JPH0236653U - - Google Patents

Info

Publication number
JPH0236653U
JPH0236653U JP11523288U JP11523288U JPH0236653U JP H0236653 U JPH0236653 U JP H0236653U JP 11523288 U JP11523288 U JP 11523288U JP 11523288 U JP11523288 U JP 11523288U JP H0236653 U JPH0236653 U JP H0236653U
Authority
JP
Japan
Prior art keywords
ring
shaped seal
flange
section
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11523288U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11523288U priority Critical patent/JPH0236653U/ja
Publication of JPH0236653U publication Critical patent/JPH0236653U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この考案の一実施例であり、断面三
角形リング状シールエツジを2重にした場合を示
す真空装置用メタルシールの要部断面図である。
第2図は、従来のメタルシール構造の要部断面図
である。 1……真空室に取付けたフランジ、1a……外
側の断面三角形リング状シールエツジ、1b……
内側の断面三角形リング状シールエツジ、2……
フタ側フランジ、2a……外側の断面三角形リン
グ状シールエツジ、2b……内側の断面三角形リ
ング状シールエツジ、3……メタル平リング、4
……ボルト、5……ナツト。
FIG. 1 is a cross-sectional view of a main part of a metal seal for a vacuum device, which is an embodiment of this invention, and shows a case where the ring-shaped seal edge is doubled in a triangular cross section.
FIG. 2 is a sectional view of a main part of a conventional metal seal structure. 1... Flange attached to the vacuum chamber, 1a... Triangular cross-section ring-shaped seal edge on the outside, 1b...
Inner cross-section triangular ring-shaped seal edge, 2...
Lid side flange, 2a...Outer triangular cross-section ring-shaped seal edge, 2b...Inner cross-section ring-shaped seal edge, 3...Metal flat ring, 4
...Boruto, 5...Natsuto.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] フランジの断面三角形リング状シールエツジを
メタル平リングに押しつけてシールするメタルシ
ールにおいて、上記フランジが多重の断面三角形
リング状シールエツジを有することを特徴とした
真空装置用メタルシール。
A metal seal for a vacuum device in which a ring-shaped seal edge of a flange is pressed against a metal flat ring for sealing, wherein the flange has multiple ring-shaped seal edges of triangular cross-section.
JP11523288U 1988-08-31 1988-08-31 Pending JPH0236653U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11523288U JPH0236653U (en) 1988-08-31 1988-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11523288U JPH0236653U (en) 1988-08-31 1988-08-31

Publications (1)

Publication Number Publication Date
JPH0236653U true JPH0236653U (en) 1990-03-09

Family

ID=31356705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11523288U Pending JPH0236653U (en) 1988-08-31 1988-08-31

Country Status (1)

Country Link
JP (1) JPH0236653U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715219U (en) * 1993-08-25 1995-03-14 博 西田 Cutter lateral shake prevention device for cutting machine
JP2006300278A (en) * 2005-04-25 2006-11-02 Nec Tokin Corp Pipe connector
WO2008056743A1 (en) * 2006-11-08 2008-05-15 Toki Engineering Co., Ltd. O-ring-equipped metal packing for pipe joint

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715219U (en) * 1993-08-25 1995-03-14 博 西田 Cutter lateral shake prevention device for cutting machine
JP2006300278A (en) * 2005-04-25 2006-11-02 Nec Tokin Corp Pipe connector
WO2008056743A1 (en) * 2006-11-08 2008-05-15 Toki Engineering Co., Ltd. O-ring-equipped metal packing for pipe joint

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