JPH0252998U - - Google Patents
Info
- Publication number
- JPH0252998U JPH0252998U JP13109288U JP13109288U JPH0252998U JP H0252998 U JPH0252998 U JP H0252998U JP 13109288 U JP13109288 U JP 13109288U JP 13109288 U JP13109288 U JP 13109288U JP H0252998 U JPH0252998 U JP H0252998U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- motor rotor
- rotor
- stator
- axial direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係るターボ分子ポンプを示す
断面図、第２図は同じく本考案におけるターボ分
子ポンプの運転状態を説明するための断面図、第
３図は従来のターボ分子ポンプを示す断面図であ
る。
１…ポンプケーシング、４…静翼、７…球面ス
パイラル溝軸受、９…回転軸、１３…回転体、１
４…動翼、２１…駆動機構、２２…モータロータ
、２３…モータステータ。
Fig. 1 is a cross-sectional view showing a turbo-molecular pump according to the present invention, Fig. 2 is a cross-sectional view illustrating the operating state of the turbo-molecular pump according to the present invention, and Fig. 3 is a cross-sectional view showing a conventional turbo-molecular pump. It is a diagram. 1... Pump casing, 4... Stationary blade, 7... Spherical spiral groove bearing, 9... Rotating shaft, 13... Rotating body, 1
4... Moving blade, 21... Drive mechanism, 22... Motor rotor, 23... Motor stator.
Claims (1)
有するケポンプケーシングと、このポンプケーシ
ング内に回転自在に設けられかつ球面スパイラル
溝軸受によつて軸支された回転軸と、この回転軸
上に固定されたモータロータおよびこのモータロ
ータの周囲に設けられたモータステータからなる
駆動機構と、この駆動機構と同一の軸線上に設け
られかつ前記回転軸上に固定され前記静翼の一部
がその内側に臨む動翼を有する回転体とを備えた
ターボ分子ポンプにおいて、前記モータステータ
に対し前記モータロータを軸線方向に相対的にず
らして位置付けたことを特徴とするターボ分子ポ
ンプ。 a pump casing having stator vanes provided in multiple stages in the axial direction; a rotating shaft rotatably provided within the pump casing and supported by a spherical spiral groove bearing; a drive mechanism consisting of a motor rotor fixed to the motor rotor and a motor stator provided around the motor rotor; What is claimed is: 1. A turbo-molecular pump comprising: a rotating body having rotor blades facing toward the motor; the motor rotor being positioned relative to the motor stator in an axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13109288U JPH0252998U (en) | 1988-10-06 | 1988-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13109288U JPH0252998U (en) | 1988-10-06 | 1988-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252998U true JPH0252998U (en) | 1990-04-17 |
Family
ID=31386839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13109288U Pending JPH0252998U (en) | 1988-10-06 | 1988-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252998U (en) |
-
1988
- 1988-10-06 JP JP13109288U patent/JPH0252998U/ja active Pending