JPH04170336A - Production of optical fiber preform - Google Patents
Production of optical fiber preformInfo
- Publication number
- JPH04170336A JPH04170336A JP29926990A JP29926990A JPH04170336A JP H04170336 A JPH04170336 A JP H04170336A JP 29926990 A JP29926990 A JP 29926990A JP 29926990 A JP29926990 A JP 29926990A JP H04170336 A JPH04170336 A JP H04170336A
- Authority
- JP
- Japan
- Prior art keywords
- combustion
- deposition
- burners
- combustion burners
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 title claims description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000002485 combustion reaction Methods 0.000 claims abstract description 42
- 239000011521 glass Substances 0.000 claims abstract description 22
- 230000008021 deposition Effects 0.000 claims abstract description 20
- 239000002245 particle Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 22
- 239000007789 gas Substances 0.000 abstract description 21
- 239000002994 raw material Substances 0.000 abstract description 5
- 230000003247 decreasing effect Effects 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 12
- 239000000567 combustion gas Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- -1 etc.) Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/22—Inert gas details
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
本発明は、一般に外付は法と呼ばれる光ファイバ母材の
製造方法のうち、複数本の燃焼バーナをターゲット部材
の軸方向に一方向から複数回トラバースさせて、ガラス
微粒子堆積体を得る光ファイバ母材の製造方法に関する
ものである。The present invention is an optical fiber preform manufacturing method generally referred to as an external method, in which a plurality of combustion burners are traversed multiple times from one direction in the axial direction of a target member to obtain a glass particle deposit. The present invention relates to a method for manufacturing a base material.
このような燃焼バーナのトラバース方式による光ファイ
バ母材の製造にあたっては、ターゲット部材外周に燃焼
バーナ先端を対峙させ、ターゲット部材を回転させなが
ら、この燃焼バーナを当該ターゲット部材の軸方向に沿
って移動させつつガラス微粒子を堆積させる堆積工程と
、この堆積工程の終了後、堆積終了位置から堆積開始位
置に戻る間、すなわち帰還工程があり、通常、この帰還
工程では、燃焼ガス（Ｈｚガス）や助燃ガス（０２ガス
）の流量を減少させ、再度、堆積開始位置に達したとき
、所望流量にする制御方法が行われている。When manufacturing an optical fiber base material using such a combustion burner traverse method, the tip of the combustion burner is opposed to the outer periphery of the target member, and the combustion burner is moved along the axial direction of the target member while rotating the target member. There is a deposition process in which glass particles are deposited while the glass particles are being deposited while A control method is used in which the flow rate of gas (02 gas) is decreased and when the deposition start position is reached again, the flow rate is set to a desired flow rate.
ところが、このような帰還工程時においては、供給流量
を減少させても、助燃ガス（Ｏｔガス）は僅かながら供
給され、その流速が遅いことによりバーナ先端部での燃
焼反応がかえって助長されてしまう傾向があり、この結
果、バーナ先端の赤熱化（高温化）は避けられず、バー
ナ寿命の短縮化を招いていた。
本発明は、このような実情に鑑みて行われたものである
。However, during such a return process, even if the supply flow rate is reduced, a small amount of auxiliary combustion gas (Ot gas) is supplied, and its slow flow rate actually accelerates the combustion reaction at the tip of the burner. As a result, the tip of the burner inevitably becomes red hot (higher temperature), resulting in a shortened burner life. The present invention has been made in view of these circumstances.
か−る本発明の特徴とする点は、混合ガスの燃焼により
ガラス微粒子を堆積させる燃焼バーナを回転するターゲ
ット部材の軸方向に一方向から複数回トラバースさせて
、該ターゲット部材の周囲にガラス微粒子堆積層を形成
してガラス微粒子堆積体を得る光ファイバ母材の製造方
法であって、前記燃焼バーナが堆積終了位置から堆積開
始位置に移動する間、前記燃焼バーナの助燃ガスの供給
を停止させる光ファイバ母材の製造方法にある。The characteristic feature of the present invention is that a combustion burner that deposits glass particles by burning a mixed gas is traversed multiple times from one direction in the axial direction of a rotating target member, thereby depositing glass particles around the target member. A method for producing an optical fiber preform to obtain a glass particle deposit by forming a deposited layer, the method comprising: stopping the supply of auxiliary combustion gas to the combustion burner while the combustion burner moves from a deposition end position to a deposition start position; A method for manufacturing an optical fiber base material.
このように本発明では、燃焼バーナの帰還工程時におい
て、助燃ガス（０２ガス）の供給が完全に停止されるた
め、バーナ火炎は外気中の酸素により燃焼そのものは維
持するものの、助燃ガスノズル先端部の火力が大幅に低
下し、燃焼バーナ先端の赤熱化（高温化）が効果的に防
止される。In this way, in the present invention, the supply of the auxiliary gas (02 gas) is completely stopped during the return process of the combustion burner, so although the burner flame maintains combustion itself due to the oxygen in the outside air, the tip of the auxiliary gas nozzle The thermal power of the combustion burner is significantly reduced, effectively preventing the tip of the combustion burner from becoming red hot (high temperature).
第１図〜第２図は本発明に係る光ファイバ母材の製造方
法を実施するための装置系の一例を示した各概略説明図
である。
図において、１はターゲット部材で、これはチャンバ２
内に収納され、その両端がガラス旋盤などで回転自在に
支持されている。なお、このターゲット部材１は、後の
工程で除去されたりあるいは光ファイバ母材のコアとな
る棒材からなる。
上記チャンバ２の一方（図中、右下側）には、内部のタ
ーゲット部材１の軸方向に沿って、開口部２ａが設けて
あり、また、反対側の他方（図中、左上側）には、燃焼
ガスなどが排気される排気部２ｂが設けである。
このチャンバ２の開口部２ａには、複数のガラス微粒子
合成用の燃焼バーナ３・・・ （例えば、２本を１組と
して、４組み（８本）のバーナ）が配置してあり、これ
らの燃焼バーナ３・・・は、外部のトラバース手段（図
示省略）により、図中の区間（Ａ−＋Ｂ−Ｃ−４Ｄ→Ａ
）をトラバースして循環するようになっている。
そして、また、これらの各燃焼バーナ３・・・には、燃
焼ガス（Ｈｔガス）、助燃ガス（０□ガス）、不活性ガ
ス（Ａｒガスなど）、原料ガス（ＳｉＣｊ！ａなど）の
混合ガスが供給されるようになっている。
このような装置系を用いて、本発明方法を実施するには
、先ず、ターゲット部材１を回転させると共に、このタ
ーゲット部材１の外周に対峙した上記各燃焼バーナ３・
・・を燃焼させながら、図中Ａ点の堆積開始位置から図
中Ｂ点の堆積終了位置にかけてトラバースさせる。
このＡ−Ｂの区間が、燃焼バーナ３の堆積工程Ｘで、こ
のとき、火炎４中で生じたガラス微粒子は、ターゲット
部材１の外周にガラス微粒子堆積層５として次第に堆積
されていく。
したがって、もちろん、この堆積工程Ｘには、第２図に
示したようにすべてのガス供給通路のバルブは開成状態
に置かれる。
この堆積工程Ｘが終了すると、上記外部のトラバース手
段の駆動により、燃焼バーナ３をターゲット部材１およ
びチャンバ２の開口部２ａから退避させ、堆積終了位置
のＢ点から０点、Ｄ点を経由して堆積開始位置のＡ点に
至る帰還工程Ｙに入る。
この工程Ｙ中には、ガラス微粒子の堆積がないため、原
料ガス（ＳｉＣ１４など）の供給を止めることはもちろ
んであるが、本発明方法では、第２図に示したようにこ
の原料ガスの供給通路と助燃ガス（０２ガス）の供給通
路とのバルブを閉塞状態にしである。もちろん、燃焼ガ
ス（Ｈ２ガス）の供給量を大幅に減少させである。
したがって、この帰還工程時の燃焼バーナ３にあっては
、例えば外気中の酸素の取り込みにより種火的な燃焼は
維持されるものの、第２図に示したように火力（より詳
しくは助燃ガスノズルの先端部の火力）が大幅にダウン
した火炎４ａとして維持される。
このため、燃焼バーナ３のノズル先端の赤熱化（高温化
）が効果的に防止される。
二の帰還工程Ｙから、堆積工程Ｘの堆積開始位置Ａに至
ったとき、自動的に上記閉塞されている原料ガスと助燃
ガスの供給通路を開成させれば、燃焼バーナ３は、堆積
工程時の本来の火炎４に戻り、上述した堆積工程が開始
させれる。
このトラバースの循環を複数回繰り返すことにより、ガ
ラス微粒子堆積層５は、次第に堆積、成長して、所望径
のガラス微粒子堆積体６が得られる。
この多孔質体からなるガラス微粒子堆積体６をチャンバ
２中から取り出し、その後、高温の加熱炉中で熱処理す
れば、透明ガラス化して、目的とする光ファイバ母材が
得られる。
なお、上記実施例では、チャンバ２の開口部２ａに複数
の燃焼バーナ３・・・を配置してトラバースさせる構成
であったが、チャンバ２の構造は、これに限定されず、
大きな開口部２ａではなく、単に燃焼バーナ３の出入り
できるスリット（間隙）を有するチャンバなどであって
もよい。また、基本的に密閉構造としたチャンバであっ
てもよい。さらに、上記実施例では、帰還工程時の燃焼
バーナ３の火炎は、種火的な燃焼を維持して、堆積工程
に対応し易くした構成であったが、堆積工程Ｘの堆積開
始位置Ａの直前に自動点火する手段を設けておけば、帰
還工程時において完全な燃焼停止状態としてトラバース
させることも可能である。1 and 2 are schematic explanatory diagrams showing an example of an apparatus system for carrying out the method for manufacturing an optical fiber preform according to the present invention. In the figure, 1 is a target member, which is a chamber 2.
It is housed inside, and both ends are rotatably supported by a glass lathe or the like. Note that this target member 1 is made of a bar material that will be removed in a later process or will become the core of the optical fiber preform. An opening 2a is provided in one side of the chamber 2 (lower right side in the figure) along the axial direction of the target member 1 therein, and an opening 2a is provided in the other side (upper left side in the figure) on the opposite side. An exhaust section 2b is provided from which combustion gas and the like are exhausted. A plurality of combustion burners 3 for synthesizing glass particles (for example, four sets (eight burners) of two burners) are arranged in the opening 2a of the chamber 2. The combustion burner 3... is moved through the section (A-+B-C-4D→A
) is circulated by traversing. In addition, each of these combustion burners 3... has a mixture of combustion gas (Ht gas), auxiliary combustion gas (0□ gas), inert gas (Ar gas, etc.), and raw material gas (SiCj!a, etc.). Gas is now supplied. In order to carry out the method of the present invention using such an apparatus system, first, the target member 1 is rotated, and each of the combustion burners 3 and 3 facing the outer periphery of the target member 1 is rotated.
... is traversed from the deposition start position at point A in the figure to the deposition end position at point B in the figure while burning. This section A-B is the deposition step X of the combustion burner 3, and at this time, the glass particles generated in the flame 4 are gradually deposited on the outer periphery of the target member 1 as a glass particle accumulation layer 5. Therefore, of course, in this deposition step X, the valves of all the gas supply passages are placed in the open state as shown in FIG. When this deposition step Then, a return process Y is started to reach point A, which is the deposition start position. During this step Y, since there is no accumulation of glass particles, it goes without saying that the supply of the raw material gas (SiC14, etc.) must be stopped, but in the method of the present invention, the supply of this raw material gas is as shown in FIG. The valves between the passage and the supply passage for the auxiliary combustion gas (02 gas) are closed. Of course, this requires a significant reduction in the amount of combustion gas (H2 gas) supplied. Therefore, in the combustion burner 3 during this return process, although pilot combustion is maintained by taking in oxygen from the outside air, for example, as shown in FIG. The flame 4a is maintained with the firepower at the tip being significantly reduced. Therefore, the nozzle tip of the combustion burner 3 is effectively prevented from becoming red hot (high temperature). When the second return step Y reaches the deposition start position A of the deposition step The original flame 4 is returned to and the deposition process described above is started. By repeating this traverse cycle a plurality of times, the glass fine particle deposit layer 5 is gradually deposited and grown, and a glass fine particle deposit 6 having a desired diameter is obtained. The glass particulate deposit 6 made of this porous material is taken out from the chamber 2 and then heat-treated in a high-temperature heating furnace to make it transparent and vitrify to obtain the desired optical fiber preform. In the above embodiment, a plurality of combustion burners 3 are arranged in the opening 2a of the chamber 2 and traversed, but the structure of the chamber 2 is not limited to this.
Instead of the large opening 2a, the chamber may simply have a slit (gap) through which the combustion burner 3 can enter and exit. Alternatively, the chamber may have a basically sealed structure. Furthermore, in the above embodiment, the flame of the combustion burner 3 during the return process was configured to maintain pilot combustion to facilitate the deposition process. If a means for automatic ignition is provided just before, it is possible to traverse the combustion in a completely stopped state during the return process.
以上の説明から明らかなように本発明に係る光ファイバ
母材の製造方法によれば、帰還工程時において、燃焼ガ
スの供給量を下げる際、助燃ガスの供給を停止させるも
のであるため、バーナノズル先端での火力が大幅に低下
し、燃焼バーナ先端の赤熱化（高温化）が効果的に防止
される。したがって、燃焼バーナの寿命の大幅な向上を
達成することができる。As is clear from the above description, according to the method for manufacturing an optical fiber preform according to the present invention, when reducing the supply amount of combustion gas during the return process, the supply of combustion auxiliary gas is stopped. The thermal power at the tip is significantly reduced, effectively preventing the tip of the combustion burner from becoming red hot (high temperature). Therefore, a significant improvement in the lifespan of the combustion burner can be achieved.
第１図は本発明に係る光ファイバ母材の製造方法を実施
するための装置系の一例を示した概略斜視図、第２図は
第１図の縦断面図である。
図中、
１・・・・・ターゲット部材、
２・・・・・チャンバ、
３・・・・・燃焼バーナ、
４・・・・・火炎、
４ａ・・・・帰還工程時の火炎、
５・・・・・ガラス微粒子堆積層、
６・・・・・ガラス微粒子堆積体、
特許出願人 藤倉電線株式会社
第１図FIG. 1 is a schematic perspective view showing an example of an apparatus system for carrying out the method for manufacturing an optical fiber preform according to the present invention, and FIG. 2 is a longitudinal sectional view of FIG. 1. In the figure, 1... target member, 2... chamber, 3... combustion burner, 4... flame, 4a... flame during return process, 5... ...Glass particulate deposit layer, 6...Glass particulate deposit body, Patent applicant: Fujikura Electric Wire Co., Ltd. Figure 1
Claims (1)
バーナを回転するターゲット部材の軸方向に一方向から
複数回トラバースさせて、該ターゲット部材の周囲にガ
ラス微粒子堆積層を形成してガラス微粒子堆積体を得る
光ファイバ母材の製造方法であって、前記燃焼バーナが
堆積終了位置から堆積開始位置に移動する間、前記燃焼
バーナの助燃ガスの供給を停止させることを特徴とする
光ファイバ母材の製造方法。A combustion burner that deposits glass particles by burning a mixed gas is traversed multiple times from one direction in the axial direction of a rotating target member to form a glass particle deposit layer around the target member to obtain a glass particle deposit. A method for manufacturing an optical fiber preform, the method comprising: stopping the supply of auxiliary gas to the combustion burner while the combustion burner moves from a deposition end position to a deposition start position. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29926990A JP2881624B2 (en) | 1990-11-05 | 1990-11-05 | Manufacturing method of optical fiber preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29926990A JP2881624B2 (en) | 1990-11-05 | 1990-11-05 | Manufacturing method of optical fiber preform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04170336A true JPH04170336A (en) | 1992-06-18 |
| JP2881624B2 JP2881624B2 (en) | 1999-04-12 |
Family
ID=17870358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29926990A Expired - Fee Related JP2881624B2 (en) | 1990-11-05 | 1990-11-05 | Manufacturing method of optical fiber preform |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2881624B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002024591A1 (en) * | 2000-09-21 | 2002-03-28 | Heraeus Tenevo Ag | Method and device for producing a cylinder from doped quartz glass |
| US20130074552A1 (en) * | 2010-05-27 | 2013-03-28 | Fujikura Ltd. | Apparatus and method for manufacturing optical fiber preform |
| US8869565B2 (en) | 2011-05-02 | 2014-10-28 | Fujikura Ltd. | Method and apparatus of producing optical fiber preform |
-
1990
- 1990-11-05 JP JP29926990A patent/JP2881624B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002024591A1 (en) * | 2000-09-21 | 2002-03-28 | Heraeus Tenevo Ag | Method and device for producing a cylinder from doped quartz glass |
| US20130074552A1 (en) * | 2010-05-27 | 2013-03-28 | Fujikura Ltd. | Apparatus and method for manufacturing optical fiber preform |
| US8997527B2 (en) | 2010-05-27 | 2015-04-07 | Fujikura Ltd. | Apparatus and method for manufacturing optical fiber preform |
| US8869565B2 (en) | 2011-05-02 | 2014-10-28 | Fujikura Ltd. | Method and apparatus of producing optical fiber preform |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2881624B2 (en) | 1999-04-12 |
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