JPH0410999U - - Google Patents
Info
- Publication number
- JPH0410999U JPH0410999U JP5200090U JP5200090U JPH0410999U JP H0410999 U JPH0410999 U JP H0410999U JP 5200090 U JP5200090 U JP 5200090U JP 5200090 U JP5200090 U JP 5200090U JP H0410999 U JPH0410999 U JP H0410999U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- plate
- support structure
- base plate
- spring plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Particle Accelerators (AREA)
Description
第1図は本考案の一実施例を示す斜視図、第2
図は第1図の詳細斜視図、第3図はSOR装置の
真空チヤンバーのサポート構造を示す図、第4図
は第3図のサポート構造の拡大正面図、第5図は
第4図の側面図である。
図中、4……真空チヤンバー、11……台板、
13……バネ板、15……受座、17……横荷重
受柱である。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a detailed perspective view of Figure 1, Figure 3 is a diagram showing the support structure of the vacuum chamber of the SOR device, Figure 4 is an enlarged front view of the support structure of Figure 3, and Figure 5 is a side view of Figure 4. It is a diagram. In the figure, 4...vacuum chamber, 11...base plate,
13... spring plate, 15... catch seat, 17... lateral load bearing column.
Claims (1)
持する真空チヤンバーのサポート構造において、
台板上に、真空チヤンバーの軸方向に可撓自在に
バネ板を取り付けると共にそのバネ板の上端を受
座を介して真空チヤンバーに固定し、台板上にバ
ネ板の両端と当接してバネ板の捩じりを抑制する
横荷重受柱を設けたことを特徴とする真空チヤン
バーのサポート構造。 In a support structure for a vacuum chamber that supports a vacuum chamber on a base plate so as to be able to move through thermal expansion,
A spring plate is attached to the base plate so as to be flexible in the axial direction of the vacuum chamber, and the upper end of the spring plate is fixed to the vacuum chamber via a catch. A support structure for a vacuum chamber characterized by the provision of a lateral load bearing column that suppresses torsion of the plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5200090U JPH0410999U (en) | 1990-05-18 | 1990-05-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5200090U JPH0410999U (en) | 1990-05-18 | 1990-05-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0410999U true JPH0410999U (en) | 1992-01-29 |
Family
ID=31571933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5200090U Pending JPH0410999U (en) | 1990-05-18 | 1990-05-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0410999U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014075294A (en) * | 2012-10-05 | 2014-04-24 | Toshiba Corp | Charged particle deflector, charged particle irradiation device, charged particle accelerator, and method for manufacturing charged particle deflector |
-
1990
- 1990-05-18 JP JP5200090U patent/JPH0410999U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014075294A (en) * | 2012-10-05 | 2014-04-24 | Toshiba Corp | Charged particle deflector, charged particle irradiation device, charged particle accelerator, and method for manufacturing charged particle deflector |