JPH04244631A - Air spring control device - Google Patents
Air spring control deviceInfo
- Publication number
- JPH04244631A JPH04244631A JP3094651A JP9465191A JPH04244631A JP H04244631 A JPH04244631 A JP H04244631A JP 3094651 A JP3094651 A JP 3094651A JP 9465191 A JP9465191 A JP 9465191A JP H04244631 A JPH04244631 A JP H04244631A
- Authority
- JP
- Japan
- Prior art keywords
- control device
- air spring
- pulse
- valve
- valves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Vibration Prevention Devices (AREA)
- Fluid-Damping Devices (AREA)
Abstract
Description
【発明の詳細な説明】
［０００１］［産業上の利用分野］本発明は、空気ばね
を利用する除振装置において、空気ばねの内部に空気を
出し入れすることにより、空気ばねにより支持される荷
の位置または振動を制御する空気ばねの制御装置に関す
る。Detailed Description of the Invention [0001] [Industrial Application Field] The present invention is a vibration isolator using an air spring, in which air is taken in and out of the air spring to reduce the load supported by the air spring. This invention relates to an air spring control device that controls the position or vibration of an air spring.
［０００２］［従来の技衛］半導体露光装置や電子顕微
鏡などの振動を嫌う精密な装置には、空気ばねを用いた
除振装置が用いられている。それは空気ばねと、空気ば
ねに空気を供給して空気ばねの上に荷を支持する制御装
置からなる。[0002] [Conventional Technology] A vibration isolator using an air spring is used in precision equipment that dislikes vibrations, such as semiconductor exposure equipment and electron microscopes. It consists of an air spring and a control device that supplies air to the air spring and supports the load on the air spring.
［０００３］制御装置は、荷の高さあるいは振動を検知
して電気信号を出力するセンサーと、その信号を増幅す
るとともに適当な制御アルゴリズムにより弁を駆動する
信号を出力するコントローラと、コントローラの信号に
したがって空気ばねに空気を出し入れする弁からなる。[0003] The control device includes a sensor that detects the height or vibration of the load and outputs an electrical signal, a controller that amplifies the signal and outputs a signal to drive the valve according to an appropriate control algorithm, and a controller that outputs an electric signal by detecting the height or vibration of the load. It consists of a valve that allows air to enter and exit the air spring according to the following conditions.
［０００４］荷の位置を制御する技術として、特開昭６
２−２９７５５２号公報に、非接触センサーを用いて荷
の高さを検知し、オンオフ電磁弁をパルス幅変調によっ
て駆動して荷の高さを制御するものが提案されている。[0004] As a technology for controlling the position of loads, Japanese Patent Application Laid-open No. 6
Japanese Patent Publication No. 2-297552 proposes a system that detects the height of a load using a non-contact sensor and controls the height of the load by driving an on-off solenoid valve by pulse width modulation.
これは電磁弁を一定の搬送周波数の、交番する給気パル
スと排気パルスからなるパルス列で駆動し、センサーか
らの信号に応して給気パルスと排気パルスの時間比を変
えて空気ばねに出入する空気の流量を制御するものであ
る。This drives a solenoid valve with a pulse train consisting of alternating supply and exhaust pulses at a constant carrier frequency, and changes the time ratio of the supply and exhaust pulses to enter and exit the air spring in response to a signal from a sensor. This controls the flow rate of air.
［０００５］この技術の特徴は、給気と排気の時間比を
変えることで空気量を調整するので、非常に微妙な空気
量の調整が可能であり、弁の不感帯がなく高精度な制御
ができること、および電空比例弁などの比べ時間応答が
速いことである。[0005] The feature of this technology is that the amount of air is adjusted by changing the time ratio of air supply and exhaust, so it is possible to make very delicate adjustments to the amount of air, and there is no dead zone of the valve, allowing for highly accurate control. and has a faster time response than electro-pneumatic proportional valves.
［０００６］その反面、給気と排気を繰り返しているの
で、給気時には荷は上昇し、排気時には荷は下降するこ
とになる。したがって、パルスの搬送周波数で荷は振動
することになる。この現象は除振装置としては望ましく
ない性質であった。[0006] On the other hand, since air supply and exhaust are repeated, the load rises during air supply and descends during exhaust. Therefore, the load will vibrate at the carrier frequency of the pulse. This phenomenon was an undesirable property for a vibration isolator.
［０００７］［発明が解決しようとする課題］本発明の
課題は上述の従来の技術において、パルス幅変調の長所
である精密な制御と速い応答を生かしながら、その短所
であるパルス搬送周波数での荷の振動を防ぐことである
。[0007] [Problem to be Solved by the Invention] The problem to be solved by the present invention is to solve the above-mentioned conventional techniques while taking advantage of the advantages of pulse width modulation, such as precise control and fast response, while solving the disadvantages of pulse width modulation, such as the problem of pulse carrier frequency. This is to prevent vibration of the load.
［０００８］［課鹿を解決するための手段］上記の目的
を達成するために、本発明は、制御装置の信号にしたが
って空気ばねに空気を出し入れする弁を有する空気ばね
の制御装置において、パルス幅変調で駆動する弁を並列
複数化し、それぞれの弁のパルスのタイミングをずらす
ことにより、パルス搬送周波数での荷の振動を防ぐよう
にした空気ばねの制御装置である。[0008] [Means for Solving Problems] In order to achieve the above object, the present invention provides an air spring control device having a valve for introducing and removing air from the air spring according to a signal from the control device. This is an air spring control device that prevents load vibration at the pulse conveyance frequency by arranging a plurality of valves driven by width modulation in parallel and shifting the timing of the pulses of each valve.
［０００９］［作用］図４〜図６に示すように、デュー
ティーが５０％のときは、弁が２個の場合、４個の場合
さらに一般に偶数個の場合、給気と排気がキャンセルさ
れて、荷の高さ変化はゼロになる。一方、デューティー
が７５％のときは、弁の数が多いほど荷の高さ変化は弁
１個のときに比べて滑らかになるように作用する。[0009] [Operation] As shown in Figures 4 to 6, when the duty is 50%, air supply and exhaust are canceled when there are two valves, four valves, and generally an even number. , the height change of the load becomes zero. On the other hand, when the duty is 75%, the greater the number of valves, the smoother the load height changes compared to when there is only one valve.
［００１０］［実施例］図１に本発明の実施例の構成図
を示す。荷の高さはセンサーによって検知され、その信
号は増輻器を経て制御装置に送られる。制御装置はその
信号に応じて空気ばねに出入する空気を加減して荷の高
さを一定に調整する。[0010] [Embodiment] FIG. 1 shows a configuration diagram of an embodiment of the present invention. The height of the load is detected by a sensor and the signal is sent to the control device via a loudspeaker. The control device adjusts the flow of air into and out of the air spring in response to the signal, thereby adjusting the height of the load at a constant level.
［００１１］図２に第１の実施例として２個の弁を用い
、１個のパルス幅変調でパルス幅変調を行い、遅延回路
により一方の弁を半周期遅らせて本発明を実現したブロ
ック線図を示す。荷の高さは高さセンサーにより検知さ
れ、増幅器を介して目標値と比較される。その偏差は増
幅器により適当なゲインで増幅されたのちパルス幅変調
回路によりパルス列に変換される。その信号は２つに分
れ、一方はドライバー回路に入力され第１の弁を駆動す
る。もう一方は遅延回路によりパルスの搬送周波数の半
周期分タイミングがずらされてドライバー回路に入力さ
れ第２の弁を駆動するものである。この場合、一方の弁
にはパルスの半周期のむだ時間が生ずるが、パルスの搬
送周波数か十分高ければ問題ない。[0011] FIG. 2 shows a block line in which the present invention is realized by using two valves as a first embodiment, performing pulse width modulation with one pulse width modulation, and delaying one valve by a half cycle using a delay circuit. Show the diagram. The height of the load is detected by a height sensor and compared with a target value via an amplifier. The deviation is amplified by an appropriate gain by an amplifier and then converted into a pulse train by a pulse width modulation circuit. The signal is split into two parts, one of which is input to the driver circuit to drive the first valve. On the other hand, the timing of the pulse is shifted by a half cycle of the pulse carrier frequency by a delay circuit, and the pulse is input to the driver circuit to drive the second valve. In this case, one valve has a dead time of half a pulse period, but this is not a problem as long as the pulse carrier frequency is sufficiently high.
［００１２］図３に第２の実施例として、２個の弁の場
合で、２個のパルス幅変調回路を用い、一方を半周期ず
らしたタイミングでそれぞれパルス幅変調して、それぞ
れ弁を駆動することにより本発明を実現したブロック線
図を示す。この場合は、偏差信号は半周期タイミングが
ずれた２つのパルス幅変調回路に入力され、それぞれの
弁を駆動するものである。この場合はどの弁も時間遅れ
なく制御することができる。[0012] FIG. 3 shows a second embodiment in which, in the case of two valves, two pulse width modulation circuits are used to modulate the pulse width of one of the circuits at a timing shifted by half a cycle to drive each valve. 1 shows a block diagram in which the present invention is realized by doing the following. In this case, the deviation signal is input to two pulse width modulation circuits whose timings are shifted by half a cycle, and drive the respective valves. In this case, any valve can be controlled without time delay.
［００１３］図５に、２分の１の流量の弁を２個使用し
て、一方を半周期ずらしたときの弁の給排気流量と荷の
高さ変化を給気、排気のデューティー５０％と７５％の
ときについて示す。[0013] Figure 5 shows the supply/exhaust flow rate of the valves and the height change of the load when two valves with a flow rate of 1/2 are used and one is shifted by half a cycle, and the duty of air supply and exhaust is 50%. and 75%.
［００１４］図６に、４分の１の流量の弁を４個使用し
て、それぞれ４分の１周期づつずらしたときの弁の給排
気流量と荷の高さ変化を給気、排気のデューティー５０
％と７５％のときについて示す。[0014] Figure 6 shows the air supply and exhaust flow rate and the change in the height of the load when four valves with a quarter flow rate are used and each valve is shifted by a quarter cycle. duty 50
% and 75%.
［００１５］なお、図４は対比のために、従来の技術に
おける１個の弁を用いた場合の弁の給排気流量と荷の高
さ変化を給気、排気のデューティー５０％と７５％のと
きについて示すものである。[0015] For comparison, FIG. 4 shows the valve supply/exhaust flow rate and load height change when one valve is used in the conventional technology, with supply and exhaust duties of 50% and 75%. It shows the time.
［００１６］［発明の効果］図７に従来の制御装置を使
用したときと、本発明の制御装置を使用したときの除振
装置上の荷の振動加速度波形を示す。従来の制御装置で
は５０Ｈｚのパルスの搬送周波数で振動していたが、本
発明の制御装置を使用した場合、その振動は大きく低減
された。[0016] [Effects of the Invention] FIG. 7 shows vibration acceleration waveforms of a load on a vibration isolator when a conventional control device is used and when a control device of the present invention is used. The conventional control device vibrates at a pulse carrier frequency of 50 Hz, but when the control device of the present invention is used, the vibration is greatly reduced.
［図１］本発明の実施例の構成図。
［図２］本発明の第１の実施例のブロック線図。
［図３］本発明の第２の実施例のブロック線図。
［図４］従来の技術の給排気流量と荷の高さの説明図。
［図５］本発明において２個の弁を用いたときの給排気
流量と荷の高さの説明図。
［図６］本発明において４個の弁を用いたときの給排気
流量と荷の高さの説明図。
［図７］本発明の効果を示すデータである。[FIG. 1] A configuration diagram of an embodiment of the present invention. [FIG. 2] A block diagram of the first embodiment of the present invention. [FIG. 3] Block diagram of a second embodiment of the present invention. [FIG. 4] An explanatory diagram of the supply/exhaust flow rate and the height of the load in the conventional technology. [FIG. 5] An explanatory diagram of the supply/exhaust flow rate and the height of the load when two valves are used in the present invention. [FIG. 6] An explanatory diagram of the supply/exhaust flow rate and the height of the load when four valves are used in the present invention. [FIG. 7] Data showing the effects of the present invention.
Claims (1)
に空気を出し入れする弁を有する空気ばねの制御装置に
おいて、パルス幅変調で駆動する弁を並列複数化し、そ
れぞれの弁のパルスのタイミングをずらすことにより、
パルス搬送周波数での荷の振動を防ぐようにしたことを
特徴とする空気ばねの制御装置。 ［請求項２］ 弁の数が偶数個であることを特徴とす
る請求項１記載の空気ばねの制御装置。 ［請求項３］ 一個のパルス幅変調回路と遅延回路に
より、これらの弁のパルスのタイミンクをずらして駆動
することを特徴とする請求項１または請求項２記載の空
気ばねの制御装置。 ［請求項４］ パルス幅変調回路を複数個用い、それ
ぞれの弁のパルスのタイミングをずらして駆動すること
を特徴とする請求項１または請求項２記載の空気ばねの
制御装置。[Scope of Claims] [Claim 1] In an air spring control device having a valve for moving air in and out of the air spring according to a signal from a control device, a plurality of valves driven by pulse width modulation are arranged in parallel, and each valve is By shifting the pulse timing,
An air spring control device characterized by preventing vibration of a load at a pulse carrier frequency. [Claim 2] The air spring control device according to Claim 1, wherein the number of valves is an even number. [Claim 3] The air spring control device according to Claim 1 or Claim 2, characterized in that the valves are driven by shifting the timing of pulses of these valves by one pulse width modulation circuit and one delay circuit. [Claim 4] The air spring control device according to Claim 1 or Claim 2, characterized in that a plurality of pulse width modulation circuits are used and the timing of the pulse of each valve is shifted to drive the valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3094651A JPH04244631A (en) | 1991-01-28 | 1991-01-28 | Air spring control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3094651A JPH04244631A (en) | 1991-01-28 | 1991-01-28 | Air spring control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04244631A true JPH04244631A (en) | 1992-09-01 |
Family
ID=14116162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3094651A Pending JPH04244631A (en) | 1991-01-28 | 1991-01-28 | Air spring control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04244631A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0655356A1 (en) * | 1993-11-22 | 1995-05-31 | Ford Motor Company Limited | Control system for variable rate dampers |
| US8690449B2 (en) | 2010-09-22 | 2014-04-08 | Ntn Corporation | Wheel bearing apparatus |
-
1991
- 1991-01-28 JP JP3094651A patent/JPH04244631A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0655356A1 (en) * | 1993-11-22 | 1995-05-31 | Ford Motor Company Limited | Control system for variable rate dampers |
| US8690449B2 (en) | 2010-09-22 | 2014-04-08 | Ntn Corporation | Wheel bearing apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4714005A (en) | Power transmission | |
| JPS61116107A (en) | Actuator controller | |
| KR100911040B1 (en) | Positioning apparatus and positioning method | |
| US20080169798A1 (en) | Method for controlling current in a load | |
| JPH04244631A (en) | Air spring control device | |
| JPH0438504A (en) | Positioning controller | |
| US5550449A (en) | Process for driving electric, current-controlled actuators | |
| JP4169780B1 (en) | Proportional solenoid valve control method and control apparatus | |
| JP3014264B2 (en) | Steel plate vibration control device | |
| JP2001154738A (en) | Method for controlling proportional solenoid valve | |
| JPH09189370A (en) | Control method of solenoid change-over valve and control device | |
| JP2002093619A (en) | Pulse-width modulation control device | |
| JPH01175842A (en) | Inclined magnetic field generating power supply | |
| JPH04244628A (en) | Air spring control device | |
| JP3141383B2 (en) | Suction type magnetic levitation device | |
| JPH04209002A (en) | Control circuit | |
| KR930023915A (en) | Digital Perup Control Method and System and Disk Memory | |
| JPH0524872Y2 (en) | ||
| SU840789A2 (en) | Filter for automatic control systems | |
| SU1539953A1 (en) | Method of controlling planar stepping motor of air support | |
| JP2002113421A (en) | Controlling device for shaker | |
| JPS61117603A (en) | Solenoid valve driving device | |
| JPH06217575A (en) | Device for switching gain of positioning servo | |
| JP2001037229A (en) | Ac voltage stabilizer | |
| JPS6283570A (en) | Control device for opening of electromagnetic valve |