JPH04177778A - Discharge excitation type pulse laser equipment - Google Patents
Discharge excitation type pulse laser equipmentInfo
- Publication number
- JPH04177778A JPH04177778A JP30521190A JP30521190A JPH04177778A JP H04177778 A JPH04177778 A JP H04177778A JP 30521190 A JP30521190 A JP 30521190A JP 30521190 A JP30521190 A JP 30521190A JP H04177778 A JPH04177778 A JP H04177778A
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- voltage
- discharge
- peaking
- peaking capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 title 1
- 239000003990 capacitor Substances 0.000 claims abstract description 58
- 230000001419 dependent effect Effects 0.000 claims abstract description 8
- 230000007423 decrease Effects 0.000 claims abstract description 7
- 229910002113 barium titanate Inorganic materials 0.000 abstract description 5
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 13
- 238000010891 electric arc Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229910002370 SrTiO3 Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は充電電圧を増加して多くの電力を投入できる
放電励起型パルスレーザ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a discharge-excited pulsed laser device that can input more power by increasing the charging voltage.
第７図は、例えば電気学会技術報告（ＩＩ部）第２１７
号（短波長レーザの現状）第５頁（昭和６１年４月発行
）に示された従来の放電励起型パルスレーザ装置の電気
回路図であり、図において１．２は相対する一対の主放
電電極、３は前記主放電電極１．２に並列に取（ｔ Ｂ
ツられＳ ｒ Ｔ ｉ Ｏ３（チタン酸ストロンチュー
ム）から成るピーキングコンデンサＣ２，４はパルス発
生用コンデンサＣ１で、一方の端子は主放電電極１に接
続さ、＋１でいる。また、５はパルス発生用コンデンサ
４の他端と主放電電極２との間に接続されたスイッチて
ザイシトロンが採用されている。６はピーキングコンデ
ンサ３に並列に挿入された充電用リアクトル、７は高電
圧電源、８．９は回路中に含まれるインダクタンスであ
る。Figure 7 shows, for example, IEEJ Technical Report (Part II) 217
This is an electrical circuit diagram of a conventional discharge-excited pulsed laser device shown in the issue (Current status of short wavelength lasers), page 5 (published in April 1986), and in the figure, 1.2 is a pair of opposing main discharges. Electrode 3 is connected in parallel to the main discharge electrode 1.2 (t B
Peaking capacitors C2 and C4 made of twisted SrTiO3 (strontium titanate) are pulse generating capacitors C1, one terminal of which is connected to the main discharge electrode 1 and is at +1. Moreover, 5 is a switch connected between the other end of the pulse generation capacitor 4 and the main discharge electrode 2, and a Zycitron is employed. 6 is a charging reactor inserted in parallel with the peaking capacitor 3, 7 is a high voltage power supply, and 8.9 is an inductance included in the circuit.
次に動作について説明する。まず、高電圧電源７からパ
ルス発生用コンデンサ４に正の高電圧か印加されると充
電用リアクトル６を通じて充電電流１１が流れパルス発
生用コンデンサ４か図示の極性に充電される。ここで、
スイッチ５がＯＮするとパルス発生用コンデンサ（Ｃ，
）４の電荷がスイッチ５を経てピーキングコンデンサ（
Ｃ２）３にパルス電流ｊ２となって流入し電荷の移行が
行われる。引続いて、主放電電極１，２間で放電が開始
され放電電流ｊ３が矢印の方向に流れる。Next, the operation will be explained. First, when a positive high voltage is applied from the high voltage power supply 7 to the pulse generating capacitor 4, a charging current 11 flows through the charging reactor 6, and the pulse generating capacitor 4 is charged to the polarity shown. here,
When switch 5 is turned on, the pulse generation capacitor (C,
) 4 passes through switch 5 to the peaking capacitor (
A pulse current j2 flows into C2)3, and the charge is transferred. Subsequently, a discharge is started between the main discharge electrodes 1 and 2, and a discharge current j3 flows in the direction of the arrow.
エキシマレーザでは、この主放電に先立って予備放電が
行われるが、この場合の電極及び電気回路は省略しであ
る。ピーキングコンデンサ（Ｃ２）３からエネルギーが
注入されると主放電電極１１２間で発生する主放電によ
りレーザ発振が行われる。エキシマレーザの如（放電抵
抗の小さい（例えば、０．２Ω）レーザにおいては、ピ
ーキングコンデンサＣ２３の両端の電圧は第９図（ａ）
の如（振動電圧波形となり逆極Ｊハの電圧が発生ずる。In the excimer laser, a preliminary discharge is performed prior to this main discharge, but the electrodes and electric circuit in this case are omitted. When energy is injected from the peaking capacitor (C2) 3, a main discharge generated between the main discharge electrodes 112 causes laser oscillation. In a laser such as an excimer laser (with a small discharge resistance (for example, 0.2Ω)), the voltage across the peaking capacitor C23 is as shown in Figure 9(a).
(The voltage waveform becomes an oscillating voltage, and a voltage with the opposite polarity J is generated.
その逆極性の電圧Ｖｒが第９図（ｂ）の如（反転電流（
アフタカレント）となってアーキングをおこし、その結
果、主放電電極１，２及びレーザガスの寿命を大幅に低
減させる。The voltage Vr with the opposite polarity is as shown in FIG. 9(b) (reversal current (
After current), arcing occurs, and as a result, the lifespan of the main discharge electrodes 1 and 2 and the laser gas is significantly reduced.
第８図はピーキングコンデンサ（Ｃ２）３にＳｒ Ｔ
ｉ ０３を用いた場合のＤＣ電圧とコンデンサ容量変化
との特性図を示したもので定格電圧近くまで充電電圧を
上げても容量が余り変らない。Figure 8 shows Sr T in peaking capacitor (C2) 3.
This is a characteristic diagram of DC voltage and capacitor capacitance change when i03 is used, and the capacitance does not change much even if the charging voltage is increased to near the rated voltage.
このことは放電開始後にピーキングコンデンサ（Ｃ２）
３にエネルギーが残留電圧として残存し、これがアフタ
カレントによるアーク放電の原因となることを示してい
る。This means that after the start of discharge, the peaking capacitor (C2)
3 shows that energy remains as a residual voltage, which causes arc discharge due to aftercurrent.
従来の放電励起型パルスレーザ装置は以上のように構成
されているので、ピーキングコンデンサＣ２にＳｒＴｉ
Ｏ３を用いると定格電圧近くまで電圧を上昇しても容量
変化は余り生じないため、放電用開始後に、該ピーキン
グコンデンサンＣ２にエネルギーが残存し、これがアフ
タカレントによる放電の原因となる等の課題があった。Since the conventional discharge-excited pulsed laser device is configured as described above, the peaking capacitor C2 is made of SrTi.
When O3 is used, even if the voltage is increased to near the rated voltage, the capacitance does not change much, so there are problems such as energy remaining in the peaking capacitor C2 after the start of discharging, and this causing discharge due to after current. was there.
また、容量移行型回路において、スイッチに高電圧電源
から印加する印加電圧■。よりも高い電圧を放電部にか
けたい時にＣ１／Ｃ２の比を太き（すると、印加電圧■
。の２倍までの電圧を印加できるが、この場合にも放電
開始後にピーキングコンデンサに残る電荷量が多（なっ
てアフタカレントによるアーク放電が生じ易いという課
題があった。In addition, in a capacitance transfer type circuit, the applied voltage ■ is applied to the switch from a high voltage power supply. When you want to apply a higher voltage to the discharge section, increase the ratio of C1/C2 (then the applied voltage
. However, even in this case, there is a problem that the amount of charge remaining in the peaking capacitor after the start of discharge is large (and arc discharge due to after current is likely to occur).
この発明は上記のような課題を解消するためになされた
もので、Ｃ，／Ｃ２の比を太き（してもアフタカレント
を少くでき、放電部の電圧をより低いスイッチ部電圧で
高効率に達成できる放電励起型パルスレーザ装置を得る
ことを目的とする。This invention was made in order to solve the above-mentioned problems. Even if the ratio of C and /C2 is made thicker, the after current can be reduced, and the voltage of the discharge part can be lowered to achieve high efficiency with a lower switch part voltage. The purpose of this invention is to obtain a discharge-excited pulsed laser device that can achieve this goal.
［課題を解決するだめの手段］
この発明に係る放電励起型パルスレーザ装置は、パルス
発生用コンデンサに充電されたエネルギーをスイッチを
介して移行するピーキングコンデンサと、そのピーキン
グコンデンサに移行したエネルギーを放電してレーザ光
を出力する主放電電極と、前記ピーキングコンデンサと
して充電電圧の増加に伴い容量が減少する電圧依存形コ
ンデンサを設けたものである。[Means for Solving the Problem] The discharge-excited pulsed laser device according to the present invention includes a peaking capacitor that transfers energy charged in a pulse generation capacitor via a switch, and a peaking capacitor that transfers energy charged in a pulse generation capacitor via a switch, and a device that discharges energy transferred to the peaking capacitor. The main discharge electrode outputs a laser beam, and the peaking capacitor is a voltage-dependent capacitor whose capacity decreases as the charging voltage increases.
［作用］
この発明における電圧依存形コンデンサどしてのチタン
酸バリウム製のピーキングコンデンサは、定格電圧まで
充電する容量が充電前の約半分に減少するので、Ｃ，／
Ｃ２を高くしても放電開始後のアフタカレントが抑制さ
れ、アーキングをな（して主放電電極の寿命を延命する
。また、同じ放電部の電圧をより低いスイッチ部の電圧
で達成できるので、固体素子スイッチの直列数を減少で
きる。[Function] In the barium titanate peaking capacitor used as the voltage dependent capacitor in this invention, the capacity to charge up to the rated voltage is reduced to about half of that before charging, so C,/
Even if C2 is increased, the aftercurrent after the start of discharge is suppressed, preventing arcing and extending the life of the main discharge electrode.Also, since the same voltage at the discharge section can be achieved with a lower voltage at the switch section, The number of solid-state switches connected in series can be reduced.
［実施例］
以下、この発明の一実施例を図について説明する。図中
、第７図と同一の部分は、同一の符号をもって図示した
第１図及び第２図において、１０は電圧依存形コンデン
サで、例えばＢ ａ Ｔ ｉ、 ０３（チタン酸バリウ
ム）で構成されたピーキングコンデンサＣ２，１１は例
えばＦＥＴ （電界効果形トランジスタ）モジュールを
直並列に接続して構成した固体素子スイッチである。[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. In FIGS. 1 and 2, the same parts as in FIG. 7 are shown with the same reference numerals. In FIGS. The peaking capacitors C2 and C11 are, for example, solid-state switches constructed by connecting FET (field effect transistor) modules in series and parallel.
次に動作について説明する。最初に回路上の動作につい
ては、第７図の従来例で述べたものと同一であるので説
明は省略する。ここで、第１図に用いたピーキングコン
デンサ（Ｃ２）１０のＤＣ電圧とコンデンサ容量変化の
特性図を第３図を参照して以下に述べる。ピーキングコ
ンデンサ（Ｃ２）１０にＢ ａ Ｔ ｉ Ｏｓを用いる
と充電電圧が定格電圧近傍に達したとき、その容量は充
電前の約半分近くまで減少する。一般に主放電電極１゜
２の寿命は化学反応による劣化は別として、均一でアー
ク無しの放電をいかに行うか否かにかかっている。また
、スパッタリングによる劣化を防ぐためにはアフタカレ
ントを最小限に抑えなければならない。従って、信頼性
を高め、長寿命化するためには、放電開始後にピーキン
グコンデンサに現われる逆電圧を減少させる必要がある
。Next, the operation will be explained. First, the operation on the circuit is the same as that described in the conventional example shown in FIG. 7, so a description thereof will be omitted. Here, a characteristic diagram of the DC voltage and capacitance change of the peaking capacitor (C2) 10 used in FIG. 1 will be described below with reference to FIG. 3. When B a T i Os is used for the peaking capacitor (C2) 10, when the charging voltage reaches the vicinity of the rated voltage, the capacitance decreases to about half of the value before charging. In general, the life of the main discharge electrode 1.2, apart from deterioration due to chemical reactions, depends on how uniform and arc-free discharge can be performed. Furthermore, in order to prevent deterioration due to sputtering, aftercurrent must be minimized. Therefore, in order to improve reliability and extend service life, it is necessary to reduce the reverse voltage that appears on the peaking capacitor after discharge starts.
関係があり、２Ｖｏ ＝Ｖ２１１ （ＣＩ ＋Ｃ２）
／Ｃ＋で表わされる。ここでγ＝Ｃ，／Ｃ２である。There is a relationship, 2Vo = V211 (CI + C2)
/C+. Here, γ=C,/C2.
第６図はＣ，／Ｃ２とＶ ２Ｍとの関係を表わし、Ｃ，
／Ｃ２の比を次第に大き（すると印加電圧■ｏの２倍ま
でピーキングコンデンサｃ２の電圧を高めることができ
る。しかも、ピーキングコンデンサにＢ ａ Ｔ ｉ
Ｏａを用いると、放電開始時に容量が最小となり、放電
開始後にピーキングコンデンサの容量が増すので放電部
との整合条件に近づき、放電により多くのエネルギーが
投入されて、ビーキングコンデンサに残るエネルギーが
減少する。このため、第４図（ａ）に具体的特性図を示
したように、ピーキングコンデンサ（Ｃ２）１０の振動
電圧波形の逆極性の電圧Ｖ ｒ ｌ：Ｉ第９図の従来例
に比して極めて小さ（なるので、同図（１〕）に示ず如
くアフタカレントも小さくなってアーク放電の心配もな
くなる。第５図は放電電圧の振動波形を示したもので、
第１ピーク電圧Ｖ２１１に達していることがわかる。ま
た、第２図に示したように実際上は固体素子スイッチ１
１を採用するとザイラトロンよりも放電時のインダクタ
ンスが大幅に低（抑えられるので、応答が速くなり第５
図に示す電圧波形は、より急峻に変化して高出力か得ら
れるようになる。Figure 6 shows the relationship between C, /C2 and V 2M;
/C2 ratio (by doing so, the voltage of the peaking capacitor c2 can be increased to twice the applied voltage
When Oa is used, the capacitance becomes minimum at the start of discharge, and the capacitance of the peaking capacitor increases after the start of discharge, approaching the matching condition with the discharge section, and more energy is input into the discharge, reducing the energy remaining in the peaking capacitor. do. Therefore, as shown in the specific characteristic diagram in FIG. 4(a), the voltage V r l:I of the opposite polarity of the oscillating voltage waveform of the peaking capacitor (C2) 10 is higher than that of the conventional example shown in FIG. 9. As the after current becomes extremely small (as shown in Figure 1), there is no need to worry about arc discharge. Figure 5 shows the oscillating waveform of the discharge voltage.
It can be seen that the first peak voltage V211 has been reached. In addition, as shown in FIG. 2, in practice, the solid state element switch 1
1, the inductance during discharge is significantly lower than that of Zyratron, so the response is faster and the fifth
The voltage waveform shown in the figure changes more steeply, allowing higher output to be obtained.
［発明の効果］
以上のようにこの発明によれば、充電電圧まで充電する
と容量が充電前の約半分に減少する電圧依存形コンデン
サとしてチタン酸バリウム製のビーキングコンデンサを
用いたので、アフタカレントによるアーク放電が発生し
な（なって主放電電極の長寿命化が図れる。また同じ放
電部の電圧をより低いスイッチ部の電圧で達成できるの
で、固体素子スイッチを用いた場合には直列数を減らす
ことができる効果がある。[Effects of the Invention] As described above, according to the present invention, a beaking capacitor made of barium titanate is used as a voltage-dependent capacitor whose capacity decreases to approximately half of that before charging when it is charged to the charging voltage, so that the after current is reduced. This eliminates the occurrence of arc discharge (this makes it possible to extend the life of the main discharge electrode).Also, the same voltage at the discharge section can be achieved with a lower voltage at the switch section, so when using a solid-state switch, the number of series connections can be reduced. There are effects that can be reduced.
第１図はこの発明の一実施例を示す放電励起型パルスレ
ーザ装置の電気回路図、第２図はこの発明の他の実施例
を示す同上電気回路図、第３図はＢ ａ Ｔ １０３の
電圧−容量特性図、第４図（ａ）（ｂ）はこの発明のピ
ーキングコンデンサの電圧及び電流波形図、第５図は最
大放電電圧の振動波形図、第６図はコンデンサＣ，／Ｃ
２の比とコンデンサ電圧最大値との相関関係図、第７図
は従来の放電励起パルスレーザ装置の電気回路図、第８
図はＳ ｒ Ｔ ｉ ０３の電圧−容量特性図、第９図
（ａ）（ｂ）は５ｒＴｉＯａのピーキングコンデンサの
電圧及び電流波形図である。
図において、１．２は主放電電極、３はピーキングコン
デンサ、４はパルス発生用コンデンサ、５はスイッチ、
１０はピーキングコンデンサとしての電圧依存形コンデ
ンサ（ＢａＴｉ０３）である。
なお、図中、同一符号は同一、又は相当部分を示す。Fig. 1 is an electric circuit diagram of a discharge-excited pulsed laser device showing one embodiment of the present invention, Fig. 2 is an electric circuit diagram of the same as the above showing another embodiment of the invention, and Fig. 3 is an electric circuit diagram of the B a T 103. Voltage-capacitance characteristic diagram, Figures 4(a) and (b) are voltage and current waveform diagrams of the peaking capacitor of the present invention, Figure 5 is an oscillation waveform diagram of the maximum discharge voltage, and Figure 6 is the capacitor C, /C.
Fig. 7 is an electrical circuit diagram of a conventional discharge-excited pulsed laser device;
The figure is a voltage-capacitance characteristic diagram of S r Ti 03, and FIGS. 9(a) and 9(b) are voltage and current waveform diagrams of a 5rTiOa peaking capacitor. In the figure, 1.2 is the main discharge electrode, 3 is the peaking capacitor, 4 is the pulse generation capacitor, 5 is the switch,
10 is a voltage dependent capacitor (BaTi03) as a peaking capacitor. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ッチを介して移行するピーキングコンデンサと、前記ピ
ーキングコンデンサに移行したエネルギーを放電してレ
ーザ光を出力する主放電電極と、前記ピーキングコンデ
ンサとして充電電圧の増加に伴い容量が減少する電圧依
存形コンデンサを備えた放電励起型パルスレーザ装置。A peaking capacitor that transfers the energy charged in the pulse generation capacitor via a switch, a main discharge electrode that discharges the energy transferred to the peaking capacitor and outputs a laser beam, and a main discharge electrode that serves as the peaking capacitor to increase the charging voltage. A discharge-excited pulsed laser device equipped with a voltage-dependent capacitor whose capacitance decreases accordingly.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30521190A JPH04177778A (en) | 1990-11-09 | 1990-11-09 | Discharge excitation type pulse laser equipment |
| US07/757,419 US5305338A (en) | 1990-09-25 | 1991-09-10 | Switch device for laser |
| GB9119426A GB2250131B (en) | 1990-09-25 | 1991-09-11 | Switch device for laser |
| DE4131949A DE4131949C2 (en) | 1990-09-25 | 1991-09-25 | Switching devices for a discharge-excited pulse laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30521190A JPH04177778A (en) | 1990-11-09 | 1990-11-09 | Discharge excitation type pulse laser equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04177778A true JPH04177778A (en) | 1992-06-24 |
Family
ID=17942390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30521190A Pending JPH04177778A (en) | 1990-09-25 | 1990-11-09 | Discharge excitation type pulse laser equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04177778A (en) |
-
1990
- 1990-11-09 JP JP30521190A patent/JPH04177778A/en active Pending
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