JPH0292179U - - Google Patents

Info

Publication number
JPH0292179U
JPH0292179U JP68189U JP68189U JPH0292179U JP H0292179 U JPH0292179 U JP H0292179U JP 68189 U JP68189 U JP 68189U JP 68189 U JP68189 U JP 68189U JP H0292179 U JPH0292179 U JP H0292179U
Authority
JP
Japan
Prior art keywords
valve
opening
vacuum
valve body
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP68189U
Other languages
English (en)
Other versions
JPH0540384Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989000681U priority Critical patent/JPH0540384Y2/ja
Publication of JPH0292179U publication Critical patent/JPH0292179U/ja
Application granted granted Critical
Publication of JPH0540384Y2 publication Critical patent/JPH0540384Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)

Description

【図面の簡単な説明】
図面は本考案の実施例を示すもので、第１図は
真空装置用バルブの中央縦断面図、第２図は第１
図の―線で切断した平面図であり、第３図は
真空装置の従来例を説明する概要図である。 １…真空装置用バルブ、２…吸引管路、３…弁
箱、４…弁座、５…弁体、６…平行リンク機構、
１０…開閉手段。

Claims (1)

    【実用新案登録請求の範囲】
  1. ワークを収容する真空槽と、この真空槽の内部
    を負圧に保つための真空ポンプとを接続する吸引
    管路に設けられたもので、弁体が弁座に対し水平
    を保つて上下移動可能に設けられるとともに、こ
    の弁体を開閉するための開閉手段が、弁箱に沿つ
    て設けられたことを特徴とする真空装置用バルブ
    。
JP1989000681U 1989-01-07 1989-01-07 Expired - Lifetime JPH0540384Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989000681U JPH0540384Y2 (ja) 1989-01-07 1989-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989000681U JPH0540384Y2 (ja) 1989-01-07 1989-01-07

Publications (2)

Publication Number Publication Date
JPH0292179U true JPH0292179U (ja) 1990-07-23
JPH0540384Y2 JPH0540384Y2 (ja) 1993-10-13

Family

ID=31199927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989000681U Expired - Lifetime JPH0540384Y2 (ja) 1989-01-07 1989-01-07

Country Status (1)

Country Link
JP (1) JPH0540384Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439480A (ja) * 1990-05-31 1992-02-10 Kokusai Electric Co Ltd 真空装置用両圧対応型ロードロックバルブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676777U (ja) * 1979-11-16 1981-06-23
JPS6058981U (ja) * 1983-09-28 1985-04-24 株式会社　徳田製作所 真空バルブ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1109078A (en) * 1975-11-05 1981-09-15 Alfred A. Schleppnik Malodor counteractants

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676777U (ja) * 1979-11-16 1981-06-23
JPS6058981U (ja) * 1983-09-28 1985-04-24 株式会社　徳田製作所 真空バルブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439480A (ja) * 1990-05-31 1992-02-10 Kokusai Electric Co Ltd 真空装置用両圧対応型ロードロックバルブ

Also Published As

Publication number Publication date
JPH0540384Y2 (ja) 1993-10-13

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