JPH0287009A - Method and apparatus for measuring surface shape - Google Patents
Method and apparatus for measuring surface shapeInfo
- Publication number
- JPH0287009A JPH0287009A JP23869888A JP23869888A JPH0287009A JP H0287009 A JPH0287009 A JP H0287009A JP 23869888 A JP23869888 A JP 23869888A JP 23869888 A JP23869888 A JP 23869888A JP H0287009 A JPH0287009 A JP H0287009A
- Authority
- JP
- Japan
- Prior art keywords
- leaf spring
- leading end
- probe
- spring
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 9
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims description 19
- 241001422033 Thestylus Species 0.000 claims description 12
- 230000000903 blocking effect Effects 0.000 claims description 2
- 238000013016 damping Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 abstract description 15
- 239000000126 substance Substances 0.000 abstract description 5
- 238000010408 sweeping Methods 0.000 abstract 1
- 230000004304 visual acuity Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
（１）発明の目的
［産業上の利用分野］
本発明は、医学、生物学、化学、表面Ｔ学等の分野にお
（Ｊる微細な表面形状を観察する必要に際し、特に高さ
を含む三次元の寸法をミクロンメートル以下の分解能で
測定するのに供せられる表面形状測定方法およびその実
施に直接使用する装置に関する。Detailed Description of the Invention (1) Purpose of the Invention [Field of Industrial Application] The present invention is applicable to fields such as medicine, biology, chemistry, and surface T-chemistry. In particular, the present invention relates to a surface profile measuring method used to measure three-dimensional dimensions including height with a resolution of micrometers or less, and an apparatus directly used for carrying out the method.
［従来の技術］
従来は、表面形状の一般的な観測手段として光学顕微鏡
や走査型電子顕微鏡があるが、高さを含む三次元の寸法
を測定するには不向きである。さらに、光学顕微鏡は光
の波長で分解能が制限されミクロンメートル以下の観測
は困難である。また電子顕微鏡での観測は真空中で行わ
なければならず、生体など水分を含む試料をそのまま測
定することは出来ない。[Prior Art] Conventionally, optical microscopes and scanning electron microscopes have been used as general observation means for surface shapes, but they are not suitable for measuring three-dimensional dimensions including height. Furthermore, the resolution of optical microscopes is limited by the wavelength of light, making it difficult to observe micrometers or smaller. Furthermore, observation with an electron microscope must be performed in a vacuum, and samples containing water, such as living organisms, cannot be directly measured.
高さを含む三次元の寸法を測定する最も一般的な測定器
は、触針を表面におしつけ、表面をなぞる従来の触針式
表面粗さ訓である。これは触針の表面への押し付は荷重
は１０ミリグラムオーダもしくはそれ以上であり、この
荷重に触２１が耐えるためにはその先端半径はミクロン
以下にする必要がある。よってミクロン以下のピッチの
微細な凹凸は検出出来ない。さらにこの大きな荷重で表
面を損傷する危険もある。特に生物組織表面のように柔
らかいものは測定不能である。The most common measuring instrument for measuring three-dimensional dimensions, including height, is the conventional stylus surface roughness test, in which a stylus is placed on the surface and traced along the surface. This is because when the stylus is pressed against the surface, the load is on the order of 10 milligrams or more, and in order for the stylus 21 to withstand this load, the tip radius must be less than microns. Therefore, fine irregularities with a pitch of microns or less cannot be detected. Furthermore, there is a risk of damaging the surface due to this large load. In particular, soft objects such as biological tissue surfaces cannot be measured.
最近、非接触で表面の凹凸を光で検出する光学式表面粗
ざ泪も用いられるようになった。これは表面を損傷する
危険はないが、光スポットの直径は１ミクロン以上であ
り、やはりミクロン以下の面分解能での測定には分解能
が不足である。Recently, optical surface roughness detection, which uses light to detect surface irregularities in a non-contact manner, has also come into use. Although this poses no risk of damaging the surface, the diameter of the light spot is more than 1 micron, and the resolution is still insufficient for measurements with a surface resolution of less than a micron.
さらに、鋭い針を表面にオングストロームオーダまで近
イ」け、その間に流れるトンネル電流を検出する走査型
トンネル顕微鏡が開発された。Furthermore, a scanning tunneling microscope was developed that allows a sharp needle to be inserted into the surface as close as angstroms to detect the tunneling current that flows between the needles.
分解能は原子レベルまで期待出来、空気中でも測定可能
であるが、１ヘンネル電流を利用するかぎり表面は導体
に限定されるという大きな欠点がある。The resolution can be expected to be down to the atomic level, and measurement is possible even in the air, but as long as 1 Hennel current is used, the major drawback is that the surface is limited to conductors.
［発明が解決しようどづる課題］
本発明は、前記従来の微細な表面形状の観測手段の欠点
に鑑み、あらゆる物質の表面に対して容易な操作かつ高
い分解能で三次元形状を測定するのに有効適切な表面形
状測定方法および装置を提供せ／、とするものである。[Problems to be Solved by the Invention] In view of the drawbacks of the conventional observation means for observing minute surface shapes, the present invention provides a method for measuring the three-dimensional shape of the surface of any material with easy operation and high resolution. It is an object of the present invention to provide an effective and appropriate surface profile measurement method and apparatus.
（２）発明の構成
［課題を解決するための手段］
本発明は、触針を支持するばねと、当該ばねの変位を検
出する変位センサを備え、前記触２１を測定面に接触摺
動させて表面形状を測定する装置において、前記測定面
と前記触２１と前記支持ばねと前記変位センサの先端と
を液体中に浸漬せしめ、前記支持ばねの変位挙動の検出
により表面形状を測定するに当り、前記支持ばねに対し
外乱振動を遮断自在かつ粘性減衰を付与自在に液体中測
定をしてミクロンノー１〜ル以下の精密測定を可能どし
てなる。(2) Structure of the invention [Means for solving the problem] The present invention includes a spring that supports a stylus and a displacement sensor that detects the displacement of the spring, and the stylus 21 is slid in contact with a measurement surface. In an apparatus for measuring a surface shape, the measurement surface, the touch 21, the support spring, and the tip of the displacement sensor are immersed in a liquid, and the surface shape is measured by detecting the displacement behavior of the support spring. The support spring is capable of blocking disturbance vibrations and imparting viscous damping to the support spring, and is capable of performing measurements in a liquid with precision of micron no. 1 to micron or less.
［実 施 例１］ 本発明装置の第１実施例を第１図につぎ説明する。[Implementation Example 1] A first embodiment of the device of the present invention will now be described with reference to FIG.
図中１は触針、２板ばねで、掃引吊杆３下端に基端をハ
持ちし水平に突出しである。触針１は板ばね２の先端に
下向固定されている。４ａは基板５上に載置した測定物
４の測定面で、触針１はこの上を接触摺動する。触針１
の先端半径はサブミクロンの分解能を得るためにもサブ
ミクロンもしくはで−れ以下に形成する。板ばね２はた
わみやすいものとし、例えば長さ１０ｍｍ 。In the figure, 1 is a stylus, and 2 is a leaf spring, whose base end is held at the lower end of the sweep hanging rod 3 and protrudes horizontally. The stylus 1 is fixed downward to the tip of a leaf spring 2. Reference numeral 4a denotes a measurement surface of a measurement object 4 placed on a substrate 5, on which the stylus 1 slides in contact. Stylus 1
The radius of the tip is formed to be submicron or less in order to obtain submicron resolution. The leaf spring 2 is flexible and has a length of, for example, 10 mm.
幅１ｍｍ 、厚さ１０μｍとすれば１０μｑ／μｍ程度
の剛性が得られる。まｌ〔、フォトリソグラフィにＪ：
るエツチング技術を使いミリノー１〜ル以下の掻く薄い
バネを形成しそれを用いてもよい。If the width is 1 mm and the thickness is 10 μm, a rigidity of about 10 μq/μm can be obtained. 〔J for photolithography:
It is also possible to form a thin spring with a thickness of 1 to 1 mm or less using an etching technique and use it.
６は板ばね２の先端変位の挙動を検出するよう板ばね２
の先端部真上に先端７を臨ませた変位センサで、本実施
例では焦点誤差検出型の光へラドセンサを用いている。6 is a plate spring 2 so as to detect the behavior of the tip displacement of the plate spring 2.
This is a displacement sensor whose tip 7 is directly above the tip of the lens, and in this embodiment, a focus error detection type optical helical rad sensor is used.
８は容器であって、触針１、板ばね２、測定面４ａおよ
び光へラドセンサ６の先端７を浸）へする液体って満た
されている。Reference numeral 8 denotes a container filled with a liquid to immerse the stylus 1, the leaf spring 2, the measuring surface 4a, and the tip 7 of the optical sensor 6.
ここで本実施例に本発明方法を作用させるには、触針１
を測定面４ａに接触させる。ここで生じる接触荷重は、
板ばね２の剛性が小さいため極めて小さな値、例えば触
！（１と測定面／ｌａとに作用するファンデルヴアール
ス力と同程度の１０μｑのオーダにできる。よって、接
触による表面の損傷を避けることができる。この状態で
掃引吊杆３の水平移動に伴い板ばね２ど−・体向に触針
１を測定面４に沿って走査する際、板ばね２は測定面４
ａの形状に応じて挙動変位しそれを掃引吊杆３の動きに
同調追従して水平移動する光へラドセンサ６で検出する
。Here, in order to apply the method of the present invention to this example, the stylus 1
is brought into contact with the measurement surface 4a. The contact load generated here is
Because the rigidity of the leaf spring 2 is small, the value is extremely small, for example, when the rigidity is tactile! (It can be on the order of 10 μq, which is about the same as the van der Waals force acting on 1 and the measurement surface /la. Therefore, damage to the surface due to contact can be avoided. In this state, the horizontal movement of the sweep suspension rod 3 When the stylus 1 is scanned along the measurement surface 4 in the direction of the leaf spring 2, the leaf spring 2 moves along the measurement surface 4.
The behavior changes according to the shape of a, and this is detected by the rad sensor 6 as the light moves horizontally in synchronization with the movement of the sweep hanging rod 3.
この場合、触針１は測定面４ａに極めて小さい接触荷重
で接しているため、板ばね２は振動しやすい。特に空気
中では、音ＩＩの空気振動で板ばね２は共振し、接触を
不安定にする危険が大きい。しかし本発明方法のように
液体９の中に浸漬した液体９中測定に当って、空気振動
は液体９で遮断され、しかも液体９の粘性で板ばね２の
振動に大きな減衰が生じるので共振は生じなくなる。よ
って支定に接触摺動が行える。In this case, since the stylus 1 is in contact with the measurement surface 4a with an extremely small contact load, the leaf spring 2 is likely to vibrate. Particularly in the air, the leaf spring 2 resonates due to the air vibration of sound II, and there is a great danger that the contact will become unstable. However, when measuring in the liquid 9 immersed in the liquid 9 as in the method of the present invention, the air vibrations are blocked by the liquid 9, and the viscosity of the liquid 9 causes a large attenuation of the vibration of the leaf spring 2, so the resonance is not caused. It will no longer occur. Therefore, contact sliding can be performed on the support.
光へッドレンザ６の先端７は、レンズもしくはレンズを
保護する透明体であるが、これが液体９中に浸漬されて
いるため、液表面で生じる表面波による乱反射や屈折率
変動の影響を受けず、良好な晶質の変位検出が出来る。The tip 7 of the optical head lens 6 is a lens or a transparent body that protects the lens, but since it is immersed in the liquid 9, it is not affected by diffuse reflection or refractive index fluctuation due to surface waves generated on the liquid surface. Good displacement detection of crystalline material is possible.
即ち、高粘度、高安定なばね変位の検出が可能となる。That is, it is possible to detect a highly viscous and highly stable spring displacement.
［実 施 例２］ 本発明装置の第２実施例を第２図につき説明する。[Implementation example 2] A second embodiment of the device according to the invention will be described with reference to FIG.
同図は、前記第１実施例において、触針１を支持するの
に平行ばね２′を用いた実施例である。平行ばね２′は
触２１１が測定面４ａを摺動したとき生じる摩擦力によ
る曲げモーメントに対する剛性が大きく、１枚の板ばね
を使用した場合Ｊ：す、曲げモーメントによるばねの変
形が少ない。よって摩擦力による変位検出誤差を小ざく
出来る、。This figure shows an embodiment in which a parallel spring 2' is used to support the stylus 1 in the first embodiment. The parallel spring 2' has high rigidity against the bending moment due to the frictional force generated when the contact 211 slides on the measurement surface 4a, and when a single leaf spring is used, the spring deformation due to the bending moment is small. Therefore, displacement detection errors due to frictional force can be reduced.
［実 施 例３］ 本発明装置の第３実施例を第３図につき説明する。[Implementation Example 3] A third embodiment of the device of the present invention will be described with reference to FIG.
同図は、前記第１実施例における光へッドゼンサ６に代
えて、板ばね２の変位検出に板ばね２先端直上に下端を
臨ませた導電プローブ１０を使用した実施例である。こ
の場合、板ばね２には導電性材料を用いる。導電プロー
ブ１０下端と板ばね２先端の間に電位を与え、極めて近
く接近させると両者の間にトンネル電流が流れる。この
電流は導電プローブ１０と板ばね２の隙間に極めて敏感
に変化する。言い換えると一定のトンネル電流は一定の
隙間に対応する。よって、ピエゾ素子１１で１〜ンネル
電流が一定となるよう、導電プローブ１０を板ばね２先
端と直角対向する方向に駆動してやると導電プロブ１０
下端は板ばね２先端の変位にかかわらずつねに板ばね２
と一定の隙間を保つ。かくして板ばね２の上下挙動変位
は導電プローブ１０の上下挙動変位、即ち、ピエゾ素子
１１の変位に等しくなる。ピエゾ素子１１の変位はピエ
ゾ素子１１に加えられる電圧で知ることが出来るから、
これにより板ばね２の上下挙動変位を測定出来る。使用
する液体９が導電性を持つ場合には、導電プローブ１０
のごく先端部を除き絶縁被覆１２を施してやることによ
り効果的なトンネル電流の検出が可能になる。This figure shows an embodiment in which a conductive probe 10 whose lower end faces directly above the tip of the leaf spring 2 is used to detect the displacement of the leaf spring 2 in place of the optical head sensor 6 in the first embodiment. In this case, the leaf spring 2 is made of a conductive material. When a potential is applied between the lower end of the conductive probe 10 and the tip of the leaf spring 2 and the probes are brought very close together, a tunnel current flows between the two. This current changes extremely sensitively to the gap between the conductive probe 10 and the leaf spring 2. In other words, a constant tunnel current corresponds to a constant gap. Therefore, if the conductive probe 10 is driven in a direction perpendicularly facing the tip of the leaf spring 2 so that the channel current in the piezo element 11 is constant, the conductive probe 10
The lower end is always connected to leaf spring 2 regardless of the displacement of the tip of leaf spring 2.
and maintain a certain gap. Thus, the vertical displacement of the leaf spring 2 is equal to the vertical displacement of the conductive probe 10, that is, the displacement of the piezo element 11. Since the displacement of the piezo element 11 can be determined by the voltage applied to the piezo element 11,
This allows the vertical displacement of the leaf spring 2 to be measured. When the liquid 9 used is conductive, the conductive probe 10
By applying the insulating coating 12 except for the tip of the slit, it becomes possible to effectively detect the tunnel current.
図中１３は直流電源、１４は抵抗、１５は増幅器である
。In the figure, 13 is a DC power supply, 14 is a resistor, and 15 is an amplifier.
（３）発明の効果
かくして本発明によれば、極めて微小な荷重で表面形状
を測定でき、従来装置では実現できなかった鋭い触針を
安定にかつ測定面の破壊の危険がなく使用できる。よっ
て高い分解能で三次元の表面形状を測定できる。(3) Effects of the Invention Thus, according to the present invention, the surface shape can be measured with an extremely small load, and a sharp stylus, which was not possible with conventional devices, can be used stably and without the risk of breaking the measurement surface. Therefore, three-dimensional surface shapes can be measured with high resolution.
さらに整理食塩水や水などの生体の生存可能なもの、タ
ンパク質やアミノ酸など水分を含む有機物の自然状態を
保存するものが使用可能であり、従来の観測手段では観
測出来ながったこれらの物質の自然状態での微細形状が
本発明では測定できる。また、周囲雰囲気で酸化や汚染
が起こり易い活性な表面も、不活性な液体、たとえばシ
リコン油などに浸漬すれば純粋な表面を測定出来る等優
れた効果を奏する。In addition, it is possible to use substances that allow living organisms to survive, such as purified saline and water, and substances that preserve the natural state of organic substances that contain water, such as proteins and amino acids, and these substances that cannot be observed with conventional observation methods can be used. According to the present invention, the fine shape of the material in its natural state can be measured. Furthermore, even active surfaces that are susceptible to oxidation and contamination in the surrounding atmosphere can be immersed in an inert liquid, such as silicone oil, to produce excellent effects such as being able to measure pure surfaces.
第１図は本発明装置の第１実施例を示す一部破断側面図
、第２図は同・第２実施例を示す一部破断側面図、第３
図は同・第３実施例を示す一部破断側面図である。
１・・・触針 ２・・・板ばね２′・・・
平行ばね ４・・・測定物４ａ・・・測定面
６・・・光へッドセンザ７・・・光へラドセン勺
の先端
８・・・容器 ９・・・液体１０・・・導
電プローブ １１・・・ピエゾ素子１２・・・絶縁被
覆FIG. 1 is a partially cutaway side view showing a first embodiment of the device of the present invention, FIG. 2 is a partially cutaway side view showing the same second embodiment, and FIG.
The figure is a partially cutaway side view showing the third embodiment. 1... Stylus 2... Leaf spring 2'...
Parallel spring 4...Measurement object 4a...Measurement surface
6... Optical head sensor 7... Tip of optical head sensor 8... Container 9... Liquid 10... Conductive probe 11... Piezo element 12... Insulating coating
Claims (1)
動の検出により表面形状を測定するに当り、前記支持ば
ねに対し外乱振動を遮断自在かつ粘性減衰を付与自在に
液体中測定してミクロンメートル以下の精密測定をする
ことを特徴とする表面形状測定方法 ２ 触針を支持したばねと、当該ばねの変位を検出する
変位センサを備え、前記触針を測定面に接触摺動させて
表面形状を測定する装置において、前記測定面と前記触
針と前記支持ばねと前記変位センサの先端とが液体中に
浸漬されていることを特徴とする表面形状測定装置[Claims of Claims] 1. When measuring a surface shape by detecting the displacement behavior of a spring that supports a stylus that slides in contact with a measurement surface, the support spring is capable of blocking disturbance vibrations and is provided with viscous damping. Surface shape measuring method 2 characterized by freely measuring in a liquid and performing precise measurements of micrometers or less A spring supporting a stylus and a displacement sensor that detects the displacement of the spring are provided, and the stylus is measured. A device for measuring a surface shape by sliding contact with a surface, characterized in that the measurement surface, the stylus, the support spring, and the tip of the displacement sensor are immersed in a liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23869888A JPH0670565B2 (en) | 1988-09-26 | 1988-09-26 | Surface shape measuring method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23869888A JPH0670565B2 (en) | 1988-09-26 | 1988-09-26 | Surface shape measuring method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0287009A true JPH0287009A (en) | 1990-03-27 |
| JPH0670565B2 JPH0670565B2 (en) | 1994-09-07 |
Family
ID=17033968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23869888A Expired - Lifetime JPH0670565B2 (en) | 1988-09-26 | 1988-09-26 | Surface shape measuring method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0670565B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04230801A (en) * | 1990-04-28 | 1992-08-19 | Focus Messtechnik Gmbh & Co Kg | Scanning head |
-
1988
- 1988-09-26 JP JP23869888A patent/JPH0670565B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04230801A (en) * | 1990-04-28 | 1992-08-19 | Focus Messtechnik Gmbh & Co Kg | Scanning head |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0670565B2 (en) | 1994-09-07 |
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