JPH0367137A

JPH0367137A - Surface temperatude controller

Info

Publication number: JPH0367137A
Application number: JP1203533A
Authority: JP
Inventors: Isao Hishikari; 功菱刈; Yukio Matsui; 幸雄松井; Kazuo Noda; 野田　一生
Original assignee: Chino Corp
Current assignee: Chino Corp
Priority date: 1989-08-04
Filing date: 1989-08-04
Publication date: 1991-03-22

Abstract

PURPOSE:To prevent control from being affected by emissivity without contact by controlling the temp. of a material to be measured by a control means in accordance with the output of a detector provided in the central part of a reference plate. CONSTITUTION:The reference plate 2 is provided in proximity to the material 1 to be measured (emissivity epsilonm, temp. Tm) and the detector 3 which detects the radiation energy from the material 1 to be measured in provided at the center of the reference plate 2. A heater H of this reference plate 2 is controlled by a setting means 4 to obtain a target temp. Tr. The output signal E of the detector 3 is given by equation I where the radiation luminance corresponding to the black body of the temp. T is designated as L(T) when the reference plate 2 is formed sufficiently large to prevent the incidence of disturbance light. The temp. of the material 1 to be measured is controlled by the control means 5 in accordance with the output of the detector 3 where the temp. of the reference plate 2 is kept at the target temp. Tr. Tm=Tr is placed and equation II holds if the Tm is assumed to attain to Tr by such control. Namely, the time when the output of the detector 3 is L(Tr) by controlling the temp. of the material 1 to be measured is the time when the temp. of the material 1 attains the temp. equal to the target temp. Tr of the reference plate 2.

Description

【発明の詳細な説明】［産業上の利用分野］この発明は、金属等の被測定物の表面温度制御装置に関
するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for controlling the surface temperature of an object to be measured such as metal.

［従来の技術１金属等の被測定物を一定温度に加熱する場合、表面温度
測定が必要となり、従来、熱電対を用いて接触式で測温
する方法、あるいは放射温度計を用いて非接触で測温す
る方法がとられていた。[Conventional technology 1] When heating an object to be measured, such as metal, to a constant temperature, surface temperature measurement is required. A method of measuring temperature was used.

［この発明か解決しようとする課題］熱な対を用いる方法では、熱電対を取り付けるのに煩雑
となり、また、放射温度計を用いる方法では、被測定物
の放射率等の影響を受けやすく、正確な測温、加熱制御
が困難だった。[Problems to be solved by this invention] In the method using a thermal couple, it is complicated to attach the thermocouple, and in the method using a radiation thermometer, it is easily affected by the emissivity of the object to be measured. Accurate temperature measurement and heating control were difficult.

この発明の目的は、以上の点に鑑み、非接触で放射率の
影響を受けない被測定物の表面温度制御装置を提供する
ことである。In view of the above points, an object of the present invention is to provide a non-contact surface temperature control device for an object to be measured that is not affected by emissivity.

［課題を解決するための手段」この発明は、目標温度とされた参照板を被測定物に近接
して設け、参照板の中央部に設けられた検出器の出力に
基き制御手段で、被測定物の温度を制御するようにした
′ｉ１ｉ、測定物の表面温度制御装置である。[Means for Solving the Problems] The present invention provides a reference plate with a target temperature set close to the object to be measured, and a control means based on the output of a detector provided at the center of the reference plate to measure the temperature of the object to be measured. 'i1i is a device for controlling the surface temperature of a measuring object, which controls the temperature of the measuring object.

［実施例コ第１図は、この発明の一実艙例を示す構成説明図である
。[Example 1] FIG. 1 is a structural explanatory diagram showing an example of an actual ship of the present invention.

図において、１は、放射率εｍ、温度Ｔｍの被測定物で
、この被測定物１に近接して放射率が１、温度Ｔｒとさ
れた参照板２が設けられている。参照板２の中央には被
測定物１からの放射エネルギーを検出する検出器３が設
けられ、参照板２のヒータＩ］を設定手段４により制御
して目標温度Ｔｒとしている、検出器３の出力は制御手
段５に入力され、制御手段５は被測定物１が目標温度Ｔ
ｒとなるよう雰囲気温度等を制御する。In the figure, reference numeral 1 denotes an object to be measured having an emissivity εm and a temperature Tm, and a reference plate 2 having an emissivity of 1 and a temperature Tr is provided adjacent to the object 1 to be measured. A detector 3 for detecting radiant energy from the object to be measured 1 is provided at the center of the reference plate 2, and the heater I of the reference plate 2 is controlled by a setting means 4 to set the target temperature Tr. The output is input to the control means 5, and the control means 5 controls the object 1 to be at the target temperature T.
Ambient temperature etc. are controlled so that r.

つまり、参照板２を十分大きくして外乱光が入射しない
場合、温度Ｔの黒体相当の放射輝度をＬ（Ｔ）として、
検出器３の出力信号Ｅは次式で与えられる。In other words, when the reference plate 2 is sufficiently large and no disturbance light is incident, the radiance equivalent to a black body at temperature T is set as L(T).
The output signal E of the detector 3 is given by the following equation.

Ｅ＝εｍＬ　（Ｔｍ）＋　（１−６ｍ）　Ｌ　（Ｔｒ）　　　　　　”・（１
）ここで参照板２の温度を目標温度Ｔｒとしておき、検
出器３の出力に基き制御手段５により被測定物１につい
ての温度を制御してＴｒとなったとすれば、（１）式で
Ｔｍ＝Ｔｒとおき、次式が成り立つ。E=εmL (Tm) + (1-6m) L (Tr) ”・(1
) Here, if the temperature of the reference plate 2 is set as the target temperature Tr, and the temperature of the object to be measured 1 is controlled by the control means 5 based on the output of the detector 3 to reach Tr, then Tm can be calculated by equation (1). =Tr, the following equation holds true.

Ｅ＝Ｌ（Ｔｒ）　　　　　　　　　　　　　・・・（２
）つまり、被測定物１の温度を制御して検出器３の出力
がＬ（Ｔｒ）のときが、被測定物１の温度が参照板２の
目標温度Ｔｒと等しくなったときである。E=L(Tr)...(2
) That is, when the temperature of the object to be measured 1 is controlled and the output of the detector 3 is L (Tr), this is when the temperature of the object to be measured 1 becomes equal to the target temperature Tr of the reference plate 2.

このようにして、被測定物ｌの放射率に影響されること
なく被測定物１の温度を制御できる。In this way, the temperature of the object to be measured 1 can be controlled without being affected by the emissivity of the object to be measured 1.

ここで、検出器３としてサーモパイル素子を用いると、
サーモパイルの性質上、その出力は、放射エネルギーＥ
が入射する温接点部と参照板２の温度Ｔｒ相当の冷接点
部との温度差に相当する出力であるので、入射エネルギ
ーがＬ（Ｔｒ）であれば、その出力はゼロとなる。Here, if a thermopile element is used as the detector 3,
Due to the nature of the thermopile, its output is radiated energy E
Since this is an output corresponding to the temperature difference between the hot junction part to which it is incident and the cold junction part corresponding to the temperature Tr of the reference plate 2, if the incident energy is L(Tr), the output will be zero.

従って、被測定物１の温度を制御してサーモパイル素子
の出力がゼロのとき、被測定物１の温度が参照板２の温
度に等しくなったときである。この出力を利用して制御
を行えばよい。Therefore, when the temperature of the object to be measured 1 is controlled and the output of the thermopile element is zero, this is when the temperature of the object to be measured 1 becomes equal to the temperature of the reference plate 2. Control can be performed using this output.

［発明の効果］以上により、被測定物の放射率に影響されることなく、
被測定物の温度を目標温度とすることかできる。[Effects of the invention] As described above, the measurement can be performed without being affected by the emissivity of the measured object.
The temperature of the object to be measured can be set as the target temperature.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、この発明の一実施例を示す構成説明図である
。１・・・被測定物、２・・・参照板、３・・・検出器、
４・・・設定手段、５・・・制御手段FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention. 1... Object to be measured, 2... Reference plate, 3... Detector,
4... Setting means, 5... Control means

Claims

【特許請求の範囲】[Claims]

１、被測定物に近接して設けられ目標温度とされた参照
板と、この参照板の中央部に設けられた検出器と、この
検出器の出力に基き被測定物についての温度を制御する
制御手段とを備えたことを特徴とする被測定物の表面温
度制御装置。1. A reference plate that is set close to the object to be measured and has a target temperature, a detector that is installed in the center of this reference plate, and the temperature of the object to be measured is controlled based on the output of this detector. 1. A surface temperature control device for a measured object, comprising: a control means.