JPH0338636U - - Google Patents
Info
- Publication number
- JPH0338636U JPH0338636U JP1989099460U JP9946089U JPH0338636U JP H0338636 U JPH0338636 U JP H0338636U JP 1989099460 U JP1989099460 U JP 1989099460U JP 9946089 U JP9946089 U JP 9946089U JP H0338636 U JPH0338636 U JP H0338636U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing unit
- self
- propelled
- transfer means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 238000007599 discharging Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Multi-Process Working Machines And Systems (AREA)
- General Factory Administration (AREA)
Description
第1図は本考案に係る基板処理装置の模式的平
面図、第2図は熱処理部を構成する各ユニツトの
1例を示す正面図、第3図は従来例の模式的平面
図である。 5…自走式基板搬送手段、10〜16…基板処
理ユニツト、18…定置式基板移載手段。
面図、第2図は熱処理部を構成する各ユニツトの
1例を示す正面図、第3図は従来例の模式的平面
図である。 5…自走式基板搬送手段、10〜16…基板処
理ユニツト、18…定置式基板移載手段。
Claims (1)
- 【実用新案登録請求の範囲】 複数種の基板処理ユニツトと、各基板処理ユニ
ツトへ基板を給排する自走式基板搬送手段とを具
備して成る基板処理装置において、 少なくとも1以上の基板処理ユニツトに定置式
基板移載手段を付設配置し、定置式基板移載手段
は、当該処理ユニツトの処理完了後、自走式基板
搬送手段が当該処理ユニツトに到着していない時
、自走式基板搬送手段が受取り可能になるまで、
当該処理ユニツトによる処理済み基板をバツフア
スペースへ停留させるように構成したことを特徴
とする基板処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989099460U JPH0648849Y2 (ja) | 1989-08-25 | 1989-08-25 | 基板処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989099460U JPH0648849Y2 (ja) | 1989-08-25 | 1989-08-25 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0338636U true JPH0338636U (ja) | 1991-04-15 |
JPH0648849Y2 JPH0648849Y2 (ja) | 1994-12-12 |
Family
ID=31648512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989099460U Expired - Lifetime JPH0648849Y2 (ja) | 1989-08-25 | 1989-08-25 | 基板処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648849Y2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003056624A1 (fr) * | 2001-12-25 | 2003-07-10 | Tokyo Electron Limited | Dispositif de transport d'un corps traite et systeme de traitement equipe d'un dispositif de transport |
JP2006224002A (ja) * | 2005-02-18 | 2006-08-31 | Hidemitsu Okinaga | 生ごみ処理装置及び処理方法 |
CN104443951A (zh) * | 2014-11-26 | 2015-03-25 | 芜湖懒人智能科技有限公司 | 一种旋叶式智能垃圾桶及其控制电路 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63215048A (ja) * | 1987-03-04 | 1988-09-07 | Toshiba Corp | 半導体組立部品の群管理方法 |
JPH01209737A (ja) * | 1988-02-17 | 1989-08-23 | Teru Kyushu Kk | 基板処理装置及び基板処理方法 |
-
1989
- 1989-08-25 JP JP1989099460U patent/JPH0648849Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63215048A (ja) * | 1987-03-04 | 1988-09-07 | Toshiba Corp | 半導体組立部品の群管理方法 |
JPH01209737A (ja) * | 1988-02-17 | 1989-08-23 | Teru Kyushu Kk | 基板処理装置及び基板処理方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003056624A1 (fr) * | 2001-12-25 | 2003-07-10 | Tokyo Electron Limited | Dispositif de transport d'un corps traite et systeme de traitement equipe d'un dispositif de transport |
JP2006224002A (ja) * | 2005-02-18 | 2006-08-31 | Hidemitsu Okinaga | 生ごみ処理装置及び処理方法 |
JP4580780B2 (ja) * | 2005-02-18 | 2010-11-17 | 秀光 翁長 | 生ごみ処理装置及び処理方法 |
CN104443951A (zh) * | 2014-11-26 | 2015-03-25 | 芜湖懒人智能科技有限公司 | 一种旋叶式智能垃圾桶及其控制电路 |
Also Published As
Publication number | Publication date |
---|---|
JPH0648849Y2 (ja) | 1994-12-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0338636U (ja) | ||
GB2207849B (en) | A fresh and creamy spread and process for preparing the spread. | |
JPH038424U (ja) | ||
JPS6420734U (ja) | ||
JPH02107942U (ja) | ||
JPH031964U (ja) | ||
JPS625126U (ja) | ||
JPH0389024U (ja) | ||
JPS64519U (ja) | ||
JPS62157809U (ja) | ||
JPS62203780U (ja) | ||
JPS6421673U (ja) | ||
JPS63144953U (ja) | ||
JPH0180934U (ja) | ||
JPS63145822U (ja) | ||
JPS6382999U (ja) | ||
JPS6356107U (ja) | ||
JPS6396025U (ja) | ||
Goroshchenko | The Structrue of the MgO--CaO--Al sub 2 O sub 3--SiO sub 2 System | |
JPS6294734U (ja) | ||
JPS6165096U (ja) | ||
JPH0356642U (ja) | ||
JPS643377U (ja) | ||
JPS63120092U (ja) | ||
JPH01177271U (ja) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |