JPH0328248Y2 - - Google Patents
Info
- Publication number
- JPH0328248Y2 JPH0328248Y2 JP1986077397U JP7739786U JPH0328248Y2 JP H0328248 Y2 JPH0328248 Y2 JP H0328248Y2 JP 1986077397 U JP1986077397 U JP 1986077397U JP 7739786 U JP7739786 U JP 7739786U JP H0328248 Y2 JPH0328248 Y2 JP H0328248Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- opening window
- clean bench
- air
- bench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004804 winding Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000825 pharmaceutical preparation Substances 0.000 description 1
- 229940127557 pharmaceutical product Drugs 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986077397U JPH0328248Y2 (it) | 1986-05-22 | 1986-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986077397U JPH0328248Y2 (it) | 1986-05-22 | 1986-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62189531U JPS62189531U (it) | 1987-12-02 |
| JPH0328248Y2 true JPH0328248Y2 (it) | 1991-06-18 |
Family
ID=30925364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986077397U Expired JPH0328248Y2 (it) | 1986-05-22 | 1986-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328248Y2 (it) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002195620A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
| JP4609803B2 (ja) * | 2008-02-06 | 2011-01-12 | 日本エアーテック株式会社 | クリーンベンチ |
| JP6178973B2 (ja) * | 2013-03-14 | 2017-08-16 | パナソニックＩｐマネジメント株式会社 | 除塵ブース |
| JP2021080744A (ja) * | 2019-11-20 | 2021-05-27 | 三井住友建設株式会社 | 医薬品、医薬部外品、医療機器、細胞に加工を施したもの、または生体の体内で発現する遺伝子を含有されたもののうちのひとつを生産若しくは製造する主設備。 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6071167A (ja) * | 1983-09-29 | 1985-04-23 | ヤマト科学株式会社 | ドラフトチヤンバ− |
-
1986
- 1986-05-22 JP JP1986077397U patent/JPH0328248Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6071167A (ja) * | 1983-09-29 | 1985-04-23 | ヤマト科学株式会社 | ドラフトチヤンバ− |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62189531U (it) | 1987-12-02 |
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