JPH0388300A - Plasma torch - Google Patents
Plasma torchInfo
- Publication number
- JPH0388300A JPH0388300A JP1222988A JP22298889A JPH0388300A JP H0388300 A JPH0388300 A JP H0388300A JP 1222988 A JP1222988 A JP 1222988A JP 22298889 A JP22298889 A JP 22298889A JP H0388300 A JPH0388300 A JP H0388300A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- plasma
- cooling
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims abstract description 29
- 238000010891 electric arc Methods 0.000 claims abstract description 10
- 230000008016 vaporization Effects 0.000 claims description 3
- 238000009834 vaporization Methods 0.000 claims description 3
- 239000003507 refrigerant Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 13
- 239000000498 cooling water Substances 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000007751 thermal spraying Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、切断、溶融、溶射等の各種プラズマ加工ある
いは気相反応に用いるプラズマトーチに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a plasma torch used for various plasma processing such as cutting, melting, and thermal spraying, or for gas phase reactions.
［従来の技術］
従来、切断、溶融、溶射等の各種プラズマ加工に用いる
プラズマトーチとして種々のものが開発されており、そ
のうち、電極の長寿命化あるいは電極冷却の効率化等の
観点から、有ｍ＃ＩＪプラズマトーチ（特開昭５６−１
４７４００号、同５９−８９８００号。[Prior Art] Various types of plasma torches have been developed for use in various types of plasma processing such as cutting, melting, and thermal spraying. m#IJ plasma torch (JP-A-56-1
No. 47400, No. 59-89800.
同６ｌ−９９３ｆｆＯ号、同 ６２−１９２２７０号、
同 ６２−１９２２７１号等）あるいは、潜熱冷却法を
採用したプラズマトーチ（特開昭６１−１８７９５９号
等〉が提案されている。Same No. 6l-993ffO, No. 62-192270,
62-192271, etc.) or a plasma torch employing a latent heat cooling method (Japanese Patent Application Laid-Open No. 61-187959, etc.).
そして、これら＊磁場プラズマトーチまたは潜熱冷却法
を利用したプラズマトーチは、それぞれ単独に用いられ
ていた。これは、従来のプラズマトーチにおいては、通
常、アルゴンガス等の放電しやすいガスが用いられてお
り、有磁場プラズマトーチまたは潜熱冷却法を採用した
プラズマトーチな単独で用いるたけでも電極寿命、電極
冷却の点で特別な問題を生じないからであった。These *magnetic field plasma torches and plasma torches that utilize latent heat cooling have been used independently. Conventional plasma torches usually use a gas that easily discharges, such as argon gas, and even if a magnetic field plasma torch or a plasma torch that uses latent heat cooling is used alone, the electrode life and electrode cooling will be reduced. This is because no particular problem arises in this respect.
［発明が解決しようとする課１ｌｌｌ］上述のように、
従来のプラズマトーチは、放電しやすいアルゴンガス等
を用いているので、有磁場プラズマトーチまたは潜熱冷
却法を採用したプラズマトーチ単独であってもそれ程問
題はなかった。[Problems to be solved by the invention] As mentioned above,
Conventional plasma torches use argon gas or the like which is easily discharged, so there was no problem even if a magnetic field plasma torch or a plasma torch employing a latent heat cooling method was used alone.
しかし、近年、プラズマトーチの利用範囲か拡大し、ア
ルゴンガス以外のガスを利用することが技術的、経済的
に好ましい場合が出現してきた。However, in recent years, the scope of use of plasma torches has expanded, and cases have emerged where it is technically and economically preferable to use gases other than argon gas.
例えば、アーク放電をＣＶＤ技術に利用する場合、プラ
ズマガスとして高濃度水素ガスを用いる必要かあるが、
水素ガスは放電電圧が高いため。For example, when arc discharge is used in CVD technology, it is necessary to use highly concentrated hydrogen gas as the plasma gas.
Because hydrogen gas has a high discharge voltage.
電極間に高電圧を印加してプラズマを発生させなければ
ならない。Plasma must be generated by applying a high voltage between the electrodes.
このため、電極表面は高温になりやすく、極端な場合に
は、局所的に電極の溶融が起きてしまうことがある。し
たがって、従来の有磁場プラズマトーチまたは潜熱冷却
法を採用したプラズマトーチ単独では、電極の短命化を
もたらすとともに、冷却効果も十分ではなかった。Therefore, the electrode surface tends to reach a high temperature, and in extreme cases, the electrode may melt locally. Therefore, using a conventional magnetic field plasma torch or a plasma torch using a latent heat cooling method alone results in a shortened electrode life, and the cooling effect is not sufficient.
本発明は、上記問題点にかんがみてなされたもので、有
磁場プラズマトーチと潜熱冷却手段を有するプラズマト
ーチを有効に複合させたプラズマトーチの提供を目的と
する。The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a plasma torch that effectively combines a magnetic field plasma torch and a plasma torch having a latent heat cooling means.
［課題を解決するための手段］
上記目的を達成するため、本発明のプラズマトーチは、
中空状の電極及び、この電極の内部中心にアーク放電可
能な間隙をもって設けられた電極とからなるアーク発生
手段と、このアーク発生手段の近傍に配置され、プラズ
マに一定方向の電磁力を作用させる磁界形成手段と、上
記電極の少なくとも一方を、冷媒の蒸発潜熱を利用して
冷却する潜熱冷却手段とを具備した構成としである。[Means for Solving the Problem] In order to achieve the above object, the plasma torch of the present invention has the following features:
An arc generating means consisting of a hollow electrode and an electrode provided at the center of the electrode with a gap that allows arc discharge, and an arc generating means disposed near the arc generating means to apply an electromagnetic force in a fixed direction to the plasma. The configuration includes a magnetic field forming means and a latent heat cooling means for cooling at least one of the electrodes using latent heat of vaporization of a refrigerant.
［作用］
上記構成からなるプラズマトーチによれば、電極間のア
ーク放電が、間隙に沿って回転しながら行なわれ、電極
間の一部のみで行なわれることがない、また、冷媒（水
〉の蒸発潜熱を利用して、少なくとも一方の電極から熱
を奪うことによって効率的な冷却を行なう。[Function] According to the plasma torch configured as described above, the arc discharge between the electrodes is performed while rotating along the gap, and is not performed only in a part of the space between the electrodes. Efficient cooling is performed by removing heat from at least one electrode using latent heat of vaporization.
［実施例］
以下、本発明プラズマトーチの実施例について第１図を
参照しつつ説明する。[Example] Hereinafter, an example of the plasma torch of the present invention will be described with reference to FIG.
第１図は実施例プラズマトーチの縦断面図である。同図
において、ｌは銅等からなる陽極であり、先端をノズル
状とした中空体に形成しである。２はタングステン等か
らなる陰極であり、陽極ｌの中心に、陽極ｌとの間に適
宜の間隙を有する状態で配置されている。この陰極２は
、中空状の陰極ホルダ３の先端に取付けられており、陰
極ホルダ３と陽極１は絶縁体からなるスペーサ４を介し
て固定されている。FIG. 1 is a longitudinal sectional view of an embodiment plasma torch. In the figure, l is an anode made of copper or the like, and is formed into a hollow body with a nozzle-shaped tip. Reference numeral 2 denotes a cathode made of tungsten or the like, which is placed at the center of the anode 1 with an appropriate gap between it and the anode 1. This cathode 2 is attached to the tip of a hollow cathode holder 3, and the cathode holder 3 and anode 1 are fixed via a spacer 4 made of an insulator.
これら陽極ｌと陰極２によって、リンク状の間隙を有す
るアーク放電電極を構成している。上記電極における陽
極ｌと陰極２（以下、電極１．２と称すこともある。〉
の間隙は０．５〜２０１−とすればよく、アーク発生の
確実性を向上させるには２〜１Ｏ−１とすることが好ま
しい。These anode 1 and cathode 2 constitute an arc discharge electrode having a link-shaped gap. Anode 1 and cathode 2 in the above electrode (hereinafter sometimes referred to as electrode 1.2).
The gap may be 0.5 to 201-1, and preferably 2 to 10-1 to improve the reliability of arc generation.
また、電極の材料としては、導電性を有し、ある程度の
耐熱性を具備するものであれば特に制限されず、銅、タ
ングステン以外にも例えば、カーボン、白金、タングス
テン−希土類合金（Ｗ−Ｔｈ等）、タンタル、チタン、
ステンレス鋼などを用いることができる。なお、電極１
．２は、どちらを陽極、陰極としてもよいが１通常は、
中空体の電極を陽極ｌとし、中空部中心に位置する電極
を陰極２とする。Further, the material of the electrode is not particularly limited as long as it has conductivity and has a certain degree of heat resistance. etc.), tantalum, titanium,
Stainless steel or the like can be used. In addition, electrode 1
．． 2. Either can be used as an anode or a cathode, but 1. Usually,
The electrode in the hollow body is referred to as an anode 1, and the electrode located at the center of the hollow part is referred to as a cathode 2.
また、電極１．２の構成するリング状の間隙は真円状の
ものに限られず、環状に連続していればよく、大きさや
形状に制限はない、したがって、例えば楕円形リング状
、ひようたん形リング状、ベルト状等とすることもでき
る。Further, the ring-shaped gap formed by the electrode 1.2 is not limited to a perfectly circular shape, but only needs to be continuous in an annular shape, and there are no restrictions on the size or shape. It can also be shaped like a tongue-shaped ring, a belt, etc.
５及び６は永久磁石であって、磁石５は陽極ｌの先端ノ
ズル部付近の外周に取付けてあり、磁石６は陰極２の内
部に埋設しである。これらの永久磁石５．６によって磁
界形成手段を構成している。なお、磁界形成手段として
は、永久磁石の代りにコイルを電極１．２の先端ノズル
部付近に配置し、このコイルに電流を流すことによって
磁界を形成するようにしたものであってもよい。5 and 6 are permanent magnets, the magnet 5 being attached to the outer periphery of the anode l near the tip nozzle part, and the magnet 6 being embedded inside the cathode 2. These permanent magnets 5.6 constitute magnetic field forming means. As the magnetic field forming means, a coil may be arranged near the tip nozzle portion of the electrode 1.2 instead of the permanent magnet, and the magnetic field may be formed by passing a current through the coil.
７はプラズマガスの供給管であり、陽極ｌと陰極２の間
にプラズマガスを供給する。電極１．２間にプラズマガ
スを供給しつつ、電極１．２間にアークを放電すると、
上記ガスは超高温のために急激に膨張してプラズマジェ
ットとなって電極１．２の間隙より外部に向かって噴き
出す。A plasma gas supply pipe 7 supplies plasma gas between the anode 1 and the cathode 2. When an arc is discharged between electrodes 1.2 while supplying plasma gas between electrodes 1.2,
The above gas expands rapidly due to the extremely high temperature, becomes a plasma jet, and is ejected outward from the gap between the electrodes 1.2.
また磁界形成手段によって磁界を形成すると、フレミン
グの左手の法則にもとづき電極１．２の間隙の放電アー
クに電磁力か作用し、プラズマジェットはリング状の間
隙に沿って移動し回転する。Further, when a magnetic field is generated by the magnetic field forming means, an electromagnetic force acts on the discharge arc in the gap between the electrodes 1.2 based on Fleming's left-hand rule, and the plasma jet moves and rotates along the ring-shaped gap.
８は陽極ｌの外周に形威した冷却空間であり、加圧給水
部９より多数の小孔ｌＯを介して冷却水が放水される。Reference numeral 8 denotes a cooling space formed around the outer periphery of the anode 1, into which cooling water is discharged from a pressurized water supply section 9 through a large number of small holes 10.
放水された冷却水は、高温状態にある陽極ｌの外周に衝
突して蒸発する。このとき、陽極ｌより熱を奪い潜熱冷
却を行なう、１１は蒸発した水蒸気の排出部である。The discharged cooling water collides with the outer periphery of the anode l, which is in a high temperature state, and evaporates. At this time, numeral 11 is a discharge part for evaporated water vapor, which takes heat from the anode l and performs latent heat cooling.
１２は陰極ホルダの内部に形威された冷却空間である。12 is a cooling space formed inside the cathode holder.
この冷却室ｒＩ！Ｉ１２には加圧給水管１３が貫入して
あり、多数の小孔１４より陰極２及び陰極ホルダ３の内
周面に冷却水が放水される。この場合も、冷却水は高温
状態にある陰極２等に衝突して蒸発し、陰極２等より熱
を奪う、１５は水蒸気の排出部である。This cooling room rI! A pressurized water supply pipe 13 penetrates I12, and cooling water is sprayed onto the inner circumferential surfaces of the cathode 2 and cathode holder 3 through a large number of small holes 14. In this case as well, the cooling water collides with the cathode 2 etc. in a high temperature state and evaporates, taking away heat from the cathode 2 etc. 15 is a water vapor discharge section.
陽極を冷却するための冷却空間８．加圧給水部９、小孔
１０．排出部１１及び、陰極２（陰極ホルダ３）を冷却
するための冷却空間１２．加圧給水管１３．小孔１４．
排出部１５によって潜熱冷却手段を構成している。なお
１本実施例では、ＷＩ熱冷却手段を、Ｉｌ極ｌ及び陰極
２の双方を冷却する構成としであるが、このうち何れか
一方のみを冷却するようにした構成であってもよい。Cooling space for cooling the anode8. Pressurized water supply part 9, small hole 10. A cooling space 12 for cooling the discharge part 11 and the cathode 2 (cathode holder 3). Pressurized water supply pipe 13. Small hole 14.
The discharge section 15 constitutes a latent heat cooling means. In this embodiment, the WI thermal cooling means is configured to cool both the Il pole 1 and the cathode 2, but it may be configured to cool only one of them.
このような構成からなるプラズマトーチにあっては、プ
ラズマガスな電極１．２の間隙に供給しつつ、電極１．
２間に電圧を印加し、アークを放電させる。これにより
、上記ガスは急激に膨張して電極１．２の間隙よりプラ
ズマジェットとなって噴き出す。In the plasma torch having such a configuration, while supplying plasma gas to the gap between the electrodes 1.2, the plasma gas is supplied to the gap between the electrodes 1.2.
A voltage is applied between the two to discharge an arc. As a result, the gas expands rapidly and is ejected from the gap between the electrodes 1.2 as a plasma jet.
また、プラズマジェットの先端ノズル部付近に磁界を形
威しであるので、アーク部分に電磁力が作用し、アーク
すなわちプラズマジェットが電極１．２のリング状の間
隙に沿って高速回転する。Further, since a magnetic field is applied near the tip nozzle portion of the plasma jet, an electromagnetic force acts on the arc portion, and the arc, that is, the plasma jet rotates at high speed along the ring-shaped gap between the electrodes 1.2.
一方、陽極ｌ及び陰極２へは、加圧給水部９及び加圧給
水管１３のそれぞれの小孔１０．１４から冷却水が放水
される。陽極ｌ及び陰極２は高温になっているので、衝
突した冷却水は蒸発する。On the other hand, cooling water is discharged to the anode 1 and the cathode 2 from the small holes 10.14 of the pressurized water supply section 9 and the pressurized water supply pipe 13, respectively. Since the anode 1 and the cathode 2 are at a high temperature, the colliding cooling water evaporates.
この際に陽極ｌと陰極２等は熱を奪われ、これにより陽
極ｌと陰極２等は冷却される。At this time, heat is removed from the anode 1, the cathode 2, etc., and thereby the anode 1, the cathode 2, etc. are cooled.
［実験例と比較例］
Ｘ豊１
上述したプラズマトーチ［陽極：タングステン、陰極：
銅、電極間の間隙： ３１−］を用い、次の条件で実験
及び比較を行なった。[Experimental Examples and Comparative Examples] X Yutaka 1 Plasma torch described above [Anode: tungsten, cathode:
Experiments and comparisons were conducted using copper and gap between electrodes: 31-] under the following conditions.
〈条件〉
コイルを用いて ５００ガウスの磁界を形威し、Ｑ、Ｓ
ｌ ／ ｗｉｎの冷却水を供給して潜熱冷却を行なっ
ているプラズマトーチにアルゴンガス１１／ｓｉｎ 、
水素ガス１０１／ｓｉｎの混合ガスをプラズマガスとし
て導入した。<Conditions> A magnetic field of 500 Gauss is applied using a coil, and Q, S
Argon gas 11/sin,
A mixed gas of 101/sin of hydrogen gas was introduced as a plasma gas.
く結果〉
この結果、 ｔｓｏｖ、 １００ Ａの直流アーク放
電か発生し、１時間安定して放電していることが確認さ
れた。Results> As a result, it was confirmed that a DC arc discharge of tsov, 100 A occurred, and the discharge continued stably for 1 hour.
比（Ｄ４上
〈条件〉
コイルに電流を流さず磁界を形成しない以外は、実験例
と同じ放電条件で放電させた。Ratio (D4 upper <conditions>) Discharge was performed under the same discharge conditions as in the experimental example except that no current was passed through the coil and no magnetic field was formed.
く結果〉
この結果、 １０分後に放電が停止した。また、電極が
溶けて変形していることが確認された。Results> As a result, the discharge stopped after 10 minutes. It was also confirmed that the electrodes were melted and deformed.
塩艶亘ユ
く条件〉
冷却手段に潜熱冷却手段を用いず、通常の水冷手段を用
いた以外は、実験例と同じ放電条件で放電させた。Salt Glossy Conditions> Discharge was performed under the same discharge conditions as in the experimental example, except that a normal water cooling means was used instead of a latent heat cooling means.
く結果〉
この結果、 １５分後に放電が停止した。また、電極が
溶けて変形していることが確認された。Results> As a result, the discharge stopped after 15 minutes. It was also confirmed that the electrodes were melted and deformed.
［発明の効果］
以上のように本発明のプラズマトーチによれば、電極間
の一部分のみにおけるアーク放電を防ぐとともに、電極
の冷却を効率的に行なうので、電極の長寿命化及び放電
しにくいガスの安定放電を可能ならしめるという効果が
ある。[Effects of the Invention] As described above, according to the plasma torch of the present invention, arc discharge is prevented only in a portion between the electrodes, and the electrodes are efficiently cooled, so that the life of the electrodes is extended and gases that are difficult to discharge are prevented. This has the effect of making stable discharge possible.
第１図は本発明プラズマトーチの一実施例断面図である
。
ｌ：陽極 ２：陰極
３：陰極ホルダ ５，６：永久磁石８：冷却空間
９：加圧給水部ｌＯ：小孔 １２：
冷却空間
１３：加圧給水管 １４：小孔FIG. 1 is a sectional view of one embodiment of the plasma torch of the present invention. 1: Anode 2: Cathode 3: Cathode holder 5, 6: Permanent magnet 8: Cooling space 9: Pressurized water supply section 1O: Small hole 12:
Cooling space 13: Pressurized water supply pipe 14: Small hole
Claims (1)
能な間隙をもって設けられた電極とからなるアーク発生
手段と、 このアーク発生手段の近傍に配置され、プラズマに一定
方向の電磁力を作用させる磁界形成手段と、 上記電極の少なくとも一方を、冷媒の蒸発潜熱を利用し
て冷却する潜熱冷却手段とを 具備したことを特徴とするプラズマトーチ。[Claims] An arc generating means consisting of a hollow electrode and an electrode provided at the center of the electrode with a gap capable of allowing arc discharge; A plasma torch comprising: a magnetic field forming means for applying an electromagnetic force; and a latent heat cooling means for cooling at least one of the electrodes using latent heat of vaporization of a refrigerant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1222988A JPH0388300A (en) | 1989-08-31 | 1989-08-31 | Plasma torch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1222988A JPH0388300A (en) | 1989-08-31 | 1989-08-31 | Plasma torch |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388300A true JPH0388300A (en) | 1991-04-12 |
Family
ID=16791043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1222988A Pending JPH0388300A (en) | 1989-08-31 | 1989-08-31 | Plasma torch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388300A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003001135A (en) * | 2001-06-18 | 2003-01-07 | Sumitomo Electric Ind Ltd | Crusher electrode and crusher |
| KR100486939B1 (en) * | 2002-03-26 | 2005-05-03 | 재단법인서울대학교산학협력재단 | Non-Transferred Type Plasma Torch With Step-Shaped Nozzle |
| JP2009506892A (en) * | 2005-09-09 | 2009-02-19 | フロニウス・インテルナツィオナール・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Method for operating a steam plasma burner and a steam cutting device |
| JP2010532744A (en) * | 2007-07-06 | 2010-10-14 | エヴァコ エルエルシー | Method and apparatus for hydrogen-related power generation by dissociating water into a single gas at an inexpensive and carbon-free location |
| CN101998750B (en) | 2009-08-14 | 2012-09-26 | 中国科学院金属研究所 | Plasma cathode and protecting method thereof |
| DE102011053106B4 (en) * | 2011-02-25 | 2016-03-24 | Industrieanlagen-Betriebsgesellschaft Mbh | Plasma torch and method for machining workpieces |
| USRE46925E1 (en) | 2001-03-09 | 2018-06-26 | Hypertherm, Inc. | Composite electrode for a plasma arc torch |
| JP2020205279A (en) * | 2014-01-31 | 2020-12-24 | モノリス マテリアルズ インコーポレイテッド | Plasma torch design |
-
1989
- 1989-08-31 JP JP1222988A patent/JPH0388300A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE46925E1 (en) | 2001-03-09 | 2018-06-26 | Hypertherm, Inc. | Composite electrode for a plasma arc torch |
| JP2003001135A (en) * | 2001-06-18 | 2003-01-07 | Sumitomo Electric Ind Ltd | Crusher electrode and crusher |
| KR100486939B1 (en) * | 2002-03-26 | 2005-05-03 | 재단법인서울대학교산학협력재단 | Non-Transferred Type Plasma Torch With Step-Shaped Nozzle |
| JP2009506892A (en) * | 2005-09-09 | 2009-02-19 | フロニウス・インテルナツィオナール・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Method for operating a steam plasma burner and a steam cutting device |
| JP2010532744A (en) * | 2007-07-06 | 2010-10-14 | エヴァコ エルエルシー | Method and apparatus for hydrogen-related power generation by dissociating water into a single gas at an inexpensive and carbon-free location |
| US9994450B2 (en) | 2007-07-06 | 2018-06-12 | Evaco, Llc | Method and apparatus for a low cost and carbon free point of use dissociation of water into elemental gases and production of hydrogen related power |
| CN101998750B (en) | 2009-08-14 | 2012-09-26 | 中国科学院金属研究所 | Plasma cathode and protecting method thereof |
| DE102011053106B4 (en) * | 2011-02-25 | 2016-03-24 | Industrieanlagen-Betriebsgesellschaft Mbh | Plasma torch and method for machining workpieces |
| JP2020205279A (en) * | 2014-01-31 | 2020-12-24 | モノリス マテリアルズ インコーポレイテッド | Plasma torch design |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0368547B1 (en) | Plasma generating apparatus and method | |
| JP5396608B2 (en) | Double plasma device | |
| US5144110A (en) | Plasma spray gun and method of use | |
| EP0427194B1 (en) | Multiple torch type plasma generation device and method of generating plasma using the same | |
| JP3203754B2 (en) | Diamond production method and production equipment | |
| JP5799153B1 (en) | Plasma torch, plasma spraying apparatus, and plasma torch control method | |
| JPH08319552A (en) | Plasma torch and plasma thermal spraying device | |
| JPH0658840B2 (en) | Transfer type plasma torch | |
| JPH0388300A (en) | Plasma torch | |
| JP2002231498A (en) | Composite torch type plasma generating method and device | |
| KR20030077369A (en) | Non-Transferred Type Plasma Torch With Step-Shaped Nozzle | |
| JPH05226096A (en) | Generation method of plasma torch and plasma jet | |
| JP3166226B2 (en) | Diamond production method and production equipment | |
| JP2010536124A (en) | Cathode assembly and method for pulsed plasma generation | |
| JP2001040467A (en) | Arc evaporating source, vacuum deposition device and vacuum deposition method | |
| JPH0963790A (en) | Nozzle for plasma torch | |
| JPS63154273A (en) | Plasma torch | |
| JPH09148094A (en) | Plasma spraying torch | |
| JP7102045B1 (en) | Plasma torch, plasma sprayer, and plasma torch control method | |
| JPH0523859A (en) | Plasma cutting device and plasma cutting torch therefor | |
| KR20010078636A (en) | Plasma arc torch | |
| JPH0636890A (en) | Plasma spraying torch | |
| JPH04221064A (en) | Vacuum arc generator and ion beam generator with this device utilized therefor | |
| JPH04246160A (en) | Thermal-spraying torch | |
| JPH07201497A (en) | Coaxial type electromagnetic accelerating flame spraying device |