JPH0254753A - Preheating method in continuous dry plating treatment - Google Patents
Preheating method in continuous dry plating treatmentInfo
- Publication number
- JPH0254753A JPH0254753A JP20392388A JP20392388A JPH0254753A JP H0254753 A JPH0254753 A JP H0254753A JP 20392388 A JP20392388 A JP 20392388A JP 20392388 A JP20392388 A JP 20392388A JP H0254753 A JPH0254753 A JP H0254753A
- Authority
- JP
- Japan
- Prior art keywords
- steel
- electron beam
- preheating
- scanning
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 21
- 238000007747 plating Methods 0.000 title claims description 13
- 238000010894 electron beam technology Methods 0.000 claims abstract description 10
- 238000012545 processing Methods 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 abstract description 26
- 239000010959 steel Substances 0.000 abstract description 26
- 238000000576 coating method Methods 0.000 abstract description 17
- 239000011248 coating agent Substances 0.000 abstract description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 5
- 229910002804 graphite Inorganic materials 0.000 abstract description 5
- 239000010439 graphite Substances 0.000 abstract description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 4
- 238000013021 overheating Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 description 11
- 238000000137 annealing Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910000976 Electrical steel Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、連続ドライプレーティング処理における予
備加熱方法に関し、とくにエレクトロンビームの走査方
法に工夫を加えることによって、鋼板の板形状に変化を
もたらすことなしに密着性に優れたコーティング被膜の
形成を可能ならしめようとするものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a preheating method in continuous dry plating, and in particular to a method for changing the shape of a steel plate by adding innovation to an electron beam scanning method. The purpose of this invention is to make it possible to form a coating film with excellent adhesion without the need for a coating film.
（従来の技術）
近年、プラズマを利用したコーティング技術が著しく進
歩し、各方面でその利用が広まりつつある。かかるコー
ティング技術を利用したものとしては、たとえば磁気記
録薄膜や各種耐摩耗性、耐食性コーティング、さらには
装飾用コーティングなどが挙げられる。(Prior Art) In recent years, coating technology using plasma has made significant progress, and its use is becoming widespread in various fields. Applications of such coating technology include, for example, magnetic recording thin films, various wear-resistant and corrosion-resistant coatings, and decorative coatings.
通常、プラズマを利用すると、金属および半金属等の蒸
発物質をイオン化又は活性化し、かつ高い運動エネルギ
ーを付与することができるため、蒸着被膜と基板との密
着性が高くしかも膜質が良好なものが得られる。Normally, when plasma is used, it is possible to ionize or activate vaporized substances such as metals and semimetals, and to impart high kinetic energy, resulting in high adhesion between the vapor-deposited film and the substrate and good film quality. can get.
プラズマ・コーティング法としてはマグネトロンスパッ
タ法、イオンブレーティング法およびプラズマＣＶＤ法
などがあり、最近では真空アークを利用したマルティ・
アーク法やホロー・カーソド（Ｈｏｌｌｏｗ Ｃａｔｈ
ｏｄｅ Ｄｉｓｃｈａｒｇｅ、 ＨＣＤ）法などが開発
されている。Plasma coating methods include magnetron sputtering, ion blating, and plasma CVD.
Arc method and Hollow Cath
ode discharge (HCD) method, etc. have been developed.
（発明が解決しようとする課題）
この発明は、上記のようなドライプレーティング法によ
って、大表面積を有する長尺薄帯を連続Ａｉｒ −ｔｏ
−Ａｉｒ方式で処理する場合に、従来まだ充分な検討
が行なわれていなかったコーティング前の予備加熱につ
いての研究成果を開示するものである。(Problems to be Solved by the Invention) The present invention provides continuous air-to-air plating of a long thin strip having a large surface area by the dry plating method as described above.
- In the case of processing using the Air method, research results regarding preheating before coating, which has not been sufficiently studied in the past, are disclosed.
すなわち従来、連続Ａｔｒ −ｔｏ −Ａｉｒ方式のド
ライプレーティング処理において、コーティング前の予
備加熱処理として鋼板表面上にエレクトロンビーム（Ｅ
Ｂ）による加熱処理を施す場合、とくに大表面積を有す
る長尺薄帯の表面上にＥＢ加熱処理を施した場合には、
薄帯表面の局部における急激な温度上昇に伴って薄帯の
局部変形たとえば腹のびや耳のびを生じていた。That is, conventionally, in a continuous Atr-to-Air dry plating process, an electron beam (E
When performing the heat treatment according to B), especially when performing the EB heat treatment on the surface of a long ribbon having a large surface area,
As the temperature rises locally on the surface of the ribbon, local deformations of the ribbon, such as belly stretching and ear stretching, occur.
上記のような形状不良の発生は、たとえば磁気特性が評
価対象となる一方向性けい素鋼板のコーティング処理に
とって極めて有害で、被膜密着性の劣化は勿論のこと磁
束密度の低下を招くなどその悪影響は著しい。従って、
コーティング処理に至る前に、その解決を図ることが、
とくに表面積が大きい薄鋼帯にとって重要である。The occurrence of shape defects as described above is extremely harmful, for example, to the coating treatment of unidirectional silicon steel sheets whose magnetic properties are to be evaluated, and has negative effects such as deterioration of coating adhesion as well as reduction of magnetic flux density. is remarkable. Therefore,
It is important to try to resolve the issue before starting the coating process.
This is especially important for thin steel strips with large surface areas.
（課題を解決するための手段）
さて発明者らは、連続Ａｉｒ −ｔｏ −Ａｉｒ方式の
ドライプレーティング処理において、コーティング前の
予備加熱処理としては鋼板表面の清浄化すなわち鋼板表
面のマイクロメルトによる平滑化およびクリーニングの
観点からは少なくともＥＢ定走査不可欠との基本認識に
立脚して、予備加熱処理につき種々の検討を加えた末に
、この発明を完成するに至ったのである。(Means for Solving the Problems) In the continuous air-to-air dry plating process, the inventors discovered that the preheating treatment before coating involves cleaning the steel plate surface, that is, smoothing the steel plate surface by micromelting. Based on the basic recognition that constant EB scanning is indispensable at least from the viewpoint of cleaning, the present invention was completed after conducting various studies on the preheating treatment.
すなわちこの発明は、長尺薄帯の連続ドライプレーティ
ング処理において、該薄帯をエレクトロンビームで予備
加熱するに当り、該エレクトロンビームを、薄帯の幅方
向に平行でかつ該幅を超える長さを一辺とする方形の縁
に沿って走査することからなる連続ドライプレーティン
グ処理における予備加熱方法である。That is, in the continuous dry plating process of a long ribbon, when the ribbon is preheated with an electron beam, the electron beam is directed in a direction parallel to the width of the ribbon and with a length exceeding the width. This is a preheating method in a continuous dry plating process that consists of scanning along the edge of a rectangle.
以下この発明を具体的に説明する。This invention will be specifically explained below.
第１図に、この発明の実施に用いて好適な予備加熱装置
を組み込んだ連続ドライプレーティング設備の要部を模
式図で示す。図中記号Ａ、Ｂ、Ｃでそれぞれ、入側差圧
室、予備加熱装置およびコーティング装置を示し、Ｓは
鋼板、Ｇはガイドロール、ａ−１〜ａ−８は真空差圧用
シールロールである。このシールロールは鋼板Ｓのガイ
ドロールも兼ねていて、同図に示したように鋼板Ｓを内
部に導きつつ順次に真空度を上げる（Ａｉｒ −ｔｏ
−Ａｉｒ方式）ことによって１０−４〜１０−６Ｔｏｒ
ｒ程度の高真空を実現することができる。FIG. 1 is a schematic diagram showing the main parts of continuous dry plating equipment incorporating a suitable preheating device for use in carrying out the present invention. In the figure, symbols A, B, and C indicate the inlet differential pressure chamber, preheating device, and coating device, respectively, S is a steel plate, G is a guide roll, and a-1 to a-8 are seal rolls for vacuum differential pressure. . This seal roll also serves as a guide roll for the steel plate S, and as shown in the figure, the degree of vacuum is increased sequentially while guiding the steel plate S into the interior.
-Air method) 10-4 to 10-6 Tor
It is possible to achieve a vacuum as high as r.
そしてｂ−１およびｂ−２がＥＢ加熱装置であって、こ
の例で２基配置され、ｂ−１で鋼板の上面を一方ｂ−２
で下面をそれぞれ走査することによって加熱するしくみ
になっている。b-1 and b-2 are EB heating devices, and in this example, two units are arranged, and b-1 is used to heat the upper surface of the steel plate while b-2
The mechanism is such that heating is achieved by scanning the bottom surface of each device.
なおり−３はホットローラーからなるを可とするディフ
レククロールであり、さらにｃ−１は集束コイル、ｃ−
２はるつぼ、ｃ−３は棒状の蒸発物質、ｃ−４はＬ字型
のＨＣＤガン、Ｃ−５は反応ガス供給口である。Naori-3 is a deflection crawler consisting of a hot roller, and c-1 is a focusing coil, c-
2 is a crucible, c-3 is a rod-shaped evaporation substance, c-4 is an L-shaped HCD gun, and C-5 is a reaction gas supply port.
さて第２図に、この発明に従うＥＢの走査要領を図解す
る。図中番号１は鋼帯、２はグラファイト板であり、３
でＥＢの走査軌跡を示す。Now, FIG. 2 illustrates the EB scanning procedure according to the present invention. In the figure, number 1 is a steel strip, 2 is a graphite plate, and 3
shows the scanning locus of EB.
二〇ＥＢの走査は、電磁偏向コイルを用いて、薄帯幅方
向に平行でかつ、板幅を超える長さを一辺とする方形に
沿う走査を行い、一つのＥＢ装置で通板方向に向ってａ
、とａ２の２つのゾーンで徐々に加熱するところに特徴
がある。なお通板方向の走査は、グラファイト２上で行
うことにより、通板方向のＥＢをこのグラファイト２で
吸収して薄帯の過熱を防止する。20 EB scanning uses an electromagnetic deflection coil to scan along a rectangle that is parallel to the strip width direction and has a length longer than the strip width on one side, and one EB device is used to scan in the strip threading direction. Tea
It is characterized by gradual heating in two zones: , and a2. Note that scanning in the threading direction is performed on the graphite 2, so that the graphite 2 absorbs EB in the threading direction to prevent overheating of the ribbon.
このような予備加熱方法は、従来の予熱加熱方法たとえ
ば板幅方向に単純往復走査を行うａ、のみの予備加熱に
比べると、１回当りの加熱が著しく軽減されるので、鋼
板の変形防止に極めて有効である。なおａｌと８２とで
加熱温度を変えてもよい。This type of preheating method significantly reduces the amount of heating per time compared to conventional preheating methods, such as preheating using only a simple reciprocating scan in the sheet width direction, so it is effective in preventing deformation of the steel sheet. Extremely effective. Note that the heating temperature may be changed between al and 82.
（作 用）
この発明に従い、ｂ−１で薄帯片面のＥＢ加熱をａｌ＋
ａ、の２段階で行い、またｂ−２で他面のＥＢ加熱を同
様にして行うと、４段階で徐々に加熱することになり、
従来法に比較して薄帯の温度上昇程度が大幅に緩和され
、かくして薄帯の変形を効果的に防止できるわけである
。(Function) According to this invention, b-1 performs EB heating on one side of the ribbon with al+
If you perform EB heating on the other side in the same way in step a and b-2, you will gradually heat it in four steps.
Compared to the conventional method, the degree of temperature rise in the ribbon is significantly reduced, and thus deformation of the ribbon can be effectively prevented.
なお前述したとおり−３をホットローラーとし、ローラ
ー内部を所定温度に加熱した状態で使用すれば、ＥＢ予
備加熱処理によって昇温させた薄帯の温度降下を効果的
に防ぐことができ有利である。As mentioned above, it is advantageous to use -3 as a hot roller and use it with the inside of the roller heated to a predetermined temperature because it can effectively prevent the temperature drop of the ribbon heated by the EB preheating treatment. .
（実施例）
実施例Ｉ
Ｃ： ０．０４４％、Ｓｉ ： ３．４６％、Ｍｎ ：
０．０６６％、Ｓｅ ： ０．０２０％、Ｓｂ ：
０．０２５％およびＭｏ ： ０．０１３％を含有する
一方向性けい素鋼板の熱延板（２，２ｒｎｒａ厚）に、
９５０″Ｃで３分間の中間焼鈍をはさむ２回の冷間圧延
を施して０．２０ｍｍ厚の最終冷延板とした。(Example) Example I C: 0.044%, Si: 3.46%, Mn:
0.066%, Se: 0.020%, Sb:
0.025% and Mo: A hot rolled sheet (2.2rnra thickness) of unidirectional silicon steel sheet containing 0.013%,
Cold rolling was performed twice with intermediate annealing for 3 minutes at 950″C to obtain a final cold rolled sheet with a thickness of 0.20 mm.
その後８２０°Ｃの湿水素中で脱炭を兼ねる１次再結晶
焼鈍を施したのち、鋼板表面上にＭｇＯ（３５％）、八
１２０３（６０％） 、Ｔｉ０ｚ（３％） 、Ｚｒ０ｚ
（２％）の成分になる焼鈍分離剤を塗布した。その後８
５０°Ｃ１５０時間の２再結晶焼鈍を施してゴス方位２
次再結晶粒を発達させた後、乾Ｈ２中で１２００°Ｃ１
８時間の純化焼鈍行なった。After that, after primary recrystallization annealing that also serves as decarburization in wet hydrogen at 820°C, MgO (35%), 81203 (60%), Ti0z (3%), and Zr0z are deposited on the surface of the steel sheet.
(2%) of the annealing separator was applied. then 8
2 recrystallization annealing at 50°C for 150 hours to obtain Goss orientation 2
After developing the next recrystallized grains, 1200°C1 in dry H2
Purification annealing was performed for 8 hours.
その後鋼板表面上の゛酸化物を酸洗により除去したのち
、電解研磨により中心線平均粗さＲａで０．０６μｍの
鏡面状態に仕上げた。Thereafter, the oxides on the surface of the steel plate were removed by pickling, and then electrolytically polished to a mirror surface with a center line average roughness Ra of 0.06 μm.
その後前掲第１図に示したＡｉｒ−ｔｏ −Ａｉｒ方式
の連続イオンブレーティング設備を用いて鋼板表面上に
ＴｉＮを１．０μ繭厚に被成した。そのときのＥＢ予備
加熱は第２図に示す方法と同じ方形のＥＢ定走査、まず
鋼板片面の８１部を１００°Ｃ５ａｚ部を２００°Ｃに
予熱した。ついでもう一方の片面の８１部を３００”Ｃ
５ａｔ部を４００°Ｃに予備加熱し、４２０°Ｃに設定
したホットローラーによって、板温を４００°Ｃに維持
した状態で第１層目のＴｉＮコーティングを行った。Thereafter, TiN was deposited to a thickness of 1.0 μm on the surface of the steel plate using the air-to-air continuous ion brating equipment shown in FIG. 1 above. The EB preheating at this time was carried out using the same rectangular EB constant scanning method as shown in FIG. 2. First, 81 parts of one side of the steel plate were preheated to 100°C, and the 5az part was preheated to 200°C. Next, heat 81 parts of the other side to 300"C.
The 5at portion was preheated to 400°C, and the first layer of TiN coating was applied while maintaining the plate temperature at 400°C using a hot roller set at 420°C.
かくして得られた製品の磁気特性および鋼板の形状につ
いて調べた結果を第１表にまとめて示す。Table 1 summarizes the results of investigating the magnetic properties of the product thus obtained and the shape of the steel plate.
なお比較のため、鋼板の片面で２００°Ｃ（通常の板幅
方向のみのＥＢ定走査、そしてもう片面で４００°Ｃに
急激に予備加熱した後、ＴｉＮ被成を行なった場合につ
いての調査結果も第１表に併せて示す。For comparison, we have investigated the results of a case where one side of the steel plate was heated to 200°C (regular EB constant scanning only in the sheet width direction, and the other side was rapidly preheated to 400°C, and then TiN coating was performed. Also shown in Table 1.
第 １ 表
（発明の効果）
かくしてこの発明によれば、長尺薄板の連続ドライプレ
ーティングの際に該薄板を予備加熱するに当り、板形状
を損うことなしに効果的に薄板を予備加熱することがで
き、しかも板表面を清浄化して鋼板とコーティング被膜
との密着性の向上も併せて達成できる。Table 1 (Effects of the Invention) Thus, according to the present invention, when preheating a long thin plate during continuous dry plating, the thin plate can be effectively preheated without damaging the plate shape. Moreover, it is also possible to clean the plate surface and improve the adhesion between the steel plate and the coating film.
第１図は、この発明の実施に用いて好適な予備加熱装置
を組み込んだ連続ドライプレーティング設備の模式図、
第２図は、この発明に従うＥＢの走査要領の説明図であ
る。
Ｓ・・・綱板 Ｇ・・・ガイドロールａ
−１〜ａ−８・・・真空差圧用シールロールｂ−１、ｂ
−２・・・上面および下面加熱用のＥＢ加熱装置ｂ−３
・・・ホットローラー ｃ−１・・・集束コイルｃ−２
・・・るつぼ ｃ−３・・・蒸発物質ｃ−４・
・・ＩＩｃＤガン ｃ−５・・・反応ガス供給口
１・・・鋼帯 ２・・・グラファイト板３
・・・ＥＢの走査軌跡FIG. 1 is a schematic diagram of a continuous dry plating equipment incorporating a preferable preheating device used to carry out the present invention, and FIG. 2 is an explanatory diagram of an EB scanning procedure according to the present invention. S...Rope plate G...Guide roll a
-1 to a-8... Seal rolls for vacuum differential pressure b-1, b
-2... EB heating device b-3 for upper and lower surface heating
... Hot roller c-1 ... Focusing coil c-2
... Crucible c-3 ... Evaporated substance c-4.
...IIcD gun c-5...Reactive gas supply port 1...Steel strip 2...Graphite plate 3
...EB scanning trajectory
Claims (1)
、該薄帯をエレクトロンビームで予備加熱するに当り、
該エレクトロンビームを、薄帯の幅方向に平行でかつ該
幅を超える長さを一辺とする方形の縁に沿って走査する
ことを特徴とする連続ドライプレーティング処理におけ
る予備加熱方法。1. In the continuous dry plating process of a long ribbon, when preheating the ribbon with an electron beam,
A preheating method in continuous dry plating processing, characterized in that the electron beam is scanned along the edge of a rectangle that is parallel to the width direction of the ribbon and has one side having a length exceeding the width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20392388A JPH0254753A (en) | 1988-08-18 | 1988-08-18 | Preheating method in continuous dry plating treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20392388A JPH0254753A (en) | 1988-08-18 | 1988-08-18 | Preheating method in continuous dry plating treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0254753A true JPH0254753A (en) | 1990-02-23 |
Family
ID=16481933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20392388A Pending JPH0254753A (en) | 1988-08-18 | 1988-08-18 | Preheating method in continuous dry plating treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0254753A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0967664A (en) * | 1995-08-28 | 1997-03-11 | Ishikawajima Harima Heavy Ind Co Ltd | Preheating method for steel sheet in continuous vacuum vapor deposition device and device therefor |
| US7796019B2 (en) | 2007-03-02 | 2010-09-14 | Fujitsu Ten Limited | Vehicular display control device |
| DE102010028777A1 (en) * | 2010-05-07 | 2011-11-10 | Von Ardenne Anlagentechnik Gmbh | Removal of backcoat on substrate e.g. glass substrate, involves warming up surface area of edge of back of substrate by electron bombardment for evaporation of solitary particles |
-
1988
- 1988-08-18 JP JP20392388A patent/JPH0254753A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0967664A (en) * | 1995-08-28 | 1997-03-11 | Ishikawajima Harima Heavy Ind Co Ltd | Preheating method for steel sheet in continuous vacuum vapor deposition device and device therefor |
| US7796019B2 (en) | 2007-03-02 | 2010-09-14 | Fujitsu Ten Limited | Vehicular display control device |
| DE102010028777A1 (en) * | 2010-05-07 | 2011-11-10 | Von Ardenne Anlagentechnik Gmbh | Removal of backcoat on substrate e.g. glass substrate, involves warming up surface area of edge of back of substrate by electron bombardment for evaporation of solitary particles |
| DE102010028777B4 (en) * | 2010-05-07 | 2013-12-05 | Von Ardenne Anlagentechnik Gmbh | Method and apparatus for removing a backside coating on a substrate |
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