JPH0261825U - - Google Patents
Info
- Publication number
- JPH0261825U JPH0261825U JP13913488U JP13913488U JPH0261825U JP H0261825 U JPH0261825 U JP H0261825U JP 13913488 U JP13913488 U JP 13913488U JP 13913488 U JP13913488 U JP 13913488U JP H0261825 U JPH0261825 U JP H0261825U
- Authority
- JP
- Japan
- Prior art keywords
- path
- parts
- stopper
- stopping
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Feeding Of Workpieces (AREA)
- Special Conveying (AREA)
- Control Of Conveyors (AREA)
Description
第１図は、本考案による部品等の停止位置決め
装置の第１の実施例を示す略図である。第２図は
、本考案の第２の実施例である斜運動するストツ
パを用いた半導体ウエーハの停止位置決め装置を
示す斜視図である。第３図は、本考案による前記
第２の実施例装置が使用される半導体ウエーハの
微少位置ずれ測定装置の平面配置図である。第４
図は、従来の部品等の停止位置決め装置の例を説
明するための略図である。
１…部品、２…斜運動するストツパ、３…搬送
ベルト、４…ストツパ駆動源、５…ストツパ、６
…Ｘ駆動源、８…Ｙ駆動源、１０…アーム駆動モ
ータ、１１…環節つきアーム、１２…吸着ホーク
、１３…斜め運動するストツパ、１５…半導体ウ
エーハ、Ａ…ウエーハバスケツト昇降装置、Ｂ…
停止位置微調整部、Ｃ…ウエーハ・トランスフア
・アーム（ウエーハ出し入れロボツト）、Ｄ…ア
ライメントステージ、Ｅ…回転アーム（チエンジ
ングアーム）、Ｆ…ＸＹステージ、Ｇ…Ｚ−θス
テージ、Ｈ…光学顕微鏡、Ｉ…位置合わせ部材（
アライメント）。
FIG. 1 is a schematic diagram showing a first embodiment of a device for stopping and positioning parts, etc., according to the present invention. FIG. 2 is a perspective view showing a semiconductor wafer stop positioning device using a stopper that moves obliquely, which is a second embodiment of the present invention. FIG. 3 is a plan layout diagram of a semiconductor wafer minute positional deviation measuring device in which the second embodiment of the present invention is used. Fourth
The figure is a schematic diagram for explaining an example of a conventional stop positioning device for parts, etc. DESCRIPTION OF SYMBOLS 1... Part, 2... Stopper that moves obliquely, 3... Conveyor belt, 4... Stopper drive source, 5... Stopper, 6
. . .
Stop position fine adjustment unit, C...Wafer transfer arm (wafer loading/unloading robot), D...Alignment stage, E...Rotating arm (chaining arm), F...XY stage, G...Z-θ stage, H...Optics Microscope, I... positioning member (
alignment).
Claims (1)
つて斜め方向に上昇して部品経路に達し、前記部
品等を静止させた後に同一の経路を移動して退避
して部品等の再移動を許容するように駆動される
斜め移動ストツパと、前記ストツパを前記経路に
沿つて駆動する単一の駆動手段を用いて構成した
部品等の停止位置決め装置。 It ascends diagonally from the front of the movement path of the parts, etc. toward the path, reaches the parts path, and after stopping the parts, etc., moves along the same path and evacuates, allowing the parts, etc. to be moved again. A device for stopping and positioning parts, etc., constructed using a diagonally moving stopper driven to move the stopper along the path, and a single driving means for driving the stopper along the path.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13913488U JPH0261825U (en) | 1988-10-25 | 1988-10-25 | |
| US07/421,351 US5052884A (en) | 1988-10-25 | 1989-10-13 | Transferring device for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13913488U JPH0261825U (en) | 1988-10-25 | 1988-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0261825U true JPH0261825U (en) | 1990-05-09 |
Family
ID=31402113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13913488U Pending JPH0261825U (en) | 1988-10-25 | 1988-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0261825U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3254997A1 (en) * | 2016-06-06 | 2017-12-13 | ALTRATEC Automation GmbH | Device for stopping a converted item on a conveyor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206720A (en) * | 1985-03-05 | 1986-09-13 | エス ケイ エフ ノーバ エービー | Stop device for article on conveyor |
-
1988
- 1988-10-25 JP JP13913488U patent/JPH0261825U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206720A (en) * | 1985-03-05 | 1986-09-13 | エス ケイ エフ ノーバ エービー | Stop device for article on conveyor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3254997A1 (en) * | 2016-06-06 | 2017-12-13 | ALTRATEC Automation GmbH | Device for stopping a converted item on a conveyor |
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