JPH0340796U - - Google Patents
Info
- Publication number
- JPH0340796U JPH0340796U JP10135689U JP10135689U JPH0340796U JP H0340796 U JPH0340796 U JP H0340796U JP 10135689 U JP10135689 U JP 10135689U JP 10135689 U JP10135689 U JP 10135689U JP H0340796 U JPH0340796 U JP H0340796U
- Authority
- JP
- Japan
- Prior art keywords
- ceramic heater
- heating
- heating element
- silicon nitride
- lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims 4
- 229910003468 tantalcarbide Inorganic materials 0.000 claims 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 2
- 238000010304 firing Methods 0.000 description 4
Landscapes
- Resistance Heating (AREA)
- Ceramic Products (AREA)
Description
第１図は本考案のセラミツクヒーターの一実施
例の焼成一体化前の状態を示す斜視図、第２図は
第１図のセラミツクヒーターの焼成一体化後の要
部拡大断面図、第３図は本考案の他のセラミツク
ヒーターの一実施例の焼成一体化前の状態を示す
斜視図、第４図は第３図のセラミツクヒーターの
焼成一体化後の要部拡大断面図である。
１……窒化珪素質焼結体、２……発熱部、３…
…リード部、４ａ，４ｂ……電極取出部、９……
導体層。
Fig. 1 is a perspective view showing an embodiment of the ceramic heater of the present invention before being integrated by firing, Fig. 2 is an enlarged cross-sectional view of the main parts of the ceramic heater of Fig. 1 after being integrated by firing, and Fig. 3 4 is a perspective view showing a state of another embodiment of the ceramic heater of the present invention before being integrated by firing, and FIG. 4 is an enlarged sectional view of the main part of the ceramic heater of FIG. 3 after being integrated by firing. 1...Silicon nitride sintered body, 2...Heating part, 3...
...Lead part, 4a, 4b... Electrode extraction part, 9...
conductor layer.
Claims (1)
タルカーバイド（ＴａＣ）を主体とする発熱体が
窒化珪素質焼結体中に埋設されて成るセラミツク
ヒーターにおいて、上記発熱体が発熱部と該発熱
部より延長されたリード部を構成し、該リード部
に接続する電極取出部を、４０〜８０重量％の窒
化チタン（ＴｉＮ）を主体とする導体で形成した
ことを特徴とするセラミツクヒーター。 ２ タングステンカーバイド（ＷＣ）またはタン
タルカーバイド（ＴａＣ）を主体とする発熱体主
要部が窒化珪素質焼結体中に埋設されて成るセラ
ミツクヒーターにおいて、上記発熱体が発熱部と
該発熱部より延長されたリード部及び該リード部
から前記窒化珪素質終結体の外表面に導出した電
極取出部を構成し、少なくとも該電極取出部を４
０〜８０重量％の窒化チタン（ＴｉＮ）を主体と
する導体層で被覆したことを特徴とするセラミツ
クヒーター。[Claims for Utility Model Registration] 1. A ceramic heater in which a heating element mainly made of tungsten carbide (WC) or tantalum carbide (TaC) is embedded in a silicon nitride sintered body, in which the heating element serves as a heating part. A ceramic heater comprising a lead part extending from the heat generating part and an electrode extraction part connected to the lead part made of a conductor mainly composed of 40 to 80% by weight titanium nitride (TiN). . 2. In a ceramic heater in which a main part of a heating element mainly made of tungsten carbide (WC) or tantalum carbide (TaC) is embedded in a silicon nitride sintered body, the heating element has a heating part and a heating part extending from the heating part. a lead portion and an electrode extraction portion led out from the lead portion to the outer surface of the silicon nitride termination body;
A ceramic heater characterized in that it is coated with a conductive layer mainly composed of 0 to 80% by weight of titanium nitride (TiN).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989101356U JP2512818Y2 (en) | 1989-08-30 | 1989-08-30 | Ceramic heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989101356U JP2512818Y2 (en) | 1989-08-30 | 1989-08-30 | Ceramic heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0340796U true JPH0340796U (en) | 1991-04-18 |
| JP2512818Y2 JP2512818Y2 (en) | 1996-10-02 |
Family
ID=31650314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989101356U Expired - Lifetime JP2512818Y2 (en) | 1989-08-30 | 1989-08-30 | Ceramic heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2512818Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020027047A1 (en) * | 2018-07-31 | 2020-02-06 | 京セラ株式会社 | Heater |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711488A (en) * | 1980-06-24 | 1982-01-21 | Ube Industries | Ceramic heater |
| JPS61104581A (en) * | 1984-10-26 | 1986-05-22 | 株式会社デンソー | Ceramic heater and manufacture thereof |
| JPS6337587A (en) * | 1986-07-31 | 1988-02-18 | 京セラ株式会社 | Ceramic heater |
-
1989
- 1989-08-30 JP JP1989101356U patent/JP2512818Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711488A (en) * | 1980-06-24 | 1982-01-21 | Ube Industries | Ceramic heater |
| JPS61104581A (en) * | 1984-10-26 | 1986-05-22 | 株式会社デンソー | Ceramic heater and manufacture thereof |
| JPS6337587A (en) * | 1986-07-31 | 1988-02-18 | 京セラ株式会社 | Ceramic heater |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020027047A1 (en) * | 2018-07-31 | 2020-02-06 | 京セラ株式会社 | Heater |
| JPWO2020027047A1 (en) * | 2018-07-31 | 2021-03-11 | 京セラ株式会社 | heater |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2512818Y2 (en) | 1996-10-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |