JPH0313465Y2 - - Google Patents

Info

Publication number: JPH0313465Y2
Authority: JP; Japan
Prior art keywords: partition wall; exhaust; casing; air supply; opening area
Prior art date: 1986-05-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP1986070001U

Other languages

English (en)

Japanese (ja)

Other versions

JPS62181519U (fr

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-05-12

Filing date

1986-05-12

Publication date

1991-03-27

1986-05-12 Application filed filed Critical

1986-05-12 Priority to JP1986070001U priority Critical patent/JPH0313465Y2/ja

1987-11-18 Publication of JPS62181519U publication Critical patent/JPS62181519U/ja

1991-03-27 Application granted granted Critical

1991-03-27 Publication of JPH0313465Y2 publication Critical patent/JPH0313465Y2/ja

Status Expired legal-status Critical Current

Links

238000005192 partition Methods 0.000 claims description 15
238000000638 solvent extraction Methods 0.000 claims 1
235000012431 wafers Nutrition 0.000 description 28
238000004519 manufacturing process Methods 0.000 description 12
239000004065 semiconductor Substances 0.000 description 12
238000000034 method Methods 0.000 description 8
230000003749 cleanliness Effects 0.000 description 3
238000011109 contamination Methods 0.000 description 3
239000000428 dust Substances 0.000 description 3
239000004020 conductor Substances 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000009434 installation Methods 0.000 description 2
238000012423 maintenance Methods 0.000 description 2
238000011144 upstream manufacturing Methods 0.000 description 2
238000004140 cleaning Methods 0.000 description 1
238000000576 coating method Methods 0.000 description 1
238000001035 drying Methods 0.000 description 1
239000002184 metal Substances 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1
238000004080 punching Methods 0.000 description 1

Landscapes

Ventilation (AREA)

JP1986070001U 1986-05-12 1986-05-12 Expired JPH0313465Y2 (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1986070001U JPH0313465Y2 (fr)	1986-05-12	1986-05-12

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1986070001U JPH0313465Y2 (fr)	1986-05-12	1986-05-12

Publications (2)

Publication Number	Publication Date
JPS62181519U JPS62181519U (fr)	1987-11-18
JPH0313465Y2 true JPH0313465Y2 (fr)	1991-03-27

Family

ID=30911236

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1986070001U Expired JPH0313465Y2 (fr)	1986-05-12	1986-05-12

Country Status (1)

Country	Link
JP (1)	JPH0313465Y2 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5994840A (ja) *	1982-11-22	1984-05-31	Hitachi Plant Eng & Constr Co Ltd	ウエハ搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58116300U (ja) *	1982-02-02	1983-08-08	日本電気株式会社	コンベヤ装置

1986
- 1986-05-12 JP JP1986070001U patent/JPH0313465Y2/ja not_active Expired

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5994840A (ja) *	1982-11-22	1984-05-31	Hitachi Plant Eng & Constr Co Ltd	ウエハ搬送装置

Also Published As

Publication number	Publication date
JPS62181519U (fr)	1987-11-18

Similar Documents

Publication	Publication Date	Title
US5401212A (en)	1995-03-28	Environmental control system
US5195922A (en)	1993-03-23	Environmental control system
US5431599A (en)	1995-07-11	Environmental control system
US5261935A (en)	1993-11-16	Clean air apparatus
JP3309416B2 (ja)	2002-07-29	連結式クリーン空間装置
KR100449975B1 (ko)	2004-09-24	반도체 장치용 크린룸
KR960004224B1 (ko)	1996-03-28	연결식 클리인공간장치
JP3654612B2 (ja)	2005-06-02	クリーンルーム
TWI220290B (en)	2004-08-11	Sheet shape electronic device clean transfer apparatus and manufacturing system for sheet shape electronic device
KR100524359B1 (ko)	2005-10-27	클린 룸용의 물품 보관 설비
US5219464A (en)	1993-06-15	Clean air apparatus
JP3225344B2 (ja)	2001-11-05	処理装置
US5429642A (en)	1995-07-04	Method for transferring wafers from one processing station to another sequentially and system therefor
JP4684683B2 (ja)	2011-05-18	クリーンブースおよびそのクリーンブースを用いた作業システム
JP3774277B2 (ja)	2006-05-10	被処理基板の搬送方法及び処理システム
JP3884570B2 (ja)	2007-02-21	基板処理装置
JPH0313465Y2 (fr)	1991-03-27
JP3697275B2 (ja)	2005-09-21	局所クリーン化におけるインターフェイスボックス及びそのクリーンルーム
JPH09320915A (ja)	1997-12-12	処理装置
JPH0541553Y2 (fr)	1993-10-20
JPH04233747A (ja)	1992-08-21	キャリアストッカ
JP2001284426A (ja)	2001-10-12	ウェハの昇降装置
JP3086910B2 (ja)	2000-09-11	半導体処理装置
JPH0437614Y2 (fr)	1992-09-03
KR20180119788A (ko)	2018-11-05	공조 장치 및 그것을 갖는 기판 처리 장치