JPH0297640A - Sintered hard alloy for precision mold and coated sintered hard alloy for precision mold - Google Patents

Sintered hard alloy for precision mold and coated sintered hard alloy for precision mold

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Publication number
JPH0297640A
JPH0297640A JP24964088A JP24964088A JPH0297640A JP H0297640 A JPH0297640 A JP H0297640A JP 24964088 A JP24964088 A JP 24964088A JP 24964088 A JP24964088 A JP 24964088A JP H0297640 A JPH0297640 A JP H0297640A
Authority
JP
Japan
Prior art keywords
cemented carbide
carbide
hard alloy
sintered hard
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24964088A
Other languages
Japanese (ja)
Other versions
JPH0635638B2 (en
Inventor
Takeshi Saito
斉藤　豪
Shunji Ozoe
尾添　俊二
Mitsuo Ueki
植木　光生
Keiichi Kobori
小堀　景一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP63249640A priority Critical patent/JPH0635638B2/en
Publication of JPH0297640A publication Critical patent/JPH0297640A/en
Publication of JPH0635638B2 publication Critical patent/JPH0635638B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/05—Press-mould die materials
    • C03B2215/07—Ceramic or cermets

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

PURPOSE:To manufacture the title alloy having excellent mirror face characteristics, corrosion resistance and chipping resistance by preparing a sintered hard alloy contg. a bonding phase constituted of specific ratios of Co, Ni and Cr3C2 and the balance WC of specific grain size. CONSTITUTION:A sintered hard alloy contg. a bonding phase constituted of, by weight, 3 to 20% Co and/or Ni and Cr3C2, 3 to 10%, for the amounts of the above Co and/or Ni and the balance WC of <=0.8mu average grain size with inevitable impurities is prepd. At this time, the grating constant of the bonding phase by X-ray diffraction is regulated to the range of 3.558 to 3.569Angstrom because of the control of the alloy carbon content to a low-carbon side in the area of a sound phase. Furthermore, in the inevitable impurities, each content of Ca, S, Si, Al and Mg is regulated to <=0.001%. In this way, the sintered hard alloy for a precision mold useful for molding of glass and plastics can be obtd.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、主としてガラスやプラスチックを被加工材料
とする精密金型用超硬合金に関し、具体的には、例えば
光学機器、映像機器、音響機器及び事務機器分野で用い
られているレンズ、特に非球面レンズ用の金型、コンパ
クトディスク（ＣＤ）やピディオディスク（ＶＤ）など
のディスク用の金型、プリズム用の金型などに適する精
密金型用超硬合金及び精密金ヘリ用被覆超硬合金に関す
るものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a cemented carbide for precision molds mainly used as work materials such as glass and plastics, and specifically for use in optical equipment, video equipment, audio equipment, etc. Precision molds suitable for lenses used in the equipment and office equipment fields, especially molds for aspheric lenses, molds for disks such as compact discs (CDs) and video discs (VDs), molds for prisms, etc. This invention relates to cemented carbide for molds and coated cemented carbide for precision metal edges.

（従来の技術） 般に、精密金型用材料は、研磨仕トした時の鏡面性、被
加工材料に対する耐食性、耐摩耗性、熱伝導性及び耐欠
損性などの特性にすぐれていることが必要である。この
精密金１〒１用材料は。(Prior Art) In general, materials for precision molds are known to have excellent properties such as specularity when polished, corrosion resistance to workpiece materials, abrasion resistance, thermal conductivity, and fracture resistance. is necessary. The material for this precision gold 1〒1 is.

ガラスな被加■゛材料とする場合と、プラスチックを披
加Ｃ材料とする場合では、その必要とする２特性が少し
異なるけれども、一般にはガラス成形にすぐれたｆ＋’
ｌ密合堅川材料用プラスチック成形にも充分にすぐれて
いるものである。Although the required two properties are slightly different when using glass as a material to be added and when using plastic as a material to be added, in general, f+', which is excellent in glass molding,
It is also excellent enough for plastic molding of tightly packed materials.

従来、精密金型用材料としては、１３クロム鋼などのス
テンレス鋼系の材料が使用されてきたが、被加工材料の
高品質化、成形加Ｔ速度の高速化又は成形加「温度の高
温化などが図られるようになる番こ従い、金型の鏡面性
、被加−Ｌ材料との離型性、金型自体の耐酸化性、　ｉ
、＋摩耗性などが問題とされている。このような問題点
を解決しようとして提案されている代表的なものとして
、特開昭６０８６０４）す公・服及び特開昭６０−１３
５５０２号公報がある。Conventionally, stainless steel materials such as 13 chromium steel have been used as materials for precision molds, but improvements in the quality of the workpiece material, faster forming T speed, or higher forming temperatures have been used. The specularity of the mold, the releasability from the applied material, the oxidation resistance of the mold itself, i.
, abrasion, etc. are considered to be problems. Typical proposals that have been made to solve these problems include JP-A-608-604) and JP-A-60-13.
There is a publication No. 5502.

（発明が解決しようとする問題点） 特開昭６０−８６０４）号公報には、タンゲスデンカ−
バイトが８０宵Ｌ％以計−の主成分であることを特徴と
する光学ガラスレンズの直接プレス成形用ＩＱＩ材料が
示されている。この特開昭６０−　８６０４）号公報の
発明は、タングステンカーバイドが８０ｗＬ％以１・含
イｆしていると光字ガラスレンズ成形用型材料としてす
ぐれているというものであるけれども、例えば、従来か
ら金型などの耐摩耗工具用超硬合金として天川化されて
いる４〜２０ｗＬ％Ｃｏ　−８０〜ｇ５ｗし％ＷＣ組成
の超硬合金を光学ガラスレンズ成形用型材料として用い
ても２鏡而性、耐食性及び離型性からステンレス鋼系の
材料と同程度の効果しか期待できないという問題がある
６ 特開昭６０−１３５５０２号公報には、ＷＣ，’ｒｉＣ
。(Problems to be solved by the invention) Japanese Patent Application Laid-Open No. 60-8604 describes
An IQI material for direct press molding of an optical glass lens is disclosed, which is characterized in that the main component is 80 L% or more of byte. The invention of JP-A-60-8604) is that if the tungsten carbide content is 80 wL% or more, it is excellent as a mold material for molding optical glass lenses. Even if a cemented carbide with a composition of 4~20wL%Co-80~g5w%WC, which has been manufactured by Tenkawa as a cemented carbide for wear-resistant tools such as molds, is used as a mold material for molding optical glass lenses, it will not be possible to produce 2 mirrors. There is a problem in that it can only be expected to have the same effect as stainless steel materials in terms of corrosion resistance, corrosion resistance, and mold releasability6.
.

ＣｒＪＣ，、ＴａＣ，ＺｒＣ，ＶＣ，ＭｏａＣ，ＮｂＣ
，Ｔｉｅ、　ＴａＮ。CrJC, TaC, ZrC, VC, MoaC, NbC
, Tie, TaN.

ＺｒＮ、ＶＮのうちの少なくとも１種を含む粉末８０〜
９５　ｆ（ｊ　Ｉｉｊ％にバインダーとしてＮ１及び／
又はｌｌｉ＋ｃｒ５〜２０％を含み、焼結後、高温静水
圧処理（ＩＩＩＰ処理）を施してなるガラスレンズ成形
のための金１％ｆｊ材が示されている。この特開昭６０
−１３５５０２３５５０２号公報ＷＣを含む炭化物、窒
化物とＮ１又はＮｉ＋Ｃｒの結合相とからなるガラス成
形用金型材であって、ｉＭ宋の’ｆｔｃ−Ｃｏ系超硬合
金に比べて−・１食性、１Ｍ　’Ｔｒｉ性及び被加Ｙ二
物であるレンズの表面精度がすぐれ−Ｃいるというもの
であるけれども１例えばＷＣ−Ｎｉ合金の場合（ま耐食
性及び耐離塑性から満足できる効果を発揮できなく　、
　ＷＣ−Ｎｉ　−Ｃｒ合金の場合は製造時にＭ７Ｃ３（
Ｍは合金中の金属元素）を炭化物などの脆性な異相が生
じやすくて工業化し難いという問題がある。Powder containing at least one of ZrN and VN 80~
95 f(j Iij% with N1 and/or as a binder
A 1% gold fj material for forming glass lenses is shown, which contains 5 to 20% of lli+cr and is subjected to high temperature isostatic pressure treatment (IIIP treatment) after sintering. This JP-A-60
-13550235502 Publication A mold material for glass molding consisting of carbide or nitride containing WC and a binder phase of N1 or Ni+Cr, which has a - monocorrosive property, 1M compared to the 'ftc-Co type cemented carbide of the iM Song Dynasty. For example, in the case of a WC-Ni alloy (although it is said that the surface precision of the lens, which is a two-material material to be applied), is excellent, it cannot exhibit satisfactory effects in terms of corrosion resistance and de-plasticity resistance.
In the case of WC-Ni-Cr alloy, M7C3 (
M (metallic element in the alloy) tends to form brittle foreign phases such as carbides, making it difficult to industrialize.

本発明は、ｌ、述のような問題点を解決したもので、具
体的には、　Ｃｏ及び／又はＮ１の晴に対する炭化クロ
ムの晴を調整してなる結合相と微粒の炭化タングステン
とからなる鏡面性、耐食性及び耐欠損性のすぐれたＦ１
’！　’、’！金型用超硬合金、及びその合金の表面に
金属、合金、ダイヤモンド及び各種のセラミックスの中
の少なくとも１種の被膜を形成した精密金望用被葭超硬
合金の提供を［１的とするものである。The present invention solves the problems mentioned above. Specifically, the present invention consists of a binder phase made by adjusting the ratio of chromium carbide to that of Co and/or N1, and fine tungsten carbide. F1 with excellent specularity, corrosion resistance and chipping resistance
'! ','! [1] To provide a cemented carbide for molds, and a cemented carbide for use in precision molding, in which a coating of at least one of metals, alloys, diamonds, and various ceramics is formed on the surface of the alloy. It is something.

（問題点を解決するための手段） 本発明者らは、ガラスやプラスチックを成形して、例え
ば非球面レンズやＣＤなどを得るための１ｌ１１密金Ｊ
ジノ料として最適な超硬合金について検、ｉ−ｊ　Ｌ。(Means for Solving the Problems) The present inventors have developed a method for molding glass or plastic to obtain, for example, aspherical lenses, CDs, etc.
Inspection of the most suitable cemented carbide as a material, i-j L.

でいた所、 まず、精密金型材としては、高温トでガラスやプラスチ
ックの被加圧材との耐溶着性にすぐれていること、被加
圧材に対］”る化学的安定性及び血・）食性にすぐれて
いること、鏡面むらのない鏡面性１性にすぐれているこ
と、並びに強度及び硬度が高くて耐酸化性にすぐれてい
るはど精密金型材に適するという第１の知見を得たもの
である。First of all, as a precision mold material, it has excellent welding resistance with pressurized materials such as glass and plastic at high temperatures, and has excellent chemical stability and resistance to blood and pressure materials. ) The first finding was that it is suitable for precision mold materials because it has excellent edibility, excellent specularity with no specular unevenness, high strength and hardness, and excellent oxidation resistance. It is something that

次に、超硬合金中に生じる欠陥は、鏡面むらや強度低下
の原因になるもので、この欠陥の内、粗粉炭化物、炭化
物凝集体又は結合相ブールでなる欠陥は、微細ＶＣ粒で
なる超硬合金中には発生し難いものである。微細ＶＣ粒
でなる超硬合金を作製する場合には、焼結ｎηの混合粉
末の状態で粗粒ＷＣを極力少なくすることが必要である
が、そのような場合でも焼結工程中のＷＣ粒子の結合相
中への溶解、析出による粒成長が起り、結果的に異常成
長したＷＣ粒子が生じ易い。そのため粒成長抑制剤の添
加が必要不可欠であり、一般に微粒超硬合金に対しては
炭化バナジウムの単独添加、炭化クロムと炭化タンタル
の複合添加などが行われているにのような超硬合金を精
密金型に応用することが有利とまず考えられる。そこで
粒成長抑制効果。Next, defects that occur in cemented carbide cause mirror surface unevenness and a decrease in strength. Among these defects, defects that are caused by coarse carbides, carbide aggregates, or binder phase boule are caused by fine VC grains. It is difficult to occur in cemented carbide. When producing a cemented carbide made of fine VC grains, it is necessary to minimize the amount of coarse WC in the mixed powder of sintered nη, but even in such a case, the WC particles during the sintering process Grain growth occurs due to dissolution and precipitation in the binder phase, and as a result, abnormally grown WC particles are likely to occur. Therefore, it is essential to add a grain growth inhibitor, and generally vanadium carbide is added alone or a combination of chromium carbide and tantalum carbide is added to fine-grained cemented carbide. It is thought that it is advantageous to apply it to precision molds. Therefore, grain growth suppressing effect.

合金の耐欠損性の観点から上記粒成長抑制剤を単独又は
複合添加した場合の合金特性を詳細に調べた結果、耐食
効果にすぐれる炭化クロムを一定量単独で添加し、しか
も添加した炭化クロムをすべて結合相に固溶させた合金
は１粒成長が十分に抑制され、耐欠損性を表わす尺度で
ある破壊靭性値にもすぐれるという第２の知見を得たも
のである。From the viewpoint of chipping resistance of the alloy, we investigated in detail the properties of the alloy when the above grain growth inhibitors were added alone or in combination, and found that chromium carbide, which has excellent corrosion resistance, was added alone in a certain amount, and chromium carbide was added. The second finding is that an alloy in which all of the above are dissolved in the binder phase has sufficient suppression of single grain growth and has an excellent fracture toughness value, which is a measure of fracture resistance.

また、Ｃｏ及び／又は旧に炭化クロムを一定量単独で添
加し、しかも添加した炭化クロムをすべて結合相に固溶
させてなる炭化タングステン−結合相超硬合金は、ガラ
スやプラスチックとの耐溶着性にすぐれており、ガラス
やプラスチックに対する化学的安定性及び耐食性にもす
ぐれているという第３の知見を得たものである。In addition, tungsten carbide-bond phase cemented carbide, which is made by adding a certain amount of Co and/or chromium carbide alone and all of the added chromium carbide is dissolved in the binder phase, is resistant to welding with glass and plastics. The third finding is that it has excellent chemical stability and corrosion resistance against glass and plastics.

さらに、耐食性、耐欠損性、耐溶着性にすぐれていて、
しかも鏡面むらの著しく少ない超硬合金の表面に金属１
合金、ダイヤモンド又は各種のセラミックスの被膜を形
成してなる被覆超硬合金は、超硬合金の表面状態が被膜
に転写されるような状態になるためにすぐれた被膜表面
状態になること、及び超硬合金と被膜との相剰効果でも
って精密金型用材料として適しているという第４の知見
を得たものである。Furthermore, it has excellent corrosion resistance, chipping resistance, and welding resistance.
Moreover, metal 1
Coated cemented carbide formed by forming a coating of alloy, diamond, or various ceramics has an excellent coating surface condition because the surface condition of the cemented carbide is transferred to the coating. The fourth finding is that due to the mutual effect of the hard alloy and the coating, it is suitable as a material for precision molds.

以上、第１．２．３及び４の知見に基づいて本発明を完
成するに至ったものである。The present invention has been completed based on the findings in Sections 1.2.3 and 4 above.

すなわち、本発明の精密金型用超硬合金は、３〜２０ｗ
Ｌ％のＣｏ及び／又はＮｉと該Ｃｏ及び／又はＮ１の量
に対し３〜ｌＯｗＬ％の炭化クロムとでなる結合相と、
残り乎均粒径０．８μｍ以下の炭化タングステンと不可
避不純物とでなることを特徴とするものである。That is, the cemented carbide for precision molds of the present invention has a power of 3 to 20 w.
A binder phase consisting of L% of Co and/or Ni and 3 to 1OwL% of chromium carbide relative to the amount of Co and/or N1;
It is characterized in that the remainder consists of tungsten carbide with an average grain size of 0.8 μm or less and unavoidable impurities.

本発明のｙ１１密金型金型硬合金における結合相は、Ｃ
ｏ−Ｃｒ−Ｃ、Ｎ１−Ｃｒ−Ｃ又はＣｏ　−Ｎｉ　−Ｃ
ｒ　−Ｃからなっており、実質的には炭化タングステン
が微晴結合相中に溶解してＣｏ　−Ｃｒ−■−Ｃ，Ｎｉ
−Ｃｒ−■−Ｃ又はＣｏ　−Ｎｉ　−Ｃｒ　−■−Ｃか
らなっているもので、この結合相の主成分であるＣｏ及
び／又はＮｉが３ｗＬ％未満になると、緻密化が不充分
になり、靭性が不足し、耐欠損性を劣化させる。逆に、
Ｃｏ及び／又はＮ１が２０Ｗシ％を超えて多くなると、
硬さが低下し、耐摩耗性が劣下する。従って、Ｃｏ及び
／又は旧は、３ｗＬ％以−Ｅから２０ｗＬ％以下と定め
たものである。The binder phase in the y11 dense mold hard alloy of the present invention is C
o-Cr-C, N1-Cr-C or Co-Ni-C
r -C, and essentially tungsten carbide is dissolved in the finely divided binder phase to form Co -Cr-■-C,Ni
-Cr-■-C or Co -Ni -Cr -■-C, and if the main components of this binder phase, Co and/or Ni, are less than 3wL%, densification will be insufficient. , the toughness is insufficient and the fracture resistance deteriorates. vice versa,
When Co and/or N1 increases beyond 20W%,
Hardness decreases and wear resistance deteriorates. Therefore, Co and/or old is determined to be from 3wL% or more to E to 20wL% or less.

また、結合相中の炭化クロムがＣｏ及び／又はＮｉの１
に対し３ｗＬ％未満では、■Ｃ粒成長抑制効果の低下に
より、粗粒肛が生成し、研磨加工後の鏡面性が劣化する
。逆に、炭化クロムがＣｏ及び／又はＮｉの晴に対しｌ
０ｗｔ％を超えて多くなると、Ｃｏ及び／又はＮｉ中に
固溶しきれな（なり、炭化クロム又はＭ、Ｃａ（Ｍは合
金中の金属元素）Ｆ！！の炭化物が析出し２鏡面性及び
耐欠損性を低下させる。従って、炭化クロム…はＣｏ及
び／又はＮ　ｉ　ｉｔに対して３〜１０ｗｔ％と定めた
ものである。In addition, chromium carbide in the binder phase is 1 of Co and/or Ni.
On the other hand, if it is less than 3 wL%, the effect of inhibiting the growth of ■C grains decreases, resulting in the formation of coarse grain holes and deterioration of the specularity after polishing. Conversely, chromium carbide
When the amount exceeds 0 wt%, carbides of chromium carbide or M, Ca (M is a metal element in the alloy) F!!, which cannot be completely dissolved in Co and/or Ni, precipitate, resulting in specularity and It lowers fracture resistance.Therefore, chromium carbide is set at 3 to 10 wt% relative to Co and/or Ni it.

本発明の精密金型用超硬合金は、合金にすぐれた鏡面性
及び耐欠損性を付！テするために、炭化クロムを結合相
中に固溶させるのであるが、この時合金炭素量は、超硬
合金中に遊離成木又はＣｏａＷｉＣで表わされるη相な
どが出現しない健全相領域内の炭Ｚｍに制御しなければ
ならないことはもとより、さらに合金中の炭素量が健全
相領域内であっても、高炭素側に偏ると、炭化クロムの
結合相中への固溶が抑制されるので１合金炭素用は健全
相領域内の低炭素側に制御することが好ましい。すなわ
ち、低炭素合金の目安として、Ｘ線回折による結合相の
格子定数が３．５５８Å以上から３．５６９Å以下にあ
ることが好ましいことである。−層好ましいのは、　Ｃ
ｏ及び／又はＮ　ｉ　ｌｄに対する炭化クロム９が３ｗ
ｔ％のときはＸ　線回折による結合相の格子定数が３，
５６１Å〜３．５６９人にあり、Ｃｏ及び／又はＮ　ｉ
　Ｂｌに対する炭化クロム量がｌｏｗＬ％のときはＸ線
回折による結合相の格子定数が３．５５８　　Å〜３５
６１　人にあることである。これらのことを縦軸が結合
相格子定数、横軸がＣｏ及び／又はＮｉ晴に対１−る炭
化クロム量で表わした第１図を用いて、さらに具体的に
説明すると、第１図中の Δ（３ｗｔ％　Ｃｒ３Ｃ−、３，５６９人）１：’：（
３ｗｔ％　Ｃｒ３ら、　３．５５４　人）Ｆ　［ｌ０ｗ
ｔ％　Ｃｒ、Ｃ２，３，５５５人）Ｄ　（ＩＯｗＬ％Ｃ
ｒｚＣａ、　３．５６１　人）の各点で囲まれたΔ、　
　［：、、　ｌ’、　Ｉ）の範囲が本発明の範囲におけ
る健全相領域を示し、この範囲の内、点Δ。The cemented carbide for precision molds of the present invention has excellent specularity and fracture resistance! In order to achieve this, chromium carbide is dissolved as a solid solution in the binder phase. At this time, the amount of alloy carbon is within the healthy phase region where free mature wood or η phase represented by CoaWiC does not appear in the cemented carbide. In addition to the need to control the carbon Zm, even if the carbon content in the alloy is within the healthy phase range, if it leans towards the high carbon side, solid solution of chromium carbide into the binder phase will be suppressed. For carbon alloy No. 1, it is preferable to control the carbon to the low carbon side within the healthy phase region. That is, as a guideline for a low carbon alloy, it is preferable that the lattice constant of the bonded phase determined by X-ray diffraction is from 3.558 Å to 3.569 Å. - The layer is preferably C
Chromium carbide 9 for o and/or N i ld is 3w
When t%, the lattice constant of the bonded phase by X-ray diffraction is 3,
561 Å to 3.569 Å, Co and/or Ni
When the amount of chromium carbide relative to Bl is low L%, the lattice constant of the bonded phase by X-ray diffraction is 3.558 Å to 35
61 This is true for people. To explain these things more specifically using Figure 1, in which the vertical axis represents the bond phase lattice constant and the horizontal axis represents the amount of chromium carbide relative to Co and/or Ni, Δ(3wt% Cr3C-, 3,569 people) 1:':(
3wt% Cr3 et al., 3.554 people) F [l0w
t% Cr, C2, 3,555 people) D (IOwL%C
Δ surrounded by each point of rzCa, 3.561 people),
The range [:,, l', I) indicates the healthy phase region within the scope of the present invention, and within this range, the point Δ.

［３（３ｗＬ％　Ｃｒ＝Ｃ，、３，５６１人）Ｃ（１ｏ
ｓｔ％Ｃｒｓら、　３．５５８人）、Ｉ）の各点で囲ま
れたΔ、Ｂ、Ｃ，Ｄの斜線を施した範囲が一層好ましい
領域を示しているものである。[3(3wL% Cr=C,, 3,561 people)C(1o
The diagonally shaded ranges Δ, B, C, and D surrounded by the points in I) indicate more preferable regions.

また粗粒■Ｃの生成を制御し鏡面性を高めるという炭化
クロム添加の効果を最大限に発揮させるためには１合金
中における不可避不純物量なり１＠する必要がある。合
金中の不可避不純物は、出発原料中に金石しているか又
は製造り作中に混入してくるものであるが、主として出
発原料中に含有している不可避不純物にＣａ、Ｓ、　Ｓ
ｉ、Ａｌ及びＭｇなどがある。これらのＣａ、　Ｓ、　
Ｓｉ、Ａ℃及びＭｇの不可避不純物は、焼結−Ｌ作中で
酸化物や硫化物を形成して、鏡面性及びｉ−１欠損性を
低下させる原因になる。そこで、これらのＣａ、　Ｓ、
　Ｓｉ、＾β及びＭｇは合金中にそれぞれ０．００１　
ｗｔ％以下に押えることが好ましいことである。In addition, in order to maximize the effect of adding chromium carbide to control the formation of coarse grains C and improve specularity, it is necessary to reduce the amount of unavoidable impurities in one alloy to 1@. Unavoidable impurities in the alloy are those contained in the starting raw materials or mixed in during the manufacturing process, but the unavoidable impurities contained in the starting raw materials mainly include Ca, S, and S.
i, Al, Mg, etc. These Ca, S,
Unavoidable impurities such as Si, A° C., and Mg form oxides and sulfides during the sintering-L process, causing deterioration of specularity and i-1 deficiency. Therefore, these Ca, S,
Si, ^β and Mg are each 0.001 in the alloy
It is preferable to keep it below wt%.

本発明の精密金型用超硬合金は、次のようなｈ法により
製造することができる。まず、出発原料としてのＷＣは
、甲・均粒度が１．０μｍ以ドのできるだけ均粒・微細
な粉末を用いるのが粗粒ＷＣを発生させないために好ま
しいものである。The cemented carbide for precision molds of the present invention can be manufactured by the following h method. First, as for WC as a starting material, it is preferable to use a powder as uniform and fine as possible with an average particle size of 1.0 μm or less in order to avoid generation of coarse WC.

これらのＷＣ粉末と他の出発原料粉末を用いて。Using these WC powders and other starting material powders.

湿式混合・粉砕、乾燥、成形、焼結などを行う−「稈は
、従来の方法で良いが、焼結後超硬合金中に残存する微
小ボアを消滅させるために、１１１Ｐ処理を行うことは
必要不６Ｉ欠である。Perform wet mixing/grinding, drying, molding, sintering, etc. - "Culms can be prepared using conventional methods, but 111P treatment is not recommended in order to eliminate micro-bores remaining in the cemented carbide after sintering. Necessity 6I is lacking.

以ｌ二に説明した本発明の超硬合金の表面に、例λば従
来から行われているような物理蒸着法１ＰＶＤ法）や化
″′？蒸着法ｆｃＶＩｌ法）でもって、被膜を形成して
ｆ＋″ｌ密金型出金型用被覆超硬合金ことは層好ましい
ことである。A film is formed on the surface of the cemented carbide of the present invention as described below by, for example, the conventional physical vapor deposition method (PVD method) or chemical vapor deposition method (fcVII method). It is preferable to use a coated cemented carbide for f + "l dense mold dispensing mold.

本発明の精密金型用被覆超硬合金における被膜は１例え
ば周期律表４ａｆＴｉ、　７ｒ、ＩＩｆ）５ａ　ｔＬ　
Ｎｂ、　Ｔａ）　、　５ａ　ＩＣｒ、　ｌＪｏ、　ＷＣ
の金属及びＲｕ。The coating in the coated cemented carbide for precision molds of the present invention is 1, for example, 4afTi, 7r, IIf) 5a tL of the periodic table.
Nb, Ta), 5a ICr, lJo, WC
metal and Ru.

Ｏｓ　　Ｒｈ、　　Ｉｒ、　Ｐｄ、　ＰＣ，ＡＳＨ，Ａ
ｕなとの金属。Os Rh, Ir, Pd, PC, ASH, A
Metal with u.

Ｖ　−Ｃｒ、　　Ｗ−Ｃｒ、　　Ｍｏ　　Ｃｒなどの合
金、ダイヤモンド、ダイヤモンド状カーボン、８ｒ方品
窒化ホウム、硬質窒化ホウ奏、窒化ケイ素、炭化ケイふ
。Alloys such as V-Cr, W-Cr, MoCr, diamond, diamond-like carbon, 8R boron nitride, hard boron nitride, silicon nitride, silicon carbide.

酸化アルミニウム、窒化アルミニウム、酸窒化アルミニ
ウム、周期（７表４ａ、　５ａ、　６ａ族金属の炭化物
。Aluminum oxide, aluminum nitride, aluminum oxynitride, periodic (7 Tables 4a, 5a, 6a group metal carbides.

窒化物、酸化物、ホウ化物、硫化物及びこれらの相ｌ′
Ｌ固溶体の中の少なくとも１種の単層又は多重層でなる
ものである。この被膜厚さは、被加丁材料を含めた使用
条件と被膜の材質により選定する必要があり、例えば金
属や合金の場合には０．５７１　ｍ〜５０μｍの厚さ、
ダイヤモンド、ダイヤモンド状カーボンやセラミックス
の場合又はこれらを含んだ多ｉｎ層でなる場合には０．
１　μｍ−２０μｍの厚さが好ましいものである。nitrides, oxides, borides, sulfides and their phases l'
It consists of a single layer or multiple layers of at least one type of L solid solution. The thickness of this coating needs to be selected depending on the usage conditions including the material to be cut and the material of the coating. For example, in the case of metals and alloys, the thickness is 0.571 m to 50 μm,
In the case of diamond, diamond-like carbon or ceramics, or in the case of multilayers containing these, the value is 0.
A thickness of 1 μm to 20 μm is preferred.

（作用） 本発明の精密金型用超硬合金は、炭化タングステンの硬
質相と、炭化クロムを固溶してなるＣ。(Function) The cemented carbide for precision molds of the present invention is formed by solid solution of tungsten carbide hard phase and chromium carbide.

及び／又はＮｉの結合相とからなるもので、結合相中に
固溶している炭化クロムが焼結工程中での炭化タングス
テンの粒成長を抑制する作用をし、鏡面性を高めるとと
もに、１１食性を向上させ、さらに焼結後結合相を強化
して耐欠損性を高めるなど聞出金型に適した特性な超硬
合金に付与する作用をしているものである。Chromium carbide dissolved in the binder phase acts to suppress grain growth of tungsten carbide during the sintering process, improves specularity, and improves specularity. It has the effect of imparting properties to the cemented carbide that are suitable for molding, such as improving the eating ability and further strengthening the binder phase after sintering to increase chipping resistance.

また１本発明の精密金型用被覆超硬合金は、鏡面性にす
ぐれた超硬合金の表面状態がそのまま被膜表面状態とし
て転写されるために、被覆超硬合金の表面の鏡面性を高
める作用をしているものである。In addition, the coated cemented carbide for precision molds of the present invention has the effect of increasing the specularity of the surface of the coated cemented carbide because the surface condition of the cemented carbide, which has excellent specularity, is directly transferred as the coating surface condition. This is what we do.

（実施例） 実施例１ ・Ｖ均粒径０．５μｍのｙ＋ｃ粉末、　’ｐ−均粒径　
１．４μｍのＣｏ粉末、平均粒径２．５μｍのＮｉ扮末
、平均粒径２．４ｕｍのＶＣ粉末、￥均粒径１．２ｇｍ
のＴａＣ粉末及び平均粒径２．５μｍのＣｒａＣ諺粉末
を出発原料として用い第曹表に示す組成に各試料を配合
した。このとき用いた出発原料粉末の内、本発明品には
ＷＣ中のＣａ、　Ｓ、＾β、Ｓｉ、　Ｍｇの含有量がそ
れぞれ１Ｏｐｐｎ＋以下に調整した粉末を用い、比較品
には従来の市販品の粉末を用いた。これらの各試料それ
ぞれをアセトンと超硬合金製ボールの入った容器中で７
２時間混合後、乾燥して得られた混合粉末を所定の形状
にプレスし、粉末成形体を得た。次いで、　１３８０℃
、１時間保持にて焼結した後、アルゴン雰囲気中、　１
３５０℃、　１０００気圧の条件で旧Ｐ処理した。こう
して得た各試料の抗折強度、硬さ。(Example) Example 1 y+c powder with V average particle size of 0.5 μm, 'p- average particle size
1.4μm Co powder, average particle size 2.5μm Ni powder, average particle size 2.4um VC powder, average particle size 1.2gm
Each sample was blended into the composition shown in Table 1 using TaC powder and CraC powder with an average particle size of 2.5 μm as starting materials. Among the starting raw material powders used at this time, powders in which the contents of Ca, S, ^β, Si, and Mg in WC were adjusted to 1 Oppn+ or less were used for the products of the present invention, and conventional commercially available products were used for comparison products. powder was used. Each of these samples was placed in a container containing acetone and a cemented carbide ball.
After mixing for 2 hours, the mixed powder obtained by drying was pressed into a predetermined shape to obtain a powder compact. Then 1380℃
, in an argon atmosphere after sintering for 1 hour.
Old P treatment was performed at 350°C and 1000 atm. The bending strength and hardness of each sample thus obtained.

結合相の格子定数及び破壊靭性値（Ｋｅｅｌを求めて、
その結果を第２表に示した。結合相の格子定数は、超硬
合金の表面に存在する炭化タングステンを溶解除去後、
Ｘａ回折により求めた。また、Ｋ＋ｃはビッカース圧痕
周辺に生じるクラック長さと硬さの関係からＷ出した。Determine the lattice constant and fracture toughness value (Keel) of the binder phase,
The results are shown in Table 2. The lattice constant of the bonding phase is determined by dissolving and removing the tungsten carbide present on the surface of the cemented carbide.
It was determined by Xa diffraction. Further, K+c was determined by W based on the relationship between the length of cracks generated around the Vickers indentation and the hardness.

更に、第２表で示したそれぞれの試料の不純物量を蛍光
Ｘ線分析により測定したところ１本発明品はＣａ、　Ｓ
、　Ｓｉ、　ＡＩｌ、　Ｍｇがそれぞれ０．００１　ｗ
Ｌ％以下であったのに対し、比較品は、Ｃａ、　　Ｓ、
　　Ｓｉ。Furthermore, when the amount of impurities in each sample shown in Table 2 was measured by fluorescent X-ray analysis, the product of the present invention contained Ca, S.
, Si, AIl, Mg are each 0.001 w
Whereas the comparative product had Ca, S,
Si.

ＡΩ、　Ｍｇが（１，ＯＱｌ　ｗＬ％を超えて多く含有
していることが確認できた。It was confirmed that AΩ, Mg was contained in a large amount exceeding (1, OQl wL%).

以下余白 実施例２ 実施例１で得た第１人の試料の内、本発明品２．４．８
．９と比較品１．３と、さらに市販のＷＣ−１０％Ｃｎ
合金を比較品６として加えて、これらの試料をそれぞれ
鏡面ｌ１１１磨した。この本発明品二２．４．８．９及
び比較品！、コ３．６のそれぞれ（７）鏡面研磨面に市
販の鉛ガラス、ホウ酸ガラス及びＩテリメチルメタクリ
レート樹脂のそれぞれを約４ｘ４Ｘ４ｍｍに成形して設
置した。このガラス又（，１樹脂が鏡面研磨面に設置さ
れてなるそれぞれの１試料を真空炉中で加熱するという
簡易試験を行っｊ、・。試験条件は、真空炉をＩ　Ｘ　
１０−”ｍｍ１１ｇの真空にｊた後、アルゴンガスな流
入して鉛ガラスの場合；ま　７００℃、１時間保持、ホ
ウ酸ガラスの場合は１３００℃、１時間保持、ポリメチ
ルメタクリレート樹脂の場合は　１００℃、１時間保持
でもって処理し、試験完了後、それぞれの合金とガラス
又は樹脂とのγ；にれｆＬｌ、合金の鏡面ｆｔ１ｆ磨而
の腐食の状態及び合金の鏡面研磨面トのガラス又は樹脂
の泡のはを調べて、これらの結果を第２表に示した。The following margin is Example 2 Among the samples obtained from the first person obtained in Example 1, the present invention product 2.4.8
．． 9, comparative product 1.3, and commercially available WC-10%Cn
Alloy was added as Comparative 6 and each of these samples was mirror polished. This invention product 2.4.8.9 and comparative product! (7) Each of commercially available lead glass, boric acid glass, and I-terimethyl methacrylate resin was molded into a size of about 4 x 4 x 4 mm and placed on the mirror-polished surface. A simple test was conducted in which one sample of each of these glass resins was placed on a mirror-polished surface and heated in a vacuum furnace.The test conditions were as follows:
After applying a vacuum of 10 mm and 11 g, inject argon gas and hold at 700°C for 1 hour for lead glass; hold at 1300°C for 1 hour for boric acid glass; hold at 1300°C for 1 hour for polymethyl methacrylate resin. Treatment was carried out at 100°C for 1 hour, and after completion of the test, the γ of each alloy and glass or resin; The foam formation of the resin was investigated and the results are shown in Table 2.

（発明の効果） 以ｌの結果５本発明の精密金型用超硬合金ｌま、　Ｃｒ
１Ｃ，−ＶＣの複合添加又け、Ｃｒ、Ｃｚ　　ＴａＣの
複合添加した合金に比べて、欠陥の大きさの尺度となる
抗＋１［強度が約２０〜５０％増加し、耐欠損性の尺度
となる破壊靭性値も高いという効果がある。(Effects of the Invention) Results 5: Cemented carbide for precision molds of the present invention, Cr
Compared to alloys with composite additions of 1C, -VC, Cr, and Cz TaC, the strength increases by about 20 to 50%, which is a measure of defect size, and It also has the effect of having a high fracture toughness value.

さらに、本発明のＴｉ７密金型川超用合金は、ＷＣＣｏ
合金、　ＷＣ−Ｃｒ、Ｃｚ　−ＶＣ−Ｃｏ合金又は本発
明の合金から外れたＷＣＣｒｔｅａ合金と比較して、ガ
ラスやプリスヂックに対する儒れｆｒＩが大きく、ガラ
スやプラスチ・・ｌり中に′１ソする気泡が少なく、し
かもガラスやプラスチックに対する耐腐食性にすぐれて
いることから１例えば光ピツクアップレンズなどに用い
られているＪｌ″球而レ面ズなどの成形用金型材どり、
て使用すると、成形されたレンズの面の精度が著しくす
ぐれたものになると共に、成形後における金Ｊｖ！自体
の成形面の損（３，１も非常に少なくなることから苦し
く長寿命になるという効果がある。Furthermore, the Ti7 dense mold river superalloy of the present invention is WCCo
Compared to alloys such as WC-Cr, Cz-VC-Co alloys, or WCCrtea alloys, which are out of the alloys of the present invention, the deformation frI against glass and plastics is greater, and it is less likely that glass and plastics will break during immersion. Because it has few air bubbles and has excellent corrosion resistance against glass and plastics, it is used as a molding material such as Jl'' ball recessed surface, which is used in optical pickup lenses.
When used as a molded lens, the precision of the surface of the molded lens becomes extremely high, and the gold Jv! Since the loss (3,1) on the molding surface itself is greatly reduced, it has the effect of lengthening the life.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、超硬合金中のＣｏ及び／叉はＮ１：、目こ対
する炭化クロムＩｄと超硬合金の結合相格子定数との関
係図である。 第１図中、Ａ（：３ｗｔ％Ｃｒ１Ｃｚ、　３．５６９人
）Ｂｆ３ｖＬ％　Ｃｒ、ら、　３．５６１　　人）Ｃ（
１ｏｓｔ％　Ｃｒ、Ｃ７，３，５５８人）Ｄ　Ｉ　ｌ０
ｗｔ％　Ｃｒ−Ｃｚ、　３．５６１　人）Ｆ、（３ｗＬ
％ＣｒＪＣｚ、３．５５４人）ト’（ｌＯｗｔ％Ｃｒａ
Ｃ，１，３，５５５人）を示ず。特に、△、Ｉ３．Ｃ，
Ｄの斜線の範囲は。 好ましい領域を表ｔ）す。FIG. 1 is a diagram showing the relationship between Co and/or N1 in a cemented carbide, chromium carbide Id, and the bond phase lattice constant of the cemented carbide. In Figure 1, A(:3wt%Cr1Cz, 3.569 people)Bf3vL%Cr, et al., 3.561 people)C(
1ost% Cr, C7, 3,558 people) D I l0
wt% Cr-Cz, 3.561 people)F, (3wL
%CrJCz, 3.554 people)to'(lOwt%Cra
C, 1,3,555 people). In particular, △, I3. C,
The shaded area in D is. t) represents the preferred area.

Claims (6)

【特許請求の範囲】[Claims] （１）３〜２０ｗｔ％のＣｏ及び／又はＮｉと該Ｃｏ及
び／又はＮｉの量に対し３〜１０ｗｔ％の炭化クロムと
でなる結合相と、残り平均粒径０．８μｍ以下の炭化タ
ングステンと不可避不純物とでなることを特徴とする精
密金型用超硬合金。(1) A binder phase consisting of 3 to 20 wt% of Co and/or Ni and 3 to 10 wt% of chromium carbide based on the amount of Co and/or Ni, and the remaining tungsten carbide with an average particle size of 0.8 μm or less. A cemented carbide for precision molds that is free from unavoidable impurities. （２）上記結合相は、Ｘ線回折による格子定数が３．５
５８Å〜３．５６９Åであることを特徴とする特許請求
の範囲第１項記載の精密金型用超硬合金。(2) The bonded phase has a lattice constant of 3.5 according to X-ray diffraction.
The cemented carbide for precision molds according to claim 1, wherein the cemented carbide has a thickness of 58 Å to 3.569 Å. （３）上記不可避不純物は、Ｃａ、Ｓ、Ｓｉ、Ａｌ及び
Ｍｇのそれぞれが０．００１ｗｔ％以下であることを特
徴とする特許請求の範囲第１項又は第２項記載の精密金
型用超硬合金。(3) The above-mentioned unavoidable impurities include Ca, S, Si, Al, and Mg, each of which is 0.001 wt% or less. Hard metal. （４）３〜２０ｗｔ％のＣｏ及び／又はＮｉと該Ｃｏ及
び／又はＮｉの量に対し３〜１０ｗｔ％の炭化クロムと
でなる結合相と、残り平均粒径０．８μｍ以下の炭化タ
ングステンと不可避不純物とでなる超硬合金の表面に金
属、合金、ダイヤモンド及びセラミックスの中の少なく
とも１種でなる単層又は多重層の被膜を形成してなる精
密金型用被覆超硬合金。(4) A binder phase consisting of 3 to 20 wt% of Co and/or Ni and 3 to 10 wt% of chromium carbide based on the amount of Co and/or Ni, and the remaining tungsten carbide with an average particle size of 0.8 μm or less. A coated cemented carbide for precision molds, which is formed by forming a single layer or multilayer coating made of at least one of metals, alloys, diamonds, and ceramics on the surface of the cemented carbide, which contains unavoidable impurities. （５）上記結合相は、Ｘ線回折による格子定数が３．５
５８Å〜３．５６９Åであることを特徴とする特許請求
の範囲第４項記載の精密金型用被覆超硬合金。(5) The bonded phase has a lattice constant of 3.5 according to X-ray diffraction.
The coated cemented carbide for precision molds according to claim 4, characterized in that the coating has a thickness of 58 Å to 3.569 Å. （６）上記不可避不純物は、Ｃａ、Ｓ、Ｓｉ、Ａｌ及び
Ｍｇのそれぞれが０．００１ｗｔ％以下であることを特
徴とする特許請求の範囲第４項又は第５項記載の精密金
型用被覆超硬合金。(6) The precision mold coating according to claim 4 or 5, wherein each of the unavoidable impurities is 0.001 wt% or less of Ca, S, Si, Al, and Mg. Cemented carbide.
JP63249640A 1988-10-03 1988-10-03 Cemented carbide for precision dies and coated cemented carbide for precision dies Expired - Lifetime JPH0635638B2 (en)

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Application Number Priority Date Filing Date Title
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JPH0297640A true JPH0297640A (en) 1990-04-10
JPH0635638B2 JPH0635638B2 (en) 1994-05-11

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03272815A (en) * 1990-02-27 1991-12-04 Nippon Tungsten Co Ltd Mold for molding resin material
JPH05320913A (en) * 1992-05-25 1993-12-07 Mitsubishi Materials Corp Surface coating cutting tool
JPH10298699A (en) * 1997-04-25 1998-11-10 Sumitomo Electric Ind Ltd Cemented carbide
JPH10298698A (en) * 1997-04-25 1998-11-10 Sumitomo Electric Ind Ltd Cemented carbide
EP0878291A1 (en) * 1997-05-14 1998-11-18 Eastman Kodak Company Method for fabricating tools for molding diffractive surfaces on optical lenses
JPH116025A (en) * 1997-04-25 1999-01-12 Sumitomo Electric Ind Ltd Cemented carbide, and coated alloy and coated hard tool using this cemented carbide as base material
JP2001115229A (en) * 1999-10-18 2001-04-24 Hitachi Tool Engineering Ltd Tough superfine cemented carbide
CN115261697A (en) * 2022-08-09 2022-11-01 成都广大精微新材料有限公司 High-performance wedge-shaped cleaver for wire bonding and manufacturing method thereof
CN116397189A (en) * 2023-06-06 2023-07-07 四川苏克流体控制设备股份有限公司 DLC-based high-wear-resistance low-friction coating material for hard seal ball valve and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135502A (en) * 1983-12-26 1985-07-18 Hoya Corp Die material for molding glass lens
JPS62227060A (en) * 1986-03-28 1987-10-06 Mitsubishi Metal Corp Ultra-high-toughness tungsten carbide-base sintered hard alloy wire rod capable of bending into circular shape
JPS63216942A (en) * 1987-03-05 1988-09-09 Sumitomo Electric Ind Ltd Tool for warm and hot forgings

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135502A (en) * 1983-12-26 1985-07-18 Hoya Corp Die material for molding glass lens
JPS62227060A (en) * 1986-03-28 1987-10-06 Mitsubishi Metal Corp Ultra-high-toughness tungsten carbide-base sintered hard alloy wire rod capable of bending into circular shape
JPS63216942A (en) * 1987-03-05 1988-09-09 Sumitomo Electric Ind Ltd Tool for warm and hot forgings

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03272815A (en) * 1990-02-27 1991-12-04 Nippon Tungsten Co Ltd Mold for molding resin material
JPH05320913A (en) * 1992-05-25 1993-12-07 Mitsubishi Materials Corp Surface coating cutting tool
JPH10298699A (en) * 1997-04-25 1998-11-10 Sumitomo Electric Ind Ltd Cemented carbide
JPH10298698A (en) * 1997-04-25 1998-11-10 Sumitomo Electric Ind Ltd Cemented carbide
JPH116025A (en) * 1997-04-25 1999-01-12 Sumitomo Electric Ind Ltd Cemented carbide, and coated alloy and coated hard tool using this cemented carbide as base material
EP0878291A1 (en) * 1997-05-14 1998-11-18 Eastman Kodak Company Method for fabricating tools for molding diffractive surfaces on optical lenses
JP2001115229A (en) * 1999-10-18 2001-04-24 Hitachi Tool Engineering Ltd Tough superfine cemented carbide
CN115261697A (en) * 2022-08-09 2022-11-01 成都广大精微新材料有限公司 High-performance wedge-shaped cleaver for wire bonding and manufacturing method thereof
CN116397189A (en) * 2023-06-06 2023-07-07 四川苏克流体控制设备股份有限公司 DLC-based high-wear-resistance low-friction coating material for hard seal ball valve and preparation method thereof
CN116397189B (en) * 2023-06-06 2023-08-15 四川苏克流体控制设备股份有限公司 DLC-based high-wear-resistance low-friction coating material for hard seal ball valve and preparation method thereof

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