JPH04240538A - Inspecting method of color filter - Google Patents
Inspecting method of color filterInfo
- Publication number
- JPH04240538A JPH04240538A JP2277891A JP2277891A JPH04240538A JP H04240538 A JPH04240538 A JP H04240538A JP 2277891 A JP2277891 A JP 2277891A JP 2277891 A JP2277891 A JP 2277891A JP H04240538 A JPH04240538 A JP H04240538A
- Authority
- JP
- Japan
- Prior art keywords
- light
- color
- defect
- color filter
- detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 10
- 230000007547 defect Effects 0.000 claims abstract description 42
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000003086 colorant Substances 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001579 optical reflectometry Methods 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 claims description 2
- 238000002310 reflectometry Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】この発明は、たとえば液晶カラー
表示パネルにおけるカラーフィルタの欠陥、特に、赤、
緑、青などの色画素の形成材料が、フィルタの基体の必
要な部分以外に付着した混色による欠陥を検出する上で
有効な技術に関する。[Industrial Field of Application] This invention is applicable to defects in color filters in, for example, liquid crystal color display panels.
The present invention relates to a technique that is effective in detecting defects caused by color mixing in which materials forming color pixels such as green and blue adhere to areas other than the necessary parts of a filter base.
【０００２】0002
【従来の技術およびその問題点】一般に、この種のカラ
ーフィルタは、基本的に、ガラス基板等の光透過性の基
体の一面に、赤、緑、青などの互いに異なる分光特性を
もつ複数色の色画素を備え、そして、多くの場合に、各
色画素の境界部分に遮光パターンを備えている。遮光パ
ターンは、表示パネルによる表示画像の鮮明度を高める
上で効果があるといわれる。こうしたカラーフィルタに
は、図３に示すように、３種類の欠陥が見られる。一つ
は、異物による欠陥１０であり、基体１２の一面の赤（
Ｒ）、緑（Ｇ）、青（Ｂ）の色画素２０の中に少なくと
も一部が埋め込まれた形態で存在する。また一つは、白
抜けの欠陥３０であり、あるべき所に色画素２０あるい
は遮光パターン４０がないパターン欠陥である。さらに
一つは、混色による欠陥５０であり、たとえば赤（Ｒ）
の色画素２０の上に青（Ｂ）の色画素２０が一部載るよ
うに、必要な部分以外に他の色画素材料が付着した欠陥
である。異物による欠陥１０は高さがあるので、対向基
板とのショートを生じるし、また、白抜けおよび混色の
他の欠陥３０，５０も表示品質の低下をもたらす。[Prior Art and Problems] In general, this type of color filter basically consists of multiple colors having different spectral characteristics such as red, green, and blue on one surface of a light-transmitting substrate such as a glass substrate. color pixels, and in many cases, a light-shielding pattern is provided at the boundary between each color pixel. The light-shielding pattern is said to be effective in increasing the clarity of images displayed by the display panel. As shown in FIG. 3, three types of defects are observed in such color filters. One is a defect 10 caused by foreign matter, which is caused by red (
R), green (G), and blue (B) color pixels 20, at least a portion of which is embedded. Another type is a white defect 30, which is a pattern defect in which the color pixel 20 or the light-shielding pattern 40 is not located where it should be. Further, one is a defect 50 due to color mixture, for example, red (R).
This is a defect in which another color image material is attached to an area other than the necessary part so that a part of the blue (B) color pixel 20 is placed on top of the color pixel 20 of . Since the defect 10 due to foreign matter has a height, it causes a short circuit with the counter substrate, and other defects 30 and 50 such as white spots and color mixture also cause a deterioration in display quality.
【０００３】そこで、それらの欠陥の有無を検査するこ
とが必要であり、従来一般には、目視による方法を採っ
ている。また、検査の効率および精度を高めた、機械化
したカラーフィルタの検査方法を適用することもできる
。たとえば、異物による欠陥１０を検出する場合、特開
昭５９−１４８８０９号の公報が示すように、異物から
の散乱光が他の部分よりも大きいことを利用し、散乱光
を検出することによって、異物による欠陥１０を検出す
ることができる。また、白抜けの欠陥３０を検出する場
合、特開昭５１−９７３８０号の公報が示す、透過光を
利用したマスクの検査方法を適用することができる。
図４が示すように、白抜けの欠陥３０の部分は、色画素
２０および遮光パターン４０の部分に比べて透過光の光
強度が大きい。そのため、ラインＴｈの所に判定基準を
設けることによって、白抜けの欠陥３０を検出すること
ができる。[0003] Therefore, it is necessary to inspect the presence or absence of these defects, and conventionally, a visual inspection method has generally been adopted. Furthermore, a mechanized color filter inspection method with improved inspection efficiency and accuracy can also be applied. For example, when detecting a defect 10 caused by a foreign object, as shown in Japanese Unexamined Patent Publication No. 148809/1989, by detecting the scattered light by utilizing the fact that the scattered light from the foreign object is larger than other parts, Defects 10 caused by foreign matter can be detected. Further, when detecting the white defect 30, a mask inspection method using transmitted light disclosed in Japanese Patent Laid-Open No. 51-97380 can be applied. As shown in FIG. 4, the light intensity of the transmitted light is greater in the white defect 30 than in the color pixel 20 and the light shielding pattern 40 portion. Therefore, by providing a determination criterion at the line Th, the white defect 30 can be detected.
【０００４】しかし、混色による欠陥５０の部分につい
ては、散乱光あるいは透過光を用いる前記の方法では、
各光強度が他の部分と大きなちがいを生じないため、欠
陥を有効に検出することができない。たとえば、散乱光
では、色画素２０の部分と混色による欠陥５０の部分と
を区別することが困難であり、また、透過光では、図２
の中に鎖線で示すように、混色による欠陥５０の部分の
透過光の光強度は極端に低く、遮光パターン４０の部分
のそれのレベルに近く、判定基準を適正に設定すること
が困難である。その点、カラーフィルタの色画素２０お
よび遮光パターン４０の各パターンに規則性があること
を利用し、画像処理することによって、混色による欠陥
５０の部分をそれらの規則性のある各パターンから区別
するようにすることが考えられる。ところが、画像処理
にはそれなりの処理装置が必要であり、コストを増すと
いう問題を生じる。However, regarding the defect 50 due to color mixture, the above method using scattered light or transmitted light cannot
Since each light intensity is not significantly different from other parts, defects cannot be detected effectively. For example, in scattered light, it is difficult to distinguish between the color pixel 20 and the defect 50 due to color mixture, and in transmitted light,
As shown by the chain line in the figure, the light intensity of the transmitted light in the part of the defect 50 due to color mixture is extremely low and is close to the level of that of the part of the light shielding pattern 40, making it difficult to appropriately set the judgment criteria. . In this regard, by utilizing the regularity of each pattern of the color pixels 20 and the light shielding pattern 40 of the color filter, and performing image processing, the defect 50 due to color mixture is distinguished from each of these regular patterns. It is possible to do so. However, image processing requires a certain amount of processing equipment, leading to the problem of increased costs.
【０００５】[0005]
【発明の目的】この発明の目的は、画像処理をすること
なく、混色による欠陥を有効に検出することができる技
術を提供することにある。OBJECTS OF THE INVENTION An object of the present invention is to provide a technique that can effectively detect defects due to color mixture without image processing.
【０００６】[0006]
【そのための手段および作用】この発明では、カラーフ
ィルタの基体１０のある部分を通過した透過光のほか、
その基体の同じ部分の色画素２０および遮光パターン４
０からの反射光をも検出し、それら透過光と反射光とを
プラスした検出光を基に欠陥を検出する。遮光パターン
４０の形成材料として、クロム、アルミニウム、ニッケ
ル等の金属材料が多用されており、それらのパターン形
成材料は、色画素２０の形成材料に比べて高い光反射性
を示す。そこで、その高い反射性を利用して、何ら画像
処理することなく、混色による欠陥５０を遮光パターン
４０の部分と明確に区別するようにすることができる。
透過光だけでは、混色による欠陥５０を遮光パターン４
０から識別することが困難であるが、反射光を加えるこ
とによって、図２に実線で示すように、遮光パターン４
０の部分の光強度を判定基準Ｔｈよりも大きくすること
ができ、それによって、混色による欠陥５０のみを検出
することができる。[Means and effects therefor] In this invention, in addition to the transmitted light that has passed through a certain part of the base 10 of the color filter,
Color pixel 20 and shading pattern 4 in the same part of the substrate
The reflected light from 0 is also detected, and defects are detected based on the detected light that is the sum of the transmitted light and reflected light. Metal materials such as chromium, aluminum, and nickel are often used as materials for forming the light-shielding pattern 40, and these pattern-forming materials exhibit higher light reflectivity than the materials for forming the color pixels 20. Therefore, by utilizing its high reflectivity, the defect 50 due to color mixture can be clearly distinguished from the light-shielding pattern 40 without any image processing. If only transmitted light is used, the defect 50 due to color mixture can be removed by the light shielding pattern 4.
Although it is difficult to distinguish from 0, by adding reflected light, the light shielding pattern 4 can be created as shown by the solid line in FIG.
The light intensity of the 0 portion can be made larger than the determination criterion Th, and thereby only the defect 50 due to color mixture can be detected.
【０００７】[0007]
【実施例】図１は、この発明を適用した検査装置の光学
系を示している。検査の対象であるカラーフィルタ１０
０に対し、２つの検出系が用意されている。一つは、カ
ラーフィルタ１００の背後の第１の光源Ｌ１を用いた透
過光による検出系であり、もう一つは、第２の光源Ｌ２
およびハーフミラー２００を用いた反射光による検出系
である。各光源としては、ハロゲンランプあるいは白色
レーザなどを用いることができる。カラーフィルタ１０
０の上部のカメラ３００が、カラーフィルタ１００から
の透過光および反射光を受光する。カメラ３００として
は、光−電気変換の通常のカメラ、あるいは色強度補正
が可能な３板式カラーカメラなどの公知のものを用いる
ことができる。通常のカメラを用いる場合には、色強度
補正フィルタ４００を挿入することによって、色に基づ
く光強度のちがいを補正するようにするのが好ましい。
なお、欠陥５０として検出すべきものの大きさは、たと
えば２０〜１００μｍ以上であるが、カメラ３００の画
素の大きさは、最小検出面積の１／４以下にすることが
望ましい。こうした検査装置を用いることによって、カ
ラーフィルタ１００の同じ部分からの透過光および反射
光を同時に検出し、混色による欠陥５０を有効に検出す
ることができる。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an optical system of an inspection apparatus to which the present invention is applied. Color filter 10 to be inspected
0, two detection systems are prepared. One is a detection system using transmitted light using a first light source L1 behind the color filter 100, and the other is a detection system using a second light source L2.
and a detection system using reflected light using a half mirror 200. A halogen lamp, a white laser, or the like can be used as each light source. color filter 10
A camera 300 at the top of the color filter 100 receives transmitted light and reflected light from the color filter 100. As the camera 300, a known camera such as a normal optical-to-electrical conversion camera or a three-panel color camera capable of color intensity correction can be used. When using a normal camera, it is preferable to insert a color intensity correction filter 400 to correct differences in light intensity based on color. The size of the defect to be detected as the defect 50 is, for example, 20 to 100 μm or more, but it is desirable that the size of the pixel of the camera 300 be 1/4 or less of the minimum detection area. By using such an inspection device, transmitted light and reflected light from the same portion of the color filter 100 can be detected simultaneously, and defects 50 due to color mixture can be effectively detected.
【０００８】[0008]
【発明の効果】この発明によれば、遮光パターン４０の
部分からの反射光が混色による欠陥５０の部分からのそ
れに比べてはるかに大きいことに着目し、カラーフィル
タ１００側の同じ部分からの透過光と反射光とを検出し
、それらをプラスした検出光を基に欠陥を検出するよう
にしているため、画像処理をすることなく、混色による
欠陥５０を有効に検出することができる。According to the present invention, attention is paid to the fact that the reflected light from the light shielding pattern 40 is much larger than that from the defect 50 due to color mixture, and the light transmitted from the same portion on the color filter 100 side is Since the light and the reflected light are detected, and defects are detected based on the detection light obtained by adding them, the defect 50 due to color mixture can be effectively detected without image processing.
【図１】この発明を適用した検査装置の一例を示す図で
ある。FIG. 1 is a diagram showing an example of an inspection device to which the present invention is applied.
【図２】この発明による検出原理を示す特性図である。FIG. 2 is a characteristic diagram showing the detection principle according to the present invention.
【図３】カラーフィルタにおける各種の欠陥を示す断面
図である。FIG. 3 is a cross-sectional view showing various defects in a color filter.
【図４】白抜きの欠陥の検出原理を示す特性図である。FIG. 4 is a characteristic diagram showing the principle of detecting defects shown in white.
１２ 基体 ２０ 色画素 ４０ 遮光パターン ５０ 混色による欠陥 １００ カラーフィルタ ３００ カメラ Ｌ１，Ｌ２ 光源 12 Base 20 color pixels 40 Shade pattern 50 Defects due to color mixture 100 Color filter 300 camera L1, L2 light source
Claims (2)
る分光特性をもつ複数色の色画素と、各色画素の境界部
分に位置する遮光パターンとを備え、この遮光パターン
が前記色画素の形成材料に比べて高い光反射性を示す材
料からなるカラーフィルタの欠陥を検出するカラーフィ
ルタの検査方法において、前記基体のある部分を通過し
た透過光のほか、その基体の同じ部分の色画素および遮
光パターンからの反射光をも検出し、それら透過光と反
射光とをプラスした検出光を基に欠陥を検出することを
特徴とする、カラーフィルタの検査方法。1. On one surface of a light-transmitting substrate, color pixels of a plurality of colors having mutually different spectral characteristics and a light-shielding pattern located at the boundary between each color pixel are provided, and this light-shielding pattern forms the color pixel. In a color filter inspection method for detecting defects in a color filter made of a material that exhibits higher light reflectivity than the other material, in addition to the transmitted light that has passed through a certain part of the base, color pixels and shading in the same part of the base are detected. A color filter inspection method characterized by also detecting reflected light from a pattern and detecting defects based on detected light that is a combination of the transmitted light and reflected light.
前記基体の必要な部分以外に付着した混色による欠陥で
ある、請求項１のカラーフィルタの検査方法。2. The method for inspecting a color filter according to claim 1, wherein the defect is a defect due to color mixture in which the material forming the color pixel adheres to a portion other than a necessary portion of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3022778A JPH07101195B2 (en) | 1991-01-23 | 1991-01-23 | Color filter inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3022778A JPH07101195B2 (en) | 1991-01-23 | 1991-01-23 | Color filter inspection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04240538A true JPH04240538A (en) | 1992-08-27 |
| JPH07101195B2 JPH07101195B2 (en) | 1995-11-01 |
Family
ID=12092128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3022778A Expired - Fee Related JPH07101195B2 (en) | 1991-01-23 | 1991-01-23 | Color filter inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07101195B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256245A (en) * | 2006-03-27 | 2007-10-04 | Toppan Printing Co Ltd | Appearance inspecting apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61256241A (en) * | 1985-05-09 | 1986-11-13 | Dainippon Printing Co Ltd | Apparatus fr inspecting color separation filter |
-
1991
- 1991-01-23 JP JP3022778A patent/JPH07101195B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61256241A (en) * | 1985-05-09 | 1986-11-13 | Dainippon Printing Co Ltd | Apparatus fr inspecting color separation filter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007256245A (en) * | 2006-03-27 | 2007-10-04 | Toppan Printing Co Ltd | Appearance inspecting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07101195B2 (en) | 1995-11-01 |
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