JPH04276011A - Laser beam machining method - Google Patents
Laser beam machining methodInfo
- Publication number
- JPH04276011A JPH04276011A JP3037341A JP3734191A JPH04276011A JP H04276011 A JPH04276011 A JP H04276011A JP 3037341 A JP3037341 A JP 3037341A JP 3734191 A JP3734191 A JP 3734191A JP H04276011 A JPH04276011 A JP H04276011A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- workpiece
- absorption rate
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000001301 oxygen Substances 0.000 claims abstract description 21
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 21
- 239000007789 gas Substances 0.000 claims abstract description 16
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims abstract description 5
- 230000001678 irradiating effect Effects 0.000 claims abstract 5
- 230000002745 absorbent Effects 0.000 claims description 9
- 239000002250 absorbent Substances 0.000 claims description 9
- 238000003672 processing method Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 abstract description 17
- 239000000463 material Substances 0.000 abstract description 7
- 239000006096 absorbing agent Substances 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000010791 quenching Methods 0.000 description 5
- 230000000171 quenching effect Effects 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】この発明は被加工材の表面を例え
ば焼入れ硬化するのに利用されるレーザ加工方法に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser processing method used for, for example, quenching and hardening the surface of a workpiece.
【０００２】0002
【従来の技術】従来、被加工材の表面を焼入れ硬化する
際に行われるレーザ焼入れにおいては、レーザ光の吸収
率を向上させるため、被加工材の表面を吸収剤で被覆し
た後レーザ光を照射するのが一般的であった。[Prior Art] Conventionally, in laser hardening that is performed when hardening the surface of a workpiece, the surface of the workpiece is coated with an absorbent and then the laser beam is applied to improve the absorption rate of the laser beam. Irradiation was common.
【０００３】そして、近年に至っては、直線偏光のレー
ザ光を入射レーザ光の電界ベクトルが入射面に平行であ
るＰ偏光の向きに入射し、入射角度をブリュースタ角付
近に設定することにより吸収率を向上させ、被加工材表
面を吸収剤で被覆することなく焼入れを行う技術が開発
されてきている。そして、この技術により吸収剤の塗布
および除去に要する多大な労力を省くことが可能になっ
た。[0003] In recent years, absorption has been achieved by making linearly polarized laser light incident in a P-polarized direction in which the electric field vector of the incident laser light is parallel to the plane of incidence, and by setting the incident angle near Brewster's angle. Techniques have been developed to improve the hardening rate and to perform hardening without coating the surface of the workpiece with an absorbent. This technology has made it possible to save a lot of effort in applying and removing the absorbent.
【０００４】図３はブリュースタ効果を利用した吸収剤
を用いないレーザ焼入れ方法を示したものであって、図
３において、１１はレーザ光、１２は被加工材、１３は
被加工材１２のレーザ光照射部、１４は反射したレーザ
光、１５はレーザ光吸収体である。FIG. 3 shows a laser hardening method that utilizes the Brewster effect and does not use an absorbent. In FIG. A laser beam irradiation unit, 14 is a reflected laser beam, and 15 is a laser beam absorber.
【０００５】この場合、被加工材１２がオーステナイト
化温度以上に十分加熱され、かつまた表面が溶融しない
ようにレーザ光１１の出力および入射角度を設定し、反
射したレーザ光１４が散乱しないようにレーザ光吸収体
１５を設けてある。In this case, the output and incident angle of the laser beam 11 are set so that the workpiece 12 is sufficiently heated above the austenitizing temperature and the surface is not melted, and the reflected laser beam 14 is not scattered. A laser light absorber 15 is provided.
【０００６】レーザ光吸収率の入射角度依存性について
は、Ｆｒｅｓｎｅｌの公式を用いて各入射角度における
理論上の吸収率の計算が可能である。Regarding the dependence of the laser light absorption rate on the angle of incidence, it is possible to calculate the theoretical absorption rate at each angle of incidence using Fresnel's formula.
【０００７】図４は波長が１０．６μｍの炭酸ガスレー
ザ光の鉄に対する吸収率を計算したものである。図４に
示すように、吸収率が最大となるブリュースタ角はおよ
そ８８度で、その入射角での吸収率はおよそ４０％強で
ある。そして、実際の焼入れにおいて、被加工材の温度
が上昇するため吸収率も上昇して５０％程度である。FIG. 4 shows the calculated absorption rate of carbon dioxide laser light with a wavelength of 10.6 μm for iron. As shown in FIG. 4, the Brewster angle at which the absorption rate is maximum is about 88 degrees, and the absorption rate at that angle of incidence is about 40% or more. In actual hardening, the temperature of the workpiece increases, so the absorption rate also increases to about 50%.
【０００８】[0008]
【発明が解決しようとする課題】しかしながら、従来の
直線偏光のレーザ光をＰ偏光の向きに入射角度をブリュ
ースタ角付近に設定して、レーザ焼入れを行う方法では
、吸収剤の塗布および除去のための労力を省くことがで
きるという点でのメリットは大きいものの、レーザ光の
鉄に対する吸収率がおよそ５０％であって、炭素系の吸
収剤を被覆したときの吸収率よりも４０〜５０％低い値
となっており、エネルギ効率の面では吸収剤を使った焼
入れ方法より劣っているという問題点があった。[Problems to be Solved by the Invention] However, in the conventional method of performing laser hardening by setting a linearly polarized laser beam in the P-polarized direction and the incident angle near Brewster's angle, it is difficult to apply and remove the absorbent. Although it has a great advantage in that it saves labor, the absorption rate of laser light for iron is approximately 50%, which is 40 to 50% higher than that when coated with carbon-based absorbent. This value was low, and there was a problem in that it was inferior to the quenching method using an absorbent in terms of energy efficiency.
【０００９】従って、同じ硬化層を得ようとした場合、
吸収剤を用いた焼入れの場合よりも高い出力を必要とす
るという問題点があった。また、反射されたレーザ光が
十分高いエネルギを持っているため、周囲に散乱しない
ようにレーザ光吸収体を設けるなどの対策を施す必要が
あるという問題点があり、これらの問題点を解決するこ
とが課題となっていた。[0009] Therefore, when trying to obtain the same hardened layer,
There was a problem in that a higher output was required than in the case of quenching using an absorbent. In addition, since the reflected laser beam has sufficiently high energy, there is a problem in that it is necessary to take measures such as installing a laser beam absorber to prevent it from scattering to the surroundings. This was an issue.
【００１０】0010
【発明の目的】この発明は、このような従来の課題にか
んがみてなされたもので、レーザ光の吸収率を従来以上
に高めることが可能であって、より低出力のレーザ光で
の加工が可能であり、レーザ光のもつエネルギを効率よ
く活用することが可能であると共にレーザ光の吸収率増
加によって反射するレーザ光のエネルギが低減するため
、反射するレーザ光の散乱に対する対策が不要となるレ
ーザ加工方法を提供することを目的としている。[Purpose of the Invention] The present invention has been made in view of these conventional problems, and it is possible to increase the absorption rate of laser light more than before, and it is possible to process with lower output laser light. It is possible to efficiently utilize the energy of the laser beam, and the energy of the reflected laser beam is reduced by increasing the absorption rate of the laser beam, so there is no need to take measures against the scattering of the reflected laser beam. The purpose is to provide a laser processing method.
【００１１】[0011]
【課題を解決するための手段】この発明は、直線偏光の
レーザ光を入射レーザ光の電界ベクトルが入射角に平行
であるＰ偏光の向きに被加工材に照射し、被加工材表面
を吸収剤で被覆することなく焼入れなどのレーザ加工を
行うに際し、被加工材の少なくともレーザ光照射部ない
しはその近傍に向けて酸素あるいは酸素を２５％以上含
むガスを吹き付けながらレーザ光を照射する構成とした
ことを特徴としており、このようなレーザ加工方法に係
わる発明の構成を前述した従来の課題を解決するための
手段としている。[Means for Solving the Problem] This invention irradiates a workpiece with a linearly polarized laser beam in the direction of P-polarized light in which the electric field vector of the incident laser beam is parallel to the incident angle, and absorbs the surface of the workpiece. When performing laser processing such as hardening without coating with an agent, the laser beam is irradiated while blowing oxygen or a gas containing 25% or more of oxygen toward at least the laser beam irradiated part of the workpiece or the vicinity thereof. The structure of the invention related to such a laser processing method is a means for solving the above-mentioned conventional problems.
【００１２】0012
【発明の作用】この発明に係わるレーザ加工方法は、上
述した構成としているので、レーザ光の吸収率がさらに
向上したものとなり、より低出力のレーザ光での加工が
なされてレーザ光のもつエネルギが効率よく加工に使用
されるものとなる。Effects of the Invention Since the laser processing method according to the present invention has the above-described structure, the absorption rate of the laser light is further improved, and processing can be performed using a lower output laser light, thereby reducing the energy of the laser light. can be used efficiently for processing.
【００１３】[0013]
【実施例】以下、この発明を図面に基づいて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below based on the drawings.
【００１４】図１はこの発明の一実施例を示す図であっ
て、図１において、１はレーザ光、２は被加工材、３は
被加工材２のレーザ光照射部、４はガスノズルである。
そして、このガスノズル４はステンレスメッシュをもつ
噴出口４ａを被加工材表面のレーザ光照射部３に向けて
設けてあると共に、このガスノズル４は酸素あるいは酸
素を２５％以上含むガスを噴出しながら、レーザ光１の
矢印Ａ１ 方向への移動とともに矢印Ａ２ 方向に移動
し、互いに相対的な位置は変化しないようになっていて
、ガスノズル４からの酸素あるいは酸素を２５％以上含
むガスは常にレーザ光照射部３ないしはその近傍に向け
て噴出されるようになっている。FIG. 1 is a diagram showing an embodiment of the present invention. In FIG. 1, 1 is a laser beam, 2 is a workpiece, 3 is a laser beam irradiation part of the workpiece 2, and 4 is a gas nozzle. be. This gas nozzle 4 is provided with a spout 4a having a stainless steel mesh facing the laser beam irradiation part 3 on the surface of the workpiece, and while spouting oxygen or a gas containing 25% or more of oxygen, As the laser beam 1 moves in the arrow A1 direction, it also moves in the arrow A2 direction, and their relative positions do not change. Oxygen from the gas nozzle 4 or gas containing 25% or more of oxygen is always irradiated with the laser beam. It is designed to be ejected toward part 3 or its vicinity.
【００１５】この場合、ガスノズル４からは酸素あるい
は酸素を２５％以上含むガスを噴出するようにしている
が、酸素濃度を２５％以上としたのは、２５％よりも少
ないと通常の大気と同程度となり、酸素の効果が十分に
得られなくなるためである。In this case, oxygen or a gas containing 25% or more of oxygen is ejected from the gas nozzle 4, but the reason why the oxygen concentration is 25% or more is because if it is less than 25%, it is the same as the normal atmosphere. This is because the effect of oxygen cannot be obtained sufficiently.
【００１６】このような構成において、ガスノズル４か
ら噴出された酸素あるいは酸素を２５％以上含むガスは
、噴出口４ａのステンレスメッシュを通過することによ
り整流されたのちレーザ光照射部３ないしはその近傍に
向けて吹き付けられる。このレーザ光照射部３は大気よ
りも酸素リッチな雰囲気にさらされた状態でレーザ光１
を照射されることにより温度が上昇するとともに、周囲
の酸素と結びついてレーザ光吸収率の高い酸化物が表面
に形成される。In such a configuration, oxygen or gas containing 25% or more of oxygen ejected from the gas nozzle 4 is rectified by passing through the stainless steel mesh of the ejection port 4a, and then is sent to the laser beam irradiation section 3 or its vicinity. It is sprayed towards. This laser beam irradiation unit 3 is exposed to an atmosphere richer in oxygen than the atmosphere, and the laser beam 1 is exposed to the atmosphere.
As a result of the irradiation, the temperature rises, and oxides with high laser light absorption rate are formed on the surface by combining with surrounding oxygen.
【００１７】図２は図３に示した従来技術と図１に示し
た本発明技術によるレーザ焼入れにおけるレーザ光吸収
率の入射角度依存性を調べた結果を示したものである。
図２より明らかなように、本発明により最大の吸収率が
６０％まで上昇し、従来の８０％程度のレーザ光出力で
焼入れが可能になった。また、これにともなって反射す
るレーザ光のエネルギが低くなるため、反射するレーザ
光の散乱に対する対策も不必要になった。FIG. 2 shows the results of investigating the dependence of the laser light absorption rate on the angle of incidence in laser hardening using the conventional technique shown in FIG. 3 and the technique of the present invention shown in FIG. As is clear from FIG. 2, the present invention increases the maximum absorption rate to 60%, making it possible to harden with about 80% of the conventional laser light output. Additionally, since the energy of the reflected laser light is lowered accordingly, it is no longer necessary to take measures against scattering of the reflected laser light.
【００１８】逆に、同じ吸収率でみた場合、本発明によ
る方法を用いることにより、従来、入射角を８８度に設
定しないと得られなかった吸収率が入射角７５度で得ら
れるようになり、より低い入射角度の設定が可能になっ
たことから、微少な入射角度のずれによるレーザ光照射
部３の位置ずれや被加工材表面でのビーム形状およびパ
ワー密度の変化が低減され、より安定化した加工が可能
になった。On the other hand, when looking at the same absorption rate, by using the method according to the present invention, it is now possible to obtain an absorption rate at an incident angle of 75 degrees, which could not previously be obtained unless the incident angle was set to 88 degrees. Since it is now possible to set a lower incident angle, the positional shift of the laser beam irradiation part 3 due to slight deviations in the incident angle and changes in the beam shape and power density on the surface of the workpiece are reduced, making it more stable. Advanced processing is now possible.
【００１９】そして、レーザ光照射部３ないしはその近
傍に向けて吹き付けるガスの酸素濃度を２５％以上とす
ることによって、酸化膜の生成による効果を十分に得る
ことができた。By setting the oxygen concentration of the gas blown toward the laser beam irradiation section 3 or its vicinity to 25% or more, the effect of the formation of an oxide film could be sufficiently obtained.
【００２０】[0020]
【発明の効果】以上説明してきたように、この発明によ
れば、被加工材の少なくともレーザ光照射部ないしはそ
の近傍に向けて酸素あるいは酸素を２５％以上含むガス
を吹き付けながらレーザ光を照射する構成としたため、
レーザ光の照射によって被加工材表面に酸化膜が形成さ
れ、その結果レーザ光の吸収率が向上し、より低出力の
レーザ光での加工が可能になり、また、反射するレーザ
光のエネルギを小さくすることが可能になるため、反射
するレーザ光の散乱に対する対策が不要となり、さらに
、より低い入射角度での加工が可能になるため、安定し
た条件での加工が可能になるという著しく優れた効果が
もたらされる。[Effects of the Invention] As explained above, according to the present invention, the laser beam is irradiated while blowing oxygen or a gas containing 25% or more of oxygen toward at least the laser beam irradiated portion of the workpiece or the vicinity thereof. Due to the configuration,
Irradiation with laser light forms an oxide film on the surface of the workpiece, which improves the absorption rate of the laser light, making it possible to process with lower output laser light, and reducing the energy of the reflected laser light. Because it can be made smaller, there is no need to take measures against the scattering of reflected laser light, and it is also possible to process at a lower angle of incidence, making it possible to process under stable conditions. effect is brought about.
【図１】この発明によるレーザ加工（焼入れ）の一実施
例を示す斜面説明図である。FIG. 1 is an explanatory view of a slope showing an embodiment of laser processing (quenching) according to the present invention.
【図２】従来方法および本発明方法におけるレーザ光吸
収率の入射角度依存性を調べた結果を示すグラフである
。FIG. 2 is a graph showing the results of investigating the incident angle dependence of laser light absorption rate in the conventional method and the method of the present invention.
【図３】従来方法によるレーザ加工（焼入れ）を示す斜
面説明図である。FIG. 3 is an explanatory diagram of a slope showing laser processing (quenching) by a conventional method.
【図４】炭酸ガスレーザ光の鉄に対する理論上の吸収率
の入射角度依存性を示したグラフである。FIG. 4 is a graph showing the incident angle dependence of the theoretical absorption rate of carbon dioxide laser light on iron.
１ レーザ光 ２ 被加工材 ３ レーザ光照射部 ４ ガスノズル 1 Laser light 2 Work material 3 Laser light irradiation part 4 Gas nozzle
Claims (1)
被加工材に照射し、被加工材表面を吸収剤で被覆するこ
となくレーザ加工を行うに際し、被加工材の少なくとも
レーザ光照射部ないしはその近傍に向けて酸素あるいは
酸素を２５％以上含むガスを吹き付けながらレーザ光を
照射することを特徴とするレーザ加工方法。Claim 1: When performing laser processing by irradiating a workpiece with linearly polarized laser light in the direction of P-polarized light and performing laser processing without coating the surface of the workpiece with an absorbent, at least the laser beam irradiated part of the workpiece is A laser processing method characterized by irradiating a laser beam while spraying oxygen or a gas containing 25% or more of oxygen towards the area or the vicinity thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3037341A JPH04276011A (en) | 1991-03-04 | 1991-03-04 | Laser beam machining method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3037341A JPH04276011A (en) | 1991-03-04 | 1991-03-04 | Laser beam machining method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04276011A true JPH04276011A (en) | 1992-10-01 |
Family
ID=12494910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3037341A Pending JPH04276011A (en) | 1991-03-04 | 1991-03-04 | Laser beam machining method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04276011A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009082975A (en) * | 2007-10-02 | 2009-04-23 | Sumitomo Electric Ind Ltd | Laser beam machining method |
| DE102007054736A1 (en) * | 2007-11-16 | 2009-05-20 | Mahle International Gmbh | Process for hardening groove flanks of the annular groove of a steel piston |
-
1991
- 1991-03-04 JP JP3037341A patent/JPH04276011A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009082975A (en) * | 2007-10-02 | 2009-04-23 | Sumitomo Electric Ind Ltd | Laser beam machining method |
| DE102007054736A1 (en) * | 2007-11-16 | 2009-05-20 | Mahle International Gmbh | Process for hardening groove flanks of the annular groove of a steel piston |
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