JPH03187143A - Sample stage - Google Patents
Sample stageInfo
- Publication number
- JPH03187143A JPH03187143A JP32549989A JP32549989A JPH03187143A JP H03187143 A JPH03187143 A JP H03187143A JP 32549989 A JP32549989 A JP 32549989A JP 32549989 A JP32549989 A JP 32549989A JP H03187143 A JPH03187143 A JP H03187143A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- sample
- base
- electron lens
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、走査電子顕微鏡（ＳＥＭ）やエレクトロプ
ローブマイクロアナライザ（ＥＰＭＡ）等の微小部の観
察や分析を行う装置における試料設置用の試料ステージ
に関する。[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to a sample stage for mounting a sample in an apparatus for observing and analyzing minute parts such as a scanning electron microscope (SEM) or an electroprobe microanalyzer (EPMA). Regarding.
ＳＥＭやＥＰＭＡ等を使用して試料を観察或いは分析す
る場合、電子線を試料に当て発生する二次電子を検出器
で検出・増幅して陰極線管上に像を形成させる。この場
合試料は防振しなければならない。従来の防振対策とし
ては試料ホルダに該試料ホルダ上面より突出した剛体棒
を取付け、試料ホルダを載置した試料ステージをＺ方向
（上方向）に駆動して該剛体棒を電子レンズヨークに押
し当て、電子レンズヨークと試料ホルダとを一体とする
ことで試料と電子レンズとの相対的振動を少なくすると
いう方法が取られていた。When observing or analyzing a sample using a SEM, EPMA, or the like, an electron beam is applied to the sample, secondary electrons generated are detected and amplified by a detector, and an image is formed on a cathode ray tube. In this case the specimen must be vibration-isolated. Conventional anti-vibration measures include attaching a rigid rod protruding from the top surface of the sample holder to the sample holder, and driving the sample stage on which the sample holder is placed in the Z direction (upward) to push the rigid rod against the electron lens yoke. A method has been adopted in which the relative vibration between the sample and the electron lens is reduced by integrating the electron lens yoke and the sample holder.
試料と電子レンズとの距離は試料の凹凸に応じて成る程
度変化させる方が好ましいが、上記する従来の方法では
試料を設置した時点で決まってしまうという不自由があ
る。また、試料と試料ステージ間の一体性の方が試料と
電子レンズとの一体性に勝るため振動対策としての効果
も不充分であるという問題がある。この発明はかかる課
題を解決するためになされたものである。Although it is preferable to vary the distance between the sample and the electron lens to a certain extent depending on the unevenness of the sample, the conventional method described above has the disadvantage that it is determined at the time the sample is placed. Furthermore, since the integrity between the sample and the sample stage is superior to the integrity between the sample and the electron lens, there is a problem that the effect as a countermeasure against vibration is insufficient. This invention has been made to solve this problem.
即ち、この発明は上記する課題を解決するために、試料
ステージが、試料ホルダを設置する２ステージを上方に
駆動するＺステージ駆動装置と、これら試料ホルダとＺ
ステージとＺステージ駆動装置と電子レンズ下面に当接
させる剛体棒とを設置するＺベースと、ｔＨｚベースと
弾性体を介して接続するＸ−Ｙステージと、前記Ｚベー
スと弾性体を介して接続されると共に該Ｚベースを上方
に移動させる押し上げ装置とより威ることを特徴とする
。That is, in order to solve the above-mentioned problems, the present invention includes a Z-stage drive device for driving upward two stages on which a sample holder is installed, and a Z-stage drive device for moving these sample holders and Z
A Z base on which a stage, a Z stage drive device, and a rigid rod that is brought into contact with the lower surface of an electron lens are installed; an X-Y stage that is connected to a tHz base via an elastic body; and an X-Y stage that is connected to the Z base via an elastic body. It is characterized by a pushing up device that moves the Z base upward at the same time as it is pushed up.
上記手段とすれば、試料と電子レンズとの距離を変化さ
せることが出来ると同時に防振措置を講することが出来
る。また、Ｚ方向に押し上げられる試料ホルダや試料ス
テージ等を剛体棒により電子レンズに剛性的に接続し、
Ｚステージ及び該Ｚステージ駆動装置をＸ−Ｙステージ
に弾性的に接続することで試料ホルダと各試料ステージ
及び試料と電子レンズ間の一体性をも確保することが出
来る。With the above means, it is possible to change the distance between the sample and the electron lens and at the same time take anti-vibration measures. In addition, the sample holder, sample stage, etc. that can be pushed up in the Z direction are rigidly connected to the electron lens using a rigid rod.
By elastically connecting the Z stage and the Z stage driving device to the XY stage, it is also possible to ensure the integrity between the sample holder and each sample stage, and between the sample and the electron lens.
以下、この発明の具体的実施例について図面を参照して
説明する。Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.
第１図はこの発明にかかる試料ステージの構成図である
。ｌは電子を小さく焦点に集めるための電子レンズであ
る。２は試料ホルダであってＺステージ３の上に設置さ
れる。該Ｚステージ３は前記試料ホルダ２と共にＺステ
ージ駆動装置４により上方へ移動させるようにしである
。従って試料ホルダ２に収納された試料Ｍと電子レンズ
ｌとの距離は該試料面の凹凸に対応しである程度変化さ
せられるようになる。５はＺベースであって前記試料ホ
ルダ２とＺステージ３及びＺステージ駆動装置４を設置
するようになっているが、別に剛体棒６（この場合三本
）を固定しである。該剛体棒６は後述する押し上げ装置
１０によってＺベース５が押し上げられた時電子レンズ
１の下面に当接させられる。FIG. 1 is a configuration diagram of a sample stage according to the present invention. 1 is an electron lens for concentrating electrons into a small focus. Reference numeral 2 denotes a sample holder, which is installed on the Z stage 3. The Z stage 3 is moved upward together with the sample holder 2 by a Z stage driving device 4. Therefore, the distance between the sample M housed in the sample holder 2 and the electron lens l can be changed to some extent depending on the unevenness of the sample surface. Reference numeral 5 denotes a Z base on which the sample holder 2, Z stage 3, and Z stage drive device 4 are installed, and rigid rods 6 (three in this case) are separately fixed thereto. The rigid rod 6 is brought into contact with the lower surface of the electronic lens 1 when the Z base 5 is pushed up by a pushing up device 10, which will be described later.
次に、７はＸ−Ｙステージであってバネ８．８を介して
前記Ｚベース５に接続されている。該Ｘ・Ｙステージ７
はＸ−Ｙステージ駆動装置９によりＺべ〜ス５及び設置
された試料ホルダ２等をＸ、Ｙ方向に移動させるように
なっているが、前記バネ８．８によりＸ−Ｙステージ駆
動装置９からの振動はカットされることになる。Next, 7 is an XY stage, which is connected to the Z base 5 via a spring 8.8. Applicable X/Y stage 7
The X-Y stage drive device 9 moves the Z base 5 and the installed sample holder 2 in the X and Y directions. The vibrations from the
１０は押し上げ装置であってブロック１１、バネ１２、
ブロックエ３を介して前記Ｚベース５に接続され、該Ｚ
ベース５を独自にＺ方向に押し上げるようになっている
。該押し上げ装置１ｏは２ベース５を上に押し上げ、前
記剛体棒６を電子レンズｌの下面に当接させる。この場
合前記バネ１２は該押し上げ装置１０の駆動モータ（図
示せず）の励磁を切った時駆動機構のバックラッシュを
吸収する役割を果たすと同時にブロック１１面と剛体棒
６の先端面との非平行変分を吸収する役目をする。10 is a push-up device including a block 11, a spring 12,
connected to the Z base 5 via the block
It is designed to independently push up the base 5 in the Z direction. The pushing up device 1o pushes up the second base 5 and brings the rigid rod 6 into contact with the lower surface of the electronic lens l. In this case, the spring 12 serves to absorb the backlash of the drive mechanism when the drive motor (not shown) of the push-up device 10 is de-energized, and at the same time, the spring 12 plays a role of absorbing the backlash of the drive mechanism when the drive motor (not shown) of the push-up device 10 is turned off. It serves to absorb parallel variations.
この発明の構成は以上のようであるがこれらは真空チャ
ンバー１４に設置される。これにより試料Ｍと電子レン
ズ１との距離を変化させることが出来ると同時に防振措
置を講することが出来る。The configuration of the present invention is as described above, and these are installed in the vacuum chamber 14. Thereby, it is possible to change the distance between the sample M and the electron lens 1, and at the same time, it is possible to take anti-vibration measures.
また、２方向に押し上げられる試料ホルダ２や試料ステ
ージ３等は剛体棒６により電子レンズ１に剛性的に接続
し、Ｚステージ３及び該Ｚステージ駆動装置４をＸ−Ｙ
ステージ７に弾性的に接続することで試料ホルダと各試
料ステージ及び試料Ｍと電子レンズ１間の一体性も確保
することが出来る。In addition, the sample holder 2, sample stage 3, etc. that are pushed up in two directions are rigidly connected to the electron lens 1 by a rigid rod 6, and the Z stage 3 and the Z stage drive device 4 are
By elastically connecting to the stage 7, integrity between the sample holder and each sample stage, as well as between the sample M and the electron lens 1 can be ensured.
この発明にかかる試料ステージは以上詳述したような構
成としたので、試料と電子光学系との間の相対的振動を
より一層減少させることが出来、解像度の高い映像が得
られるようになる。Since the sample stage according to the present invention has the configuration described in detail above, the relative vibration between the sample and the electron optical system can be further reduced, and a high-resolution image can be obtained.
【図面の簡単な説明】
第１図はこの発明にかかる試料ステージの構成図である
。
１・・−電子レンズ ２−試料ホルダ
３−・−Ｚステージ ４・−Ｚステージ駆動装置５−Ｚ
ベース ６−剛体棒 ７−Ｘ −Ｙステージ８．１２−
・バネ ９−・・Ｘ−Ｙステージ駆動装置０
・−押し上げ装置BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a configuration diagram of a sample stage according to the present invention. 1...-electronic lens 2-sample holder 3--Z stage 4-Z stage drive device 5-Z
Base 6-Rigid rod 7-X -Y stage 8.12-
・Spring 9-...X-Y stage drive device 0 ・-Pushing device
Claims (1)
るＺステージ駆動装置と、これら試料ホルダとＺステー
ジとＺステージ駆動装置と電子レンズ下面に当接させる
剛体棒とを設置するＺベースと、該Ｚベースと弾性体を
介して接続されるＸ・Ｙステージと、前記Ｚベースと弾
性体を介して接続されると共に該Ｚベースを上方に移動
させる押し上げ装置とより成ることを特徴とする試料ス
テージ。(1) A Z stage drive device that drives the Z stage upward on which the sample holder is installed; a Z base that installs the sample holder, the Z stage, the Z stage drive device, and a rigid rod that is brought into contact with the lower surface of the electron lens; A sample comprising: an X/Y stage connected to the Z base via an elastic body; and a push-up device connected to the Z base via an elastic body and for moving the Z base upward. stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32549989A JPH03187143A (en) | 1989-12-15 | 1989-12-15 | Sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32549989A JPH03187143A (en) | 1989-12-15 | 1989-12-15 | Sample stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03187143A true JPH03187143A (en) | 1991-08-15 |
Family
ID=18177561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32549989A Pending JPH03187143A (en) | 1989-12-15 | 1989-12-15 | Sample stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03187143A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014116185A (en) * | 2012-12-10 | 2014-06-26 | Jeol Ltd | Sample positioning device, charged particle beam device, and sample holder |
| JP2016115513A (en) * | 2014-12-15 | 2016-06-23 | 株式会社ホロン | Image vibration reduction device |
-
1989
- 1989-12-15 JP JP32549989A patent/JPH03187143A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014116185A (en) * | 2012-12-10 | 2014-06-26 | Jeol Ltd | Sample positioning device, charged particle beam device, and sample holder |
| EP2741311A3 (en) * | 2012-12-10 | 2016-07-13 | JEOL Ltd. | Specimen positioning device, charged particle beam system, and specimen holder |
| JP2016115513A (en) * | 2014-12-15 | 2016-06-23 | 株式会社ホロン | Image vibration reduction device |
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