JPH0283137A - Discharge machining device - Google Patents

Discharge machining device

Info

Publication number
JPH0283137A
JPH0283137A JP23252488A JP23252488A JPH0283137A JP H0283137 A JPH0283137 A JP H0283137A JP 23252488 A JP23252488 A JP 23252488A JP 23252488 A JP23252488 A JP 23252488A JP H0283137 A JPH0283137 A JP H0283137A
Authority
JP
Japan
Prior art keywords
fixed
linear motor
linear
permanent magnet
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23252488A
Other languages
Japanese (ja)
Inventor
Shoji Ishihara
石原　紹治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23252488A priority Critical patent/JPH0283137A/en
Publication of JPH0283137A publication Critical patent/JPH0283137A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE:To improve the positioning precision of a work provided above by providing a protruded electrode group on a fixed section, providing a movable section with electromagnets and a permanent magnet oppositely to it to form a linear pulse motor, and stacking two linear pulse motors at right angles. CONSTITUTION:The first linear motor movable section 22 formed with a permanent magnet 22a and a pair of electromagnets 22b and 220 fixed to its N and S poles is slidably provided on the first linear motor fixed section 21 fixed on a bed 1 and provided with protruded electrodes 21a made of soft magnetic steel to form the first linear motor. The second linear motor fixed section 23 with the same structure as that of the first linear motor movable section 22 is fixed, and a work 25 is fixed on the second linear motor movable section 24. When two-phase currents are fed to coils wound on the electromagnets 22a and 22c respectively, the movable sections 22 and 24 are moved with respect to the fixed sections 21 and 23 respectively, the work 25 is moved in the X and Y directions, and precise positioning can be performed.

Description

【発明の詳細な説明】 ［産業上の利用分野］ この発明は、放電加工装置に係り、さらに詳しくは、該
装置における被加工物の位置決めを行う駆動機構に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an electric discharge machining apparatus, and more particularly to a drive mechanism for positioning a workpiece in the apparatus.

［従来の技術］ 従来、放電加工装置における被加工物の位置決めを行う
には、Ｘ、Ｙ方向に移動するテーブル、サドルの駆動源
として回転式モータを使用し、動力伝達には歯車やボー
ルねじ等で構成された直線変位に変換する構造になって
いた。[Prior Art] Conventionally, in order to position a workpiece in an electric discharge machining device, a rotary motor is used as a drive source for a table and a saddle that move in the X and Y directions, and gears and ball screws are used to transmit power. It had a structure that converted it into a linear displacement consisting of, etc.

第５図は放電加工装置における従来の被加工物駆動系の
構成例を示す斜視図である。図において、（１）は放電
加工装置本体側に固定されたベッド、（２）はベッド（
１）に平行に突設された一対のレールで、サドル（３）
が摺動して移動する。（４）はレール（２）に直交して
サドル（３）に突設された一対のレールで、被加工物を
載置するテーブル（５）が摺動して移動する。（６）は
放電加工装置本体側に固定され、サドル（３）を駆動す
る回転式モータ、（７）は回転式モータ（６）の回転角
を検出する角度検出器、（８）は回転式モータ（６）の
出力軸に結合した伝達ギヤ、（９）は伝達ギヤ（８）に
噛み合うとともに、サドル（３）に固定されたボールめ
ねじ（ｌＯ）に噛み合うボールおねじ（１１）に結合さ
れた伝達ギヤである。FIG. 5 is a perspective view showing an example of the configuration of a conventional workpiece drive system in an electrical discharge machining apparatus. In the figure, (1) is a bed fixed to the electrical discharge machining device main body side, and (2) is a bed (
A pair of rails protruding parallel to the saddle (3)
slides and moves. (4) is a pair of rails projecting from the saddle (3) perpendicular to the rails (2), on which the table (5) on which the workpiece is placed slides. (6) is a rotary motor that is fixed to the electrical discharge machining device main body and drives the saddle (3), (7) is an angle detector that detects the rotation angle of the rotary motor (6), and (8) is a rotary motor. A transmission gear (9) connected to the output shaft of the motor (6) meshes with the transmission gear (8) and is connected to a male ball screw (11) that meshes with a female ball screw (lO) fixed to the saddle (3). This is the transmission gear.

（１２）は放電加工装置本体側に固定され、テーブル（
５）を駆動する回転式モータ、（１３）は回転式モータ
（１２）の回転角を検出する角度検出器、（１４）は回
転式モータ（１２）の出力軸に結合した伝達ギヤ、（１
５）は伝達ギヤ（１４）に噛み合うとともに、テーブル
（５）に固定された図示しないボールめねじに噛み合う
ボールおねじ（１６）に結合した伝達ギヤである。(12) is fixed to the electrical discharge machining equipment main body side, and the table (
(13) is an angle detector that detects the rotation angle of the rotary motor (12); (14) is a transmission gear coupled to the output shaft of the rotary motor (12);
5) is a transmission gear coupled to a male ball screw (16) that meshes with the transmission gear (14) and meshes with a female ball screw (not shown) fixed to the table (5).

次に、動作について説明する。回転式モータ（６）、＜
１２）が図示のない設定部よりの制御指令に応じて回転
すると、サドル（３）の駆動系では、回転式モータ（６
）、伝達ギヤ（８）、（９）　、ボールおねじ（１１）
に回転運動が伝達され、この回転運動がボールめねじ（
１０）によって直線運動に変換され、ボールめねじ（１
０）が固定されたサドル（３）をレール（２）に沿って
摺動させる。また、テーブル（５）の駆動系では、回転
式モータ（１２）、伝達ギヤ（１４）。Next, the operation will be explained. Rotary motor (6), <
12) rotates in response to a control command from a setting unit (not shown), the drive system of the saddle (3) rotates the rotary motor (6).
), transmission gear (8), (9), ball male screw (11)
The rotational motion is transmitted to the female ball screw (
10) into linear motion, and the female ball screw (1
0) slides the saddle (3) to which it is fixed along the rail (2). Furthermore, the drive system for the table (5) includes a rotary motor (12) and a transmission gear (14).

（１５）、ボールおねじ（１Ｂ）に回転運動が伝達され
、この回転運動がボールおねじ（１６）に噛み合うボー
ルめねじによって直線運動に変換され、テーブル（５）
をレール（４）に沿って摺動させる。(15), the rotational motion is transmitted to the male ball screw (1B), this rotational movement is converted into linear motion by the female ball screw that meshes with the male ball screw (16), and the table (5)
slide along the rail (4).

以上のように回転式モータ（６）　、　（１２）のそれ
ぞれの回転運動によって、サドル（３）とテーブル（５
）とは互いに直交する直線運動に変換され、テーブル（
５）上に載置した被加工物を所定の位置に位置決めする
。As described above, the saddle (3) and the table (5) are
) is converted into mutually orthogonal linear motion, and the table (
5) Position the workpiece placed above at a predetermined position.

なお、モータ回転角検出器（７）　、　（１３）は、上
述の動作における回転式モータ（８）　、　（１２）の
それぞれの回転角を検出し、これらの回転角に対応する
サドル（３）およびテーブル（５）のＸ−Ｙ方向の変位
を読取る。The motor rotation angle detectors (7) and (13) detect the respective rotation angles of the rotary motors (8) and (12) during the above-mentioned operation, and detect the saddle (3) corresponding to these rotation angles. and read the displacement of the table (5) in the X-Y direction.

［発明が解決しようとする課８］ 上記のような従来の放電加工装置では、回転式モータに
よる回転運動を伝達ギヤやボールねじを介して直線運動
に変換し、テーブル上に載置、固定した被加工物を移動
して加工電極と被加工物との相対位置を変えるようにし
ているので、伝達ギヤの噛み合いのバックラッシュ、ボ
ールねじに対する負荷変動による変位、これらの駆動系
における摩擦が起因するヒステリシス等によって被加工
物の位置決め精度が低下し易く、またこの精度低下を防
止するためのメンテナンスが容易にできないなどの課題
があった。[Issue 8 to be solved by the invention] In the conventional electrical discharge machining equipment as described above, the rotary motion by a rotary motor is converted into linear motion via a transmission gear or a ball screw, and the machine is placed and fixed on a table. Since the workpiece is moved to change the relative position between the machining electrode and the workpiece, backlash in the meshing of the transmission gear, displacement due to load fluctuations on the ball screw, and friction in these drive systems are caused. There have been problems in that the positioning accuracy of the workpiece tends to decrease due to hysteresis and the like, and maintenance cannot be easily performed to prevent this decrease in accuracy.

この発明は上記のような課題を解消するためになされた
もので、安定した高精度の位置決めを行うことができる
とともに、部品数が少なく、精度維持のためのメンテナ
ンスが簡単な放電加工装置を得ることを目的とする。This invention was made to solve the above-mentioned problems, and provides an electric discharge machining device that can perform stable and highly accurate positioning, has a small number of parts, and is easy to maintain to maintain accuracy. The purpose is to

〔課題を解決するための手段］ この発明に係る放電加工装置は、等間隔に並設された第
１の突極群を有しベット上に固設された固定部と、第１
の突極群の上方に対向して設けられた電磁石と永久磁石
等を有する可動部とからなる第１のリニアパルスモータ
と、第２の突極群を有し第１のリニアパルスモータの可
動部に直交して固設された固定部と、第２の突極群の上
方に対向して設けられた電磁石と永久磁石等を有し被加
工物を載置・固定する可動部とからなる第２のリニアパ
ルスモータとを具備したものである。[Means for Solving the Problems] An electric discharge machining apparatus according to the present invention includes a fixing portion having a first group of salient poles arranged in parallel at equal intervals and fixed on a bed;
A first linear pulse motor consisting of a movable part having an electromagnet and a permanent magnet, etc. provided above a group of salient poles, and a movable part of the first linear pulse motor having a second group of salient poles. The fixed part is fixed perpendicular to the second salient pole group, and the movable part has an electromagnet, a permanent magnet, etc., and is provided oppositely above the second salient pole group to place and fix the workpiece. It is equipped with a second linear pulse motor.

［作用］ この発明における第２のリニアパルスモータの可動部上
に載置・固定された被加工物は、第１のリニアパルスモ
ータによる可動部の移動と、この移動方向に直交する第
２のリニアパルスモータの可動部の移動とで合成された
Ｘ−Ｙ座標によって位置決めされる。[Function] In this invention, the workpiece placed and fixed on the movable part of the second linear pulse motor is moved by the movement of the movable part by the first linear pulse motor and by the second movement perpendicular to the direction of movement. Positioning is performed using the X-Y coordinates combined with the movement of the movable part of the linear pulse motor.

［実施例］ 第１図（ａ）　、（ｂ）はこの発明の一実施例の構成を
示す正面図である。図において、（１）はベッド、（２
１）はベッド（１）に固定され、軟磁鋼の突極（２１ａ
）が設けられた第１のりニアモータ固定部、（２２）は
永久磁石（２２ａ）及び永久磁石（２２ａ）のＮＳ極に
固定した一対の電磁石（２２ｂ）　、　（２２ｃ）等よ
りなり、ガイド（２２ｄ）によって支持され、後述する
パルスモータの駆動作用によって第１のりニアモータ固
定部（２１）面上を摺動する第１のりニアモータ可動部
、（２３）は第１のりニアモータ可動部（２２’）に固
定され、第１のりニアモータ固定部（２１）に直交して
設けられた軟磁鋼の突極（２３ａ）を有する第２のりニ
アモータ固定部、（２４）は永久磁石（２４ａ）及び永
久磁石（２４ａ）のＮＳ極に固定した一対の電磁石（２
４ｂ）。[Embodiment] FIGS. 1(a) and 1(b) are front views showing the configuration of an embodiment of the present invention. In the figure, (1) is a bed, (2
1) is fixed to the bed (1) and has a salient pole (21a) made of soft magnetic steel.
), the first linear motor fixing part (22) is made up of a permanent magnet (22a) and a pair of electromagnets (22b) and (22c) fixed to the north and south poles of the permanent magnet (22a), and the guide (22d ), the first linear motor movable part (23) slides on the surface of the first linear motor fixed part (21) by the driving action of a pulse motor, which will be described later. A second linear motor fixing part (24) having salient poles (23a) of soft magnetic steel fixed and provided orthogonally to the first linear motor fixing part (21) is a permanent magnet (24a) and a permanent magnet (24a). ) A pair of electromagnets (2
4b).

（２４ｃ）等よりなり、ガイド（２４ｄ）で支持されて
第２のりニアモータ固定部（２３）面上を摺動する第２
のりニアモータ可動部（２４）で、被加工物（２５）を
載置・固定している＝ 第２図は第１図における突極（２１ａ）　、永久磁石（
２２ａ）　、電磁石（２２ｂ）　、　（２２ｃ）の詳細
図である。(24c), etc., and is supported by a guide (24d) and slides on the surface of the second near motor fixing part (23).
The workpiece (25) is placed and fixed in the glue near motor movable part (24) = Figure 2 shows the salient pole (21a) in Figure 1, the permanent magnet (
22a), electromagnets (22b) and (22c) in detail.

図において、永久磁石（２２ａ）の両極のそれぞれに電
磁石（２２ｂ）　、　（２２ｃ）が固定され、さらに電
磁石（２２ｂ）　、　（２２ｃ）のそれぞれの極（２２
ｂｌ）、　（２２ｂ２）　。In the figure, electromagnets (22b) and (22c) are fixed to each of the poles of the permanent magnet (22a), and furthermore, electromagnets (22b) and (22c) are fixed to each of the poles of the permanent magnet (22a), and
bl), (22b2).

（２２ｃｌ）、（２２ｃ２）にはコイル（２７）、（２
８）が極性が互いに逆になるようにして直列に巻回され
、かつ、コイル（２７）、（２８）にはそれぞれに２相
のパルス電流が給電されるようになっている。(22cl) and (22c2) have coils (27) and (2
8) are wound in series so that their polarities are opposite to each other, and two-phase pulse currents are supplied to each of the coils (27) and (28).

なお、第２のりニアモータ可動部（２４）の永久磁石（
２４ａ）　、電磁石（２４ｂ）　、　（２４ｃ）も上記
と同様に構成され、電磁石（２４ｂ）　、　（２４ｃ）
のそれぞれの極に２相のパルス電流を給電するコイルが
巻回されている。In addition, the permanent magnet (
24a), electromagnets (24b) and (24c) are also configured in the same manner as above, and electromagnets (24b) and (24c)
A coil is wound around each pole to supply two-phase pulse current.

上記のように構成された被加工物の駆動機構において、
例えば第１のりニアモータ固定部（２１）の突極（２１
ａ）と、第１のりニアモータ可動部（２２）の極（２２
ｂ）　、　（２２ｃ）とが第３図（ａ）に示すような位
置関係にあるとき、コイル（２８）に矢印方向に電流を
流して電磁石（２２ｃ）を励磁すると、極（２２ｅｌ）
の磁界が増強し、極（２２ｃ２）においては永久磁石（
２２ａ）よる磁界と電磁石（２２ｃ）による磁界とが互
いに打ち消し合うので、第１のりニアモータ可動部（２
２）は、第１のりニアモータ固定部（２１）に対して極
（２２ｃｌ）の磁力によって保持される。In the workpiece drive mechanism configured as above,
For example, the salient pole (21) of the first linear motor fixing part (21)
a) and the pole (22) of the first linear motor movable part (22).
b) and (22c) are in the positional relationship as shown in Figure 3(a), when a current is applied to the coil (28) in the direction of the arrow to excite the electromagnet (22c), the pole (22el)
The magnetic field of is strengthened, and at the pole (22c2), a permanent magnet (
Since the magnetic field generated by 22a) and the magnetic field generated by the electromagnet (22c) cancel each other out, the first linear motor movable part (22c)
2) is held by the magnetic force of the pole (22cl) with respect to the first linear motor fixing part (21).

次に、コイル（２８）の電流が断たれ、第３図（ｂ）に
示すような方向に電流を流して電磁石（２２ｂ）を励磁
すると、極（２２ｂ２）の磁界が増強し、極（２２ｂｌ
）においては永久磁石（２２ａ）による磁界と電磁石（
２２ｂ）による磁界とが打ち消し合い、永久磁石（２２
ａ）等、すなわち第１のりニアモータ可動部（２２）は
、第１のりニアモータ固定部ぐ２１）に対して１／４　
ｐだけ図の右方へ移動してから、極（２２ｂ２）の磁力
に保持される。Next, the current in the coil (28) is cut off, and when the electromagnet (22b) is excited by passing a current in the direction shown in FIG. 3(b), the magnetic field of the pole (22b2) is strengthened,
), the magnetic field by the permanent magnet (22a) and the electromagnet (
22b) cancel each other out, and the permanent magnet (22b)
a) etc., that is, the first glue near motor movable part (22) is 1/4 of the first glue near motor fixed part 21).
After moving to the right in the figure by p, it is held by the magnetic force of the pole (22b2).

次に、コイル（２７）の電流が断たれ、第３図（ｅ）に
示すような方向に電流を流して電磁石（２２ｃ）を励磁
すると、極（２２ｃ２）の磁界が増強し、極（２２ｅｌ
）においては永久磁石（２２ａ）による磁界と電磁石（
２２ｃ）による磁界とが打ち消し合うので、第１のりニ
アモータ可動部（２２）は、第１のりニアモータ固定部
（２１）に対してさらにｌ／４　ｐだけ図の右方へ移動
した後にコイル（’２８　）の電流が断たれると、極（
２２ｃ２）における永久磁石（２２ａ）の磁力によって
保持される。Next, the current in the coil (27) is cut off, and when the electromagnet (22c) is excited by passing the current in the direction shown in FIG. 3(e), the magnetic field of the pole (22c2) is strengthened,
), the magnetic field by the permanent magnet (22a) and the electromagnet (
22c) cancel each other out, the first linear motor movable part (22) further moves to the right in the figure by 1/4 p with respect to the first linear motor fixed part (21), and then the coil (' When the current at the pole (28) is cut off, the pole (
22c2) by the magnetic force of the permanent magnet (22a).

以上のように、図示のない設定部より出力するパルス数
に応じて第１のりニアモータ可動部（２２）は所定量の
移動を行ない、停止位置においてコイル（２７）、（２
８）の電流による励磁が断たれると、永久磁石（２２ａ
）の磁力によって保持される。As described above, the first linear motor movable part (22) moves a predetermined amount according to the number of pulses output from the setting part (not shown), and at the stop position, the coils (27), (2
When the excitation by the current of 8) is cut off, the permanent magnet (22a
) held by the magnetic force.

第２のりニアモータ固定部（２３）と第２のりニアモー
タ可動部（２４）も上述と全く同様の動作を行うので、
互いに直交する第１のりニアモータ可動部（２２）と第
２のりニアモータ可動部（２４）とは、設定部よりのそ
れぞれへの所定のパルス数に応じた移動をして、被加工
物（２５）の位置決め等が行なわれる。The second glue near motor fixed part (23) and the second glue near motor movable part (24) also operate in exactly the same way as described above.
The first linear motor movable part (22) and the second linear motor movable part (24), which are perpendicular to each other, move according to a predetermined number of pulses from the setting part to each of them, and move the workpiece (25). Positioning, etc. are performed.

また、以上の動作によって得られる被加工物（２５）の
位置決めの精度は、電磁石の励磁方式や突極（２１ａ）
　、　（２３ａ）のピッチ等によって定まるが、ステッ
プ位置精度：±０．０３＋ｓｍｓ繰り返し位置決め精度
：±Ｏ、ＯＯ５關、ヒステリシス：　０　、０４　ｒａ
ｔｓ程度の精度が得られる。In addition, the accuracy of positioning the workpiece (25) obtained by the above operation depends on the excitation method of the electromagnet and the salient pole (21a).
, Determined by pitch etc. of (23a), step position accuracy: ±0.03+sms repeat positioning accuracy: ±O, OO5, hysteresis: 0,04 ra
Accuracy on the order of ts can be obtained.

なお、上述の実施例では互いに直交する第１、第２のり
ニアモータ可動部（２２）　、　（２４）が、それぞれ
が対向する突極（２１ａ）　、　（２３ａ）との磁力変
化によって移動する構成について説明したが、第４図に
示すように被加工物を載置・固定するりニアモータ可動
部に固定して設けられて、互いに直交する永久磁石（２
７）、（２Ｂ＞等を部分的に示した突極（２９）上に配
置する構成にしても、Ｘ、Ｙ軸方向への被加工物の移動
を交互にそれぞれ行うようにすれば、上述の実施例と同
等のものが得られる。In addition, in the above-mentioned embodiment, the first and second linear motor movable parts (22) and (24), which are perpendicular to each other, are moved by magnetic force changes with the opposing salient poles (21a) and (23a), respectively. As explained above, as shown in Fig. 4, permanent magnets (2
7), (2B>, etc.) are arranged on the partially shown salient pole (29), if the workpiece is moved in the X and Y axis directions alternately, the above-mentioned result can be achieved. An equivalent result is obtained as in the example.

また、上述の実施例ではリニアパルスモータを放電加工
装置における被加工物の駆動系に使用した例について説
明したが、他の加工装置等における被加工物の位置決め
を行う装置に適用しても、同様の効果を奏する。Further, in the above embodiment, an example was explained in which the linear pulse motor was used in the drive system of the workpiece in an electric discharge machining device, but it can also be applied to a device for positioning the workpiece in other machining devices. It has a similar effect.

［発明の効果］ 以上のように、この発明によれば、固定部の突極群に対
向して設けた可動部の永久磁石と電磁石とによる磁力で
、設定部より出力するパルス数に応じて被加工物をＸ−
Ｙ方向に移動させて位置決めを行うようにしたので、歯
車やねじの摩耗等による精度維持のためのメンテナンス
が必要なく、また安定した高精度の被加工物の位置決め
ができる効果がある。[Effects of the Invention] As described above, according to the present invention, the magnetic force generated by the permanent magnet and electromagnet of the movable part, which are provided opposite to the salient pole group of the fixed part, is used to control the number of pulses output from the setting part. The workpiece is
Since positioning is performed by moving in the Y direction, there is no need for maintenance to maintain accuracy due to wear of gears and screws, and there is an effect that stable and highly accurate positioning of the workpiece can be performed.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図（ａ）　、　（ｂ）はこの発明の一実施例の構成
を示す正面図及び側面図、第２図は第１図の要部を示す
詳細図、第３図（ａ）　、（ｂ）　、（ｃ）はりニアモ
ータ可動部の動作説明図、第４図はこの発明の他の実施
例を示す斜視図、第５図は従来の放電加工装置における
被加工物の駆動機構の一例を示す斜視図である。 図において、（１）はベッド、（２１）は第１のりニア
モータ固定部、（２１ａ）　、　（２３ａ）は突極、（
２２）は第１のりニアモータ可動部、（２２ａ）　、　
（２４ａ）は永久磁石、（２２ｂ）　、　（２２ｃ）　
、　（２４ｂ）　、　（２４ｃ）は電磁石％’　（２３
）は第２のりニアモータ固定部、（２４）は第２のりニ
アモータ可動部、（２５）は被加工物。 なお、図中同一符号は同−又は相当部分を示す。1(a) and (b) are front and side views showing the configuration of an embodiment of the present invention, FIG. 2 is a detailed view showing the main parts of FIG. 1, and FIG. 3(a), ( b), (c) An explanatory diagram of the operation of the movable part of the beam near motor, FIG. 4 is a perspective view showing another embodiment of the present invention, and FIG. 5 is an example of a workpiece drive mechanism in a conventional electric discharge machining apparatus. FIG. In the figure, (1) is the bed, (21) is the first linear motor fixing part, (21a) and (23a) are the salient poles, (
22) is the first linear motor movable part, (22a),
(24a) is a permanent magnet, (22b), (22c)
, (24b), (24c) are electromagnet%' (23
) is the second linear motor fixed part, (24) is the second linear motor movable part, and (25) is the workpiece. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 　等間隔に並設された第１の突極群を有しベッド上に固
設された固定部と、上記第１の突極群の上方に対向して
設けられた電磁石と永久磁石等を有する可動部とからな
る第１のリニアパルスモータと、等間隔に並設された第
２の突極群を有し上記第１のリニアパルスモータの可動
部に直交して固設された固定部と、上記第２の突極群の
上方に対向して設けられた電磁石と永久磁石等を有し被
加工物を載置・固定する可動部とからなる第２のリニア
パルスモータとを具備した放電加工装置。A fixed part having a first group of salient poles arranged in parallel at equal intervals and fixed on the bed, and an electromagnet, a permanent magnet, etc. provided oppositely above the first group of salient poles. a first linear pulse motor comprising a movable part; a fixed part having a second group of salient poles arranged in parallel at equal intervals and fixedly installed perpendicular to the movable part of the first linear pulse motor; , a second linear pulse motor comprising an electromagnet disposed facing above the second salient pole group and a movable part having a permanent magnet or the like, on which a workpiece is placed and fixed. Processing equipment.
JP23252488A 1988-09-19 1988-09-19 Discharge machining device Pending JPH0283137A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23252488A JPH0283137A (en) 1988-09-19 1988-09-19 Discharge machining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23252488A JPH0283137A (en) 1988-09-19 1988-09-19 Discharge machining device

Publications (1)

Publication Number Publication Date
JPH0283137A true JPH0283137A (en) 1990-03-23

Family

ID=16940683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23252488A Pending JPH0283137A (en) 1988-09-19 1988-09-19 Discharge machining device

Country Status (1)

Country Link
JP (1) JPH0283137A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6353199B1 (en) * 1998-11-17 2002-03-05 Sodick Co., Ltd. Apparatus for electric discharge machining
US6509538B2 (en) * 2000-03-10 2003-01-21 Sodick Co., Ltd. Wire cut electric discharge machine using linear motors
CN106180937A (en) * 2016-08-29 2016-12-07 大连銮艺精密模塑制造有限公司 Fine positioning magnetic conversion work platform

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6353199B1 (en) * 1998-11-17 2002-03-05 Sodick Co., Ltd. Apparatus for electric discharge machining
US6509538B2 (en) * 2000-03-10 2003-01-21 Sodick Co., Ltd. Wire cut electric discharge machine using linear motors
CN106180937A (en) * 2016-08-29 2016-12-07 大连銮艺精密模塑制造有限公司 Fine positioning magnetic conversion work platform

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