JPH033503U - - Google Patents
Info
- Publication number
- JPH033503U JPH033503U JP5936189U JP5936189U JPH033503U JP H033503 U JPH033503 U JP H033503U JP 5936189 U JP5936189 U JP 5936189U JP 5936189 U JP5936189 U JP 5936189U JP H033503 U JPH033503 U JP H033503U
- Authority
- JP
- Japan
- Prior art keywords
- glassine paper
- carrier
- paper bag
- opening
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011086 glassine Substances 0.000 claims description 6
- 238000004806 packaging method and process Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
Landscapes
- Container Filling Or Packaging Operations (AREA)
Description
第１図はこの考案の一実施例の自動ウエハー包
装機の上面図、第２図は従来の包装作業について
説明する正面図である。
１……キヤリヤセツト台、２……ウエハー、３
，４……キヤリヤ、６……グラシン紙袋、７……
エアーノズル、８……ハンドリング手段（吸着ペ
ン）。
FIG. 1 is a top view of an automatic wafer packaging machine according to an embodiment of this invention, and FIG. 2 is a front view illustrating a conventional packaging operation. 1...Carrier setting table, 2...Wafer, 3
, 4...carrier, 6...glassine paper bag, 7...
Air nozzle, 8... Handling means (suction pen).
Claims (1)
において、 多数の半導体ウエハーを整列収納したキヤリヤ
をセツトするキヤリヤセツト台と、 前記キヤリヤの開口側の前方にキヤリヤ側に開
口部を向けて配置されたグラシン紙袋と、 前記グラシン紙袋の近傍に配置されて、このグ
ラシン紙袋の開口部を拡開させるエアーノズルと
、 前記キヤリヤに収納されている半導体ウエハー
を一枚ずつ取り出してグラシン紙袋に詰め込むハ
ンドリング手段とを備えたことを特徴とする自動
ウエハー包装機。[Scope of Claim for Utility Model Registration] In the process of packaging semiconductor wafers in glassine paper bags, there is provided a carrier setting table for setting a carrier in which a large number of semiconductor wafers are arranged and stored, and an opening facing the carrier side in front of the opening side of the carrier. a glassine paper bag placed in the glassine paper bag; an air nozzle placed near the glassine paper bag to enlarge the opening of the glassine paper bag; An automatic wafer packaging machine characterized by being equipped with a packing and handling means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5936189U JPH033503U (en) | 1989-05-23 | 1989-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5936189U JPH033503U (en) | 1989-05-23 | 1989-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH033503U true JPH033503U (en) | 1991-01-14 |
Family
ID=31585791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5936189U Pending JPH033503U (en) | 1989-05-23 | 1989-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033503U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008212421A (en) * | 2007-03-05 | 2008-09-18 | Mitsubishi Electric Corp | Sunlight shading apparatus |
-
1989
- 1989-05-23 JP JP5936189U patent/JPH033503U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008212421A (en) * | 2007-03-05 | 2008-09-18 | Mitsubishi Electric Corp | Sunlight shading apparatus |
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