JPH026372A - Production of aluminum nitride sintered form - Google Patents
Production of aluminum nitride sintered formInfo
- Publication number
- JPH026372A JPH026372A JP63154624A JP15462488A JPH026372A JP H026372 A JPH026372 A JP H026372A JP 63154624 A JP63154624 A JP 63154624A JP 15462488 A JP15462488 A JP 15462488A JP H026372 A JPH026372 A JP H026372A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- thermal decomposition
- decomposition product
- organic polymer
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000005979 thermal decomposition reaction Methods 0.000 claims abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 13
- 229920000620 organic polymer Polymers 0.000 claims abstract description 10
- 238000005245 sintering Methods 0.000 claims abstract description 10
- 230000001590 oxidative effect Effects 0.000 claims abstract description 4
- 238000010304 firing Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 abstract description 9
- 229920005989 resin Polymers 0.000 abstract description 7
- 239000011347 resin Substances 0.000 abstract description 7
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 abstract description 5
- 239000004372 Polyvinyl alcohol Substances 0.000 abstract description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 abstract description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 abstract description 2
- 239000007787 solid Substances 0.000 abstract description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000001354 calcination Methods 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 1
- 239000008187 granular material Substances 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 150000001875 compounds Chemical class 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- -1 carbide Chemical class 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、窒化アルミニウムを主成分とする高熱伝導
性窒化アルミニウム焼結体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing a highly thermally conductive aluminum nitride sintered body containing aluminum nitride as a main component.
近年、電子部品の小型化・高集積化が著しく、それに伴
い、それらの単位面積あたりの発熱量は増加の一途をた
どっている。電子部品にとって、これらの熱電いかに逃
がすかがポイントであり、熱電導率の高い基板が望まれ
ている。この目的のため、従来使用されてきたアルミナ
基板にかわり窒化アルミニウム焼結体が注目されている
。In recent years, electronic components have become significantly smaller and more highly integrated, and as a result, the amount of heat generated per unit area of these components continues to increase. For electronic components, the key is how to dissipate these thermoelectrics, and a substrate with high thermal conductivity is desired. For this purpose, aluminum nitride sintered bodies are attracting attention in place of the conventionally used alumina substrates.
窒化アルミニウムは難焼結性物質であるため、通常、常
圧焼結体を得るに際し、焼結助剤として希土類及び／又
はアルカリ土類元素を含む化合物全添加し焼成されてい
る。これらの焼結助剤は、窒化アルミニウムの緻密化を
促進させるばかりでなく、窒化アルミニウム衣面に多量
に存在する酸素と反応することにより、Ａｊ＋Ｎ粒子内
への酸素の同浴を減少させて、高い熱伝導性をもつ焼結
体をもたらす。Since aluminum nitride is a substance that is difficult to sinter, normally, when obtaining an atmospheric pressure sintered body, a compound containing a rare earth and/or alkaline earth element is added as a sintering aid and then fired. These sintering aids not only promote the densification of aluminum nitride, but also reduce the amount of oxygen entering the Aj+N particles by reacting with the oxygen present in large amounts on the aluminum nitride coating surface. Produces a sintered body with high thermal conductivity.
近年のＡＪＮ粉の高純度化とくに低酸素化に伴ない、そ
れらの粉を用いた焼結体の熱伝導率は向上の一途をたど
っているが、窒化アルミニウムの理論熱伝導率（３２０
ｗ／ｎｎ−ｋ ）に対し、半分程度の熱伝導率にとどま
っているのが現状であり、より高い熱伝導率をもつ窒化
アルミニウム焼結体の出現が待たれている。The thermal conductivity of sintered bodies using these powders has been steadily improving as the purity of AJN powder has increased in recent years, especially with the reduction in oxygen content.
At present, the thermal conductivity is only about half that of the aluminum nitride sintered body with higher thermal conductivity.
本発明は、このような従来方法では達し得ない高い熱伝
導性を有する窒化アルミニウム焼結体の製造方法を提供
するものである。The present invention provides a method for producing an aluminum nitride sintered body having high thermal conductivity that cannot be achieved by conventional methods.
本発明者らは、上記目的を達成するため鋭意検討を重ね
た結果、窒化アルミニウム粉、焼結助剤及び有機重合体
の熱分解生成物からなる成形体を焼成するに際し、その
昇温条件を敵しく制御することにより、従来より高い熱
伝導率を有する焼結体が得られることを見い出し本発明
に至った。As a result of extensive studies to achieve the above object, the inventors of the present invention have determined that the heating conditions for firing a compact made of aluminum nitride powder, a sintering aid, and a thermal decomposition product of an organic polymer are It was discovered that a sintered body having a higher thermal conductivity than the conventional one can be obtained by properly controlling the temperature, leading to the present invention.
すなわち、本発明は、窒化アルミニウム粉、焼結助剤及
び有機１合体の熱分解生成物を含んでなる成形体を非酸
化性雰囲気下で焼成するに際し、１１００〜１７００℃
における昇温速度を２０℃／分以下とし、１７５０℃以
上の温度で焼成することを特徴とする窒化アルミニウム
焼結体の製造方法である。That is, in the present invention, when firing a molded body containing aluminum nitride powder, a sintering aid, and a thermal decomposition product of an organic monomer in a non-oxidizing atmosphere, the heating temperature is 1100 to 1700°C.
This is a method for producing an aluminum nitride sintered body, characterized in that the heating rate is 20° C./min or less and firing is performed at a temperature of 1750° C. or higher.
以下、本発明をさらに詳細に説明する。The present invention will be explained in more detail below.
この発明における有機重合体の熱分解生成物とは、例え
ば、塩化ビニル樹脂、ポリビニルアルコル、酢酸ビニル
樹脂等の有機重合体の粒状品又は粉末を不活性雰囲気中
にて加熱したものであり、常温においてはピッチ状を呈
する固体で、炭素原子と水素原子の１量比（Ｃ／Ｈ）を
１０〜２５に制御したものが好ましい。これは有機１合
体の種類を問わず、通常、温度２００〜５００℃，Ａｒ
又はＮ２中にて熱処理して製造される。The thermal decomposition product of an organic polymer in this invention is, for example, a granular product or powder of an organic polymer such as vinyl chloride resin, polyvinyl alcohol, vinyl acetate resin, etc., heated in an inert atmosphere. It is preferable to use a pitch-like solid in which the molar ratio of carbon atoms to hydrogen atoms (C/H) is controlled to 10 to 25. Regardless of the type of organic monomer, this is usually carried out at a temperature of 200 to 500°C and in an Ar
Alternatively, it is manufactured by heat treatment in N2.
これらの有機１合体の熱分解生成物は、焼成中に窒化ア
ルミニウム粒子六回に存在する酸素と反応することによ
り、窒化アルミニウム言有酸索量全低減させ、得られた
焼結体の熱伝導性を向上させるが、さらに、１１００℃
〜１７００℃における昇温速度を２０℃／分以下好まし
くは２℃／分〜１０℃／分にすることにより、その効果
は顕著となる。すなわち、本発明者らは、各温度におけ
る成形体中の酸素言有賞、炭素言有蛍金測定したところ
、有機１合体の熱分解生成物の還元作用が行われるのは
、１１００℃〜１７００℃であること、及びこれらの還
元作用が、この温度域に咥ける昇温速度を２０８Ｃ／分
以下とすることによシ大きくなること、そしてこれらの
条件下で焼成して得られた焼結体の酸素含有量は極めて
低減され熱伝導率が著しく高くなることを見い出したも
のである。The thermal decomposition products of these organic monomers react with oxygen present in the aluminum nitride particles during sintering, thereby reducing the total amount of aluminum nitride oxygen and improving the thermal conductivity of the resulting sintered body. In addition, the temperature at 1100℃
The effect becomes remarkable by setting the temperature increase rate at ~1700°C to 20°C/min or less, preferably 2°C/min to 10°C/min. That is, the present inventors measured the oxygen content and carbon content of the molded product at various temperatures, and found that the reduction effect of the thermal decomposition product of the organic 1 combination takes place between 1100°C and 1700°C. ℃, and that these reduction effects are enhanced by setting the heating rate in this temperature range to 208 C/min or less, and that the sintered product obtained by firing under these conditions It was discovered that the oxygen content of the body is extremely reduced and the thermal conductivity is significantly increased.
本発明において、有機重合体の熱分解生成物は、窒化ア
ルミニウム含有酸素量に応じて適切量配合される。その
量としては、（熱分解生成物の量〕／（窒化アルミニウ
ム含有酸素量）の１量比（以下Ｐ２Ｏ比と記す）が０．
０８〜２．５とくに０．９〜１．５とすることによりそ
の効果は著しく大きくなる。In the present invention, the thermal decomposition product of the organic polymer is blended in an appropriate amount depending on the amount of oxygen contained in aluminum nitride. As for the amount, the ratio (hereinafter referred to as P2O ratio) of (amount of thermal decomposition products)/(amount of oxygen contained in aluminum nitride) is 0.
By setting the ratio to 0.08 to 2.5, particularly 0.9 to 1.5, the effect becomes significantly greater.
本発明において使用される窒化アルミニウム粉としては
、通常、金属アルミニウム直接窒化法及びアルミナ還元
窒化法等により製造されたものを使用するが、その製造
履歴等に問題ではなく、むしろ酸素含有量が６Ｎ量係以
下、とくに２重ｉｔ％以下のものを使用することが好ま
しい。The aluminum nitride powder used in the present invention is normally produced by a metal aluminum direct nitriding method, an alumina reduction nitriding method, etc., but there is no problem with its manufacturing history, and rather the oxygen content is 6N. It is preferable to use a material with a weight ratio of less than 2%, especially less than 2%.
本発明に用いられる焼結助剤は公知のものが使用できる
が、特に希土類元素及び／又はアルカリ土類金属元素を
含む化合物を使用することが、望ましい。ここで希土類
を含む化合物とは、Ｙ、Ｌａ。Although any known sintering aid can be used in the present invention, it is particularly desirable to use a compound containing a rare earth element and/or an alkaline earth metal element. Here, the compounds containing rare earth elements include Y and La.
Ｃａ 、 Ｇｄ 、 Ｄｙ等の元素を含む、酸化物、窒
化物、炭化物、ハロゲン化物、水素化物又は加熱によっ
てそれらになるものをさす。また、アルカリ土類金属を
含む化合物とは、Ｃａ、 Ｓｒ、 Ｂａを富む、酸化物
、窒化物、炭化物、ハロゲン化物、水素化物又は加熱に
よってそれらになるものをさす。Refers to oxides, nitrides, carbides, halides, hydrides, or substances that become such when heated, including elements such as Ca, Gd, and Dy. Further, the compound containing an alkaline earth metal refers to an oxide, nitride, carbide, halide, hydride, or a compound that becomes such by heating, which is rich in Ca, Sr, or Ba.
焼結助剤量は、その種類により異なるが、通常、命化ア
ルミニウム１００Ｎ量部に対し０．３〜８重量部とくに
０．５〜５］［ｊｔ部が好ましい。８Ｎ量部を越えると
生成する第２相成分が多くなり０．３Ｎｉｉｔ部未満で
は緻密化が不足しいずれの場合も熱伝導性の著しい向上
を阻害してし筐う。The amount of the sintering aid varies depending on its type, but is usually 0.3 to 8 parts by weight, preferably 0.5 to 5 parts by weight, per 100 N parts of aluminum. If the amount exceeds 8N parts, a large amount of second phase components will be produced, and if it is less than 0.3N parts, densification will be insufficient, and in either case, significant improvement in thermal conductivity will be inhibited.
以上のように１１００℃〜１７００℃における昇温速度
を２０８Ｃ／分以下に抑えて加熱された成形体は、最終
的に１７５０℃以上の温度で焼成される。１７５０℃に
満たない温度で焼成しても成形体は著しく緻密化しない
。好ましい焼成温度は１８００℃〜１９５０℃である。The molded body heated while suppressing the temperature increase rate at 1100°C to 1700°C to 208 C/min or less as described above is finally fired at a temperature of 1750°C or higher. Even if the molded body is fired at a temperature lower than 1750°C, the molded body will not be significantly densified. The preferred firing temperature is 1800°C to 1950°C.
以下、本発明を実施例をあげてさらに具体的に説明する
。Hereinafter, the present invention will be explained in more detail with reference to Examples.
実施例１
酸素含有量１．０重量％の窒化アルミニウム粉に炭素原
子と水素原子の１量比（Ｃ／Ｈ）が１２である塩化ビニ
ル樹脂の熱分解生成物を、Ｐ／○比を０．９又は１．５
にして配合し、さらに各々にＹ２Ｏ３を２又は４に置部
添加して混合物を得た。この混合物をアルミナ製ポット
にトリクレンとともに入れ、ボールミルにより充分混合
したのち、乾燥後、これらの混合粉末を４００々／６Ｍ
２の圧力で加圧成形し、さらに１０ Ｄ Ｏｋｇ／（：
ｒＩＬ２にてラバープレスしろ０φｎｒｎ Ｘ ５ ｖ
の円板状成形体を得た。Example 1 A thermal decomposition product of vinyl chloride resin with a carbon atom to hydrogen atom ratio (C/H) of 12 was added to aluminum nitride powder with an oxygen content of 1.0% by weight, and the P/○ ratio was 0. .9 or 1.5
Then, 2 or 4 portions of Y2O3 were added to each to obtain a mixture. This mixture was placed in an alumina pot along with trichlene, thoroughly mixed using a ball mill, and after drying, the mixed powder was mixed with 400/6M
Pressure molded at a pressure of 2, and further 10 D Okg/(:
Rubber press with rIL2 0φnrn X 5 v
A disc-shaped molded body was obtained.
これらの成形体’ｅ）Ｊｚ、１気圧中で１１００℃〜１
７００℃における昇温速度を５℃／分、１０℃／分、２
０℃／分、２５℃／分及び４０℃／分として昇温し、さ
らに１９００℃まで昇温したのち３時間保持して、焼結
体を作製した。得られた焼結体ｅま、１０φ醇ｘ３ｚ正
に研削加工し、密度測定後、レーサ゛−フラッシュ法に
て、熱伝導率ｔ−測測定た。These molded bodies'e) Jz, 1100°C to 1 at 1 atm.
The temperature increase rate at 700°C was 5°C/min, 10°C/min, 2
The temperature was raised at 0°C/min, 25°C/min, and 40°C/min, and the temperature was further raised to 1900°C and held for 3 hours to produce a sintered body. The obtained sintered body was ground to a diameter of 10 mm x 3 mm, and after measuring the density, the thermal conductivity was measured using the laser flash method.
その結果を表１に示す。The results are shown in Table 1.
実施例２
酸素含有量１．５：］ＵＪｉ％の窒化アルミニウム粉に
炭素原子と水素原子のＴＬ量比（Ｃ／Ｈ）が１０である
塩化ビニル樹脂の熱分解生成物を、Ｐ２Ｏ比を０．６又
は１．２として配合し、さらに各々にＹＦ３を１又は３
ｉＪｉ部添加して混合物を得た。この混合物を実施例１
と同様な方法にて成形した。これらの成形体ｋ Ｎ２，
１ 気圧中で１０００℃〜１７ｏ。Example 2 A thermal decomposition product of vinyl chloride resin having a TL ratio of carbon atoms to hydrogen atoms (C/H) of 10 was added to aluminum nitride powder with an oxygen content of 1.5: ] UJi%, and a P2O ratio of 0. .6 or 1.2, and further contains 1 or 3 YF3, respectively.
iJi parts were added to obtain a mixture. This mixture was prepared in Example 1.
It was molded using the same method. These molded bodies k N2,
1000℃~17o at atmospheric pressure.
℃における昇温速度を５℃／分、１ｏ℃／分、２０℃／
分、２５℃／分及び４０’ｃ／分として昇温し、さらに
１８００℃まで昇温したのち６時間保持して、焼結棒金
作製した。得られた焼結体の密度と熱伝導率を測定した
。The heating rate at ℃ is 5℃/min, 1o℃/min, 20℃/min.
The temperature was increased at 25° C./min and 40° C./min, and then the temperature was further increased to 1800° C. and held for 6 hours to produce a sintered metal bar. The density and thermal conductivity of the obtained sintered body were measured.
その結果を表２に示す。The results are shown in Table 2.
実施例３
酸素含有量が１．２重量％である窒化アルミニウム粉に
塩化ビニル樹脂の熱分解生成物でＣ／Ｈが２５であるも
のをＰ１０比１．５又は２．５として配合した。これに
、さらに酸化カルシウムを各々１又は２ｉＪｉｔ部添加
し、それらの混合物を実施例１と同様な方法にて混合し
成形体を得た。得られた成形体はＮ２，１気圧中にて、
１９５０℃１６時間焼成した。その際、１１００℃〜１
７００℃における昇温速度を、５℃／分、１０℃／分、
２５℃／分及び４０℃／分とした。得られた焼結体の密
度及び熱伝導率の測定結果を衣６に示す。Example 3 A thermal decomposition product of vinyl chloride resin having a C/H ratio of 25 was blended with aluminum nitride powder having an oxygen content of 1.2% by weight at a P10 ratio of 1.5 or 2.5. To this, 1 or 2 parts of calcium oxide was added, and the mixture was mixed in the same manner as in Example 1 to obtain a molded body. The obtained molded body was heated in N2, 1 atm.
It was baked at 1950°C for 16 hours. At that time, 1100℃~1
The temperature increase rate at 700°C was 5°C/min, 10°C/min,
The temperature was 25°C/min and 40°C/min. The measurement results of the density and thermal conductivity of the obtained sintered body are shown in Figure 6.
本発明のように、有機重合体の熱分解生成物を會む成形
体を焼成するに際し、昇温速度を制御することにより、
高い熱伝導率を有する窒化アルミニウム焼結体を製造す
ることができる。As in the present invention, by controlling the temperature increase rate when firing a molded body containing a thermal decomposition product of an organic polymer,
An aluminum nitride sintered body having high thermal conductivity can be produced.
Claims (1)
熱分解生成物を含んでなる成形体を非酸化性雰囲気下で
焼成するに際し、１１００℃〜１７００℃における昇温
速度を２０℃／分以下とし、１７５０℃以上の温度で焼
成することを特徴とする窒化アルミニウム焼結体の製造
方法。(1) When firing a molded body containing aluminum nitride powder, a sintering aid, and a thermal decomposition product of an organic polymer in a non-oxidizing atmosphere, the temperature increase rate between 1100°C and 1700°C is set at 20°C/ 1. A method for producing an aluminum nitride sintered body, the method comprising firing at a temperature of 1750° C. or higher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63154624A JPH026372A (en) | 1988-06-24 | 1988-06-24 | Production of aluminum nitride sintered form |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63154624A JPH026372A (en) | 1988-06-24 | 1988-06-24 | Production of aluminum nitride sintered form |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH026372A true JPH026372A (en) | 1990-01-10 |
Family
ID=15588253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63154624A Pending JPH026372A (en) | 1988-06-24 | 1988-06-24 | Production of aluminum nitride sintered form |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH026372A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015020937A (en) * | 2013-07-22 | 2015-02-02 | 住友電気工業株式会社 | Aluminum nitride sintered body and method of producing the same |
-
1988
- 1988-06-24 JP JP63154624A patent/JPH026372A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015020937A (en) * | 2013-07-22 | 2015-02-02 | 住友電気工業株式会社 | Aluminum nitride sintered body and method of producing the same |
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