JPH0377442B2 - - Google Patents

Info

Publication number: JPH0377442B2
Authority: JP; Japan
Prior art keywords: scale; metal; light; manufacturing; etching
Prior art date: 1980-02-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP55021393A

Other languages

English (en)

Japanese (ja)

Other versions

JPS56118606A (en

Inventor

Mikio Kenmochi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitutoyo Corp

Original Assignee

Mitutoyo Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1980-02-22

Filing date

1980-02-22

Publication date

1991-12-10

1980-02-22 Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp

1980-02-22 Priority to JP2139380A priority Critical patent/JPS56118606A/ja

1981-02-18 Priority to DE19813105934 priority patent/DE3105934A1/de

1981-02-19 Priority to GB8105226A priority patent/GB2072850B/en

1981-09-17 Publication of JPS56118606A publication Critical patent/JPS56118606A/ja

1991-12-10 Publication of JPH0377442B2 publication Critical patent/JPH0377442B2/ja

Status Granted legal-status Critical Current

Links

229910052751 metal Inorganic materials 0.000 claims description 54
239000002184 metal Substances 0.000 claims description 54
238000004519 manufacturing process Methods 0.000 claims description 20
229920002120 photoresistant polymer Polymers 0.000 claims description 13
238000000034 method Methods 0.000 claims description 12
238000010521 absorption reaction Methods 0.000 claims description 3
239000011248 coating agent Substances 0.000 claims description 3
238000000576 coating method Methods 0.000 claims description 3
230000000694 effects Effects 0.000 claims description 2
239000010408 film Substances 0.000 claims 2
239000010409 thin film Substances 0.000 claims 2
238000005530 etching Methods 0.000 description 19
238000006243 chemical reaction Methods 0.000 description 7
238000007796 conventional method Methods 0.000 description 6
238000005260 corrosion Methods 0.000 description 5
230000007797 corrosion Effects 0.000 description 5
238000010586 diagram Methods 0.000 description 5
230000031700 light absorption Effects 0.000 description 5
239000000463 material Substances 0.000 description 5
238000007747 plating Methods 0.000 description 5
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
239000003518 caustics Substances 0.000 description 4
239000011521 glass Substances 0.000 description 4
230000001681 protective effect Effects 0.000 description 3
238000007788 roughening Methods 0.000 description 3
229910001220 stainless steel Inorganic materials 0.000 description 3
239000010935 stainless steel Substances 0.000 description 3
239000010953 base metal Substances 0.000 description 2
XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 2
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
229910052737 gold Inorganic materials 0.000 description 2
239000010931 gold Substances 0.000 description 2
239000000203 mixture Substances 0.000 description 2
229910052709 silver Inorganic materials 0.000 description 2
239000004332 silver Substances 0.000 description 2
239000000758 substrate Substances 0.000 description 2
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
241000668842 Lepidosaphes gloverii Species 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
238000010894 electron beam technology Methods 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
238000005259 measurement Methods 0.000 description 1
239000011259 mixed solution Substances 0.000 description 1
239000000615 nonconductor Substances 0.000 description 1
230000003647 oxidation Effects 0.000 description 1
238000007254 oxidation reaction Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B1/00—Measuring instruments characterised by the selection of material therefor
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/02—Rulers with scales or marks for direct reading
- G01B3/04—Rulers with scales or marks for direct reading rigid
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optical Transform (AREA)
Length Measuring Devices By Optical Means (AREA)
ing And Chemical Polishing (AREA)

JP2139380A 1980-02-22 1980-02-22 Metal scale and manufacture thereof Granted JPS56118606A (en)

Priority Applications (3)

Application Number	Priority Date	Filing Date	Title
JP2139380A JPS56118606A (en)	1980-02-22	1980-02-22	Metal scale and manufacture thereof
DE19813105934 DE3105934A1 (de)	1980-02-22	1981-02-18	Metallskala und verfahren zu ihrer herstellung
GB8105226A GB2072850B (en)	1980-02-22	1981-02-19	Metal scale for an electronic measuring instrument

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2139380A JPS56118606A (en)	1980-02-22	1980-02-22	Metal scale and manufacture thereof

Publications (2)

Publication Number	Publication Date
JPS56118606A JPS56118606A (en)	1981-09-17
JPH0377442B2 true JPH0377442B2 (zh)	1991-12-10

Family

ID=12053811

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2139380A Granted JPS56118606A (en)	1980-02-22	1980-02-22	Metal scale and manufacture thereof

Country Status (3)

Country	Link
JP (1)	JPS56118606A (zh)
DE (1)	DE3105934A1 (zh)
GB (1)	GB2072850B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60118912U (ja) *	1984-01-18	1985-08-12	アルプス電気株式会社	反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS61102915U (zh) *	1984-12-12	1986-07-01
JPS61197510U (zh) *	1985-05-31	1986-12-10
GB2188426A (en) *	1986-03-26	1987-09-30	Digital Building Systems Limit	Quantity surveying instrument
JPH04208810A (ja) *	1990-12-03	1992-07-30	Omron Corp	変位信号出力装置
US5963330A (en) *	1996-11-13	1999-10-05	Dr. Johannes Heidenhain Gmbh	Optical position measuring device
GB2339910A (en) *	1998-07-17	2000-02-09	Ab Automotive Electronics Ltd	Position determining system for a vehicle seat
DE19937023A1 (de) *	1999-08-05	2001-02-08	Heidenhain Gmbh Dr Johannes	Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung
JP2006337321A (ja) *	2005-06-06	2006-12-14	Mitsutoyo Corp	光学スケール、及び、その製造方法
US20150160041A1 (en) *	2011-12-28	2015-06-11	Nikon Corporation	Encoder, manufacturing method of encore scale manufacturing method of encoder, and driving apparatus
JP6425875B2 (ja) *	2013-06-14	2018-11-21	株式会社ミツトヨ	光電式測定器用スケール、エンコーダ及びスケールの形成方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR638014A (fr) *	1926-07-10	1928-05-14	Comp Generale Electricite	Procédé pour l'obtention de couches de nickel à partir des tôles composées de couches alternantes de nickel et de cuivre
DE902713C (de) *	1950-02-28	1955-11-17	Wenczler & Heidenhain	Verfahren zum Aufbringen von Kopien auf beliebiges Material
DE1217637B (de) *	1961-01-04	1966-05-26	Philips Nv	Vorrichtung zum Messen von Verschiebungen
DE1278124B (de) *	1965-09-02	1968-09-19	Leitz Ernst Gmbh	Verfahren zur Herstellung von Teilungen, Messmarken, Gittern u. dgl.
CH460365A (de) *	1966-12-08	1968-07-31	Wild Heerbrugg Ag	Auf einem optischen Träger aufgebrachte lichtundurchlässige und reflexionsfreie Beschichtung
DE1798372A1 (de) *	1967-03-28	1972-08-10	Rudolph Dietbert Dipl Phys	Verfahren zur Herstellung von Reflexions- und Transmissionsgittern
AT284483B (de) *	1967-08-10	1970-09-10	Wenczler & Heidenhain	Geätzte Meßteilung und Verfahren zu deren Herstellung
US3878391A (en) *	1973-12-17	1975-04-15	Westinghouse Electric Corp	Radiometric pulse initiator having a reflective patterned drum
DE3316144A1 (de) *	1982-05-04	1983-11-10	Canon K.K., Tokyo	Verfahren und vorrichtung zum messen des ausmasses einer bewegung

1980
- 1980-02-22 JP JP2139380A patent/JPS56118606A/ja active Granted
1981
- 1981-02-18 DE DE19813105934 patent/DE3105934A1/de active Granted
- 1981-02-19 GB GB8105226A patent/GB2072850B/en not_active Expired

Also Published As

Publication number	Publication date
DE3105934A1 (de)	1982-01-07
DE3105934C2 (zh)	1991-07-18
JPS56118606A (en)	1981-09-17
GB2072850B (en)	1984-02-29
GB2072850A (en)	1981-10-07

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