JPH03221343A - Centering jig for groove machining - Google Patents

Abstract

PURPOSE:To set the center axis along the whole length by connecting divided profile curved bodies, and inserting a jig along the face to be machined when the deformation of the cylinder split body of a work is three-dimensional. CONSTITUTION:The semi-cylindrical board profile curved body 2 of a centering jig 1 for groove machining on a semi-cylindrical wafer board has the same convex curvature as the inner curved face of a wafer board 4, and the centering jig 1 is fitted and supported on a reference bar 3. Four or multiple support sections 3' are used as required, the curved face bus of the profile curved body 2 is parallel with the reference bar 3, when the board profile curved body 2 is inserted into the inner curved face of the wafer board 4, the reference bar 3 along the deformation of the board 4 sets the center at individual points as it is. When the center is measured while the spindle 7 of a groove boring machine 8 is arranged along the reference bar 3, the center of the board 4 is indexed, and a groove is bored on the wafer board 4 so that the the center of the groove boring machine 8 coincides with the center which is read out.

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、半円筒形なとの円筒分割体に溝加工を施す場
合、より具体的には半導体用ウェーハボートに同一形状
の溝加工を行うために必要な該ボートの中心軸を取り出
す芯出し治具に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to the case where grooves are formed on a semi-cylindrical divided cylindrical body, more specifically, when grooves of the same shape are formed on a semiconductor wafer boat. The present invention relates to a centering jig for taking out the center axis of the boat necessary for the purpose of the centering process.

［従来の技術］ 半円筒形ウェーハホードにウェーハを立てて保持する溝
を加工する際、ウェーハボートの微少な変形が加工点の
中心を一定にすす、全体としての芯出し・をし・ないと
溝の深さ・幅なと同一形状のものを加工するのか難し・
く、またホード中心と加工具の中心とを合致させるため
の当該ボート中心の設定に仮Ｍ芯出しを行うためその試
し切りの手間から多くの時間を要し、大変能率が悪かっ
た。[Prior art] When machining grooves to hold wafers upright in a semi-cylindrical wafer holder, slight deformation of the wafer boat causes the center of the machining point to remain constant, which requires centering as a whole. It is difficult to process grooves with the same shape and depth.
In addition, it took a lot of time to make trial cuts, and it was very inefficient, since provisional M centering was performed to set the center of the boat in order to match the center of the hoard with the center of the processing tool.

［発明が解決し・ようとする問題点コ ラニーへボートなと、略円筒分割体の軸方向に見ろ微少
′な変形が溝切り箇所ことの中心点を変化させる。し・
かじ、この変形は全体的に緩やかであるから、この変形
状態を利用してウェーハボート全長に沿う中心軸の設定
を試みろ。[Problem to be Solved by the Invention] In the case of Colaney, a minute deformation in the axial direction of the substantially cylindrical segment changes the center point of the grooved portion. death·
This deformation is generally gradual, so try to use this deformation to set the central axis along the entire length of the wafer boat.

［問題を解決する為の手段］ 基準バーを中心としてこれに支持した倣い曲面体は、ウ
ェーハボートの変形が少なけれはボートの長と同し長さ
のものを使用し、変形が三次元的である場合には、ボー
トを１０〜３０に分割するような長さの倣い曲面体とし
て、これを連接する。[Means to solve the problem] If the deformation of the wafer boat is small, use a curved surface body supported by the reference bar that has the same length as the boat, and if the deformation is three-dimensional. In some cases, these are connected as curved bodies with a length that divides the boat into 10 to 30 parts.

いずれも倣い曲面体がボートの被加工面に沿って嵌装さ
れ、その基準バーは全ての被加工面の中心をそのまま設
定できろ。In both cases, a copying curved body is fitted along the machined surface of the boat, and its reference bar can be set at the center of all the machined surfaces.

［作用および実施例］ 第１図の半円筒形ウェーへホ、−）Ｌこ対する満加］１
用芯出し治具（１）は、塩化ヒニール等の軽量な（オ質
からな０、その上置筒形のボート倣い曲面体（２）の凸
面の曲率は、ウェーハボート（４）内曲面と同しである
。この７１−１−ト倣い曲面体（２）：ま、この中心位
置で基準へ−（３）に装着・支持される。支持部に’３
’）は、必要に応し４個又は複数個使う。倣い曲面体（
２）の曲面母線は基準バー（３３）と平行である。ホー
ド倣い曲面体（２）をウェーハホード（４）の内曲面に
嵌装すると、几スートの変形に沿う基準バー（３）がそ
のまま各点の中心を設定する。第２図に示す溝加工機（
８）のスピンドル（７）を基準バーに３）に沿って中心
を測定させろと、ボート（４）の中心か割り出されろ。[Operations and Examples] The semi-cylindrical shape shown in FIG.
The centering jig (1) is made of lightweight material such as phenyl chloride. It is the same.This 71-1-t copying curved surface body (2): Well, at this center position, it is mounted and supported on the reference (3).
') may be used four or more times as necessary. Tracing curved surface (
The curved generatrix of 2) is parallel to the reference bar (33). When the hoard imitating curved surface body (2) is fitted onto the inner curved surface of the wafer hoard (4), the reference bar (3) that follows the deformation of the soot directly sets the center of each point. Grooving machine shown in Figure 2 (
Determine the center of the boat (4) by measuring the center of the spindle (7) of 8) with the reference bar along 3).

このためにスピンドル（７）に電気マイクロメータ（６
）を取り付けて、ボート（４）の中心座標を読み取らせ
るのが良い。溝加工機（８）の中心と読み取った中心と
を合致させτウェーハボート　（４）に溝を彫る。For this purpose, an electric micrometer (6) is mounted on the spindle (7).
) to read the center coordinates of the boat (4). Align the center of the groove processing machine (8) with the read center and carve a groove in the τ wafer boat (4).

、Ｅ記芯出し冶ｇ（１）の変形例とし・て、第３図（（
Ｌ）には、軽量１ヒの九（こボート倣い曲面体（２）を
複数個に分割し・た例を示す。基準バー（：３）に等間
隔に支持してこれらを連結する。同（）））には、倣い
曲面体（２）ζこ複数個の窓を開けろ場合を示す。また
、ウェーハボート（４）の内曲面中心軸が；３次に的に
変形し・ている場合に使えろように、ボート倣い曲面体
（２）をホードの１０〜３０分割に相当するように短く
し・で、基準バー（３）に連接し・、基準バー（３）を
曲線定規のよに使う。, As a modification of E centering jig g(1), Fig. 3 ((
L) shows an example in which the lightweight curved surface body (2) is divided into a plurality of parts. They are supported at equal intervals on the reference bar (3) and connected. ())) shows the case where a plurality of windows are opened in the curved surface (2). In addition, the boat-like curved surface (2) was made to correspond to 10 to 30 divisions of the wafer boat (4) so that it can be used when the center axis of the inner curved surface of the wafer boat (4) is cubically deformed. Shorten it, connect it to the reference bar (3), and use the reference bar (3) like a curved ruler.

軽量化とともに芯出し・治具にフレキシヒリテイーを与
え、ボートの変形に沿う機能を高めるのが良い。In addition to reducing weight, it is good to give flexibility to the centering and jig to improve its ability to follow the deformation of the boat.

［発明の効果］ 本発明の芯出し治具をウェーハボートの内面に接触嵌合
させるたけて、該ウェーハホード各被加工箇所の中心を
設定でき、溝加工機の加工中心を当該設定中心と正確に
一致できるので、非常に簡単に短時間の正確な芯出しか
可能になった。即ち、誰かやってもウェーハホードに同
し・ように溝を加してき、溝加工のはらつきかなくなっ
た。叉、ｉＫ来のウェーハ、１．−　）試しＬ月りのセ
・斐かなく、重ζこウェーハホード満加工芯出しは、軽
い材料を使用し、構造的にも間隙を設けるなとして軽量
化を行えはその作業性が一層向上する。[Effects of the Invention] By fitting the centering jig of the present invention into contact with the inner surface of the wafer boat, the center of each workpiece location on the wafer boat can be set, and the processing center of the groove processing machine can be accurately aligned with the set center. Since it can match the centering position, it is now possible to perform accurate centering very easily and in a short period of time. In other words, no matter who did it, they added grooves to the wafer holder in the same way, and the unevenness in groove processing disappeared. Another wafer from iK: 1. -) During the trial period, the centering of the wafer hoard can be done using light materials and no gaps are created in order to reduce the weight of the wafer, further improving work efficiency. do.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は溝加工用芯出し治具の斜視図、第２図は溝加工
用芯出し・治具を使って溝加工し・でいる図、及び第３
図（ａ　）、（ｂ）はホード倣い曲面体の変更例をそれ
ぞれボす。 （１）　ＴＩＩ＃加工用芯出し治具 （２）ボート倣い曲面体 （：３）基準バー （３゛）支持部 （４）ウェーハホード く５）溝加工機テーブル （６）電気マイクロメータ （７）廣加工代スヒント ル （８）溝加工機Figure 1 is a perspective view of the centering jig for groove machining, Figure 2 is a diagram of groove machining using the centering jig for groove machining, and Figure 3 is a diagram showing the centering jig for groove machining.
Figures (a) and (b) show examples of modifications to the Hoard curved surface, respectively. (1) Centering jig for TII# processing (2) Boat copying curved surface (:3) Reference bar (3゛) Support part (4) Wafer holder 5) Grooving machine table (6) Electric micrometer (7) ) Wide machining allowance schintle (8) Grooving machine

Claims (1)

【特許請求の範囲】[Claims] 略円筒分割体の内周面に溝加工をするための治具であっ
て、略円筒分割体の内周面とほぼ同一曲率の外周面を有
する倣い曲面体と、倣い曲面体の外周面の中心軸を規定
する基準バーと、基準バーと倣い曲面体との接続保持手
段と、からなることを特徴とする溝加工用芯出し治具。A jig for machining grooves on the inner circumferential surface of a substantially cylindrical segmented body, which includes a profiling curved body having an outer circumferential surface having approximately the same curvature as the inner circumferential surface of the substantially cylindrical segmented body; A centering jig for groove machining, comprising: a reference bar that defines a central axis; and means for connecting and holding the reference bar and a curved surface to be copied.