JPH04139345A - Method and apparatus for supplying constant temperature and constant moisture air - Google Patents
Method and apparatus for supplying constant temperature and constant moisture airInfo
- Publication number
- JPH04139345A JPH04139345A JP2262490A JP26249090A JPH04139345A JP H04139345 A JPH04139345 A JP H04139345A JP 2262490 A JP2262490 A JP 2262490A JP 26249090 A JP26249090 A JP 26249090A JP H04139345 A JPH04139345 A JP H04139345A
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- JP
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- Prior art keywords
- air
- temperature
- constant
- humidity
- target temperature
- Prior art date
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Links
- 238000000034 method Methods 0.000 title claims description 12
- 238000010438 heat treatment Methods 0.000 claims abstract 4
- 238000005192 partition Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000000638 solvent extraction Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Devices For Use In Laboratory Experiments (AREA)
- Central Air Conditioning (AREA)
- Air Conditioning Control Device (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、極めて高い精度で、供給すべき空気の温度、
湿度を制御することが可能な空気処理方法及びこの方法
を天施する装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention provides a method for determining the temperature of the air to be supplied,
The present invention relates to an air treatment method capable of controlling humidity and an apparatus for performing this method.
従来技術
半導体の製造やバイオテクノロジー 或は、薬品や食品
の製造、医療関係等では、新鮮で、しかも一定の温度、
湿度に調整され、且つ、清浄な空気が必要とされる場合
が多い。Conventional technology In the semiconductor manufacturing, biotechnology, pharmaceutical and food manufacturing, medical fields, etc., fresh, constant temperature,
Humidity-regulated and clean air is often required.
例えば、ＩＣの製造において、シリコンウヱー７ｒ上に
ＩＣパターンを７オトエツチングする際、シリコンウェ
ー７７表面に形成した酸化膜上に、レジスト液を塗り、
レジストを乾燥した後に、これに７オトマスクを合わせ
て露光して、レジスト膜に感光させる操作を行う。この
際に形成されるレノスト膜は、厚さが、１００オングス
トローム程度で、その均一性が、製品の最終９溜りに大
きく影響するため、供給空気のクリーン度と同様、レノ
ストの乾燥に関与する雰囲気の、温度湿度の変動幅が、
夫々、±０．１”Ｃ１±１％ＲＨ程度の範囲に収まるこ
とが強く望まれている。For example, when manufacturing an IC, when etching an IC pattern on the silicon wafer 7r, a resist solution is applied on the oxide film formed on the surface of the silicon wafer 77.
After drying the resist, it is exposed to light using a 7-otomask to expose the resist film to light. The thickness of the Rennost film formed at this time is approximately 100 angstroms, and the uniformity of the film greatly affects the final puddle of the product. The fluctuation range of temperature and humidity is
It is strongly desired that the respective values fall within a range of approximately ±0.1” C1 ±1% RH.
従来、この種の用途に用いられている恒温恒湿空気供給
装置は、第２図に示すように、箱体５０中を仕切板５１
によって仕切ることにより、外気導入口５２から、ホー
スダクト連結口５３に至る一連の空気流路を形成し、こ
の外気導入口に送風機５４を装着して、外気導入口から
ホースダクト連結口５３に向かって送風し、外気導入口
５２に隣接して、蒸発式加湿器５５、冷凍機５６の蒸発
器から成る空気冷却器５７、電熱式加熱器５８を、風上
側から風下側に向って、この順序に設けである。６１は
、温度センサーで、その出力は、温度コントロラー６０
に入力され、所望の空気温度が得られるように、加熱器
５８を制御する。同様に、６３は湿度センサーで、その
検出信号に基ずいて、湿度コントロラー６２が、加湿器
５５のヒータ５５ａの作動を制御するように構成されて
いる。Conventionally, a constant temperature and constant humidity air supply device used for this type of application has a partition plate 51 inside a box body 50, as shown in FIG.
By partitioning the air, a series of air flow paths from the outside air inlet 52 to the hose duct connection port 53 is formed. Next to the outside air inlet 52, an evaporative humidifier 55, an air cooler 57 consisting of an evaporator of a refrigerator 56, and an electric heater 58 are installed in this order from the windward side to the leeward side. It is provided for. 61 is a temperature sensor whose output is sent to the temperature controller 60
The heater 58 is controlled so that the desired air temperature is obtained. Similarly, 63 is a humidity sensor, and the humidity controller 62 is configured to control the operation of the heater 55a of the humidifier 55 based on its detection signal.
６５は、ホースダクトで、クリーンベンチなどのＪｌ整
空気供給空間７０と、恒温恒湿空気供給装置本体とを自
在に連結する目的で設けられており、必要に応じて５〜
１５ｍ程度の長さのものが用いられている。６６は、ホ
ースダクトの端部に設けられたＩＩＥＰ＾フィルターな
どのエアフィルタである。Reference numeral 65 is a hose duct, which is provided for the purpose of freely connecting the Jl air supply space 70 such as a clean bench and the constant temperature and humidity air supply device main body.
A length of about 15 m is used. 66 is an air filter such as an IIEP^ filter provided at the end of the hose duct.
上記のような装置によって、所定条件の空気を供給した
場合、成人外気の温度の変動、ホースダクトの周囲から
の熱侵入等によって、ときとして、±０．４℃以上にも
及ぶ制御温度の振れが数分ないし拾数分にわたって続く
といった制御の乱れが生じ、ホースダクト周囲からの侵
入熱の影響をなくす目的で、温湿度センサ−６１，６３
を、空気供給口６７にとりつけても、若干変動範囲は、
狭くなるものの、変動を±０．１℃以内に収めることは
できなかった。When air is supplied under predetermined conditions using the above-mentioned device, the control temperature may fluctuate by more than ±0.4°C due to fluctuations in the temperature of the outside air, heat intrusion from the surroundings of the hose duct, etc. The temperature/humidity sensors 61, 63 are installed in order to eliminate the influence of heat entering from around the hose duct.
Even if it is attached to the air supply port 67, the fluctuation range is slightly
Although it became narrower, it was not possible to keep the fluctuation within ±0.1°C.
発明の構成
本発明者は、このような制御の乱れについて、その原因
を追及した結果、外気温の変動などに対して、制御系が
追従できずに応答遅れが生じる二と、及び、行程の長い
ホースダクトやＩＩＥＰ＾フィルタなどが、かなりの熱
容破を有しており、これが、加熱源或は吸熱源として、
作用して、新たな平衡状態に到達するまで、そこを流れ
る空気温度を変動させる原因となること等が主たる要因
であることを見出だし、本発明を完成したものである。Structure of the Invention As a result of investigating the causes of such control disturbances, the inventor found that the control system is unable to follow changes in outside temperature, resulting in delayed response, and Long hose ducts, IIEP^ filters, etc. have considerable heat capacity, and this can be used as a heat source or heat absorption source.
The present invention was completed based on the discovery that the main factor is that the temperature of the air flowing through the air changes until a new equilibrium state is reached.
本発明の要旨は、空気入口及び空気供給口とを結ぶ一連
の空気流路に、加湿器、加熱器を備えて、これに外気を
通して所定条件の恒温恒湿空気を供給する方法において
、前記空気流路に導入した外気を、尋人外気の状態によ
り、必要に応じて加湿した後に、供給目標の温度湿度条
件を備えた空気の露点に相当する温度まで冷却除湿し、
次いで、この冷却除湿空気を目標温度より低い所定の温
度まで一次加熱して温度上昇させたのち、更に、この一
次加熱空気を二次加熱して目標温度に温度上昇させて供
給することを特徴とする特許湿空気の供給方法、及びこ
の方法を天地するためのｖｃＩ！ｔとして、送風機を憧
えた−・連の空気流路中に、加湿器と、この加湿器を通
った空気を、供給空気の目標値たる温度湿度条件を有す
る空気の露点温度まで冷却除湿する冷却器と、この冷却
器で冷却された空気を、供給空気の目標値より低い所定
の温度まで加熱する一次加熱器と、この一次加熱器によ
って温度上昇した空気を更に加熱して、供給空気の温度
が正確に目標温度になるようにする二次加熱器とを設け
たことを特徴とする超精密に温度湿度制御された恒温恒
湿空気の供給装置とにある。The gist of the present invention is to provide a method for supplying constant temperature and constant humidity air under predetermined conditions by providing a humidifier and a heater in a series of air flow paths connecting an air inlet and an air supply port, and passing outside air through the air flow path to supply constant temperature and humidity air under predetermined conditions. The outside air introduced into the flow path is humidified as necessary depending on the condition of the outside air, and then cooled and dehumidified to a temperature corresponding to the dew point of the air with the target temperature and humidity conditions.
Next, this cooled dehumidified air is primarily heated to a predetermined temperature lower than the target temperature to raise the temperature, and then this primary heated air is further heated to raise the temperature to the target temperature before being supplied. Patented method for supplying humid air, and vcI to improve this method! As for the air blower, there is a humidifier in the air flow path, and a cooling device that cools and dehumidifies the air that has passed through the humidifier to the dew point temperature of the air that has the target temperature and humidity conditions of the supplied air. a primary heater that heats the air cooled by the cooler to a predetermined temperature lower than the target value of the supply air; and a primary heater that further heats the air whose temperature has been raised by the primary heater to increase the temperature of the supply air. and a secondary heater to ensure that the air reaches the target temperature accurately.
以下、実施例に基すいて図面を参照しながら詳細に説明
する。Hereinafter, embodiments will be described in detail with reference to the drawings.
第１図は、本発明の一実施例を概念的に示すものであっ
て、断熱壁で構成した箱体１内を仕切板１ａ、ｌａによ
って分画することにより、外気導入口２からホースダク
ト連結口３に至る一連の空気流路を形成し、この外気導
入口２に送風１ｆｔ４を装着して、外気導入口がらホー
スダクト連結口に向かって連続送風し、風上側から風下
側に向がって、蒸発式の加湿器５、冷凍ｆｉ６の蒸発器
から成る冷却器７、電熱式の一次加熱器８が、この順序
で設けられている。９は、温度センサで、その検出信号
は、温度コントロラー１０に入力され、ここで設定値と
比較されて、その偏差に基ずいて一次加熱器８が駆動さ
れる。FIG. 1 conceptually shows an embodiment of the present invention, in which the inside of a box 1 configured with heat-insulating walls is divided by partition plates 1a and la, and a hose duct is connected from an outside air inlet 2 to a hose duct. A series of air flow paths leading to the connection port 3 are formed, and a 1ft4 air blower is attached to the outside air inlet 2 to continuously blow air from the outside air inlet toward the hose duct connection port, with the direction from the windward side to the leeward side. Therefore, an evaporative humidifier 5, a cooler 7 consisting of an evaporator of the frozen fi 6, and an electric primary heater 8 are provided in this order. Reference numeral 9 denotes a temperature sensor, and its detection signal is input to a temperature controller 10, where it is compared with a set value and the primary heater 8 is driven based on the deviation.
１１．１１は、ホースダクトで、一端がホースダクト連
結口３に連結し、他端が、ＦＩＥＰ＾フィルタ１２を介
して、目的空間４０に連結する空気供給口１３をなして
いる。１４は、このホースダクト１１の中途に介在して
設けたヒーター収納ダクトケースで、この中に、二次加
熱器１５が収納されており、その作動は、空気供給口１
３に設けた温度センサ１６の検出信号に基すいて、温度
フントロラ−１７によって制御される。１８は、温度セ
ンサ１７と並設された湿度センサで、制御器１９を通し
て加湿器５のヒーター５ａをｔｄｌ ＩＩＩするもので
ある。２０は、加湿器の水位を検出するレベルスイッチ
で、ｆ熱タンク２１に給水する給水弁２２を開田制御す
る。２３は、冷却器７のドレン排出管である。以下に本
発明の方法の一例を上記装置の作用と共に説明する。Reference numeral 11.11 denotes a hose duct, one end of which is connected to the hose duct connection port 3, and the other end is an air supply port 13 connected to the target space 40 via the FIEP filter 12. Reference numeral 14 denotes a heater storage duct case interposed in the middle of the hose duct 11. A secondary heater 15 is stored in this duct case, and its operation is controlled by the air supply port 1.
It is controlled by a temperature controller 17 based on a detection signal from a temperature sensor 16 provided at 3. A humidity sensor 18 is installed in parallel with the temperature sensor 17, and controls the heater 5a of the humidifier 5 through the controller 19. 20 is a level switch that detects the water level of the humidifier, and controls the water supply valve 22 that supplies water to the f-heat tank 21. 23 is a drain discharge pipe of the cooler 7. An example of the method of the present invention will be explained below along with the operation of the above device.
上記装置は、送風機４によって導入された外気を、加湿
器５によって加湿し、ついで冷却器７を通過する際に、
目的空間４０において要ＦＣされる温度、湿度条件を備
えた空気の露点に相当する温度に冷却除湿される。かく
して冷却器７を通過した空気の絶対水分量は、空気温度
の如何にかがわらず一定となり、従って空気供給口１６
において、供給空気の温度が、目的空間４０で要求され
る目標温度になれば、相Ｎ湿度も一義的に目標湿度にな
って供給される。The above device humidifies outside air introduced by a blower 4 by a humidifier 5, and then when passing through a cooler 7,
In the target space 40, the air is cooled and dehumidified to a temperature corresponding to the dew point of the air with the temperature and humidity conditions required for FC. Thus, the absolute moisture content of the air that has passed through the cooler 7 is constant regardless of the air temperature, and therefore the air supply port 16
In this case, when the temperature of the supplied air reaches the target temperature required in the target space 40, the phase N humidity also becomes the target humidity and is supplied.
冷却器７を通過した空気は、一次加熱器８で、目標温度
との中間の所定の温度、例えば、前記露点の温度より３
〜６度程度高い一定の温度に加熱される。このようにし
て一次加熱された？気は、ホースダクト中間の二次加熱
器に入り、空気供給口１８の温度が、目標湿度になるよ
うに二次加熱されて、目標の温湿度条件を備えた空気と
して目的空間に供給される。The air that has passed through the cooler 7 is heated to a predetermined temperature midway between the target temperature and the dew point temperature by a primary heater 8.
It is heated to a constant temperature of ~6 degrees higher. Was it primarily heated in this way? The air enters the secondary heater in the middle of the hose duct, where it is secondary heated so that the temperature at the air supply port 18 reaches the target humidity, and is supplied to the target space as air with the target temperature and humidity conditions. .
上記実施例では、一次及び二次加熱器として加熱器を二
カ所に設けた例を示したが、これは、三次加熱器の必要
性を否定するものではない。In the above embodiment, an example was shown in which heaters were provided at two locations as the primary and secondary heaters, but this does not negate the necessity of a tertiary heater.
効果
本発明に係る恒温恒湿空気の供給方法及びその装置は、
尋人外気の温度条件の変動に対しで、一次加熱器が素早
く反応して一次加熱空気の温度を正確に一定に保つこと
ができ、これによって二次加熱器は、長行程の空気流路
からの侵入熱の変動に対してのみ制御を行えばよいので
、夫々の変動要素に対して、個別のフィードバック制御
が可能となり、精度の高い害♀ｌ−？−栢迎梢憎世ケ九
ｌ井心す１−レができる。本発明者が、第１図の装置と
、第２図において温、湿度検出器を、空λ供給口６７に
設けた装置とを用いて、風量２ ｖ”７分、ダクトホー
ス１２−１冷凍機８００ ｖａ、送風機２００ｗ、目標
制御温度、湿度が、夫々、２３℃、４５％ＲＨで行った
実験において、第１図及び第２図のＡ−Ｄ点における温
度変動の測定結果を第３図に示す。この結果から、本ｍ
装置においては、±０．１℃の範囲において、精密に温
度制御がなされていることが明らか４．４覇ＷＶ門ｉ
第１図は、本発明の一実施例を示す説明図である。Effects The constant temperature and humidity air supply method and device according to the present invention are as follows:
The primary heater can quickly react to fluctuations in the temperature conditions of the outside air and keep the temperature of the primary heated air accurately constant. Since it is only necessary to control the fluctuations in the intrusion heat of - You can do 1-re to be able to hate the world. The present inventor used the device shown in FIG. 1 and the device shown in FIG. Figure 3 shows the measurement results of temperature fluctuations at points A-D in Figures 1 and 2 in an experiment conducted with a machine of 800 VA, a blower of 200 W, target control temperature, and humidity of 23°C and 45% RH, respectively. From this result, this
It is clear that the temperature of the apparatus is precisely controlled within the range of ±0.1°C. Figure 1 is an explanatory diagram showing an embodiment of the present invention.
第２図は、従来技術を示す説明図である。FIG. 2 is an explanatory diagram showing the prior art.
第３図は、本願装置と従来装置との比較実験の結果を示
すグラフである。FIG. 3 is a graph showing the results of a comparative experiment between the device of the present invention and the conventional device.
第 図No. figure
Claims (3)
に、加湿器、加熱器を備えて、これに外気を通して所定
条件の恒温恒湿空気を供給する方法において、前記空気
流路に導入した外気を必要に応じて加湿した後に、供給
目標の温度湿度条件を備えた空気の露点に相当する温度
まで冷却除湿し、次いで、この冷却除湿空気を目標温度
より低い所定の温度まで一次加熱して温度上昇させたの
ち、更に、この一次加熱空気を二次加熱して目標温度に
温度上昇させて供給することを特徴とする恒温恒湿空気
の供給方法。(1) A method in which a series of air channels connecting an air inlet and an air supply port is provided with a humidifier and a heater, and outside air is passed through the air channels to supply constant temperature and constant humidity air under predetermined conditions to the air channels. After humidifying the introduced outside air as necessary, it is cooled and dehumidified to a temperature corresponding to the dew point of the air with the target temperature and humidity conditions, and then this cooled and dehumidified air is primarily heated to a predetermined temperature lower than the target temperature. A method for supplying constant-temperature and constant-humidity air, the method comprising: heating the primarily heated air to raise the temperature, and then heating the primarily heated air to raise the temperature to a target temperature before supplying the air.
該加湿器を通った空気を供給すべき空気の目標値である
温度湿度条件を備えた空気の露点の相当する温度まで冷
却除湿する冷却器と、該冷却器で冷却された空気を、供
給空気の目標温度より低い所定の温度まで加熱する一次
加熱器と、該一次加熱器を通過した空気を、更に前記目
標温度まで加熱する二次加熱器とを設けたことを特徴と
する恒温恒湿空気供給装置。(2) a humidifier in a series of air channels equipped with a blower;
A cooler that cools and dehumidifies the air that has passed through the humidifier to a temperature corresponding to the dew point of the air with the target temperature and humidity conditions of the air to be supplied; Constant temperature and humidity air characterized by being provided with a primary heater that heats the air to a predetermined temperature lower than the target temperature of the air, and a secondary heater that further heats the air that has passed through the primary heater to the target temperature. Feeding device.
ることにより形成された、外気導入口からホースダクト
連結口に至る一連の連続空間と、前記ホースダクト連結
口に一端で連結し、他端が調整空気供給口をなしている
ホースダクトから成り、加湿器、冷却器、一次加熱器が
前記箱状構造物内の空気流路に収納されており、二次加
熱器がホースダクトに介装されている特許請求の範囲第
２項記載の恒温恒湿空気供給装置。(3) The air flow path connects a series of continuous spaces from the outside air inlet to the hose duct connection port, which are formed by partitioning the inside of the box-like structure with partition plates, and the hose duct connection port at one end. A humidifier, a cooler, and a primary heater are housed in the air passage in the box-like structure, and a secondary heater is a hose duct whose other end serves as a regulated air supply port. A constant temperature and constant humidity air supply device according to claim 2, which is installed in a constant temperature and constant humidity air supply device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2262490A JPH04139345A (en) | 1990-09-29 | 1990-09-29 | Method and apparatus for supplying constant temperature and constant moisture air |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2262490A JPH04139345A (en) | 1990-09-29 | 1990-09-29 | Method and apparatus for supplying constant temperature and constant moisture air |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04139345A true JPH04139345A (en) | 1992-05-13 |
Family
ID=17376522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2262490A Pending JPH04139345A (en) | 1990-09-29 | 1990-09-29 | Method and apparatus for supplying constant temperature and constant moisture air |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04139345A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06257791A (en) * | 1993-02-27 | 1994-09-16 | Orion Mach Co Ltd | Constant-temperature air supplying apparatus |
| US5921088A (en) * | 1994-07-01 | 1999-07-13 | Komatsu Ltd. | Air conditioning apparatus |
| US6752543B2 (en) | 2002-05-23 | 2004-06-22 | Dainippon Screen Mfg. Co. Ltd. | Substrate processing apparatus |
| JP2012207802A (en) * | 2011-03-29 | 2012-10-25 | Nippon Steel Engineering Co Ltd | Temperature and humidity adjusting device and carbon dioxide gas separating system |
| CN102967014A (en) * | 2012-11-02 | 2013-03-13 | 伟盈技术研发(无锡)有限公司 | Environmentally-friendly constant-temperature constant-moisture water exchange fresh air system |
| KR101677957B1 (en) * | 2016-07-12 | 2016-11-21 | 강성덕 | Thermo-hygrostat apparatus |
| CN107664340A (en) * | 2017-09-12 | 2018-02-06 | 广东美的制冷设备有限公司 | Air conditioner and its control method, device |
| CN108006917A (en) * | 2017-11-29 | 2018-05-08 | 广东美的制冷设备有限公司 | Air conditioner and its control method and device |
-
1990
- 1990-09-29 JP JP2262490A patent/JPH04139345A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06257791A (en) * | 1993-02-27 | 1994-09-16 | Orion Mach Co Ltd | Constant-temperature air supplying apparatus |
| JPH0810064B2 (en) * | 1993-02-27 | 1996-01-31 | オリオン機械株式会社 | Constant temperature air supply device |
| US5921088A (en) * | 1994-07-01 | 1999-07-13 | Komatsu Ltd. | Air conditioning apparatus |
| US6752543B2 (en) | 2002-05-23 | 2004-06-22 | Dainippon Screen Mfg. Co. Ltd. | Substrate processing apparatus |
| JP2012207802A (en) * | 2011-03-29 | 2012-10-25 | Nippon Steel Engineering Co Ltd | Temperature and humidity adjusting device and carbon dioxide gas separating system |
| CN102967014A (en) * | 2012-11-02 | 2013-03-13 | 伟盈技术研发(无锡)有限公司 | Environmentally-friendly constant-temperature constant-moisture water exchange fresh air system |
| KR101677957B1 (en) * | 2016-07-12 | 2016-11-21 | 강성덕 | Thermo-hygrostat apparatus |
| CN107664340A (en) * | 2017-09-12 | 2018-02-06 | 广东美的制冷设备有限公司 | Air conditioner and its control method, device |
| CN107664340B (en) * | 2017-09-12 | 2020-05-05 | 广东美的制冷设备有限公司 | Air conditioner and control method and device thereof |
| CN108006917A (en) * | 2017-11-29 | 2018-05-08 | 广东美的制冷设备有限公司 | Air conditioner and its control method and device |
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