JPH0351561A - Ball screw for superhigh vacuum - Google Patents
Ball screw for superhigh vacuumInfo
- Publication number
- JPH0351561A JPH0351561A JP18555889A JP18555889A JPH0351561A JP H0351561 A JPH0351561 A JP H0351561A JP 18555889 A JP18555889 A JP 18555889A JP 18555889 A JP18555889 A JP 18555889A JP H0351561 A JPH0351561 A JP H0351561A
- Authority
- JP
- Japan
- Prior art keywords
- screw shaft
- metal film
- nut
- ball
- soft metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 50
- 239000002184 metal Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims description 48
- 239000000314 lubricant Substances 0.000 claims description 17
- 239000007787 solid Substances 0.000 claims description 14
- 239000010935 stainless steel Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 230000036316 preload Effects 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims description 2
- 101100069231 Caenorhabditis elegans gkow-1 gene Proteins 0.000 claims 1
- 230000002195 synergetic effect Effects 0.000 abstract description 3
- 238000004299 exfoliation Methods 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 62
- 239000010409 thin film Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 2
- 102100030393 G-patch domain and KOW motifs-containing protein Human genes 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052961 molybdenite Inorganic materials 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、超高真空環境において、半導体等の電子部品
を製造するための薄膜加工装置等、例えばそのテーブル
の送りやウエハーカセットの昇降等、各種の送り対象物
の送りを行なうのに用いる超高真空用ボールねじに関す
る。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is applicable to various types of equipment such as thin film processing equipment for manufacturing electronic components such as semiconductors in an ultra-high vacuum environment, such as feeding the table and lifting and lowering the wafer cassette. This invention relates to an ultra-high vacuum ball screw used to feed objects.
従来の技術
超高真空環境において、駆動部の潤滑剤として油分を用
いると、この油分が真空槽内の真空度、真空の質を低下
させるため、好ましい超高真空環境を得るには、油分を
用いないようにする必要がある。そこで、従来、超高真
空環境において用いるボールねじは、ねじ軸およびナッ
トの軌道面と、この軌道面で転動するポールとの潤泪の
ためにボールの表面に軟質金属であるＡｇの膜をコーテ
ィングしていた。Conventional technology In an ultra-high vacuum environment, if oil is used as a lubricant for the drive part, this oil will degrade the vacuum degree and quality of the vacuum inside the vacuum chamber. It is necessary to avoid using it. Conventionally, ball screws used in ultra-high vacuum environments have a film of Ag, a soft metal, on the surface of the ball to maintain moisture between the raceway surfaces of the screw shaft and nut, and the poles that roll on these raceway surfaces. It was coating.
発明が解決しようとする課題
しかし、ボールは循環する際、表面に絶えず傷が発生す
るため、繰返して使用すると、Ａｇ膜３
が簡単に剥離して潤滑性が失われる。また、Ａｇ膜がボ
ールから一度剥離してしまうと、ねじ軸、若しくはナッ
トの軌道面と、ボールの母材が直接接触する確率が増え
る。ねじ軸、ナットおよびボールの母材に同種の材料で
あるステンレス鋼を用いていると、上記接触に伴って母
材同士が固着してしまい、終には動作しなくなる。この
ように、従来の超高真空用ねじは寿命が短く、したがっ
て、これを用いた薄膜加工装置等の信頼性に劣り、しか
も、メンテナンスを頻繁に行なわなければならないなど
の課題があった。Problems to be Solved by the Invention However, as the balls circulate, scratches are constantly generated on their surfaces, and when used repeatedly, the Ag film 3 easily peels off and lubricity is lost. Moreover, once the Ag film is peeled off from the ball, the probability that the raceway surface of the screw shaft or nut will come into direct contact with the base material of the ball increases. If stainless steel, which is the same material, is used for the base materials of the screw shaft, nut, and ball, the base materials will stick to each other due to the above-mentioned contact, and eventually they will not work. As described above, conventional ultra-high vacuum screws have a short lifespan, and therefore, thin film processing equipment using the screws is inferior in reliability, and furthermore, maintenance has to be performed frequently.
本発明は、このような従来技術の課題を解決するもので
あり、ねじ軸およびナットの軌道面と、この軌道面で転
動するボールとの潤滑性を向上させて寿命を向上させる
ことができ、〜したがって、薄膜加工装置等の信頼性を
向上させることができ、しかも、メンテナンスの頻度を
減らすことができ、経済性の向上を図ることができるよ
うにした超高真空用ボールねじを提供す４
ることを目的とするものである。The present invention solves the problems of the conventional technology, and improves the lubricity between the raceway surfaces of the screw shaft and nut and the balls rolling on these raceway surfaces, thereby extending the life of the screw shaft and nut. , ~Therefore, it is an object of the present invention to provide a ball screw for ultra-high vacuum that can improve the reliability of thin film processing equipment, etc., reduce the frequency of maintenance, and improve economic efficiency. 4. The purpose is to
課題を解決するための手段
上記目的を達成するだめの本発明の技術的手段は、ねじ
軸とナットのそれぞれの軌道面に潤滑材として働く軟質
金属膜を設けると共に、」一記ねじ軸とナットの軌道面
で転動するボールの表面に潤滑材として働く軟質金属膜
を設け、ナットをテーブル等の送り対象物に連結するよ
うに構成したものである。Means for Solving the Problems The technical means of the present invention for achieving the above object is to provide a soft metal film that acts as a lubricant on the respective raceway surfaces of the screw shaft and the nut, and A soft metal film that acts as a lubricant is provided on the surface of the balls rolling on the raceway surface, and the nut is connected to an object to be fed such as a table.
上記ナットはねじ軸の軸心方向と直交方向で分割し、分
割したナット同士を回り止めすると共に、ばねにより離
隔方向に加圧して予圧を加えるタイプのダブルナット構
成とすることができる。The above-mentioned nut can be divided in a direction orthogonal to the axial direction of the screw shaft, and can have a double nut configuration in which the divided nuts are prevented from rotating each other, and a preload is applied by applying pressure in the separating direction by a spring.
そして、万一、上記軟質金属膜が剥離した際、上記ねじ
軸とナットが上記ポールと固着しないようにねじ軸、ナ
ットの母材とボールの母材に異種材料を用い、またはね
じ軸とナットが軟質金属膜の内側にボールの母材とは異
種の材料からなる硬質金属１１Ｍをイ１゛シ、またはボ
ールが「
Ｏ
軟質金属膜の内側にねじ軸とナットの母材とは異種の材
料からなる硬質金属膜を有するのが好ましい。In order to prevent the screw shaft and nut from sticking to the pole in the event that the soft metal film peels off, use different materials for the screw shaft, the base material of the nut, and the base material of the ball, or use different materials for the screw shaft and the nut. The inside of the soft metal film is a hard metal 11M made of a material different from the base material of the ball, or the ball is made of a material different from the base material of the screw shaft and nut inside the soft metal film. It is preferable to have a hard metal film consisting of.
また、上記ねじ軸、ナットおよびボールの軟質金属膜を
層状固体潤滑膜に替えることができる。Furthermore, the soft metal films of the screw shaft, nut, and ball can be replaced with layered solid lubricant films.
上記ねじ軸、ナットの骨材にステンレス鋼、アルミニウ
ム合金のいずれかを選択して用い、また、上記ボールの
母材にステンレス鋼を用い、また、上記硬質金属膜にＴ
ｉＣを用い、また、上記軟質金属膜にＡｇを用い、また
、上記層状固体潤滑膜にＭＯＳ２、ＷＳ２のいずれかを
用いることができる。Either stainless steel or aluminum alloy is selected and used for the aggregate of the screw shaft and nut, stainless steel is used for the base material of the ball, and T is used for the hard metal film.
iC can be used, Ag can be used for the soft metal film, and either MOS2 or WS2 can be used for the layered solid lubricant film.
作用
したがって、本発明によれば、超高真空環境において、
ねじ軸の回転に伴いボールを介してナットを直線運動さ
せる際、互いに接触ずるねじ軸およびナットの軌道面と
、ボールの表面の双方に設けた軟質金属膜、若しくは層
状固体潤滑膜の粘性、若しくは層状剥離による潤滑効果
６
により、ねじ軸の回転運動をナットに円滑に伝達してナ
ットおよびこれに連結されたテーブル等を円滑に直線送
りすることができ、このとき、上記のように接触部の双
方に軟質金属膜、若しくは層状固体潤滑膜を設けている
ので、その相乗的効果によりそれらの剥離、または離脱
を防止することができる。Therefore, according to the present invention, in an ultra-high vacuum environment,
When the nut is moved linearly through the ball as the screw shaft rotates, the viscosity of the soft metal film or layered solid lubricant film provided on both the raceway surfaces of the screw shaft and nut that come into contact with each other and the surface of the ball, or Due to the lubrication effect6 due to layered peeling, the rotational motion of the screw shaft can be smoothly transmitted to the nut, and the nut and the table connected to it can be smoothly fed linearly. Since a soft metal film or a layered solid lubricant film is provided on both sides, their synergistic effect can prevent their peeling or detachment.
そして、ねじ軸、ナットの母材とボールの母材に異種材
料を用い、またはねじ軸とナットが軟質金属膜の内側に
ボールの母材とは異種の材料からなる硬質金属膜を有し
、またはボールが軟質金属膜の内側にねじ軸とナットの
母材とは異種の材料からなる硬質金属膜を形成すること
により、万一、軟質金属膜、若しくは層状固体潤滑膜が
剥離、または離脱しても、ねじ軸およびナットの軌道面
とボールとは固着しにくく、ナットおよびこれに連結さ
れたテーブル等が駆動停止するのを防止することができ
る。The screw shaft, the base material of the nut, and the base material of the ball are made of different materials, or the screw shaft and the nut have a hard metal film made of a material different from the base material of the ball inside the soft metal film, Or, if the ball forms a hard metal film made of a different material from the base material of the screw shaft and nut on the inside of the soft metal film, the soft metal film or layered solid lubricant film may peel or separate. Even if the screw shaft and the nut raceway surface are hard to adhere to the balls, it is possible to prevent the nut and the table connected thereto from stopping driving.
実施例 以下、本発明の実施例について図面を参照し７ ながら説明する。Example Hereinafter, embodiments of the present invention will be described with reference to the drawings. I will explain.
図は本発明の一実施例における超高真空用ボールねじを
示す断面図である。The figure is a sectional view showing an ultra-high vacuum ball screw according to an embodiment of the present invention.
図に示すようにねじ軸１がその軸心方向と直交方向で２
分割されたナット２、３に挿通され、ねじ軸１の外周に
螺旋状に形成された軌道面（ねじ溝）４とナット２、３
の内周に螺旋状に形威された軌道面（ねじ溝）５、６が
同一位置に合わされ、これらの軌道面４と５、６により
形成された溝の中に多数のボール７が納められ、ボール
７は循環ずるように構成されている（循環部については
図示省略）。ナット２の端部外周に設けられた突部８が
ナット３のψ１゛１１部外周に形成された凹入段部９に
係合され、ナット３の凹入段部９には回り止めピン１０
が突設され、この回り止めピン１０がナット２の突部８
に形成された切欠１１に係合されて互いに回り止めされ
ている。ナット２と３の間にはねじ軸１の外周において
板ばね１２が介在され、この板ばね１２の反撥弾性によ
り予圧が加えられ８８
た定圧予圧タイプのダブルナット構成となっている。As shown in the figure, the screw shaft 1 is
The raceway surface (thread groove) 4 that is inserted into the divided nuts 2 and 3 and formed in a spiral shape on the outer periphery of the screw shaft 1 and the nuts 2 and 3
Raceway surfaces (thread grooves) 5 and 6 formed in a spiral shape on the inner periphery of the ball are aligned at the same position, and a large number of balls 7 are housed in the grooves formed by these raceway surfaces 4, 5, and 6. , the balls 7 are configured to circulate (the circulation part is not shown). A protrusion 8 provided on the outer periphery of the end of the nut 2 is engaged with a recessed step 9 formed on the outer periphery of the ψ1゛11 portion of the nut 3, and a detent pin 10 is fitted in the recessed step 9 of the nut 3.
is provided protrudingly, and this detent pin 10 is connected to the protrusion 8 of the nut 2.
They are engaged with a notch 11 formed in and are prevented from rotating relative to each other. A leaf spring 12 is interposed between the nuts 2 and 3 on the outer periphery of the screw shaft 1, and a preload is applied by the repulsive elasticity of the leaf spring 12, forming a constant pressure preload type double nut configuration.
上記ねじ軸１は、その両端部が固定部に軸受（共に図示
省略）を介して回転可能に支持され、ナット２、３は、
ねじ軸１の軸心方向に沿って移動する薄膜加工装置のテ
ーブル（図示省略）等に連結される。Both ends of the screw shaft 1 are rotatably supported by a fixed part via bearings (both not shown), and the nuts 2 and 3 are
The screw shaft 1 is connected to a table (not shown) of a thin film processing apparatus that moves along the axial direction of the screw shaft 1 .
上記ねじ軸１とナット２、３はその母材としてＳ Ｕ
Ｓ ３ ０ ４を用い、ボール７はその母材としてＳＵ
Ｓ４４０Ｃを用いた。上記ねじ軸１とナット２、３は軌
道面４と、５，６に電解複合研磨を施し、母材とは異種
の材料で、しかも、母材より更に硬質の金属であるＴｉ
Ｃの膜をイオンプレーティング法で厚さ１．５μｍにコ
ーティングし、このＴｉＣ膜上に軟質金属であるＡｇの
膜をイオンブレーティング法で厚さ０．３μｍにコーテ
ィングした。これらＴｉＣ膜およびＡｇ膜を同一真空内
で連続的にコーティングすることによりＴｉＣ膜−ヒへ
の不純物の付着量が少ないので、Ａｇ膜をＴｉＣ膜に対
して強く密着させること９
ができる。上記ボール７の表面にも同様に軟質金属であ
るＡｇの膜をイオンヅレーデインク法で厚さ０．３μｍ
にコーティングした。また、回り止めピン１０と板ばね
１２はステンレス鋼製とした。The screw shaft 1 and nuts 2 and 3 are made of S U as their base material.
S304 is used, and the ball 7 is SU as its base material.
S440C was used. The screw shaft 1 and nuts 2 and 3 have raceway surfaces 4, 5 and 6 subjected to electrolytic composite polishing, and are made of Ti, which is a different material from the base material and is a harder metal than the base material.
A film of C was coated to a thickness of 1.5 μm using an ion plating method, and a film of Ag, which is a soft metal, was coated on the TiC film to a thickness of 0.3 μm using an ion plating method. By continuously coating these TiC film and Ag film in the same vacuum, the amount of impurities adhering to the TiC film is small, so that the Ag film can be strongly adhered to the TiC film9. Similarly, a film of Ag, which is a soft metal, was applied to the surface of the ball 7 using the ion Zrede ink method to a thickness of 0.3 μm.
coated. Further, the rotation stop pin 10 and the leaf spring 12 were made of stainless steel.
そして、１０−” Ｔｏｒｒ台の超高真空中において、
上記本発明実施例と、比較のためにボールの表面にのみ
Ａｇ膜をコーティングした上記従来例のねじ軸１にそれ
ぞれ軸方向に５ ｋｇの荷重をかけた状態で耐久試験を
行なった。１回の動作距離を４５ｍｍ，動作速度を３
ｍｌ ／ Ｓｅｅとし、本発明実施例と比較例を同じ条
件で同時にスタートさせた。上記試験の結果、比較例は
動作回数１３１０回でボール７がねじ軸１とナット２、
３の軌道面４と５、６に固着して停止した。これに対し
、本発明実施例は動作回数２１０００回を過ぎてもまだ
十分動作可能であった。Then, in an ultra-high vacuum of 10-” Torr,
A durability test was conducted with a load of 5 kg applied in the axial direction to the screw shaft 1 of the above-mentioned example of the present invention and the above-mentioned conventional example in which only the surface of the ball was coated with an Ag film for comparison. One movement distance is 45mm, movement speed is 3
ml/See, and the Examples and Comparative Examples of the present invention were started at the same time under the same conditions. As a result of the above test, in the comparative example, the ball 7 was connected to the screw shaft 1 and the nut 2 after 1310 operations.
It stuck to the raceway surfaces 4, 5, and 6 of No. 3 and stopped. In contrast, the embodiment of the present invention was still able to operate satisfactorily even after 21,000 operations.
このように、本発明実施例によれば、従来の比較例に較
べ、ねじ軸１の軌道面４およびナット２、３の軌道面５
、６と、ボール７の表面の１ ０
双方に設けたＡｇ膜の粘性により潤滑効果を飛躍的に向
上させ、寿命を延ばすことができることがわかった。ま
た、万一、ねじ軸１の軌道面４およびナット２、３の軌
道面５、６とボール７のＡｇ膜が剥離しても、ねじ軸１
の軌道面４とナット２、３の軌道面５、６にはＡｇ膜の
内側にボール７の母材であるステンレス鋼とは異質の材
料で、硬質のＴｉＣ膜を形或しているので、両者は固着
しにくい。As described above, according to the embodiment of the present invention, the raceway surface 4 of the screw shaft 1 and the raceway surfaces 5 of the nuts 2 and 3 are improved compared to the conventional comparative example.
, 6 and the surface of the ball 7, the viscosity of the Ag film can dramatically improve the lubricating effect and extend the life. In addition, even if the raceway surface 4 of the screw shaft 1, the raceway surfaces 5 and 6 of the nuts 2 and 3, and the Ag film of the ball 7 peel off, the screw shaft 1
The raceway surfaces 4 of the nuts 2 and 3 and the raceway surfaces 5 and 6 of the nuts 2 and 3 are coated with a hard TiC film, which is a material different from the stainless steel that is the base material of the ball 7, on the inside of the Ag film. Both are difficult to stick together.
なお、上記実施例では、軟質金属（Ａｇ）膜を用いた場
合について説明したが、このＡｇ膜に替えてＭｏＳ２、
ＷＳ２等からなる層状固体潤滑膜を用いることができ、
との層状固体潤滑膜を用いれば、ねじ軸１の回転運動を
ボール７を介してナット２、３に伝達する際、層状固体
潤滑膜の層状剥離により潤滑効果を与えることができ、
したがって、ナット２、３およびこれに連結されたテー
ブル等を円滑に駆動させることができる。また、軟質金
属膜、若しくは層状固体潤滑膜の内側に硬質金属膜を形
或するのは、万一１１
軟質金属膜等がＨ離、または離脱した場合に相手方の母
材と固着しにくいように異種の材料を用いるためである
。したがって、ねじ軸１およびナット２、３とボール７
の母材に異種の材料を用いておけば、硬質金属膜を形威
しなくてもよい。しかし、上記のように硬質金属膜と軟
質金属膜をイオンプレーティング法で母材上に連続的に
コーティングすれば、硬質金属膜上への不純物の付着量
が少ないので、軟質金属膜の強い密着力を維持すること
ができる利点がある。In the above example, a case was explained in which a soft metal (Ag) film was used, but instead of this Ag film, MoS2,
A layered solid lubricant film made of WS2 etc. can be used,
By using the layered solid lubricant film, when transmitting the rotational motion of the screw shaft 1 to the nuts 2 and 3 via the balls 7, a lubrication effect can be provided by the layered exfoliation of the layered solid lubricant film,
Therefore, the nuts 2, 3 and the table connected thereto can be smoothly driven. In addition, forming a hard metal film on the inside of a soft metal film or a layered solid lubricant film prevents it from adhering to the other base material in the unlikely event that the soft metal film etc. separates or separates. This is because different materials are used. Therefore, screw shaft 1, nuts 2, 3 and ball 7
If a different type of material is used for the base material, there is no need to form a hard metal film. However, if a hard metal film and a soft metal film are continuously coated on the base material using the ion plating method as described above, the amount of impurities adhering to the hard metal film is small, so the soft metal film has strong adhesion. It has the advantage of being able to maintain power.
発明の効果
以上要するに本発明によれば、超高真空環境において、
ねじ軸の回転に伴いボールを介してナットを直線運動さ
せる際、互いに接触するねじ軸およびナットの軌道面と
、ボールの表面の双方に設けた軟質金属膜、若しくは層
状固体潤滑膜の粘性、若しくは層状剥離による潤滑効果
により、ねじ軸の回転運動をナットに円滑に伝達してナ
ットおよびこれに連結されたテーブル等を円滑に直線送
りすることができ、このと１２
き、上記のように接触部の双方に軟質金属膜、若しくは
層状固体潤滑膜を設けているので、その相乗効果により
それらの剥離、または離脱を防止することができ、寿命
を延ばずことができる。したがって、Ｒ膜加工装置等の
信頼性を向上させることができ、しかも、メンテナンス
の頻度を減らすことができ、経済性の向上を図ることが
できる。Effects of the Invention In short, according to the present invention, in an ultra-high vacuum environment,
When the nut is linearly moved via the ball as the screw shaft rotates, the viscosity of the soft metal film or layered solid lubricant film provided on both the raceway surfaces of the screw shaft and nut that contact each other and the surface of the ball, or Due to the lubrication effect caused by the layered peeling, the rotational motion of the screw shaft can be smoothly transmitted to the nut, and the nut and the table connected thereto can be smoothly linearly fed. Since a soft metal film or a layered solid lubricant film is provided on both sides, their synergistic effect can prevent their peeling or separation, and the service life can be maintained. Therefore, it is possible to improve the reliability of the R-film processing apparatus, etc., and to reduce the frequency of maintenance, thereby improving economic efficiency.
また、ねじ軸、ナットの母材とボールの母材に異種材料
を用い、またはねじ軸とナットが軟質金属膜の内側にボ
ールの母材とは異種の材料からなる硬質金属膜を有し、
またはボールが軟質金属膜の内側にねじ軸とナットの母
材とは異種の材料からなる硬質金属膜を形成することに
より、万一、軟質金属膜、若しくは層状固体潤滑膜が剥
離、または離脱しても、ねじ軸およびナットの軌道面と
ボールとは固着しにくく、ナットおよびこれに連結され
たテーブル等が駆動停止するのを防止することができ、
更に一層寿命を延ばすことができる。In addition, different materials are used for the screw shaft, the base material of the nut, and the base material of the ball, or the screw shaft and the nut have a hard metal film made of a material different from the ball base material inside the soft metal film,
Or, if the ball forms a hard metal film made of a different material from the base material of the screw shaft and nut on the inside of the soft metal film, the soft metal film or layered solid lubricant film may peel or separate. Even if the screw shaft and the nut raceway surface are hard to adhere to the balls, it is possible to prevent the nut and the table connected to it from stopping driving.
Furthermore, the service life can be further extended.
１３13
図は本発明の一実施例における超高真空用ボールねじを
示す断面図である。
１・・・ねじ軸、２、３・・・ナット、４、５、６・・
軌道面、７・・・ポール、１２・・・板ばね。The figure is a sectional view showing an ultra-high vacuum ball screw according to an embodiment of the present invention. 1... Screw shaft, 2, 3... Nut, 4, 5, 6...
Raceway surface, 7...pole, 12...leaf spring.
Claims (10)
有し、上記ねじ軸とナットの軌道面で転動するボールが
表面に軟質金属膜を有する超高真空用ボールねじ。(1) An ultra-high vacuum ball screw in which the screw shaft and nut each have a soft metal film on their raceway surfaces, and the balls rolling on the raceway surfaces of the screw shaft and nut have a soft metal film on their surfaces.
、分割されたナット同士が回り止めされると共に、ばね
により離隔方向に加圧されて予圧が加えられている請求
項１記載の超高真空用ボールねじ。(2) The nut is divided in a direction orthogonal to the axial direction of the screw shaft, and the divided nuts are prevented from rotating each other and are pressurized in the direction of separation by a spring to apply preload. Ball screw for ultra-high vacuum.
である請求項１または２記載の超高真空用ボールねじ。(3) The ultra-high vacuum ball screw according to claim 1 or 2, wherein the screw shaft, the base material of the nut, and the base material of the ball are different materials.
材とは異種の材料からなる硬質金属膜を有する請求項１
または２記載の超高真空用ボールねじ。(4) Claim 1 in which the screw shaft and the nut have a hard metal film made of a material different from the base material of the ball inside the soft metal film.
Or the ultra-high vacuum ball screw described in 2.
材とは異種の材料からなる硬質金属膜を有する請求項１
または２記載の超高真空用ボールねじ。(5) Claim 1 in which the ball has a hard metal film made of a different material from the base material of the screw shaft and the nut inside the soft metal film.
Or the ultra-high vacuum ball screw described in 2.
固体潤滑膜に替えた請求項１ないし５のいずれかに記載
の超高真空用ボールねじ。(6) The ultra-high vacuum ball screw according to any one of claims 1 to 5, wherein the soft metal film of the screw shaft, nut, and ball is replaced with a layered solid lubricant film.
ウム合金のいずれかを選択して用い、ボールの母材にス
テンレス鋼を用いた請求項１ないし６のいずれかに記載
の超高真空用ボールねじ。(7) The ultra-high vacuum device according to any one of claims 1 to 6, wherein the base material of the screw shaft and the nut is selected from either stainless steel or aluminum alloy, and the base material of the ball is stainless steel. ball screw.
いずれかに記載の超高真空用ボールねじ。(8) The ultra-high vacuum ball screw according to any one of claims 4 to 7, wherein the hard metal film is made of TiC.
、５、７、８のいずれかに記載の超高真空用ボールねじ
。(9) Claims 1, 2, 3, and 4 in which the soft metal film is made of Ag.
, 5, 7, or 8. The ultra-high vacuum ball screw according to any one of .
れかからなる請求項６ないし８のいずれかに記載の超高
真空用ボールねじ。(10) The ultra-high vacuum ball screw according to any one of claims 6 to 8, wherein the layered solid lubricant film is made of either MoS_2 or WS_2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18555889A JPH0351561A (en) | 1989-07-18 | 1989-07-18 | Ball screw for superhigh vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18555889A JPH0351561A (en) | 1989-07-18 | 1989-07-18 | Ball screw for superhigh vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0351561A true JPH0351561A (en) | 1991-03-05 |
Family
ID=16172912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18555889A Pending JPH0351561A (en) | 1989-07-18 | 1989-07-18 | Ball screw for superhigh vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351561A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004060742A (en) * | 2002-07-29 | 2004-02-26 | Nidec Tosok Corp | Ball screw |
| CN101817153A (en) * | 2010-04-26 | 2010-09-01 | 济南二机床集团有限公司 | Ram type milling head feeding mechanism |
| JP2017096361A (en) * | 2015-11-20 | 2017-06-01 | 日本精工株式会社 | Ball Screw |
-
1989
- 1989-07-18 JP JP18555889A patent/JPH0351561A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004060742A (en) * | 2002-07-29 | 2004-02-26 | Nidec Tosok Corp | Ball screw |
| CN101817153A (en) * | 2010-04-26 | 2010-09-01 | 济南二机床集团有限公司 | Ram type milling head feeding mechanism |
| JP2017096361A (en) * | 2015-11-20 | 2017-06-01 | 日本精工株式会社 | Ball Screw |
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