JPH0245447U - - Google Patents

Info

Publication number
JPH0245447U
JPH0245447U JP12213188U JP12213188U JPH0245447U JP H0245447 U JPH0245447 U JP H0245447U JP 12213188 U JP12213188 U JP 12213188U JP 12213188 U JP12213188 U JP 12213188U JP H0245447 U JPH0245447 U JP H0245447U
Authority
JP
Japan
Prior art keywords
rays
base plate
fluorescent
incident
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12213188U
Other languages
Japanese (ja)
Other versions
JPH0725684Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988122131U priority Critical patent/JPH0725684Y2/en
Publication of JPH0245447U publication Critical patent/JPH0245447U/ja
Application granted granted Critical
Publication of JPH0725684Y2 publication Critical patent/JPH0725684Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の作用を説明する線図、第2図
は本考案実施例の構成を示した図である。 なお図において、1は基台板、2はX線、3は
X線検出器、4は試料、5はスリツト、6は蛍光
X線である。
FIG. 1 is a diagram illustrating the operation of the present invention, and FIG. 2 is a diagram showing the configuration of an embodiment of the present invention. In the figure, 1 is a base plate, 2 is an X-ray, 3 is an X-ray detector, 4 is a sample, 5 is a slit, and 6 is a fluorescent X-ray.

Claims (1)

【実用新案登録請求の範囲】 (1) 表面に試料を薄く被着した平面状の基台板
に微小の入射角をもつて細いX線を入射させると
共にその入射部に対設して前記試料の蛍光X線を
検出するためのX線検出器に入射する前記基台板
の蛍光X線が極大値より低い適当な値となるよう
に上記基台板をその表面に対して直角な方向へ移
動させる機構を設けた全反射蛍光X線分析装置。 (2) 表面に試料を薄く被着した平面状の基台板
に微小の入射角をもつて細いX線を入射させると
共にその入射部に対設して前記試料の蛍光X線を
検出するためのX線検出器に入射する前記基台板
の蛍光X線が極大値より低い適当な値となるよう
に上記細いX線を形成するスリツトの位置をこの
スリツトを通るX線と交叉する方向へ移動させる
機構を設けた全反射蛍光X線分析装置。
[Claims for Utility Model Registration] (1) Thin X-rays are incident on a flat base plate with a thin sample coated on the surface at a minute angle of incidence, and the sample is placed opposite to the incident part. The base plate is moved in a direction perpendicular to its surface so that the fluorescent X-rays of the base plate incident on the X-ray detector for detecting the fluorescent X-rays of the base plate have an appropriate value lower than the maximum value. A total internal reflection fluorescent X-ray analyzer equipped with a moving mechanism. (2) To make thin X-rays incident on a flat base plate with a thin sample coated on its surface at a minute angle of incidence, and to detect fluorescent X-rays from the sample by placing it opposite to the incident part. The position of the slit that forms the thin X-rays is moved in a direction that intersects the X-rays passing through the slits so that the fluorescent X-rays of the base plate incident on the X-ray detector have an appropriate value lower than the maximum value. A total internal reflection fluorescent X-ray analyzer equipped with a moving mechanism.
JP1988122131U 1988-09-20 1988-09-20 Total reflection X-ray fluorescence analyzer Expired - Lifetime JPH0725684Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988122131U JPH0725684Y2 (en) 1988-09-20 1988-09-20 Total reflection X-ray fluorescence analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988122131U JPH0725684Y2 (en) 1988-09-20 1988-09-20 Total reflection X-ray fluorescence analyzer

Publications (2)

Publication Number Publication Date
JPH0245447U true JPH0245447U (en) 1990-03-28
JPH0725684Y2 JPH0725684Y2 (en) 1995-06-07

Family

ID=31369771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988122131U Expired - Lifetime JPH0725684Y2 (en) 1988-09-20 1988-09-20 Total reflection X-ray fluorescence analyzer

Country Status (1)

Country Link
JP (1) JPH0725684Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222150A (en) * 1985-11-28 1987-09-30 ゲ−・カ−・エス・エス・フオルシユングスツエントルム・ゲ−シユタハト・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Method of analyzing element composition of surface layer of sample without breaking said surface layer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222150A (en) * 1985-11-28 1987-09-30 ゲ−・カ−・エス・エス・フオルシユングスツエントルム・ゲ−シユタハト・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Method of analyzing element composition of surface layer of sample without breaking said surface layer

Also Published As

Publication number Publication date
JPH0725684Y2 (en) 1995-06-07

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