JPH03190665A - Abrasive grain in ultraprecise finishing method - Google Patents
Abrasive grain in ultraprecise finishing methodInfo
- Publication number
- JPH03190665A JPH03190665A JP1313220A JP31322089A JPH03190665A JP H03190665 A JPH03190665 A JP H03190665A JP 1313220 A JP1313220 A JP 1313220A JP 31322089 A JP31322089 A JP 31322089A JP H03190665 A JPH03190665 A JP H03190665A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive grains
- polishing
- workpiece
- processing
- pressing force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006061 abrasive grain Substances 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims description 7
- 238000003825 pressing Methods 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 11
- 239000002245 particle Substances 0.000 claims description 5
- 238000007730 finishing process Methods 0.000 claims description 3
- 239000011162 core material Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 abstract description 22
- 239000007771 core particle Substances 0.000 abstract description 2
- 239000002861 polymer material Substances 0.000 abstract 2
- 238000007740 vapor deposition Methods 0.000 abstract 2
- 238000003754 machining Methods 0.000 description 10
- 238000009499 grossing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明は、被加工物表面の鏡面仕上げ加工（研磨加工
）を行なう超精密仕上げ加工法の研磨材として使用され
る砥粒の改良に関するものである。[Detailed Description of the Invention] <Industrial Application Field> This invention relates to the improvement of abrasive grains used as an abrasive material in ultra-precision finishing processing for mirror-finishing (polishing) the surface of a workpiece. It is.
〈従来の技術及びその問題点〉
従来、此種の超精密仕上げ加工法は回転ベッド上にセッ
トした被加工物の加工表面（研磨面）と回転ベッドの上
方に上下動自在で且つ回転自在に設置された加工工具の
加圧面との間に、Ｂ４Ｃ又はＣＢＮなどからなる硬質砥
粒を供給介在させ、加工工具を下降させての押圧力と回
転ベッドの回転に伴う被加工物の繰り返し移動により砥
粒を被加工物の加工表面に繰り返し摺合わせて該加工表
面の鏡面仕上げ加工を行なっていた。<Conventional technology and its problems> Conventionally, this type of ultra-precision finishing method involves processing the processing surface (polishing surface) of a workpiece set on a rotating bed and a machine that can move vertically and freely above the rotating bed. Hard abrasive grains made of B4C or CBN are supplied between the pressure surface of the installed processing tool, and the pressing force of lowering the processing tool and the repeated movement of the workpiece as the rotating bed rotates. Abrasive grains are repeatedly rubbed against the machined surface of the workpiece to give the machined surface a mirror finish.
然るに、上記した従来加工法は硬質で異形状を呈する硬
質砥粒に押圧力（加工圧）を与えて加工表面からの材料
の微小除去（微小破壊）を行なうために、機械的切削作
用（物理的研磨）で被加工物の加工表面が微小破壊を繰
り返して研磨平滑化が進行する過程で硬質砥粒の角部等
の加工表面への衝突によって該加工表面にはどうしても
クラッチ（ひっかき傷）等の応力歪が残り、そのクラッ
チ等の応力歪の発生を完全には避けることができず、即
ち研磨平滑性を維持することができず、クラッチ等の応
力歪がない超精密な鏡面仕上げ加工精度を望むことはで
きない。However, in the conventional processing method described above, mechanical cutting action (physical During polishing, the surface of the workpiece undergoes repeated micro-destructions during polishing, and during polishing and smoothing, collisions of hard abrasive grains with the corners of the surface inevitably cause scratches on the surface. The stress and distortion of the clutch, etc. remains, and the occurrence of stress and distortion of the clutch, etc. cannot be completely avoided, which means that polishing smoothness cannot be maintained, and ultra-precision mirror finish machining accuracy with no stress and distortion of the clutch, etc. cannot hope for.
〈発明が解決しようとする課題〉
本発明はこの様な従来事情に鑑みてなされたものであり
、その技術的課題は面精度の優れた超精密な鏡面仕上げ
加工が得られ、しかも加工能率の向上を図り得る全く新
しく開発した超精密仕上げ加工法の砥粒を提供すること
にある。<Problems to be Solved by the Invention> The present invention has been made in view of the above-mentioned conventional circumstances, and its technical problem is to obtain ultra-precise mirror finish processing with excellent surface accuracy, while also improving processing efficiency. Our objective is to provide abrasive grains for a completely newly developed ultra-precision finishing process that can be improved.
〈技術的課題を達成するための手段〉
上記した課題を達成するために本発明が講じる技術的手
段は、回転ベッド上にセットした被加工物の加工表面と
上下動自在で且つ回転自在に設置された加工工具の加圧
面との間に供給介在する砥粒を優れた弾力性を有する高
分子系材にて形成した芯材粒子の表面に、研磨作用を有
する機能性材料をスパッタ蒸着せしめた球形状に形成し
てなることを特徴とする。<Means for Achieving the Technical Problems> The technical means taken by the present invention to achieve the above-mentioned problems is a system that is installed so as to be movable up and down and rotatable with respect to the processing surface of a workpiece set on a rotating bed. A functional material with an abrasive action is sputter-deposited on the surface of core particles made of a polymeric material with excellent elasticity, which are interposed between the abrasive grains and the pressurizing surface of the processed tool. It is characterized by being formed into a spherical shape.
〈作 用〉
而して、上記した本発明の技術的手段によれば、加工工
具の下降により押圧力（加工圧）が与えられると砥粒は
その押圧力に平行して撓み変形し、それによって内部に
弾性応力を付与した状態で且つ被加工物の加工表面に対
して摺合う接触が面接触状態になって該加工表面と加工
工具の加圧面との間に介在され、回転ベッドの回転に伴
う被加工物の移動により加工表面の研磨加工を行なう。<Function> According to the above-mentioned technical means of the present invention, when pressing force (processing pressure) is applied by lowering the processing tool, the abrasive grains are deflected and deformed in parallel to the pressing force. With the internal elastic stress applied, the sliding contact with the machining surface of the workpiece becomes a surface contact state, which is interposed between the machining surface and the pressurizing surface of the machining tool, and the rotating bed rotates. Polishing of the machined surface is performed by moving the workpiece along with the movement of the workpiece.
〈実施例〉
本発明の実施の一例を図面に基づいて以下説明すると、
第１図は超精密仕上げ加工法の加工概略図（原理図）を
示し、（１）は回転ベッド、（２）はこの回転ベッド（
１）の上方に上下動自在に設置された加工工具、（３）
は回転ベッド（１）上に押えクラップ等の周知の係脱手
段によって取付はセットした被加工物、（４）は球形弾
性砥粒であり、この砥粒（４）に加工工具（２）の下降
による押圧力（加工圧）を与え、回転ベッド（１）の回
転に伴う被加工物（３）の移動により該被加工物（３）
の加工表面（３ａ）に砥粒（４）を摺合わせて機械的切
削作用（物理的研磨）により加工表面（３ａ）の材料の
微小破壊を繰り返して該加工表面（３ａ）の鏡面仕上げ
加工、所謂研磨加工を行なう。<Example> An example of implementing the present invention will be described below based on the drawings.
Figure 1 shows a processing schematic diagram (principle diagram) of the ultra-precision finishing method, where (1) is a rotating bed and (2) is this rotating bed (
1) A processing tool installed above it so that it can move up and down, (3)
(4) is a spherical elastic abrasive grain. A pressing force (processing pressure) is applied by descending, and the workpiece (3) is moved as the rotating bed (1) rotates.
Mirror-finishing of the processed surface (3a) by repeating micro-destruction of the material of the processed surface (3a) by mechanical cutting action (physical polishing) by rubbing the abrasive grains (4) together on the processed surface (3a), A so-called polishing process is performed.
上記球形弾性砥粒（４）は、加工工具（２）の下降によ
り与えられる押圧力（加工圧）に平行した撓み量をもっ
て撓み変形した際に内部に発生する弾性応力、換言すれ
ば、被加工物（３）の加工表面（３ａ）に対する接触加
工応力が該加工表面（３ａ）との摺合いによる機械的切
削作用によって研磨を行なう所謂被加工物との物理的研
磨が可能な優れた弾力性を有する高分子系材、本実施例
にあっては、ポリアミドやポリカーボネイトなどによっ
て球形状に形成した芯材粒子（４ａ）の表面に、研磨作
用を有する機能性材料（４ｂ）例えばＮｄ材、又はＮｄ
−Ｆｅ−Ｂ材などをスパッタ蒸着して所望の粒径（粒度
）に形成する（第４図参照）。The above-mentioned spherical elastic abrasive grains (4) are caused by the elastic stress generated inside the grains when they are deformed with an amount of deflection parallel to the pressing force (processing pressure) applied by lowering the processing tool (2). Excellent elasticity that enables physical polishing with the so-called workpiece, where the contact processing stress on the workpiece surface (3a) of the object (3) is polished by mechanical cutting action due to sliding contact with the workpiece surface (3a). In this example, a functional material having an abrasive action (4b) such as Nd material, or Nd
-Fe--B material or the like is sputter-deposited to form a desired particle size (see FIG. 4).
尚、この球形弾性砥粒（４）の粒径は加工表面（３２）
の凸凹部の表面荒さに応じて任意に設定し、その表面荒
さに応じた粒径のものを使用する。In addition, the particle size of this spherical elastic abrasive grain (4) is the same as that of the machined surface (32).
The particle size is arbitrarily set depending on the surface roughness of the uneven portions, and a particle size corresponding to the surface roughness is used.
次に、以上の如き構成した球形弾性砥粒（４）を用いた
本実施例の超精密仕上げ加工法を説明すると、球形弾性
砥粒（４）を周知の如く粘性を有する流体中に混入させ
て被加工物（３）がセットされた回転ベッド（１）を内
在する加工容器（５）に投入供給して被加工物（３）の
加工表面（３ａ）と加工工具（２）の加圧面（２ａ）と
の両者間に介在させ、加工工具（２）を下降させる。す
ると、被加工物（３）の加工表面（３ａ）と加工工具（
２）の加圧面（２ａ）との両者間に介在された球形弾性
砥粒（４）は加工工具（２）の下降により与えられる押
圧力（加工圧）に平行して撓み変形し、加工表面（３ａ
）に対する接触状態が点接触から面接触状態になって内
部に被加工物（３）の物理的研磨が可能な弾性応力が付
与維持された状態で前記両者間に介在される（第２図及
び第３図参照）。Next, to explain the ultra-precision finishing method of this embodiment using the spherical elastic abrasive grains (4) configured as above, the spherical elastic abrasive grains (4) are mixed into a viscous fluid as is well known. The rotating bed (1) with the workpiece (3) set thereon is fed into the processing container (5) therein, and the machining surface (3a) of the workpiece (3) and the pressurizing surface of the processing tool (2) are fed. (2a) and lower the processing tool (2). Then, the machining surface (3a) of the workpiece (3) and the machining tool (
The spherical elastic abrasive grains (4) interposed between the pressing surface (2a) of 2) are deformed in parallel with the pressing force (processing pressure) applied by lowering the processing tool (2), and the processing surface (3a
) changes from a point contact to a surface contact state, and an elastic stress capable of physically polishing the workpiece (3) is applied and maintained between the two (Figs. 2 and 3). (See Figure 3).
そして、回転ベッド（１）の回転に伴う被加工物（３）
の移動が開始すると、球形弾性砥粒（４）は撓み変形に
伴う内部弾性応力をもって加工表面（３ａ）との接触加
工応力を一定に保ちながら該加工表面（３ａ）と摺合い
、その加工表面（３ａ）の凸凹部のうち凸部に弾性変形
作用のもとて優先的に接触摺合って該凸部の微小破壊を
繰り返して加工表面（３ａ）の研磨平滑化を進行させ、
該加工表面（３ａ）の超精密な鏡面仕上げ加工を行なう
。The workpiece (3) accompanying the rotation of the rotating bed (1)
When the movement of the spherical elastic abrasive grains (4) starts, the spherical elastic abrasive grains (4) slide against the machined surface (3a) while keeping the contact processing stress constant with the machined surface (3a) with internal elastic stress accompanying the bending deformation, and the machined surface The convex portions of the convex and concave portions in (3a) contact and slide preferentially under the action of elastic deformation to repeatedly cause micro-destruction of the convex portions, thereby progressing polishing and smoothing of the machined surface (3a);
The processed surface (3a) is subjected to ultra-precise mirror finishing.
〈発明の効果〉
本発明の超精密仕上げ加工における砥粒は叙上の如く構
成してなるから、下記の作用効果を奏する。<Effects of the Invention> Since the abrasive grains in the ultra-precision finishing process of the present invention are configured as described above, the following effects are achieved.
■回転ベッド上にセットされた被加工物の加工表面と加
工工具の加圧面との間に介在された球形弾性砥粒は、加
工工具の下降により与えられる押圧力（加工圧）に平行
した撓み量をもって撓み変形し、被加工物の加工表面に
対して摺合う接触が面接触状態になり、しかも押圧力に
応じて付与される内部弾性応力のもとて一定の接触加工
応力（物理的研磨作用）を保ちながら摺合って加工表面
の研磨加工を行なうことから、スラッチ（ひっかき傷）
等の応力歪の発生がなく、加工表面の研磨平滑性を維持
しながら該加工表面の微小破壊を繰り返してその研磨平
滑化を進行することが出来る。■The spherical elastic abrasive grains interposed between the machining surface of the workpiece set on the rotating bed and the pressurizing surface of the machining tool bend in parallel to the pressing force (processing pressure) applied by lowering the machining tool. The sliding contact with the machined surface of the workpiece becomes a surface contact state, and the contact processing stress (physical polishing) is very constant due to the internal elastic stress applied according to the pressing force. Since the machined surface is polished by sliding together while maintaining the
There is no generation of stresses and strains such as, and the polishing and smoothing of the processed surface can be progressed by repeating micro-destruction of the processed surface while maintaining the polished smoothness of the processed surface.
従って、被加工物の加工表面の超精密な鏡面仕上げ加工
が可能となり、加えて加工表面との摺合わせが面接触で
あるために加工能率の向上を図ることが出来る。Therefore, it is possible to perform ultra-precise mirror finishing on the processing surface of the workpiece, and in addition, since the sliding contact with the processing surface is surface contact, it is possible to improve processing efficiency.
■加工工具の下降による押圧力に応じた球形弾性砥粒の
撓み量を任意に調整しなから該砥粒の加工表面に対する
接触加工応力を制御する加工法を、加工表面の研磨平滑
化が進行する過程で行なうことが可能であるから、加工
表面の研磨開始初期時における該加工表面の凸凹部が荒
い場合、球形弾性砥粒を最大限に撓み変形せしめた加工
表面との面接触状態にて研磨加工を行ない、そして、凸
部が優先的に研磨加工されて該凸部が凹部に近ずく加工
表面の研磨平滑化が進行するにつれて球形弾性砥粒の撓
み量を徐々に小さくして加工表面に対する面接触状態を
変えながら該加工表面の超精密な鏡面仕上げ加工を行な
うといった全く新しい加工法を実現でき、有益且つ実用
的効果が大なる球形弾性砥粒どなる。■A processing method in which the amount of deflection of the spherical elastic abrasive grains is arbitrarily adjusted according to the pressing force caused by the descending of the processing tool, and the contact processing stress of the abrasive grains on the processing surface is controlled. Polishing and smoothing of the processing surface progresses. Therefore, if the surface to be machined is rough at the initial stage of polishing, it can be carried out in the state of surface contact with the machined surface where the spherical elastic abrasive grains are deformed to the maximum extent. Polishing is performed, and as the convex portions are polished preferentially and the convex portions approach the concave portions, and as the polishing and smoothing of the machined surface progresses, the amount of deflection of the spherical elastic abrasive grains is gradually reduced to improve the polishing of the machined surface. It is possible to realize a completely new processing method in which ultra-precise mirror finish processing is performed on the processed surface while changing the surface contact state with respect to the surface, and the spherical elastic abrasive grains have a large beneficial and practical effect.
依って、所期の目的を達成し得た。Therefore, the intended purpose was achieved.
第１図は超精密仕上げ加工法の加工概略図、第２図は球
形弾性砥粒に加工工具による押圧力（加工圧）が与えら
れていない状態を示す要部の拡大図、第３図は加工工具
による押圧力が与えられて球形弾性砥粒が撓み変形した
状態を示す同拡大図、第４図は本発明球形弾性砥粒を示
す拡大断面図である。
尚、図中Figure 1 is a processing schematic diagram of the ultra-precision finishing method, Figure 2 is an enlarged view of the main part showing the state in which no pressing force (processing pressure) is applied to the spherical elastic abrasive grains by the processing tool, and Figure 3 is FIG. 4 is an enlarged view showing a state in which the spherical elastic abrasive grains are bent and deformed by the pressing force applied by the processing tool, and FIG. 4 is an enlarged sectional view showing the spherical elastic abrasive grains of the present invention. In addition, in the figure
Claims (1)
転ベッドの上方に上下動自在で且つ回転自在に設置され
た加工工具の加圧面との間に砥粒を介在し、この砥粒を
加工工具による押圧力と回転ベッドの回転に伴う被加工
物の繰り返し移動により被加工物の加工表面に摺合わせ
て該加工表面の研磨加工を行なう超精密仕上げ加工法に
於いて、前記砥粒を優れた弾力性を有する高分子系材に
て形成した芯材粒子の表面に、研磨作用を有する機能性
材料をスパッタ蒸着せしめた球形状に形成してなること
を特徴とする超精密仕上げ加工法における砥粒。Abrasive grains are interposed between the processing surface of the workpiece set on a rotating bed and the pressurizing surface of a processing tool installed above the rotating bed so as to be able to move up and down and freely rotate, and process these abrasive grains. In an ultra-precision finishing method in which the workpiece is polished by sliding it against the workpiece surface by repeatedly moving the workpiece in conjunction with the pressing force of a tool and the rotation of a rotary bed, the above-mentioned abrasive grains are used as superior materials. In an ultra-precision finishing process characterized by forming a spherical shape by sputter-depositing a functional material having an abrasive action on the surface of a core material particle made of a polymeric material having elasticity. Abrasive grain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1313220A JPH03190665A (en) | 1989-11-30 | 1989-11-30 | Abrasive grain in ultraprecise finishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1313220A JPH03190665A (en) | 1989-11-30 | 1989-11-30 | Abrasive grain in ultraprecise finishing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03190665A true JPH03190665A (en) | 1991-08-20 |
Family
ID=18038557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1313220A Pending JPH03190665A (en) | 1989-11-30 | 1989-11-30 | Abrasive grain in ultraprecise finishing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03190665A (en) |
-
1989
- 1989-11-30 JP JP1313220A patent/JPH03190665A/en active Pending
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