JPH0369364U - - Google Patents

Info

Publication number
JPH0369364U
JPH0369364U JP12886289U JP12886289U JPH0369364U JP H0369364 U JPH0369364 U JP H0369364U JP 12886289 U JP12886289 U JP 12886289U JP 12886289 U JP12886289 U JP 12886289U JP H0369364 U JPH0369364 U JP H0369364U
Authority
JP
Japan
Prior art keywords
flange
attached
vacuum
sealing part
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12886289U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12886289U priority Critical patent/JPH0369364U/ja
Publication of JPH0369364U publication Critical patent/JPH0369364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案の一実施例を示す部分断面図
、第2図及び第3図は従来の真空フランジを示す
もので、第2図はOリング装着タイプを示す部分
断面図、第3図は金属ガスケツト装着タイプを示
す部分断面図である。 図において、1,10……フランジ、2……ボ
ルト孔、3……Oリング用の溝、4……Oリング
、5……コンフラツト部、6……金属ガスケツト
である。なお、各図中、同一符号は夫々相当部分
を示す。
Fig. 1 is a partial sectional view showing an embodiment of this invention, Figs. 2 and 3 show a conventional vacuum flange, Fig. 2 is a partial sectional view showing an O-ring mounted type, and Fig. 3 FIG. 2 is a partial cross-sectional view showing a metal gasket installation type. In the figure, 1, 10... flange, 2... bolt hole, 3... groove for O-ring, 4... O-ring, 5... conflat part, 6... metal gasket. Note that in each figure, the same reference numerals indicate corresponding parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] フランジにシール部を形成して真空をシールす
るようにしたものにおいて、上記フランジにシー
ル部形成用のOリングを装着し得るようにしたO
リング用溝と、金属ガスケツトを装着し得るよう
にしたコンフラツト部とを設けるようにしたこと
を特徴とする真空フランジ。
A sealing part is formed on the flange to seal the vacuum, and an O-ring for forming the sealing part can be attached to the flange.
A vacuum flange characterized by being provided with a ring groove and a conflat portion into which a metal gasket can be attached.
JP12886289U 1989-11-01 1989-11-01 Pending JPH0369364U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12886289U JPH0369364U (en) 1989-11-01 1989-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12886289U JPH0369364U (en) 1989-11-01 1989-11-01

Publications (1)

Publication Number Publication Date
JPH0369364U true JPH0369364U (en) 1991-07-10

Family

ID=31676536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12886289U Pending JPH0369364U (en) 1989-11-01 1989-11-01

Country Status (1)

Country Link
JP (1) JPH0369364U (en)

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