JPH0410999U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す斜視図、第２
図は第１図の詳細斜視図、第３図はＳＯＲ装置の
真空チヤンバーのサポート構造を示す図、第４図
は第３図のサポート構造の拡大正面図、第５図は
第４図の側面図である。 図中、４……真空チヤンバー、１１……台板、
１３……バネ板、１５……受座、１７……横荷重
受柱である。 Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a detailed perspective view of Figure 1, Figure 3 is a diagram showing the support structure of the vacuum chamber of the SOR device, Figure 4 is an enlarged front view of the support structure of Figure 3, and Figure 5 is a side view of Figure 4. It is a diagram. In the figure, 4...vacuum chamber, 11...base plate,
13... spring plate, 15... catch seat, 17... lateral load bearing column.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 台板上に真空チヤンバーを熱膨張移動可能に支
持する真空チヤンバーのサポート構造において、
台板上に、真空チヤンバーの軸方向に可撓自在に
バネ板を取り付けると共にそのバネ板の上端を受
座を介して真空チヤンバーに固定し、台板上にバ
ネ板の両端と当接してバネ板の捩じりを抑制する
横荷重受柱を設けたことを特徴とする真空チヤン
バーのサポート構造。 In a support structure for a vacuum chamber that supports a vacuum chamber on a base plate so as to be able to move through thermal expansion,
A spring plate is attached to the base plate so as to be flexible in the axial direction of the vacuum chamber, and the upper end of the spring plate is fixed to the vacuum chamber via a catch. A support structure for a vacuum chamber characterized by the provision of a lateral load bearing column that suppresses torsion of the plate.