＝θ−２α
斜め入射：△θ２＝２α
となる。ここで△θ１＝△θ２として解くとα＝θ／４
となる。すなわち、測定面２０の傾きがθ／４より小さ
い場合は△θ２≦△θ１となり斜め入射光学系の方がよ
り多くの反射光を受光でき、一方測定面２０の傾きがθ
／４より大きい場合は△θ２≧△θ１となり垂直入射光
学系の方がより多くの反射光を受光できる。従って測定
台１の同一位置を垂直入射および斜め入射の両方で交互
に走査し、受光素子１３の受光量の多い方で高さを求め
ることにより各斜面に対してより高いＳ／Ｎ比で高さ測
定ができる上、フラット鏡面に近い物から凹凸や傾斜の
ある物まで幅広く対応できる。FIG. 4(a) shows the case of normal incidence, and FIG. 4(b) shows the case of oblique incidence. Light receiving direction 21 and strongest reflection direction 22, 22 when the measurement surface 20 has an inclination of angle α
The deviation angles △θ1 and △θ2 with respect to Here, if we solve by setting △θ1=△θ2, α=θ/4
becomes. That is, when the inclination of the measurement surface 20 is smaller than θ/4, △θ2≦△θ1, and the oblique incidence optical system can receive more reflected light.
If it is larger than /4, △θ2≧△θ1, and the vertical incidence optical system can receive more reflected light. Therefore, by scanning the same position on the measuring table 1 alternately with both vertical incidence and oblique incidence, and determining the height using the one that receives more light from the light-receiving element 13, a higher S/N ratio can be obtained for each slope. In addition to being able to measure the surface area, it can also handle a wide range of objects, from near-flat mirror surfaces to uneven and sloping objects.
【００２９】図５および図６はそれぞれ本発明の他の実
施例の斜視図および信号処理回路のブロック図である。
本実施例も測定台１，走査光学系および受光光学系を備
えている。FIGS. 5 and 6 are a perspective view and a block diagram of a signal processing circuit of another embodiment of the present invention, respectively. This embodiment also includes a measuring table 1, a scanning optical system, and a light receiving optical system.
【００３０】本実施例の走査光学系は、第１のレーザ２
と、第１のレーザ２のビーム径を所要のビーム径に拡大
する第１のビーム拡大器３と、第１のレーザ２と波長の
異なる第２のレーザ３０と、第２のレーザ３０のビーム
径を所要のビーム径に拡大する第２のビーム拡大器３１
と、第１のレーザ２および第２のレーザ３０のレーザ光
を１本に重ね合わせるミラー３２およびビームスプリッ
タ３３で構成された重ね合わせ光学系と、重ね合わされ
たレーザ光を測定台１と平行な面内で測定台１の送り方
向と直交する方向に走査するガルバノミラー４と、ガル
バノミラー４で走査されたレーザ光を最終的に測定台１
の測定面上で所要のビーム径に収光しかつ走査速度を一
定にするｆθレンズ５と、ｆθレンズ５を通過した第１
のレーザ２と第２のレーザ３０のレーザ光のうち第２の
レーザ３０のレーザ光を透過し第１のレーザ２のレーザ
光を測定台１の斜め上方から走査軌跡が測定台１の送り
方向と直交するように反射する第１のフィルタ３４と、
第１のフィルタ３４を通過した第２のレーザ３０のレー
ザ光を測定台１の真上から鉛直下方に走査軌跡が第１の
レーザ２の軌跡と一致するように反射する反射ミラー３
５とを有する。The scanning optical system of this embodiment has a first laser 2
, a first beam expander 3 that expands the beam diameter of the first laser 2 to a required beam diameter, a second laser 30 having a different wavelength from the first laser 2, and a beam of the second laser 30. A second beam expander 31 that expands the diameter to a required beam diameter.
A superimposing optical system includes a mirror 32 and a beam splitter 33 that superimpose the laser beams of the first laser 2 and the second laser 30 into one, and A galvano mirror 4 scans within the plane in a direction perpendicular to the feeding direction of the measuring table 1, and the laser beam scanned by the galvano mirror 4 is finally sent to the measuring table 1.
an fθ lens 5 that converges the light to a required beam diameter on the measurement surface and keeps the scanning speed constant;
Among the laser beams of the laser 2 and the second laser 30, the laser beam of the second laser 30 is transmitted, and the laser beam of the first laser 2 is scanned from diagonally above the measuring table 1.The scanning locus is in the feeding direction of the measuring table 1. a first filter 34 that reflects at right angles to;
Reflection mirror 3 that reflects the laser beam of the second laser 30 that has passed through the first filter 34 from directly above the measurement table 1 vertically downward so that the scanning trajectory matches the trajectory of the first laser 2
5.
【００３１】受光光学系は、測定対象物９の反射光の中
で第１のフィルタ３４により反射されたレーザ２のレー
ザ光の入射角に等しい反射角方向に反射するレーザ光を
集光する集光レンズ１１と、集光レンズ１１の光軸上に
あり集光レンズ１１を通過したレーザ光を走査方向に集
光するシリンドリカルレンズ１２と、シリンドリカルレ
ンズ１２を通過した第１のレーザ２と第２のレーザ３０
のレーザ光のうち第２のレーザ３０のレーザ光を透過し
第１のレーザ２のレーザ光を反射する第２のフィルタ３
６と、第２のフィルタ３６で分光された第１，第２のレ
ーザ２，３０のレーザ光をそれぞれ集光レンズ１１およ
びシリンドリカルレンズ１２の焦点位置で受光する第１
の受光素子３７、第２の受光素子１３とを有する。The light-receiving optical system is a condenser for condensing the laser light reflected from the measurement object 9 in the direction of the reflection angle equal to the incident angle of the laser light of the laser 2 reflected by the first filter 34. an optical lens 11; a cylindrical lens 12 that is on the optical axis of the condenser lens 11 and condenses the laser beam that has passed through the condenser lens 11 in the scanning direction; and a first laser 2 and a second laser that have passed through the cylindrical lens 12; laser 30
a second filter 3 that transmits the laser beam of the second laser 30 and reflects the laser beam of the first laser 2;
6 and a first laser beam that receives the laser beams of the first and second lasers 2 and 30 separated by the second filter 36 at the focal positions of the condenser lens 11 and the cylindrical lens 12, respectively.
It has a light receiving element 37 and a second light receiving element 13.
【００３２】図６に示す信号処理回路は、第１の受光素
子３７の受光位置から高さを求める第１の高さ演算回路
３８と、第２の受光素子１３の受光位置から高さを求め
る第２の高さ演算回路３９と、第１の受光素子３７と第
２の受光素子１３の受光量を比較し受光量の多い方の受
光素子１３または３７の信号を受ける高さ演算回路３８
または３９の高さ演算結果を最終的に決定する測定対象
物９の高さとして選択する高さ判定回路１８とで構成さ
れる。高さ演算回路１６は式（２）に従い測定対象物９
の高さを求め、高さ演算回路１７は式（１）に従い測定
対象物９の高さを求める。The signal processing circuit shown in FIG. 6 includes a first height calculation circuit 38 that calculates the height from the light receiving position of the first light receiving element 37 and a height calculating circuit 38 that calculates the height from the light receiving position of the second light receiving element 13. A second height calculation circuit 39 and a height calculation circuit 38 which compares the amount of light received by the first light receiving element 37 and the second light receiving element 13 and receives a signal from the light receiving element 13 or 37 which receives a larger amount of light.
Alternatively, the height determination circuit 18 selects the height calculation result of step 39 as the height of the object to be measured 9 to be finally determined. The height calculation circuit 16 calculates the measurement target 9 according to equation (2).
The height calculating circuit 17 calculates the height of the object to be measured 9 according to equation (1).
【００３３】図７および図８はそれぞれ本発明のさらに
他の実施例の斜視図および信号処理回路のブロック図で
ある。FIGS. 7 and 8 are a perspective view and a block diagram of a signal processing circuit of still another embodiment of the present invention, respectively.
【００３４】本実施例の走査光学系は、レーザ２，ビー
ム拡大器３，ガルバノミラー４およびｆθレンズ５を備
え、さらにｆθレンズ５を通過したレーザ光を分光する
第１の偏光ビームスプリッタ４０と、偏光ビームスプリ
ッタ４０を通過したレーザ光（以下Ｐ偏光のレーザ光と
称す）を測定台１の真上から鉛直下方に走査軌跡が測定
台１の送り方向と直交するように反射する第１の反射ミ
ラー４２と、偏光ビームスプリッタ４０で反射されたレ
ーザ光（以下Ｓ偏光のレーザ光と称す）を測定台１の斜
め上方から走査軌跡が第１の反射ミラー４２と一致する
ように反射しかつ偏光ビームスプリッタ４０から測定台
１の測定面までの光路長が第１の反射ミラー４２におけ
る同光路長と等しい第２の反射ミラー４１とで構成され
る。The scanning optical system of this embodiment includes a laser 2, a beam expander 3, a galvanometer mirror 4, and an fθ lens 5, and further includes a first polarizing beam splitter 40 that separates the laser beam that has passed through the fθ lens 5. , a first reflector that reflects the laser beam (hereinafter referred to as P-polarized laser beam) that has passed through the polarizing beam splitter 40 from directly above the measuring table 1 vertically downward so that the scanning locus is orthogonal to the feeding direction of the measuring table 1. The laser beam reflected by the reflecting mirror 42 and the polarizing beam splitter 40 (hereinafter referred to as S-polarized laser beam) is reflected from diagonally above the measuring table 1 so that the scanning locus coincides with the first reflecting mirror 42. It is composed of a second reflecting mirror 41 whose optical path length from the polarizing beam splitter 40 to the measurement surface of the measuring table 1 is equal to the optical path length of the first reflecting mirror 42 .
【００３５】受光光学系は、第２の反射ミラー４１によ
り反射されたＳ偏光のレーザ光のレーザ入射角に等しい
反射角方向に反射するレーザ光を集光する集光レンズ１
１およびシリンドリカルレンズ１０と、シリンドリカル
レンズ１０を通過したレーザ光を分光する第２の偏光ビ
ームスプリッタ１１と、第２の偏光ビームスプリッタ１
１で分光されたＰ偏光のレーザ光およびＳ偏光のレーザ
光をそれぞれ集光レンズ９およびシリンドリカルレンズ
１０の焦点位置で受光する第１の受光素子１３および第
２の受光素子３７とで構成される。The light receiving optical system includes a condenser lens 1 that condenses the laser beam reflected by the second reflection mirror 41 in a reflection angle direction equal to the laser incidence angle of the S-polarized laser beam.
1, a cylindrical lens 10, a second polarizing beam splitter 11 that separates the laser beam that has passed through the cylindrical lens 10, and a second polarizing beam splitter 1.
It is composed of a first light receiving element 13 and a second light receiving element 37 that receive the P-polarized laser light and the S-polarized laser light separated by the laser beam 1 at the focal positions of the condenser lens 9 and the cylindrical lens 10, respectively. .
【００３６】図８の信号処理回路は、第１の受光素子１
３の受光位置から高さを求める第１の高さ演算回路１６
と、第２の受光素子３７の受光位置から高さを求める第
２の高さ演算回路１７と、高さ判定回路１８とで構成さ
れる。The signal processing circuit shown in FIG.
The first height calculation circuit 16 calculates the height from the light receiving position of No. 3.
, a second height calculating circuit 17 that calculates the height from the light receiving position of the second light receiving element 37, and a height determining circuit 18.
【００３７】[0037]
【発明の効果】以上説明したように本発明は、１つの走
査光学系で垂直入射と斜め入射の走査を交互に高速に切
換えて、または同時に行うことにより、同一走査位置に
おける両走査の反射光量を比較し、反射光量の多い方で
高さ測定を行うことにより、表面状態が鏡面に近い物か
ら傾斜のある物まで幅広く高いＳ／Ｎ比で高精度かつ高
速に三次元形状を測定できるという効果を有する。Effects of the Invention As explained above, the present invention can reduce the amount of reflected light in both scans at the same scanning position by alternately switching vertically incident and obliquely incident scanning at high speed or performing them simultaneously using one scanning optical system. By comparing height measurements using the side with a greater amount of reflected light, it is possible to measure three-dimensional shapes with high precision and high speed over a wide range of surfaces, from near-mirror to inclined surfaces, with a high S/N ratio. have an effect.
【図１】本発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing one embodiment of the present invention.
【図２】図１に示した実施例の信号処理回路のブロック
図である。FIG. 2 is a block diagram of the signal processing circuit of the embodiment shown in FIG. 1;
【図３】図１に示した実施例の高さ測定原理を説明する
平面図である。FIG. 3 is a plan view illustrating the height measurement principle of the embodiment shown in FIG. 1;
【図４】図１に示した実施例の垂直方向および斜め方向
の入射による受光素子１３の受光量の比較を説明するた
めの平面図である。FIG. 4 is a plan view for explaining a comparison of the amount of light received by the light receiving element 13 when incident in the vertical direction and in the oblique direction in the embodiment shown in FIG. 1;
【図５】本発明の他の実施例を示す斜視図である。FIG. 5 is a perspective view showing another embodiment of the present invention.
【図６】図５に示した実施例の信号処理回路のブロック
図である。FIG. 6 is a block diagram of the signal processing circuit of the embodiment shown in FIG. 5;
【図７】本発明のさらに他の実施例を示す斜視図である
。FIG. 7 is a perspective view showing still another embodiment of the present invention.
【図８】図７に示した実施例の信号処理回路のブロック
図である。FIG. 8 is a block diagram of the signal processing circuit of the embodiment shown in FIG. 7;
【図９】従来の三次元形状測定装置を示す斜視図である
。FIG. 9 is a perspective view showing a conventional three-dimensional shape measuring device.
【図１０】図９に示す三次元形状測定装置の測定対象物
の高さ測定原理を説明する図である。10 is a diagram illustrating the principle of measuring the height of the object to be measured by the three-dimensional shape measuring device shown in FIG. 9. FIG.
【図１１】図９に示す三次元形状測定装置で表面状態の
異なる測定対象物を測定した場合の反射光の違いを説明
する図である。11 is a diagram illustrating differences in reflected light when measuring objects with different surface conditions are measured by the three-dimensional shape measuring apparatus shown in FIG. 9. FIG.
１，５０ 測定台
２，３０，５１ レーザ
３，３１，５２ ビーム拡大器
４，６，５３ ガルバノミラー
５，５４ ｆθレンズ
７，８，３２，３５，４１，４２ 反射ミラー９
，５５，５５′，５５″ 測定対象物１１，５７
集光レンズ
１２，５８ シリンドリカルレンズ１３，３７，
５９ 受光素子
１４ ステージ制御回路
１５ 切換え回路
１６，１７，３８，３９ 高さ演算回路１８
高さ判定回路
１９，６０ レーザ光
２０ 測定面
２１，６１ 受光方向
２２，２２′ 最も強い反射方向３３ ビ
ームスプリッタ
３４，３６ フィルタ
４０，４３ 偏光ビームスプリッタ６２，６２′
反射強度分布1, 50 Measuring table 2, 30, 51 Laser 3, 31, 52 Beam expander 4, 6, 53 Galvanometer mirror 5, 54 fθ lens 7, 8, 32, 35, 41, 42 Reflection mirror 9
, 55, 55', 55'' Measurement object 11, 57
Condensing lens 12, 58 Cylindrical lens 13, 37,
59 Light receiving element 14 Stage control circuit 15 Switching circuit 16, 17, 38, 39 Height calculation circuit 18
Height judgment circuit 19, 60 Laser beam 20 Measurement surface 21, 61 Light receiving direction 22, 22' Strongest reflection direction 33 Beam splitter 34, 36 Filter 40, 43 Polarizing beam splitter 62, 62'
Reflection intensity distribution
Claims (3)
プ送りされる測定台と、（Ｂ）レーザと、前記レーザの
ビーム径を所要のビーム径に拡大するビーム拡大器と、
前記ビーム拡大器を通過したレーザ光を前記測定台の送
り方向と直交する方向に走査するスキャナと、前記スキ
ャナで走査されたレーザ光を最終的に前記測定台の測定
面上で所要のビーム径に集光しかつ走査速度を一定する
ｆθレンズと、前記ｆθレンズを通過したレーザ光の光
路を２方向に前記スキャナの走査に同期して切換えるガ
ルバノミラーと、前記ガルバノミラーの切換運動の一終
点で反射されたレーザ光を前記測定台の真上から鉛直下
方に走査軌跡が前記測定台の送り方向と直交するように
反射する第１の反射ミラーと、前記ガルバノミラーの切
換運動の他終点で反射されたレーザ光を前記測定台の斜
め上方から走査軌跡が前記第１の反射ミラーによる走査
軌跡と一致するように反射しかつ前記ガルバノミラーか
ら前記測定台の測定面上までの光路長が前記第１の反射
ミラーでの同光路長と等しくなるように反射する第２の
反射ミラーとで構成される走査光学系と、（Ｃ）前記第
２の反射ミラーによるレーザ入射角に大きさが等しい角
度の反射角方向に反射するレーザ光を集光する集光レン
ズと、前記集光レンズの光軸上にあり前記集光レンズを
通過したレーザ光を走査方向に集光するシリンドリカル
レンズと、前記集光レンズと前記シリンドリカルレンズ
の焦点位置に置かれレーザ光を受光する受光素子とで構
成される受光光学系と、（Ｄ）前記スキャナの走査に同
期して走査毎に前記測定台をステップ送りするステージ
制御回路とレーザ光を前記第１の反射ミラーで反射して
走査した時の前記受光素子の受光位置から測定対象物の
高さを求める第１の高さ演算回路と、レーザ光を前記第
２の反射ミラーで反射して走査した時の前記受光素子の
受光位置から測定対象物の高さを求める第２の高さ演算
回路と前記第１および第２の反射ミラーで反射されたレ
ーザ光で走査した時の同一位置における前記受光素子の
受光量を比較し受光量の多い方の前記第１または第２の
反射ミラーで反射した時の前記第１または第２の高さ演
算回路の高さ演算結果を選択する高さ判定回路とで構成
される信号処理回路とを備えることを特徴とする三次元
形状測定装置。1. (A) a measuring table on which an object to be measured is placed and fed in steps in one direction; (B) a laser; and a beam expander for expanding the beam diameter of the laser to a required beam diameter.
a scanner that scans the laser beam that has passed through the beam expander in a direction perpendicular to the feeding direction of the measuring table; and a scanner that scans the laser beam that has passed through the beam expander in a direction perpendicular to the feeding direction of the measuring table; an f-theta lens that focuses light at a constant scanning speed and a galvanometer mirror that switches the optical path of the laser beam that has passed through the f-theta lens in two directions in synchronization with the scanning of the scanner, and one end point of the switching movement of the galvano mirror. a first reflecting mirror that reflects the laser beam reflected from directly above the measuring table vertically downward so that the scanning locus is perpendicular to the feeding direction of the measuring table; and another end point of the switching movement of the galvanometer mirror. The reflected laser beam is reflected from diagonally above the measuring table so that its scanning locus coincides with the scanning locus of the first reflecting mirror, and the optical path length from the galvanometer mirror to the measuring surface of the measuring table is as follows. a scanning optical system composed of a second reflecting mirror that reflects the light so that the optical path length is equal to the same optical path length at the first reflecting mirror; and (C) a laser incident angle having a size equal to the laser incident angle by the second reflecting mirror. a condenser lens that condenses the laser beam reflected in the direction of the reflection angle of the angle; a cylindrical lens that is on the optical axis of the condenser lens and condenses the laser beam that has passed through the condenser lens in the scanning direction; (D) a light-receiving optical system comprising a condenser lens and a light-receiving element placed at the focal position of the cylindrical lens to receive the laser beam; a stage control circuit that calculates the height of the object to be measured from the light receiving position of the light receiving element when the laser beam is reflected by the first reflecting mirror and scanned; a second height calculation circuit that calculates the height of the object to be measured from the light receiving position of the light receiving element when reflected by the second reflecting mirror and scanned; and a laser reflected by the first and second reflecting mirrors. The first or second height calculation circuit compares the amount of light received by the light receiving element at the same position when scanning with light, and when the light is reflected by the first or second reflecting mirror, whichever has a larger amount of light received. A three-dimensional shape measuring device comprising: a signal processing circuit configured with a height determination circuit that selects a height calculation result.
Ｂ）第１のレーザと、前記第１のレーザのビーム径を所
要のビーム径に拡大する第１のビーム拡大器と、前記第
１のレーザと波長の異なる第２のレーザと、前記第２の
レーザのビーム径を所要のビーム径に拡大する第２のビ
ーム拡大器と、前記第１のビーム拡大器および前記第２
のビーム拡大器で拡大された２本のレーザ光を１本に重
ね合わせる重ね合わせ光学系と、この重ね合わせ光学系
により重ね合わせされたレーザ光を前記測定台の送り方
向と直交する方向に走査するスキャナと、前記スキャナ
で走査されたレーザ光を最終的に前記測定台の測定面上
で所要のビーム径に集光しかつ走査速度を一定にするｆ
θレンズと、前記ｆθレンズを通過した前記第１のレー
ザのレーザ光と前記第２のレーザのレーザ光のいずれか
一方のレーザ光を透過し他方のレーザ光を前記測定台の
斜め上方から走査軌跡が前記測定台の送り方向と直交す
るように反射する第１のフィルタと、前記第１のフィル
タを通過した一方のレーザ光を前記測定台の真上から鉛
直下方に走査軌跡が前記第１のレーザ光の軌跡と一致す
るように反射する反射ミラーとで構成される走査光学系
と、（Ｃ）前記第１のフィルタで反射された他のレーザ
光の入斜角に大きさが等しい角度の反射角方向に反射す
るレーザ光を集光する集光レンズと、前記集光レンズの
光軸上にあり前記集光レンズを通過したレーザ光を走査
方向に集光するシリンドリカルレンズと、前記シリンド
リカルレンズを通過した前記一方および他方のレーザ光
を分光する第２のフィルタと、前記第２のフィルタで分
光された前記一方および他方のレーザ光をそれぞれ前記
集光レンズおよび前記シリンドリカルレンズの焦点位置
で受光する第１および第２の受光素子とで構成される受
光光学系と、（Ｄ）前記第１の受光素子の受光位置から
高さを求める第１の高さ演算回路と、前記第２の受光素
子の受光位置から高さを求める第２の高さ演算回路と、
前記第１の受光素子と前記第２の受光素子の受光量を比
較し受光量の多い方の受光素子の信号を受ける前記第１
また第２の高さ演算回路の高さ演算結果を選択する高さ
判定回路とで構成される信号処理回路とを備えることを
特徴とする三次元形状測定装置。Claim 2: (A) a measuring table on which the object to be measured is placed;
B) a first laser, a first beam expander that expands the beam diameter of the first laser to a required beam diameter, a second laser having a different wavelength from the first laser, and the second laser. a second beam expander for expanding the beam diameter of the laser to a required beam diameter; the first beam expander and the second beam expander;
A superimposing optical system that superimposes two laser beams expanded by a beam expander into one, and a superimposing optical system that scans the superimposed laser beams in a direction perpendicular to the feeding direction of the measuring table. and a scanner that finally focuses the laser beam scanned by the scanner to a required beam diameter on the measurement surface of the measurement table and keeps the scanning speed constant.
A θ lens, and either one of the laser light of the first laser and the laser light of the second laser that has passed through the fθ lens is transmitted, and the other laser light is scanned from diagonally above the measurement table. A first filter that reflects the laser beam so that its trajectory is perpendicular to the feeding direction of the measuring table, and one laser beam that has passed through the first filter is scanned vertically downward from directly above the measuring table. (C) an angle whose magnitude is equal to the incident angle of another laser beam reflected by the first filter; a condenser lens that condenses the laser beam reflected in the direction of the reflection angle; a cylindrical lens that is on the optical axis of the condenser lens and condenses the laser beam that has passed through the condenser lens in the scanning direction; a second filter that separates the one and the other laser beams that have passed through the lens, and the one and the other laser beams that have been separated by the second filter at focal positions of the condenser lens and the cylindrical lens, respectively. (D) a first height calculation circuit that calculates the height from the light receiving position of the first light receiving element; a second height calculation circuit that calculates the height from the light receiving position of the light receiving element;
The first light receiving element compares the amount of light received by the first light receiving element and the second light receiving element and receives a signal from the light receiving element which receives a larger amount of light.
A three-dimensional shape measuring device further comprising: a signal processing circuit configured with a height determination circuit that selects a height calculation result of the second height calculation circuit.
Ｂ）レーザと、前記レーザのビーム径を所要のビーム径
に拡大するビーム拡大器と、このビーム拡大器により拡
大されたレーザ光を前記測定台の送り方向と直交する方
向に走査するスキャナと、前記スキャナで走査されたレ
ーザ光を最終的に前記測定台の測定面上で所要のビーム
径に集光しかつ走査速度を一定にするｆθレンズと、前
記ｆθレンズを通過したレーザ光を分光する第１の偏光
ビームスプリッタと、前記偏光ビームスプリッタを通過
したＰ偏光のレーザ光を前記測定台の真上から鉛直下方
に走査軌跡が前記測定台の送り方向と直交するように反
射する第１の反射ミラーと、前記偏光ビームスプリッタ
で反射されＳ偏光のレーザ光を前記測定台の斜め上方か
ら走査軌跡が前記第１の反射ミラーの走査軌跡と一致す
るように反射しかつ前記偏光ビームスプリッタから前記
測定台の測定面までの光路長が前記第１の反射ミラーに
よる前記Ｐ偏光のレーザ光の光路長と等しくなるように
反射する第２の反射ミラーとで構成される走査光学系と
、（Ｃ）前記第２の反射ミラーにより反射された前記Ｓ
偏光のレーザ光の入斜角に大きさが等しい角度の反射角
方向に反射するレーザ光を集光する集光レンズと、前記
集光レンズの光軸上にあり前記集光レンズを通過したレ
ーザ光を走査方向に集光するシリンドリカルレンズと、
前記シリンドリカルレンズを通過したレーザ光を分光す
る第２の偏光ビームスプリッタと、前記第２の偏光ビー
ムスプリッタで分光されたＰ偏光のレーザ光およびＳ偏
光のレーザ光それぞれを前記集光レンズおよび前記シリ
ンドリカルレンズの焦点位置で受光する第１および第２
の受光素子とで構成される受光光学系と、（Ｄ）前記第
１の受光素子の受光位置から高さを求める第１の高さ演
算回路と、前記第２の受光素子の受光位置から高さを求
める第２の高さ演算回路と、前記第１の受光素子の前記
第２の受光素子の受光量を比較し受光量の多い方の受光
素子の信号を受ける前記第１または第２の高さ演算回路
の高さ演算結果を選択する高さ判定回路とで構成される
信号処理回路とを備えることを特徴とする三次元形状測
定装置。Claim 3: (A) a measuring table on which the object to be measured is placed;
B) a laser, a beam expander that expands the beam diameter of the laser to a required beam diameter, and a scanner that scans the laser beam expanded by the beam expander in a direction perpendicular to the feeding direction of the measurement table; An fθ lens that finally converges the laser beam scanned by the scanner to a required beam diameter on the measurement surface of the measurement table and keeps the scanning speed constant, and the laser beam that has passed through the fθ lens is separated into spectra. a first polarizing beam splitter; and a first polarizing beam splitter that reflects the P-polarized laser beam that has passed through the polarizing beam splitter from directly above the measuring table vertically downward so that the scanning locus is orthogonal to the feeding direction of the measuring table. A reflecting mirror and a reflecting mirror reflect the S-polarized laser beam reflected by the polarizing beam splitter from diagonally above the measuring table so that the scanning locus coincides with the scanning locus of the first reflecting mirror, and transmitting the S-polarized laser beam from the polarizing beam splitter to the a scanning optical system comprising a second reflecting mirror that reflects the P-polarized laser beam so that the optical path length to the measurement surface of the measuring table is equal to the optical path length of the P-polarized laser beam by the first reflecting mirror; ) The S reflected by the second reflecting mirror
a condensing lens that condenses the laser beam reflected in the direction of a reflection angle whose magnitude is equal to the incident oblique angle of the polarized laser beam; and a laser beam that is on the optical axis of the condensing lens and passes through the condensing lens. A cylindrical lens that focuses light in the scanning direction,
a second polarizing beam splitter that separates the laser beam that has passed through the cylindrical lens; and a second polarizing beam splitter that splits the laser beam that has passed through the cylindrical lens; The first and second beams receive light at the focal position of the lens.
(D) a first height calculation circuit that calculates the height from the light receiving position of the first light receiving element; a second height arithmetic circuit that calculates the height, and a second height calculation circuit that compares the amount of light received by the second light receiving element with the first light receiving element, and receives a signal from the light receiving element that receives a larger amount of light. A three-dimensional shape measuring device comprising: a signal processing circuit comprising a height determination circuit that selects a height calculation result of a height calculation circuit;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632491A JP2595821B2 (en) | 1991-03-12 | 1991-03-12 | 3D shape measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632491A JP2595821B2 (en) | 1991-03-12 | 1991-03-12 | 3D shape measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04282407A true JPH04282407A (en) | 1992-10-07 |
| JP2595821B2 JP2595821B2 (en) | 1997-04-02 |
Family
ID=12743980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4632491A Expired - Lifetime JP2595821B2 (en) | 1991-03-12 | 1991-03-12 | 3D shape measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2595821B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0712529A (en) * | 1993-06-22 | 1995-01-17 | Nec Corp | Shape inspection apparatus of bonding wire |
| JPH0749219A (en) * | 1993-08-05 | 1995-02-21 | Nec Corp | Measuring device for ic lead height |
| JPH0783620A (en) * | 1993-09-13 | 1995-03-28 | Nec Corp | Laser displacement meter |
| JP2010507089A (en) * | 2006-10-18 | 2010-03-04 | バルティオン テクニリーネン トゥトキムスケスクス | Determination of surface and thickness |
| JP2012127887A (en) * | 2010-12-17 | 2012-07-05 | Keyence Corp | Optical displacement meter |
| JP2013096859A (en) * | 2011-11-01 | 2013-05-20 | Kobe Steel Ltd | Height measuring apparatus and height measuring method |
| JP2013186126A (en) * | 2012-03-09 | 2013-09-19 | Samsung Electro-Mechanics Co Ltd | Three-dimensional measuring device and method |
| WO2014050319A1 (en) * | 2012-09-25 | 2014-04-03 | 株式会社日立ハイテクノロジーズ | Film-forming apparatus and film-forming method |
| DE102020116394A1 (en) | 2020-06-22 | 2021-12-23 | Pac Tech - Packaging Technologies Gmbh | Method for monitoring a laser soldering process and laser soldering system |
-
1991
- 1991-03-12 JP JP4632491A patent/JP2595821B2/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0712529A (en) * | 1993-06-22 | 1995-01-17 | Nec Corp | Shape inspection apparatus of bonding wire |
| JPH0749219A (en) * | 1993-08-05 | 1995-02-21 | Nec Corp | Measuring device for ic lead height |
| JPH0783620A (en) * | 1993-09-13 | 1995-03-28 | Nec Corp | Laser displacement meter |
| JP2010507089A (en) * | 2006-10-18 | 2010-03-04 | バルティオン テクニリーネン トゥトキムスケスクス | Determination of surface and thickness |
| JP2012127887A (en) * | 2010-12-17 | 2012-07-05 | Keyence Corp | Optical displacement meter |
| CN102564316A (en) * | 2010-12-17 | 2012-07-11 | 株式会社其恩斯 | Optical displacement meter |
| JP2013096859A (en) * | 2011-11-01 | 2013-05-20 | Kobe Steel Ltd | Height measuring apparatus and height measuring method |
| JP2013186126A (en) * | 2012-03-09 | 2013-09-19 | Samsung Electro-Mechanics Co Ltd | Three-dimensional measuring device and method |
| WO2014050319A1 (en) * | 2012-09-25 | 2014-04-03 | 株式会社日立ハイテクノロジーズ | Film-forming apparatus and film-forming method |
| DE102020116394A1 (en) | 2020-06-22 | 2021-12-23 | Pac Tech - Packaging Technologies Gmbh | Method for monitoring a laser soldering process and laser soldering system |
| DE102020116394B4 (en) | 2020-06-22 | 2022-03-24 | Pac Tech - Packaging Technologies Gmbh | Method for monitoring a laser soldering process and laser soldering system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2595821B2 (en) | 1997-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8014002B2 (en) | Contour sensor incorporating MEMS mirrors | |
| US5834766A (en) | Multi-beam scanning apparatus and multi-beam detection method for the same | |
| JP2943499B2 (en) | Height measuring method and device | |
| JP2651093B2 (en) | Shape detection method and device | |
| US9013711B2 (en) | Contour sensor incorporating MEMS mirrors | |
| JP2510786B2 (en) | Object shape detection method and apparatus | |
| CN112789542A (en) | Optical scanning device with beam compression and expansion | |
| JP2595821B2 (en) | 3D shape measuring device | |
| US4892371A (en) | Semiconductor laser array light source and scanner | |
| US4425041A (en) | Measuring apparatus | |
| JPH0914935A (en) | Measuring device for three-dimensional object | |
| JP2500658B2 (en) | Scanning laser displacement meter | |
| JPH04282845A (en) | Three-dimensional shape measuring instrument | |
| JP2004020536A (en) | Three-dimensional shape measuring apparatus | |
| JP2003083723A (en) | Three-dimensional shape measuring optical system | |
| JPH0311401B2 (en) | ||
| US4739158A (en) | Apparatus for the detection of pattern edges | |
| JPH0658723A (en) | Scanning type laser displacement meter | |
| JPH11281473A (en) | M2 measuring device | |
| JPH0915518A (en) | Laser scanning device | |
| JPH03111707A (en) | Detecting method of shape of object | |
| JP2004117001A (en) | Laser doppler vibrometer | |
| JP2808713B2 (en) | Optical micro displacement measuring device | |
| JPH07120217A (en) | Distance measurement method and device | |
| JP2000321019A (en) | Displacement measuring instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19961105 |