JPH0384940A - Resin-sealed semiconductor device - Google Patents

Resin-sealed semiconductor device

Info

Publication number
JPH0384940A
JPH0384940A JP22226489A JP22226489A JPH0384940A JP H0384940 A JPH0384940 A JP H0384940A JP 22226489 A JP22226489 A JP 22226489A JP 22226489 A JP22226489 A JP 22226489A JP H0384940 A JPH0384940 A JP H0384940A
Authority
JP
Japan
Prior art keywords
insulating film
semiconductor pellet
leads
lead
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22226489A
Other languages
Japanese (ja)
Other versions
JPH088270B2 (en
Inventor
Sukeyuki Kami
上 祐之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP22226489A priority Critical patent/JPH088270B2/en
Publication of JPH0384940A publication Critical patent/JPH0384940A/en
Publication of JPH088270B2 publication Critical patent/JPH088270B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE:To widen a gap between a lead and a circuit formation face of a semiconductor pellet, to prevent a characteristic from being deteriorated and to restrain an influence of moisture creeping via the lead by a method wherein the semiconductor pellet is bonded to a heat-resistant insulating film and the lead is connected to the insulating film at a side face of the semiconductor pellet. CONSTITUTION:A circuit formation face of a semiconductor pellet 2 is bonded and fixed to an insulating film 5 by an adhesive material 6; a plurality of leads 1 are bonded and fixed to peripheral edge parts on the rear surface of the insulating film 5. In this case, the prescribed leads 1 among a group of leads 1 are connected electrically to interconnection patterns 4. Electrode pads of the semiconductor pellet 2 are connected to the interconnection patterns 4 in the surface of the insulating film 5 by using bonding wires 3. Thereby, the discrete electrode pads of the semiconductor pellet 2 are connected electrically to the prescribed leads 1. Since the leads 1 are arranged at side faces of the semiconductor pellet 2, it is possible to avoid that an electrical characteristic of a semiconductor device is changed by a voltage applied to the leads 1.

Description

【発明の詳細な説明】 〔産業上の利用分野] 本発明はペレットサイズの大型化に有効な樹脂封止型半
導体装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a resin-sealed semiconductor device that is effective in increasing the pellet size.

[従来の技術] 従来の樹脂封止型半導体装置は金属薄板から成形された
リードフレームを使用して形成されている。即ち、半導
体ペレットはリードフレームの中央部に設けられたタブ
(アイランド)上に固定されており、半導体ペレット上
に形成された電極パ、ドはボンディングワイヤによりタ
ブの周囲に配置されたリードと電気的に接続されている
。そして、半導体ペレット及びリードフレーム等は樹脂
により封止されており、この樹脂封止部から前記リード
が側方に導出されている。
[Prior Art] A conventional resin-sealed semiconductor device is formed using a lead frame molded from a thin metal plate. That is, the semiconductor pellet is fixed on a tab (island) provided in the center of the lead frame, and the electrode pads formed on the semiconductor pellet are electrically connected to the leads placed around the tab by bonding wires. connected. The semiconductor pellet, lead frame, etc. are sealed with resin, and the leads are led out laterally from this resin-sealed portion.

近年、半導体ペレットの大型化に伴い、樹脂封止部の側
端と半導体ペレット取り付は部であるタブとの間の距離
が小さくなっている。しかし、前述した構造において、
この距離が極端に小さくなると、例えばリードの支持が
できなくなる等の不都合が発生する。このため、タブを
省略し、リードを絶縁シートを介して半導体ペレットに
固定した構造の半導体装置が提案されている。
In recent years, as semiconductor pellets have become larger, the distance between the side edges of the resin sealing portion and the tabs that attach the semiconductor pellet has become smaller. However, in the above structure,
If this distance becomes extremely small, problems such as the inability to support the leads will occur. For this reason, a semiconductor device has been proposed in which the tab is omitted and the leads are fixed to the semiconductor pellet via an insulating sheet.

第4図は上述のタブを省略した構造の従来の樹脂封止型
半導体装置を示す断面図である。半導体ペレット22は
その上面周縁部に電極パッド27が形成されている。こ
の半導体ペレット22上には、耐熱性絶縁フィルム25
を介してリード21が固定されている。この絶縁フィル
ム25は両面に接着材26が付着しており、この接着材
26により半導体ペレット22及びリード21が接着さ
れている。また、電極パッド27はボンディングワイヤ
23によりリード21と電気的に接続されている。そし
て、半導体ペレット22、絶縁フィルム25及びボンデ
ィングワイヤ23はモールド樹脂部28により封止され
ており、リード21のみがモールド樹脂部28から外部
に延出している。
FIG. 4 is a sectional view showing a conventional resin-sealed semiconductor device having a structure in which the above-mentioned tab is omitted. The semiconductor pellet 22 has electrode pads 27 formed on the periphery of its upper surface. A heat-resistant insulating film 25 is placed on the semiconductor pellet 22.
A lead 21 is fixed via the lead 21. This insulating film 25 has an adhesive 26 adhered to both sides thereof, and the semiconductor pellet 22 and the lead 21 are adhered by this adhesive 26. Further, the electrode pad 27 is electrically connected to the lead 21 by a bonding wire 23. The semiconductor pellet 22, the insulating film 25, and the bonding wire 23 are sealed by the molded resin part 28, and only the leads 21 extend outside from the molded resin part 28.

[発明が解決しようとする課題] しかしながら、上述したタブを省略した構造の従来の樹
脂封止型半導体装置には、以下に示す欠点がある。
[Problems to be Solved by the Invention] However, the conventional resin-sealed semiconductor device having a structure in which the tab described above is omitted has the following drawbacks.

即ち、半導体ペレット22の回路形成面とり一ド21と
が絶縁フィルム25を介して配置されるため、回路形成
面とり−ド2!との間に容量が形成される。このため、
リード21に電圧が印加されるとり−ド21及びペレッ
ト22間に静電気が誘起され、半導体装置の電気的特性
が劣化する。
That is, since the circuit-forming chamfered one 21 of the semiconductor pellet 22 is arranged with the insulating film 25 interposed therebetween, the circuit-forming chamfered one 2! A capacitance is formed between the two. For this reason,
Static electricity is induced between the lead 21 to which a voltage is applied and the pellet 22, deteriorating the electrical characteristics of the semiconductor device.

また、リード21を介して外部から侵入する水分の侵入
経路がタブを有する半導体装置に比して短いと共に、そ
の幅が広くなる。このため、半導体装置の耐湿性が低い
Furthermore, the path for moisture to enter from the outside through the leads 21 is shorter and wider than in a semiconductor device having a tab. Therefore, the moisture resistance of the semiconductor device is low.

更に、金属製のり一ド21が絶縁フィルム25を介して
半導体ペレット22の回路形成面に固着されているため
、半導体装置内部の応力分布がタブがある場合と異なり
、リード21とペレット22との接合部分に集中する。
Furthermore, since the metal glue 21 is fixed to the circuit forming surface of the semiconductor pellet 22 via the insulating film 25, the stress distribution inside the semiconductor device is different from the case where there is a tab, and the stress distribution between the lead 21 and the pellet 22 is different from that in the case where there is a tab. Concentrate on the joints.

このため、半導体装置の信頼性が低い。Therefore, the reliability of the semiconductor device is low.

本発明はかかる問題点に鑑みてなされたものであって、
半導体装置におけるリードの占有率を低減し、半導体装
置の電気的特性の劣化が回避できると共に、耐湿性及び
信頼性が高い樹脂封止型半導体装置を提供することを目
的とする。
The present invention has been made in view of such problems, and includes:
It is an object of the present invention to provide a resin-sealed semiconductor device which can reduce lead occupancy in a semiconductor device, avoid deterioration of the electrical characteristics of the semiconductor device, and has high moisture resistance and reliability.

[課題を解決するための手段] 本発明に係る樹脂封止型半導体装置は、半導体ペレット
と、この半導体ペレットの回路形成面に接着された耐熱
性絶縁フィルムと、この耐熱性絶縁フィルムに形成され
た配線パターンと、前記半導体ペレットの側方において
前記耐熱性絶縁フィルムに接着されたリードとを有する
ことを特徴とする。
[Means for Solving the Problems] A resin-sealed semiconductor device according to the present invention includes a semiconductor pellet, a heat-resistant insulating film bonded to the circuit-forming surface of the semiconductor pellet, and a heat-resistant insulating film formed on the heat-resistant insulating film. and a lead bonded to the heat-resistant insulating film on the side of the semiconductor pellet.

[作用] 本発明においては、半導体ペレットの回路形成面に耐熱
性絶縁フィルムが接着されており、リードは半導体ペレ
ットの側方においてこの絶縁膜に接着されている。即ち
、前記リードは半導体ペレットの回路形成面の直上域又
は直下域には配置されない。このため、リードに印加さ
れた電圧により半導体素子の動作が影響を受けることを
回避できる。また、リードの基端が半導体ペレットの側
方に位置しており、リード基端部と半導体ペレットの回
路形成面との間隔が広いため、リードを介して樹脂封止
部内に侵入した水分が半導体ペレットの回路形成面に到
達することを抑制できる。更に、リードは絶縁フィルム
と半導体ペレットの側方で接着されているため、半導体
装置内部の応力が半導体ペレットの回路形成面に集中す
ることが回避される。このため、半導体装置内部の応力
に対する強度が向上し、従って半導体装置の信頼性が向
上する。
[Function] In the present invention, a heat-resistant insulating film is adhered to the circuit forming surface of the semiconductor pellet, and the leads are adhered to this insulating film on the sides of the semiconductor pellet. That is, the leads are not arranged directly above or below the circuit forming surface of the semiconductor pellet. Therefore, the operation of the semiconductor element can be prevented from being affected by the voltage applied to the leads. In addition, since the base end of the lead is located on the side of the semiconductor pellet and the distance between the base end of the lead and the circuit forming surface of the semiconductor pellet is wide, moisture that has entered the resin sealing part through the lead can It can be suppressed from reaching the circuit forming surface of the pellet. Furthermore, since the leads are bonded to the insulating film and the semiconductor pellet at the sides, stress inside the semiconductor device is prevented from concentrating on the circuit forming surface of the semiconductor pellet. Therefore, the strength against stress inside the semiconductor device is improved, and the reliability of the semiconductor device is therefore improved.

[実施例] 次に、本発明の実施例について添付の図面を参照して説
明する。
[Example] Next, an example of the present invention will be described with reference to the accompanying drawings.

第1図は本発明の第1の実施例に係る樹脂封止型半導体
装置の樹脂封止前の状態を示す斜視図、第2図は第1図
の■−■線による断面図である。
FIG. 1 is a perspective view showing a resin-sealed semiconductor device according to a first embodiment of the present invention in a state before resin sealing, and FIG. 2 is a cross-sectional view taken along the line 1--2 in FIG.

半導体ペレット2は、その回路形成面が接着材eにより
絶縁フィルム5に接着固定されている。
The circuit forming surface of the semiconductor pellet 2 is adhesively fixed to the insulating film 5 with an adhesive e.

この絶縁フィルム5の側部にはペレット2の上面に形成
された電極パッドに対応する切れ込みが設けられており
、このため半導体ペレット2の電極パッドは露出してい
る。また、この絶縁フィルム5には下面から側部を介し
て上面に延出した所定の形状の導電性配線パターン4が
形成されている。
A notch corresponding to the electrode pad formed on the upper surface of the pellet 2 is provided on the side of the insulating film 5, so that the electrode pad of the semiconductor pellet 2 is exposed. Further, a conductive wiring pattern 4 of a predetermined shape is formed on the insulating film 5 and extends from the lower surface to the upper surface via the side portions.

この配線パターン4は、例えばスクリーン印刷により、
又は無電解メツキ後にエツチングして形成したCu又は
Auからなる配線である。
This wiring pattern 4 is formed by screen printing, for example.
Alternatively, it is a wiring made of Cu or Au formed by etching after electroless plating.

複数個のり一ドlは絶縁フィルム5の下面周縁部に接着
固定されている。この場合、リード1の群の中の所定の
り−ド1は配線パターン4と電気的に接続されている。
A plurality of glue sticks 1 are adhesively fixed to the peripheral edge of the lower surface of the insulating film 5. In this case, a predetermined lead 1 in the group of leads 1 is electrically connected to the wiring pattern 4.

また、半導体ペレット2の電極パッドはボンディングワ
イヤ3により絶縁フィルム5の上面の配線パターン4と
接続されている。これにより、半導体ペレット2の各電
極パッドは所定のり−ド1と電気的に接続されている。
Further, the electrode pad of the semiconductor pellet 2 is connected to the wiring pattern 4 on the upper surface of the insulating film 5 by a bonding wire 3. Thereby, each electrode pad of the semiconductor pellet 2 is electrically connected to a predetermined glue 1.

なお、この半導体ペレット2及び絶縁フィルム5は樹脂
により封止されるが、絶縁フィルム5は少Aくとも樹脂
封止工程において変形しない程度の耐熱性が必要である
Note that although the semiconductor pellet 2 and the insulating film 5 are sealed with resin, the insulating film 5 needs to have at least heat resistance to the extent that it will not be deformed during the resin sealing process.

本実施例においては、リード1が半導体ペレット2の側
方に配置されているため、リードlに印加された電圧に
より半導体装置の電気的特性が変化することを回避でき
る。また、リード1に沿って水分が侵入したとしても、
リード1は半導体ペレット2の側部近傍までしかなく、
このため水分が半導体ペレット2の回路形成面まで到達
することを抑制で毒る。更に、例えばリード1に応力が
印加された場合、半導体ペレット2の回路形成面に応力
が集中することを回避できるため、応力に対する半導体
装置の信頼性が高い。
In this embodiment, since the lead 1 is placed on the side of the semiconductor pellet 2, it is possible to avoid changes in the electrical characteristics of the semiconductor device due to the voltage applied to the lead 1. Also, even if moisture enters along lead 1,
The lead 1 extends only to the vicinity of the side of the semiconductor pellet 2,
Therefore, moisture is prevented from reaching the circuit forming surface of the semiconductor pellet 2. Furthermore, when stress is applied to the lead 1, for example, concentration of stress on the circuit forming surface of the semiconductor pellet 2 can be avoided, so that the reliability of the semiconductor device against stress is high.

第3図は本発明の第2の実施例に係る樹脂封止型半導体
装置の樹脂封止前の状態を示す斜視図である。
FIG. 3 is a perspective view showing a state of a resin-sealed semiconductor device according to a second embodiment of the present invention before resin-sealing.

半導体ペレット12はその回路形成面が接着材1θによ
り絶縁フィルム15と接着されている。
The circuit-forming surface of the semiconductor pellet 12 is bonded to the insulating film 15 with an adhesive 1θ.

この絶縁フィルム15は、第1の実施例と同様に、半導
体ペレット12上に形成された電極パッドに相当する部
分に切れ込みが設けられている。また、この絶縁フィル
ム15上には所定の配線パターン14が形成されており
、半導体ペレット12の電極パッドはボンディングワイ
ヤ13によりこの配線パターン14と接続されている。
This insulating film 15 is provided with cuts in portions corresponding to the electrode pads formed on the semiconductor pellet 12, as in the first embodiment. Further, a predetermined wiring pattern 14 is formed on this insulating film 15 , and the electrode pads of the semiconductor pellet 12 are connected to this wiring pattern 14 by bonding wires 13 .

一方、リード11もボンディングワイヤ13により絶縁
フィルム15上の配線パターン14と接続されており、
これにより所定の電極パッドが所定のり−ド11と電気
的に接続されている。
On the other hand, the lead 11 is also connected to the wiring pattern 14 on the insulating film 15 by a bonding wire 13.
Thereby, a predetermined electrode pad is electrically connected to a predetermined board 11.

本実施例においては、電極パッドと配線パターン14と
の接続及びリード1工と配線パターン14との接続をボ
ンディングワイヤ13により行っているため、第1の実
施例と同様の効果が得られるのに加えて、リード11と
電極パッドとの間の電気的な接続の信頼性が、第1の実
施例に比して、−層高いという利点がある。
In this embodiment, since the connection between the electrode pad and the wiring pattern 14 and the connection between the lead 1 and the wiring pattern 14 are made by the bonding wire 13, the same effect as in the first embodiment can be obtained. In addition, there is an advantage that the reliability of the electrical connection between the lead 11 and the electrode pad is much higher than in the first embodiment.

[発明の効果] 以上説明したように本発明によれば、半導体ペレットは
耐熱性絶縁フィルムに接着されており、リードは半導体
ペレットの側方においてこの絶縁フィルムに接続されて
いるから、リードと半導体ペレットの回路形成面との間
隔が広く、リードに印加される電圧の影響による半導体
装置の特性の劣化を防止できると共に、リードを介して
侵入する水分の影響も抑制される。また、例えばリード
に印加される応力が半導体ペレットの回路形成面に集中
することが回避されるため、半導体装置の信頼性が向上
するという効果も奏する。
[Effects of the Invention] As explained above, according to the present invention, the semiconductor pellet is bonded to a heat-resistant insulating film, and the leads are connected to this insulating film on the sides of the semiconductor pellet, so that the leads and the semiconductor The distance between the pellet and the circuit forming surface is wide, which prevents deterioration of the characteristics of the semiconductor device due to the influence of the voltage applied to the leads, and also suppresses the influence of moisture entering through the leads. Furthermore, since the stress applied to the leads, for example, is prevented from concentrating on the circuit formation surface of the semiconductor pellet, there is also an effect that the reliability of the semiconductor device is improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1の実施例に係る樹脂封止型半導体
装置の樹脂封止前の状態を示す斜視図、第2図は第1図
の■−■線による断面図、第3図は本発明の第2の実施
例に係る樹脂封止型半導体装置の樹脂封止前の状態を示
す斜視図、第4図は従来の樹脂封止型半導体装置を示す
断面図である。
1 is a perspective view showing a resin-sealed semiconductor device according to a first embodiment of the present invention in a state before resin encapsulation; FIG. 2 is a sectional view taken along the line ■-■ of FIG. 1; The figure is a perspective view showing a resin-sealed semiconductor device according to a second embodiment of the present invention in a state before resin-sealing, and FIG. 4 is a cross-sectional view showing a conventional resin-sealed semiconductor device.

Claims (1)

【特許請求の範囲】[Claims] (1)半導体ペレットと、この半導体ペレットの回路形
成面に接着された耐熱性絶縁フィルムと、この耐熱性絶
縁フィルムに形成された配線パターンと、前記半導体ペ
レットの側方において前記耐熱性絶縁フィルムに接着さ
れたリードとを有することを特徴とする樹脂封止型半導
体装置。
(1) A semiconductor pellet, a heat-resistant insulating film bonded to the circuit forming surface of the semiconductor pellet, a wiring pattern formed on the heat-resistant insulating film, and a heat-resistant insulating film bonded to the side of the semiconductor pellet. 1. A resin-sealed semiconductor device characterized by having a bonded lead.
JP22226489A 1989-08-29 1989-08-29 Resin-sealed semiconductor device Expired - Lifetime JPH088270B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22226489A JPH088270B2 (en) 1989-08-29 1989-08-29 Resin-sealed semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22226489A JPH088270B2 (en) 1989-08-29 1989-08-29 Resin-sealed semiconductor device

Publications (2)

Publication Number Publication Date
JPH0384940A true JPH0384940A (en) 1991-04-10
JPH088270B2 JPH088270B2 (en) 1996-01-29

Family

ID=16779663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22226489A Expired - Lifetime JPH088270B2 (en) 1989-08-29 1989-08-29 Resin-sealed semiconductor device

Country Status (1)

Country Link
JP (1) JPH088270B2 (en)

Also Published As

Publication number Publication date
JPH088270B2 (en) 1996-01-29

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