JPH0325892U - - Google Patents

Info

Publication number
JPH0325892U
JPH0325892U JP8762989U JP8762989U JPH0325892U JP H0325892 U JPH0325892 U JP H0325892U JP 8762989 U JP8762989 U JP 8762989U JP 8762989 U JP8762989 U JP 8762989U JP H0325892 U JPH0325892 U JP H0325892U
Authority
JP
Japan
Prior art keywords
stator
rotor
threaded groove
support member
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8762989U
Other languages
English (en)
Other versions
JP2557551Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989087629U priority Critical patent/JP2557551Y2/ja
Publication of JPH0325892U publication Critical patent/JPH0325892U/ja
Application granted granted Critical
Publication of JP2557551Y2 publication Critical patent/JP2557551Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る真空ポンプとしての複合
型ターボ分子ポンプの一実施例を示す断面図であ
り、第２図は従来の真空ポンプを示す断面図であ
る。 ４……ロータ、５……ロータ翼、６……ステー
タ翼、７……固定筒（支持部材）、１５……ネジ
溝部、１６……ステータ、１７，１８……ニクロ
ム線（加熱部）。

Claims (1)

    【実用新案登録請求の範囲】
  1. ステータに対して相対回転するロータと、この
    ロータを回転自在に支持する支持部材と、前記ロ
    ータとステータの対向する壁面の少くともいずれ
    か一方にかつ少くとも一部に形成されたネジ溝部
    を備えた真空ポンプにおいて、前記ネジ溝部に対
    向するステータあるいはネジ溝部が設けられたス
    テータと前記支持部材との少くともいずれか一方
    に加熱部を設けたことを特徴とする真空ポンプ。
JP1989087629U 1989-07-24 1989-07-24 真空ポンプ Expired - Fee Related JP2557551Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989087629U JP2557551Y2 (ja) 1989-07-24 1989-07-24 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989087629U JP2557551Y2 (ja) 1989-07-24 1989-07-24 真空ポンプ

Publications (2)

Publication Number Publication Date
JPH0325892U true JPH0325892U (ja) 1991-03-18
JP2557551Y2 JP2557551Y2 (ja) 1997-12-10

Family

ID=31637274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989087629U Expired - Fee Related JP2557551Y2 (ja) 1989-07-24 1989-07-24 真空ポンプ

Country Status (1)

Country Link
JP (1) JP2557551Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108412785A (zh) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 一种复合分子泵
CN108412786A (zh) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 一种复合分子泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108412785A (zh) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 一种复合分子泵
CN108412786A (zh) * 2018-02-26 2018-08-17 北京海斯德电机技术有限公司 一种复合分子泵

Also Published As

Publication number Publication date
JP2557551Y2 (ja) 1997-12-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees