JPH03195964A - Electrochemical gas sensor element - Google Patents
Electrochemical gas sensor elementInfo
- Publication number
- JPH03195964A JPH03195964A JP1337713A JP33771389A JPH03195964A JP H03195964 A JPH03195964 A JP H03195964A JP 1337713 A JP1337713 A JP 1337713A JP 33771389 A JP33771389 A JP 33771389A JP H03195964 A JPH03195964 A JP H03195964A
- Authority
- JP
- Japan
- Prior art keywords
- solid electrolyte
- electrolyte layer
- gas
- electrode
- gas sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 38
- -1 polysiloxane Polymers 0.000 claims abstract description 16
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 12
- 229920000642 polymer Polymers 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 239000005518 polymer electrolyte Substances 0.000 abstract description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 6
- 239000003792 electrolyte Substances 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- 239000008151 electrolyte solution Substances 0.000 abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052737 gold Inorganic materials 0.000 abstract description 3
- 239000010931 gold Substances 0.000 abstract description 3
- 229910052697 platinum Inorganic materials 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005266 casting Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 description 12
- 239000007787 solid Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 7
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical class FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 7
- 230000035699 permeability Effects 0.000 description 5
- 239000004205 dimethyl polysiloxane Substances 0.000 description 4
- 238000003487 electrochemical reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000011244 liquid electrolyte Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 125000001905 inorganic group Chemical group 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- 229960002796 polystyrene sulfonate Drugs 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電気化学式ガスセンサ素子に関し、詳しく
は、電気化学反応を利用して大気中のガス等を検出する
ガスセンサを構成するための素子に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electrochemical gas sensor element, and more particularly, to an element for configuring a gas sensor that detects gas in the atmosphere using an electrochemical reaction. It is something.
電気化学反応を利用したガスセンサ素子は、基本的には
、複数の電極とその電極間のイオン伝導を媒介する電解
質から構成されている。環境中にガスが存在すると、こ
のガスが電極上で電気化学反応を起こすことによって電
極間に電流が流れるこの電流を測定して、ガスの存在を
検知するのである。Gas sensor elements that utilize electrochemical reactions basically consist of a plurality of electrodes and an electrolyte that mediates ion conduction between the electrodes. When a gas is present in the environment, this gas causes an electrochemical reaction on the electrodes, causing a current to flow between the electrodes.The presence of the gas is detected by measuring this current.
電解質としては、従来、硫酸等の液体電解質が用いられ
ていたが、このような液体電解質を用いた場合、電解質
濃度の変化を防ぐことが困難であり、小型で、しかも長
期的に安定な素子を得るのが難しいといった欠点があっ
た。Conventionally, liquid electrolytes such as sulfuric acid have been used as electrolytes, but when such liquid electrolytes are used, it is difficult to prevent changes in electrolyte concentration, and it is difficult to prevent small and long-term stable elements. The disadvantage was that it was difficult to obtain
そこで、液体電解質の代わりに、高分子固体電解質を用
いてイオン伝導を行わせるセンサの開発が進められてい
る。高分子固体電解質としては、スルホン化パーフルオ
ロカーボン等のプロトン伝導体が使用される。このよう
な高分子固体電解質を用いたガスセンサ素子は、素子の
小型化やメインテナンスフリー化の実現が期待されてい
る。Therefore, the development of sensors that perform ion conduction using solid polymer electrolytes instead of liquid electrolytes is underway. As the solid polymer electrolyte, a proton conductor such as sulfonated perfluorocarbon is used. Gas sensor elements using such polymer solid electrolytes are expected to be miniaturized and maintenance-free.
さらに、本願発明者らは、絶縁基板の同一面上に、必要
な電極を並べて設けておき、その上を前記固体高分子電
解質で覆った、いわゆるプレーナ型構造のガスセンサ素
子を開発し、先に特願昭６３−４２８４１号等で特許出
願している。このような構造のガスセンサ素子は、半導
体や印刷配線回路の製造技術あるいは薄膜形成技術を適
用して製造することができ、素子の微細化や生産性の向
上を図ることができ、実用性に優れたものとなる〔課題
を解決するための手段〕
上記のように、高分子固体電解質層で各電極を覆った構
造のガスセンサ素子では、環境中のガス分子が高分子固
体電解質を透過して電極に到達しなければ、電気化学反
応が起こらず、ガスの検出ができない。したがっ“ζ、
素子の応答速度もしくはガス感度を向上させるには、高
分子固体電解質層の厚みが出来るだけ薄いほうが望まし
いことになる。ところが、高分子固体電解質層の厚みが
薄くなると、製造技術上、均一な層を作るのが困難にな
ったり、電解質層のインピーダンスが増大して、却って
素子感度が低下してしまうという問題があった。Furthermore, the inventors of the present application have developed a gas sensor element with a so-called planar structure, in which the necessary electrodes are arranged side by side on the same surface of an insulating substrate, and the electrodes are covered with the solid polymer electrolyte. Patent applications have been filed under Japanese Patent Application No. 63-42841. Gas sensor elements with such a structure can be manufactured by applying semiconductor or printed wiring circuit manufacturing technology or thin film formation technology, making it possible to miniaturize the element and improve productivity, making it highly practical. [Means for solving the problem] As described above, in a gas sensor element having a structure in which each electrode is covered with a solid polymer electrolyte layer, gas molecules in the environment pass through the solid polymer electrolyte and are connected to the electrodes. If the electrochemical reaction does not occur, the gas cannot be detected. Therefore “ζ,
In order to improve the response speed or gas sensitivity of the device, it is desirable that the solid polymer electrolyte layer be as thin as possible. However, as the thickness of the solid polymer electrolyte layer becomes thinner, there are problems in that it becomes difficult to create a uniform layer due to manufacturing technology, and the impedance of the electrolyte layer increases, which actually reduces the sensitivity of the device. Ta.
そこで、この発明は、前記したような高分子固体電解質
層を用いたプレーナ型のガスセンサ素子において、固体
電解質層の材料自体のガス透過率を高めることによって
、素子の応答速度を向」ニさせると同時に、厚みの減少
によるインピーダンスの上昇を防ぎ、製造も容易で素子
感度の高い電気化学式ガスセンサ素子を提供することに
ある。Therefore, the present invention aims to improve the response speed of the element by increasing the gas permeability of the material of the solid electrolyte layer itself in a planar gas sensor element using the solid polymer electrolyte layer as described above. At the same time, it is an object of the present invention to provide an electrochemical gas sensor element that prevents an increase in impedance due to a decrease in thickness, is easy to manufacture, and has high element sensitivity.
上記課題を解決する、この発明にかかる電気化学式ガス
センサ素子は、絶縁基板の同一面上に作用電極、対極お
よび参照電極が設けられ、各種およびその間を覆って固
体電解質層が設けられた電気化学式ガスセンサ素子にお
いて、固体電解Ｉｆｉ、層が、固体電解質となる高分子
にポリシロキサンまたはその誘導体を含むものからなる
。An electrochemical gas sensor element according to the present invention that solves the above problems is an electrochemical gas sensor in which a working electrode, a counter electrode, and a reference electrode are provided on the same surface of an insulating substrate, and a solid electrolyte layer is provided covering each electrode and between them. In the device, the solid electrolyte Ifi layer is made of a solid electrolyte containing polysiloxane or a derivative thereof as a polymer.
絶縁基板や各種の構造は、通常の電気化学式センサ素子
と同様のものでよい。固体電解質層を構成する固体電解
質としては、通常の電気化学式ガスセンサ素子に用いら
れているのと同様の高分子からなるプロトン伝導体が使
用される。具体的には、ポリスチレンスルホネートポリ
マー、スルホン化パーフルオロカーボン、カルボキシル
化パーフルオロカーボン等が挙げられる。このうち、ス
ルホン化パーフルオロカーボンは、溶媒に可溶であるた
め成膜性がよいこと、プロトン解離度が大きいのでブロ
ー・ン伝専性がよいこと等の点で好ましいものである。The insulating substrate and various structures may be similar to those of ordinary electrochemical sensor elements. As the solid electrolyte constituting the solid electrolyte layer, a proton conductor made of a polymer similar to that used in ordinary electrochemical gas sensor elements is used. Specific examples include polystyrene sulfonate polymer, sulfonated perfluorocarbon, carboxylated perfluorocarbon, and the like. Among these, sulfonated perfluorocarbons are preferable because they are soluble in solvents, so they have good film-forming properties, and because they have a high degree of proton dissociation, they have good blow-on transfer property.
この発明では、固体電解質とし°ζ、上記のような高分
子にポリシロキサンまたはその誘導体を含むものを用い
る。ポリシロキサンは、いわゆるキロキサン結合を有す
る高分子化合物であり、下式％式％
Ｒ，＝メチル基、エチル基、フェニル基、ビニル基、フ
ルオロ基その他の無機および有機基
ポリシロキサンまたはその誘導体としては、前記固体電
解質を構成する高分子の溶媒、例えばアルコールに溶解
するものを用いる。In this invention, the solid electrolyte used is one containing polysiloxane or a derivative thereof in the polymer as described above. Polysiloxane is a polymer compound having a so-called chiroxane bond, and has the following formula % R, = methyl group, ethyl group, phenyl group, vinyl group, fluoro group, and other inorganic and organic groups as polysiloxane or its derivatives. , a solvent for the polymer constituting the solid electrolyte, such as one that is soluble in alcohol, is used.
このような成分を含む高分子固体電解質を用い、各種お
よびその間を覆って固体電解質層を設けるには、通常ｄ
電気化学式ガスセンサの製造と同様の手段が採用される
。例えば、固体電解質を構成する高分子およびポリシロ
キサンまたはその誘導体を、適当な溶媒に溶解して、い
わゆるキャスティングにより、所定の厚みを有する固体
電解質層を形成することができる。In order to use a solid polymer electrolyte containing such components and to provide a solid electrolyte layer covering each type and between them, d is usually used.
Similar measures are adopted for manufacturing electrochemical gas sensors. For example, a solid electrolyte layer having a predetermined thickness can be formed by dissolving the polymer and polysiloxane or its derivatives constituting the solid electrolyte in a suitable solvent and by so-called casting.
固体電解質層の厚みは、通常の電気化学式ガスセンサと
同じ程度かより厚く形成することができる。すなわち、
この発明で用いる固体電解質層は、固体電解質層の厚み
が厚くても良好な応答速度が得られるのである。固体電
解質層の厚みが分厚い程、製造が容易になるとともにイ
ンピーダンスが低くなるので、このような条件を考慮し
て、固体電解質層の厚みを決定する。具体的には、使用
条件等によっても異なるが、通常、１０〜５０μｍ程度
が好ましい。The thickness of the solid electrolyte layer can be formed to be approximately the same as or thicker than that of a normal electrochemical gas sensor. That is,
The solid electrolyte layer used in this invention can provide good response speed even if the solid electrolyte layer is thick. The thicker the solid electrolyte layer is, the easier it is to manufacture and the lower the impedance is, so the thickness of the solid electrolyte layer is determined in consideration of these conditions. Specifically, it is usually preferably about 10 to 50 μm, although it varies depending on usage conditions and the like.
ポリシロキサンまたはその誘導体は、ガス透過性に優れ
ているという性質を有している。したがって、このよう
なポリシロキサンまたはその誘導体が固体電解質を構成
する高分子に含まれていれば、固体電解質層のガス透過
性が向上する。固体電解質層のガス透過性が高ければ、
センサの応答速度が良好になりガス感度が向上する。ま
た、固体電解質層の厚みが増えてもセンサの応答速度が
低下しないので、固体電解質層の厚みを増やすことがで
きる。固体電解質層の厚みが増えれば、均一な膜を容易
に形成できるので製造が簡単になるとともに、インピー
ダンスが小さくなる。以上の結果、センサ素子の感度が
向上する。Polysiloxane or its derivatives have excellent gas permeability. Therefore, if such polysiloxane or its derivative is contained in the polymer constituting the solid electrolyte, the gas permeability of the solid electrolyte layer will be improved. If the gas permeability of the solid electrolyte layer is high,
The response speed of the sensor is improved and the gas sensitivity is improved. Furthermore, since the response speed of the sensor does not decrease even if the thickness of the solid electrolyte layer increases, the thickness of the solid electrolyte layer can be increased. If the thickness of the solid electrolyte layer is increased, a uniform film can be easily formed, which simplifies manufacturing and reduces impedance. As a result of the above, the sensitivity of the sensor element is improved.
ついで、この発明の実施例について、図を参照しながら
以下に説明する。Next, embodiments of the present invention will be described below with reference to the drawings.
第１図および第２図に示すように、絶縁基板１０の表面
に、白金や金等からなる電極、すなわち短冊状の作用極
２０、対極３０および参照極４０が並んで形成されてい
る。電極材料は、上記以外にも、金属または非金属から
なる通常の電極材料が使用できる。各種２０・・・の形
状や配置は、通常の電気化学式ガスセンサと同様の各種
構造に変更することもできる。As shown in FIGS. 1 and 2, electrodes made of platinum, gold, or the like, that is, strip-shaped working electrodes 20, counter electrodes 30, and reference electrodes 40 are formed side by side on the surface of an insulating substrate 10. As the electrode material, in addition to those mentioned above, ordinary electrode materials made of metal or nonmetal can be used. The shapes and arrangements of the various types 20 can also be changed to various structures similar to those of ordinary electrochemical gas sensors.
各種２０・・・の上およびその間を覆って、固体電解質
層５０が形成されている。固体電解質層５０の材料は、
前記したように、スルホン化パーフルオロカーボン等の
高分子電解質材料に、ポリジメチルシロキサン等のシロ
キサンまたはその誘導体をブレンドしたものが用いられ
る。スルホン化パーフルオロカーボンを用いる場合、そ
の溶媒であるアルコールにスルホン化パーフルオロカー
ボンおよびポリジメチルシロキサン等を熔解した混合溶
液を製造し、この溶液を各種２０・・・の上にキャステ
ィングする。A solid electrolyte layer 50 is formed to cover the various types 20 and between them. The material of the solid electrolyte layer 50 is
As described above, a blend of a polymer electrolyte material such as a sulfonated perfluorocarbon and a siloxane such as polydimethylsiloxane or a derivative thereof is used. When using a sulfonated perfluorocarbon, a mixed solution is prepared by dissolving the sulfonated perfluorocarbon, polydimethylsiloxane, etc. in alcohol as a solvent, and this solution is cast on various types of 20....
固体電解質層５０は、各種２０・・・のほぼ全体を覆っ
ているが、各種２０・・・の一部は固体電解質層５０の
外まで延長されて、外部回路との接続用端子部２２，３
２．４２となっている。The solid electrolyte layer 50 covers almost the entirety of each type 20..., but a part of each type 20... is extended to the outside of the solid electrolyte layer 50 to form a terminal portion 22 for connection with an external circuit, 3
It is 2.42.
つぎに、上記のような構造を有するガスセンサ素子の具
体的実施例について詳しく説明する。Next, specific examples of the gas sensor element having the above structure will be described in detail.
実施例１
シリコン基板からなる絶縁基板１０上に、白金からなる
作用極２０．対極３０、および１、金からなる参照極４
０を、それぞれスパツタリングで形成した。つぎに、こ
れらの電極２０・・・全体を覆うとともに、端子部２２
・・・のみは露出するようにして、電解質溶液をキャス
ティングし、固体電解質層５０を形成した。電解質溶液
としては、スルホン化パーフルオロカーボン５重量％、
ポリジメチルシロキサン０．５重量％を含むＤＭＦ溶液
を用いた。Example 1 A working electrode 20 made of platinum is placed on an insulating substrate 10 made of a silicon substrate. Counter electrode 30, and 1, reference electrode 4 made of gold
0 were formed by sputtering. Next, while covering the entirety of these electrodes 20..., the terminal portion 22
. . . was exposed, and an electrolyte solution was cast to form a solid electrolyte layer 50. As the electrolyte solution, 5% by weight of sulfonated perfluorocarbon,
A DMF solution containing 0.5% by weight of polydimethylsiloxane was used.
このようにして製造されたセンサ素子の性能を確認する
ために、ＣＯガスに対するガス感度を測定した。第３図
に試験装置を示している。測定用チェンバー９０内に、
製造されたセンサ素子を置く。各種２０・・・の端子部
２２・・・はリード線９１につなぎ、リード線９１はポ
テンショスタット９２に接続した。ポテンショスタット
９２にはレコーダ９３が接続されている。In order to confirm the performance of the sensor element manufactured in this way, gas sensitivity to CO gas was measured. Figure 3 shows the test equipment. Inside the measurement chamber 90,
Place the manufactured sensor element. The terminal portions 22 of each type 20 were connected to a lead wire 91, and the lead wire 91 was connected to a potentiostat 92. A recorder 93 is connected to the potentiostat 92.
上記のような装置を用い、作用極２０と参照極４０の間
の印加電圧を０．４５ Ｖに保った。チェンバー９０内
の雰囲気を、空気のみの状態からＣＯガスを１０００ｐ
ｐａ＋含む空気に置き換え、作用極２０と対極３０の間
に流れる出力電流の変化を測定した。なお、比較のため
、固体電解質層５０にポリジメチルシロキサンを含まな
い従来構造のガスセンサ素子も製造し、同様の測定を行
った。Using the device as described above, the applied voltage between the working electrode 20 and the reference electrode 40 was maintained at 0.45 V. The atmosphere inside the chamber 90 was changed from air only to 1000p of CO gas.
The change in the output current flowing between the working electrode 20 and the counter electrode 30 was measured by replacing it with air containing pa+. For comparison, a gas sensor element with a conventional structure in which the solid electrolyte layer 50 does not contain polydimethylsiloxane was also manufactured, and the same measurements were performed.
第４図は、上記試験の結果を示している。時間軸の０点
が、ＣＯガスを含む雰囲気に置き換えた時点を示してい
る。出力電流の高さがＣＯガスに対する感度を示す。グ
ラフから明らかなように、この発明の実施例の場合、比
較例に比べてはるかに出力電流が大きく、したがってガ
ス感度が高いと言える。この結果から、固体電解質［５
０にポリシロキサンを含む、この発明のガスセンサ素子
は、従来のものに比べて、ガス感度を大幅に向上させ得
ることが実証された。FIG. 4 shows the results of the above test. The zero point on the time axis indicates the point in time when the atmosphere was replaced with an atmosphere containing CO gas. The height of the output current indicates the sensitivity to CO gas. As is clear from the graph, in the case of the example of the present invention, the output current is much larger than that of the comparative example, and therefore it can be said that the gas sensitivity is high. From this result, solid electrolyte [5
It has been demonstrated that the gas sensor element of the present invention, which contains polysiloxane in zero, can significantly improve gas sensitivity compared to conventional ones.
以上に述べたように、この発明にかかる電気化学式ガス
センサ素子は、固体電解質層に、ガス透過性に優れたポ
リシロキサンまたはその誘導体を含んでいることにより
、ガス感度を大幅に向上させることができる。ガス感度
が高ければ、高精度なガス検出および定量が可能になり
、ガスセンサの用途もしくは需要の拡大に大きく貢献す
ることができる。As described above, the electrochemical gas sensor element according to the present invention can significantly improve gas sensitivity by including polysiloxane or its derivatives with excellent gas permeability in the solid electrolyte layer. . High gas sensitivity enables highly accurate gas detection and quantification, which can greatly contribute to expanding the applications and demand for gas sensors.
第１図はこの発明の実施例を示す断面図、第２図は平面
図、第３図はガス感度の測定装置を示す概略構成図、第
４図は測定結果を示すグラフ図である。
１０・・・絶縁基板 ２０．３０．４０・・・電極５０
・・・固体電解質層
第
図
第２図
５０
０FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is a plan view, FIG. 3 is a schematic configuration diagram showing a gas sensitivity measuring device, and FIG. 4 is a graph showing measurement results. 10... Insulating substrate 20.30.40... Electrode 50
...Solid electrolyte layer Fig. 2 50 0
Claims (1)
が設けられ、各極およびその間を覆って固体電解質層が
設けられた電気化学式ガスセンサ素子において、固体電
解質層が、固体電解質となる高分子にポリシロキサンま
たはその誘導体を含むものからなることを特徴とする電
気化学式ガスセンサ素子。1. In an electrochemical gas sensor element in which a working electrode, a counter electrode, and a reference electrode are provided on the same surface of an insulating substrate, and a solid electrolyte layer is provided covering each electrode and between them, the solid electrolyte layer is made of a polymer that serves as the solid electrolyte. 1. An electrochemical gas sensor element comprising polysiloxane or a derivative thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1337713A JPH03195964A (en) | 1989-12-25 | 1989-12-25 | Electrochemical gas sensor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1337713A JPH03195964A (en) | 1989-12-25 | 1989-12-25 | Electrochemical gas sensor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03195964A true JPH03195964A (en) | 1991-08-27 |
Family
ID=18311266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1337713A Pending JPH03195964A (en) | 1989-12-25 | 1989-12-25 | Electrochemical gas sensor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03195964A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5387329A (en) * | 1993-04-09 | 1995-02-07 | Ciba Corning Diagnostics Corp. | Extended use planar sensors |
-
1989
- 1989-12-25 JP JP1337713A patent/JPH03195964A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5387329A (en) * | 1993-04-09 | 1995-02-07 | Ciba Corning Diagnostics Corp. | Extended use planar sensors |
| US5401376A (en) * | 1993-04-09 | 1995-03-28 | Ciba Corning Diagnostics Corp. | Electrochemical sensors |
| US5503719A (en) * | 1993-04-09 | 1996-04-02 | Ciba Corning Diagnostics Corp. | Extended use planar sensors |
| US5518601A (en) * | 1993-04-09 | 1996-05-21 | Ciba Corning Diagnostics Corp. | Extended use planar sensors |
| US5595646A (en) * | 1993-04-09 | 1997-01-21 | Ciba Corning Diagnostics Corp. | Extended use planar sensors |
| US6068748A (en) * | 1993-04-09 | 2000-05-30 | Berger; Joseph | Extended use planar sensors |
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