JPH1030643A - Method for forming solid lubrication film on ball of rolling bearing - Google Patents
Method for forming solid lubrication film on ball of rolling bearingInfo
- Publication number
- JPH1030643A JPH1030643A JP20796296A JP20796296A JPH1030643A JP H1030643 A JPH1030643 A JP H1030643A JP 20796296 A JP20796296 A JP 20796296A JP 20796296 A JP20796296 A JP 20796296A JP H1030643 A JPH1030643 A JP H1030643A
- Authority
- JP
- Japan
- Prior art keywords
- ball
- bearing
- film
- ring
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Rolling Contact Bearings (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は転がり軸受に係わ
り、特に高真空、高温、低温、放射性雰囲気などのよう
にグリースや油で潤滑できない環境や油の存在が好まし
くない環境での使用に適する転がり軸受の玉への固体潤
滑膜形成方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rolling bearing, and more particularly to a rolling suitable for use in an environment where lubrication with grease or oil is not possible, such as a high vacuum, a high temperature, a low temperature, a radioactive atmosphere, or an environment where oil is not preferable. The present invention relates to a method for forming a solid lubricating film on a bearing ball.
【０００２】[0002]
【従来の技術】従来、高真空、高温、低温、放射性雰囲
気等のようにグリースや油で潤滑できない所や油の存在
が好ましくない場所では、一般的に固体潤滑が採用され
ている。固体潤滑の方法としては玉および内輪、外輪の
軌道溝に二硫化モリブデン、二硫化タングステン、ポリ
テトラフルオロエチレン樹脂（以下、ＰＴＦＥと略
す）、金、銀などの固体潤滑剤を蒸着、スパッタ、イオ
ンプレーティング、メッキ、焼き付けおよびバーニッシ
ュ（機械的な押しつけ）などの方法が提案されている。
例えば、特開平２ー２４５５１４号公報に記載されてい
るように、コーティングの手段としてスパッタによる技
術が用いられ、特開昭５３ー１３８９８９号および特開
昭５５ー５７７１７号公報には、イオンプレーティング
による技術が用いられている。また、特開昭５１ー４２
８４７号公報に記載されているように、玉表面に金、銀
等の潤滑性金属のメッキを施す技術が用いられている。
また、特開平６ー１０９０２２号公報および特開平６ー
１５９３７３号公報には固体潤滑剤の微粉末をボールミ
ル、バレル加工およびショットピーニング等の機械的エ
ネルギを利用して軸受部品にコーティングする技術が開
示されている。2. Description of the Related Art Conventionally, solid lubrication is generally employed in places where lubrication with grease or oil is not possible or where oil is not desirable, such as high vacuum, high temperature, low temperature, radioactive atmosphere and the like. As a method of solid lubrication, a solid lubricant such as molybdenum disulfide, tungsten disulfide, polytetrafluoroethylene resin (hereinafter abbreviated as PTFE), gold, silver, etc. is deposited, sputtered, ionized, and the like on the raceway grooves of the ball, inner ring, and outer ring. Methods such as plating, plating, baking and burnishing (mechanical pressing) have been proposed.
For example, as described in JP-A-2-245514, a technique by sputtering is used as a means of coating, and JP-A-53-13889 and JP-A-55-57717 disclose ion plating. Technology is used. Also, JP-A-51-42
As described in Japanese Patent No. 847, a technique of plating a lubricating metal such as gold or silver on the surface of a ball is used.
JP-A-6-109022 and JP-A-6-159373 disclose a technique for coating a fine powder of a solid lubricant on a bearing component by using mechanical energy such as ball milling, barrel processing and shot peening. Have been.
【０００３】[0003]
【発明が解決しようとする課題】ところが従来の固体潤
滑剤のコーティング方法においては次のような問題点、
課題がある。 （１）スパッタやイオンプレーティングで玉表面に固体
潤滑剤をコーティングする場合、強固に付着する膜厚
は、約０．２μｍ以下であり、その範囲内では膜厚が増
すほど軸受寿命が延びる。ところが製造時に膜厚が均一
になりにくいことや玉の表面粗さのばらつきを考慮し
て、固体潤滑剤の膜厚は０．２μｍ以上にするのが一般
的である。このように膜厚を増すと約０．２μｍ以上に
ついた膜は付着力が弱くなるため、軸受を回転したとき
に潤滑膜が容易に摩耗して、発塵となって軸受外に多量
の塵となって出てくるという問題があった。このように
固体潤滑膜をコーティングした玉をテフロンのような自
己潤滑性材料からなる保持器をもつ軸受に組み込み、回
転させると玉の表面に保持器材が移着して薄い膜が出来
るが、下地材の固体潤滑剤の膜厚が厚すぎて強固に付着
していないため、移着膜も容易に剥離が起こってしま
い、発塵が多かったり耐久性が短いなどの問題があっ
た。 （２）電気メッキでコーティングする場合は、金属電極
との距離でメッキ厚さが大きく影響を受け、かつ玉にも
電極を設置しなければならないため、電極設置部分はメ
ッキされないという問題があった。 （３）固体潤滑剤の微粉末を機械的エネルギでコーティ
ングする方法では、コーティングするときのエネルギで
軸受表面が傷ついたり、コーティングされた膜は固体潤
滑剤の微粉末が重なって表面に係留している状態なの
で、膜は剥がれ易くそのため軸受の寿命が短かったり、
発塵が多いという問題があった。 そこで、本発明は玉表面に固体潤滑膜を強固に付着させ
るとともに、回転時に発塵が少なく、さらに 耐久性に
優れる転がり軸受の玉への固体潤滑膜形成方法を提供す
ることを目的とする。However, the conventional solid lubricant coating method has the following problems.
There are issues. (1) When a solid lubricant is coated on the ball surface by sputtering or ion plating, the film thickness firmly adhered is about 0.2 μm or less, and within that range, the life of the bearing increases as the film thickness increases. However, the thickness of the solid lubricant is generally set to 0.2 μm or more in consideration of the difficulty in making the film thickness uniform during manufacturing and the variation in the surface roughness of the balls. When the film thickness is increased in this manner, the film having a thickness of about 0.2 μm or more has a weaker adhesive force. Therefore, when the bearing is rotated, the lubricating film is easily worn, and generates a large amount of dust outside the bearing. There was a problem that comes out. The ball coated with the solid lubricating film in this way is incorporated into a bearing having a cage made of a self-lubricating material such as Teflon, and when rotated, the cage material is transferred to the surface of the ball to form a thin film. Since the thickness of the solid lubricant of the material is too thick and does not adhere firmly, the transfer film is easily peeled off, and there are problems such as increased dust generation and short durability. (2) In the case of coating by electroplating, there is a problem that the plating thickness is greatly affected by the distance from the metal electrode and the electrode must be provided on the ball, so that the electrode installation portion is not plated. . (3) In the method of coating the fine powder of the solid lubricant with mechanical energy, the bearing surface is damaged by the energy at the time of coating, or the coated film overlaps with the fine powder of the solid lubricant and anchors to the surface. In the state, the film is easy to peel off, so the life of the bearing is short,
There was a problem that much dust was generated. Accordingly, it is an object of the present invention to provide a method of forming a solid lubricating film on a ball of a rolling bearing, in which a solid lubricating film is firmly adhered to a ball surface, generates less dust during rotation, and has excellent durability.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するた
め、本発明は内輪と外輪との間に複数の玉が挿設された
転がり軸受の玉への固体潤滑膜形成方法において、前記
玉の表面に残留した物質をスパッタ装置内でスパッタエ
ッチングにより除去し表面を荒らす第１の工程と、前記
第１の工程で処理された玉の表面上に二硫化モリブデン
または二硫化タングステンをスパッタにより０．０１〜
０．１μｍの膜厚に形成する第２の工程と、前記スパッ
タ装置内から取り出し前記第２の工程で被膜処理された
玉と、前記被膜処理された玉の表面に接触させた自己潤
滑性材料からなる第１のリング材と第２のリング材およ
び保持器を備えたスラスト型の仮組立軸受を構成し、前
記仮組立軸受の両端に設けた両リング材の向かい合う面
の何れか一方を前記被膜処理された玉に押圧させた状態
で、前記被膜処理された玉が回転するように移動させる
ことにより前記両リング材から前記被膜処理された玉に
移着させて潤滑膜を形成する第３の工程と、からなるこ
とを特徴とするものである。また、前記第１のリング材
と前記第２のリング材のうち、少なくとも一方のリング
材に前記被膜処理された玉と互いに向かい合う面で接触
する弧状の軌道溝を形成していることを特徴とするもの
である。According to the present invention, there is provided a method for forming a solid lubricating film on a ball of a rolling bearing having a plurality of balls inserted between an inner ring and an outer ring. A first step of removing a substance remaining on the surface by sputter etching in a sputtering apparatus to roughen the surface, and a method in which molybdenum disulfide or tungsten disulfide is sputtered on the surface of the ball treated in the first step. 01 ~
A second step of forming a film having a thickness of 0.1 μm, a ball taken out of the sputtering apparatus and coated in the second step, and a self-lubricating material brought into contact with the surface of the coated ball A first ring material, a second ring material, and a retainer, and a thrust-type temporary assembly bearing including the retainer, and one of the surfaces of the two ring materials provided at both ends of the temporary assembly bearing facing each other. The lubricating film is formed by moving the coated ball so that the coated ball is rotated while the pressed ball is pressed against the coated ball to transfer the ball from both the ring members to the coated ball. And the step of: Further, an arc-shaped raceway groove is formed on at least one of the first ring material and the second ring material, the arc-shaped raceway groove being in contact with the coated ball on surfaces facing each other. Is what you do.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施形態を図に基
づいて説明する。図１は本発明の実施の形態を示す転が
り軸受の玉への固体潤滑形成方法のうち、スパッタエッ
チングとスパッタに用いるスパッタ装置の断面図であ
る。図において、１は玉、２はスパッタ装置、２１は回
転基板、２２は皿、２３は固定基板、２４は二硫化モリ
ブデンターゲット、２５は真空チャンバ、２６は二硫化
モリブデン膜である。まず、最初に第１の工程として軸
受型番＃６０８（内径φ８、外径φ２２、幅７）用の玉
１（直径５／３２″、材質 ステンレスＳＵＳ４４０
Ｃ）を軸受２セット分の１４個準備し、玉１に付着した
酸化膜や吸着膜、あるいは塵などを十分に溶剤で洗浄す
る。次に、スパッタダウンのスパッタ装置２を使って、
回転基板２１の上に内径φ６０、高さ１５の皿２２を固
定し、その中に洗浄・乾燥した１４個の玉１を入れる。
固定基板２３に配設されたターゲット２４には純度９９
％の二硫化モリブデンのバルクを用いる。まず、真空チ
ャンバ２５内を真空引きして、真空度が落ち着いてきた
ら、回転基板２１を４ｒ／ｍｉｎで１０秒間回転、２秒
間停止のサイクルで稼動する。３分経過後、スパッタエ
ッチングを開始し、１０分間その状態に保持する。時間
がきたらスパッタエッチングを停止して３分経過後、続
いて第２の工程としてスパッタに入る。この間、回転基
板２１は前記サイクルで稼動したままの状態にしてお
く。この時、玉１表面に付着させる膜厚はスパッタする
時間で管理する。このようにして二硫化モリブデンの膜
厚（μｍ）を０．００５、０．００８、０．０１、０．
０５、０．１、０．１５および０．３にスパッタした玉
１をそれぞれ１４個（軸受＃６０８の２セット分）ずつ
準備した。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a cross-sectional view of a sputtering apparatus used for sputter etching and sputtering in the method of forming solid lubricant on a ball of a rolling bearing according to an embodiment of the present invention. In the figure, 1 is a ball, 2 is a sputtering apparatus, 21 is a rotating substrate, 22 is a plate, 23 is a fixed substrate, 24 is a molybdenum disulfide target, 25 is a vacuum chamber, and 26 is a molybdenum disulfide film. First, as a first step, ball 1 (diameter 5/32 ″, material stainless steel SUS440) for bearing model # 608 (inner diameter φ8, outer diameter φ22, width 7)
C) is prepared for 14 bearings for two sets of bearings, and an oxide film or an adsorbing film adhered to the ball 1 or dust is sufficiently washed with a solvent. Next, using the sputter-down sputtering device 2,
A dish 22 having an inner diameter of φ60 and a height of 15 is fixed on the rotating substrate 21, and 14 washed and dried balls 1 are put therein.
The target 24 provided on the fixed substrate 23 has a purity of 99%.
% Bulk of molybdenum disulfide is used. First, when the inside of the vacuum chamber 25 is evacuated and the degree of vacuum is settled, the rotating substrate 21 is rotated at 4 r / min for 10 seconds, and is operated in a cycle of stopping for 2 seconds. After 3 minutes, sputter etching is started and kept in that state for 10 minutes. After a lapse of time, the sputter etching is stopped, and after elapse of 3 minutes, the sputtering is started as a second step. During this time, the rotating substrate 21 is kept operating in the cycle. At this time, the film thickness adhered to the surface of the ball 1 is controlled by the sputtering time. Thus, the film thickness (μm) of molybdenum disulfide is set to 0.005, 0.008, 0.01, 0.
Fourteen balls (spread for two sets of bearing # 608) were prepared for each of the balls 1 sputtered at 05, 0.1, 0.15, and 0.3.
【０００６】次に第３の工程として、図２に示すスラス
ト軸受３（ＮＳＫ型番＃51200、内径φ１０、外径φ２
６、幅１１）を準備する。なお、図１の（ａ）はスラス
ト軸受の側断面図、（ｂ）は（ａ）に関するＡＡ’矢視
図を示したものである。スラスト軸受３はその構成要素
である第１のリング材である内輪３１、第２のリング材
である外輪３２および保持器３３の材質を、二硫化モリ
ブデンを５０％、ガラス繊維を５％添加したＰＴＦＥと
したものを使用した。このスラスト軸受３に前記の二硫
化モリブデン膜２６がスパッタされた玉１を組み込んで
仮組立軸受とし、真空チャンバ内の稼動軸に取り付け
る。このような状態で内輪３１を固定し、外輪３２をス
パッタされた玉１に押圧させた状態でスラスト荷重５ｋ
ｇｆをかけて、真空度が１０-4Ｐａになったら、１，２
００ｒ／ｍｉｎで外輪３２を１時間回転させる。その後
回転を停止して、玉１を取り出す。玉１の表面には二硫
化モリブデン膜２６があるが、さらにその上にＰＴＦＥ
複合材料の移着膜３４が付いている。なお、このスラス
ト軸受３はその両端に設けた内輪３１と外輪３２のう
ち、少なくとも一方にスパッタされた玉１と互いに向か
い合う面で接触する弧状の軌道溝を形成させる構成と
し、内輪３１、外輪３２の向かい合う面はその何れか一
方を固定し、他方を回転させるようにしたものである。
また、スラスト軸受３のリング材３１、３２および保持
器３３の材質はＰＴＦＥに替えて、二硫化モリブデンを
２０％とＰＴＦＥを２０％を含んだポリエ−テルエ−テ
ルケトン（ＰＥＥＫ）樹脂、二硫化モリブデンを１５％
添加したポリイミド樹脂、あるいは鉛１０％、すず１０
％、銅８０％からなる鉛青銅鋳物、ＰＴＦＥを２０％含
んだポリイミド樹脂などを使用しても良い。Next, as a third step, the thrust bearing 3 (NSK model # 51200, inner diameter φ10, outer diameter φ2
6. Prepare width 11). 1A is a side sectional view of the thrust bearing, and FIG. 1B is a view taken along the line AA ′ of FIG. The thrust bearing 3 is made by adding 50% of molybdenum disulfide and 5% of glass fiber to the materials of the inner ring 31, which is the first ring member, the outer ring 32, which is the second ring member, and the retainer 33, which are the constituent elements. PTFE was used. The ball 1 on which the molybdenum disulfide film 26 is sputtered is incorporated into the thrust bearing 3 to form a temporarily assembled bearing, which is attached to an operating shaft in a vacuum chamber. In such a state, the inner ring 31 is fixed, and the outer ring 32 is pressed against the sputtered ball 1 and a thrust load of 5 k is applied.
gf, when the degree of vacuum reaches 10 -4 Pa,
The outer ring 32 is rotated at 00 r / min for one hour. Thereafter, the rotation is stopped and the ball 1 is taken out. On the surface of the ball 1, there is a molybdenum disulfide film 26, on which PTFE is further placed.
A composite transfer film 34 is provided. The thrust bearing 3 has a configuration in which at least one of an inner ring 31 and an outer ring 32 provided at both ends thereof is formed with an arc-shaped raceway groove which is in contact with the sputtered ball 1 on surfaces facing each other. The surfaces facing each other are such that one of them is fixed and the other is rotated.
The material of the ring members 31 and 32 and the retainer 33 of the thrust bearing 3 is not PTFE, but is polyether-terketone (PEEK) resin containing 20% molybdenum disulfide and 20% PTFE, and molybdenum disulfide. 15%
Polyimide resin added, or lead 10%, tin 10
%, 80% copper, a lead-bronze casting, a polyimide resin containing 20% PTFE, or the like.
【０００７】上記の第３の処理工程にて、これらの二硫
化モリブデン膜の上にＰＴＦＥ複合材料の移着膜が形成
された玉１を仮組立軸受であるスラスト軸受３から取り
外し、十分に溶剤で洗浄されたステンレス製の被試験用
のラジアル軸受（型番＃６０８）４に組み込んで、真空
中で発塵試験を行った。発塵量測定装置５を図３に示
す。モータ５１のロータ５２が垂直になるようにして、
ロータ５２の支持に前記のとおり製作した２個ずつの玉
軸受４、４１を取りつけた。モータ５１の内部は１０-4
Ｐａの真空になっている。２．７ｋｇｆのスラスト荷重
をバネ５３で軸受４にかけて、モータ５１を１，２００
ｒ／ｍｉｎで回転させたときに、軸受４から発生する塵
を、下部の玉軸受４１の下方に設置したレーザ式のパー
ティクルカウンタ５４（最高測定感度０．２７μｍ）で
測定した。In the third processing step, the ball 1 having the molybdenum disulfide film on which the transfer film of the PTFE composite material is formed is removed from the thrust bearing 3 which is a temporarily assembled bearing, and the solvent is sufficiently removed. Was assembled into a stainless steel radial bearing (model number # 608) 4 to be tested, which was cleaned in Step 2, and a dust generation test was performed in a vacuum. FIG. 3 shows the dust generation amount measuring device 5. With the rotor 52 of the motor 51 being vertical,
The two ball bearings 4 and 41 manufactured as described above were attached to the support of the rotor 52. The inside of the motor 51 is 10 -4
The vacuum is Pa. A thrust load of 2.7 kgf is applied to the bearing 4 by the spring 53, and the motor 51 is moved to 1,200.
Dust generated from the bearing 4 when rotated at r / min was measured by a laser type particle counter 54 (maximum measurement sensitivity 0.27 μm) installed below the lower ball bearing 41.
【０００８】図４に８時間測定したときの０．２７μｍ
以上の塵のカウント総数と二硫化モリブデンの膜厚との
関係を示す。二硫化モリブデンの膜厚が０．０１〜０．
１μｍの間では軸受からの発塵は比較的少ない。二硫化
モリブデンの膜厚が０．０１μｍ未満および０．１μｍ
を越えると発塵が多い。０．０１μｍ未満では玉軸受の
潤滑としてＰＴＦＥ複合材料が支配的になり、０．１μ
ｍを越えると二硫化モリブデンからの発塵があると考え
る。このようにまず玉１に０．０１μｍ〜０．１μｍの
膜厚の二硫化モリブデン膜２５をスパッタして、その玉
１の表面に固体潤滑剤の移着膜３４を処理して、固体潤
滑玉軸受４を構成すると、非常に発塵の少ない玉軸受を
提供することが出来る。なお、実施例では、スパッタす
る固体潤滑剤として二硫化モリブデンを挙げたが、二硫
化タングステンなどの他の層状構造物質でも良い。FIG. 4 shows 0.27 μm measured for 8 hours.
The relationship between the total number of dust particles and the film thickness of molybdenum disulfide is shown below. The film thickness of molybdenum disulfide is 0.01 to 0.1.
Particle generation from the bearing is relatively small at a distance of 1 μm. Molybdenum disulfide film thickness less than 0.01 μm and 0.1 μm
If it goes over, there is a lot of dust. If it is less than 0.01 μm, the PTFE composite material becomes dominant as lubrication for the ball bearing, and
If m exceeds m, it is considered that dust is generated from molybdenum disulfide. As described above, first, the molybdenum disulfide film 25 having a thickness of 0.01 μm to 0.1 μm is sputtered on the ball 1, and the surface of the ball 1 is treated with the solid lubricant transfer film 34, and the solid lubricating ball is processed. When the bearing 4 is configured, a ball bearing that generates very little dust can be provided. In the embodiment, molybdenum disulfide is used as the solid lubricant to be sputtered. However, other layered structural materials such as tungsten disulfide may be used.
【０００９】上記スパッタエッチングにより、玉表面は
全面にわたってほぼ均一に０．０１〜０．３μｍ程度に
荒らされて、その面に膜厚０．０１〜０．１μｍの二硫
化モリブデンがスパッタされ、さらにその表面に自己潤
滑性材料の移着膜が処理されるので、二硫化モリブデン
膜は強固に付着しており、また移着膜も荒らされた面の
谷間に食い込む。したがって、玉軸受に組み込まれて回
転するときの保持器および転走面との接触による摩耗は
非常に少なくなるので、発塵が少ない転がり軸受の玉へ
の固体潤滑膜形成方法を提供することができる。By the above-mentioned sputter etching, the surface of the ball is roughened almost uniformly to about 0.01 to 0.3 μm over the entire surface, and molybdenum disulfide having a thickness of 0.01 to 0.1 μm is sputtered on the surface. Since a transfer film of a self-lubricating material is treated on the surface, the molybdenum disulfide film is firmly adhered, and the transfer film also digs into the valley of the roughened surface. Therefore, abrasion due to contact with the retainer and the rolling surface when rotating by being incorporated in the ball bearing is extremely reduced, so that it is possible to provide a method of forming a solid lubricating film on a ball of a rolling bearing that generates less dust. it can.
【００１０】[0010]
【発明の効果】以上述べたように本発明によれば、玉表
面に固体潤滑膜を強固に付着させ、回転時に発塵の少な
い、耐久性に優れる高信頼性の転がり軸受の玉への固体
潤滑膜形成方法を得る効果がある。As described above, according to the present invention, a solid lubricating film is firmly adhered to the surface of a ball to reduce dust generation at the time of rotation, and to provide a highly reliable solid to the ball of a rolling bearing having excellent durability. There is an effect of obtaining a lubricating film forming method.
【図面の簡単な説明】[Brief description of the drawings]
【図１】本発明の実施の形態を示すスパッタ装置の断面
図である。FIG. 1 is a sectional view of a sputtering apparatus showing an embodiment of the present invention.
【図２】（ａ）は本発明の実施の形態を示すスラスト軸
受の側断面図、（ｂ）は（ａ）に関するＡＡ’矢視図で
ある。FIG. 2A is a side sectional view of a thrust bearing showing an embodiment of the present invention, and FIG. 2B is an AA ′ arrow view related to FIG.
【図３】発塵量測定装置を示す断面図である。FIG. 3 is a cross-sectional view showing a dust generation amount measuring device.
【図４】二硫化モリブデンのスパッタ膜厚と発塵カウン
ト数の関係を示す図である。FIG. 4 is a diagram showing the relationship between the sputtered film thickness of molybdenum disulfide and the number of generated particles.
１：玉、２：スパッタ装置、２１：回転基板、２２：
皿、２３：回転基板、２４：二硫化モリブデンターゲッ
ト、２５：真空チャンバ、２６：二硫化モリブデン膜、
３：スラスト軸受、３１：内輪、３２：外輪、３３：保
持器、３４：ＰＴＦＥの移着膜、４、４１：玉軸受、
５：発塵量測定装置、５１：モータ、５２：ロータ、５
３：バネ、５４：パーティクルカウンタ1: ball, 2: sputtering device, 21: rotating substrate, 22:
Dish, 23: rotating substrate, 24: molybdenum disulfide target, 25: vacuum chamber, 26: molybdenum disulfide film,
3: Thrust bearing, 31: inner ring, 32: outer ring, 33: cage, 34: PTFE transfer film, 4, 41: ball bearing,
5: dust generation amount measuring device, 51: motor, 52: rotor, 5
3: Spring, 54: Particle counter
Claims (2)
た転がり軸受の玉への固体潤滑膜形成方法において、 前記玉の表面に残留した物質をスパッタ装置内でスパッ
タエッチングにより除去し表面を荒らす第１の工程と、
前記第１の工程で処理された玉の表面上に二硫化モリブ
デンまたは二硫化タングステンをスパッタにより０．０
１〜０．１μｍの膜厚に形成する第２の工程と、前記ス
パッタ装置内から取り出し前記第２の工程で被膜処理さ
れた玉と、前記被膜処理された玉の表面に接触させた自
己潤滑性材料からなる第１のリング材と第２のリング材
および保持器を備えたスラスト型の仮組立軸受を構成
し、前記仮組立軸受の両端に設けた両リング材の向かい
合う面の何れか一方を前記被膜処理された玉に押圧させ
た状態で、前記被膜処理された玉が回転するように移動
させることにより前記両リング材から前記被膜処理され
た玉に移着させて潤滑膜を形成する第３の工程と、から
なることを特徴とする転がり軸受の玉への固体潤滑膜形
成方法。1. A method of forming a solid lubricating film on a ball of a rolling bearing having a plurality of balls inserted between an inner ring and an outer ring, wherein a substance remaining on the surface of the ball is removed by sputter etching in a sputtering apparatus. A first step of roughening the surface,
Molybdenum disulfide or tungsten disulfide is sputtered on the surface of the ball treated in the first step for 0.0%.
A second step of forming a film having a thickness of 1 to 0.1 μm, a ball taken out of the sputtering apparatus and coated with the coating in the second step, and a self-lubricating contacted surface of the coated ball. A thrust-type temporary assembly bearing including a first ring material, a second ring material, and a retainer made of a conductive material, and any one of surfaces of both ring materials provided at both ends of the temporary assembly bearing Is pressed against the coated ball, and the coated ball is moved so as to rotate, thereby transferring the two ring materials to the coated ball to form a lubricating film. A method of forming a solid lubricating film on a ball of a rolling bearing, comprising a third step.
材のうち、少なくとも一方のリング材に前記被膜処理さ
れた玉と互いに向かい合う面で接触する弧状の軌道溝を
形成している転がり軸受の玉への固体潤滑膜形成方法。2. A rolling, wherein at least one of the first ring material and the second ring material has an arc-shaped orbital groove that is in contact with the coated ball on surfaces facing each other. A method for forming a solid lubricating film on a bearing ball.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20796296A JP3729217B2 (en) | 1996-07-17 | 1996-07-17 | Method for forming solid lubricating film on ball of rolling bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20796296A JP3729217B2 (en) | 1996-07-17 | 1996-07-17 | Method for forming solid lubricating film on ball of rolling bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1030643A true JPH1030643A (en) | 1998-02-03 |
| JP3729217B2 JP3729217B2 (en) | 2005-12-21 |
Family
ID=16548414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20796296A Expired - Lifetime JP3729217B2 (en) | 1996-07-17 | 1996-07-17 | Method for forming solid lubricating film on ball of rolling bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3729217B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6896416B2 (en) | 2000-12-20 | 2005-05-24 | Nsk Limited | Rolling-bearing and bearing unit |
| EP1588878A2 (en) | 2004-03-29 | 2005-10-26 | Nissan Motor Co., Ltd. | Slide apparatus for automotive vehicle |
| JP2006137614A (en) * | 2004-11-10 | 2006-06-01 | Hoya Corp | Mold press forming apparatus, and method for production of the apparatus |
| CN116180288A (en) * | 2022-12-29 | 2023-05-30 | 江苏君霖纺织科技有限公司 | Parallel shaft machine equipment with multi-layer staggered godet roller and application thereof |
| GB2621340A (en) * | 2022-08-08 | 2024-02-14 | Esr Tech Limited | Rolling element bearings |
-
1996
- 1996-07-17 JP JP20796296A patent/JP3729217B2/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6896416B2 (en) | 2000-12-20 | 2005-05-24 | Nsk Limited | Rolling-bearing and bearing unit |
| EP1588878A2 (en) | 2004-03-29 | 2005-10-26 | Nissan Motor Co., Ltd. | Slide apparatus for automotive vehicle |
| EP1588878A3 (en) * | 2004-03-29 | 2008-11-26 | Nissan Motor Co., Ltd. | Slide apparatus for automotive vehicle |
| US9238932B2 (en) | 2004-03-29 | 2016-01-19 | Nissan Motor Co., Ltd. | Slide apparatus for automotive vehicle |
| JP2006137614A (en) * | 2004-11-10 | 2006-06-01 | Hoya Corp | Mold press forming apparatus, and method for production of the apparatus |
| GB2621340A (en) * | 2022-08-08 | 2024-02-14 | Esr Tech Limited | Rolling element bearings |
| CN116180288A (en) * | 2022-12-29 | 2023-05-30 | 江苏君霖纺织科技有限公司 | Parallel shaft machine equipment with multi-layer staggered godet roller and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3729217B2 (en) | 2005-12-21 |
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