JPH0238932Y2 - - Google Patents
Info
- Publication number
- JPH0238932Y2 JPH0238932Y2 JP7760981U JP7760981U JPH0238932Y2 JP H0238932 Y2 JPH0238932 Y2 JP H0238932Y2 JP 7760981 U JP7760981 U JP 7760981U JP 7760981 U JP7760981 U JP 7760981U JP H0238932 Y2 JPH0238932 Y2 JP H0238932Y2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- tank
- plating liquid
- master
- holder frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007747 plating Methods 0.000 claims description 17
- 238000007772 electroless plating Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Description
【考案の詳細な説明】
本考案は、情報記録媒体用原盤からスタンパを
作るに際して使用する無電解メツキ用治具装置に
関する。[Detailed Description of the Invention] The present invention relates to an electroless plating jig device used when making a stamper from a master disc for an information recording medium.
例えばビデオデイスク用原盤は、ガラス盤の上
にレジストを塗布して、そのレジストに記録信号
としてのレーザビームを照射してピツトを形成し
たもので、このビデオデイスク原盤からスタンパ
を製造するには、スパツタリングによる方法と銀
鏡反応による方法が確立されている。 For example, a video disc master is made by coating a glass disc with a resist and irradiating the resist with a laser beam as a recording signal to form pits. To manufacture a stamper from this video disc master, A method using sputtering and a method using silver mirror reaction have been established.
しかしながら、これらの方法ではスタンパの寿
命や品質の点について限界があつた。またNi等
を用いる無電解メツキによる場合は、寿命・品質
共に向上するが、メツキ時に泡が生じたり、外部
からのゴミの混入があると、メツキ膜にムラがで
きてしまうなどの問題があつた。 However, these methods have limitations in terms of stamper life and quality. In addition, electroless plating using Ni etc. improves both lifespan and quality, but there are problems such as bubbles occurring during plating and unevenness in the plating film if dirt is mixed in from the outside. Ta.
本考案の目的は、無電解メツキを行なうに当つ
て、上記したような泡やゴミによるメツキ膜のム
ラができないようにすることができる無電解メツ
キ用治具装置を提供することである。 An object of the present invention is to provide a jig device for electroless plating that can prevent unevenness of the plating film caused by bubbles and dust as described above when performing electroless plating.
以下、本考案を実施例によつて説明する。第１
図および第２図において、１は円筒状のメツキ槽
本体であり、内部が隔壁２によつて外槽Ａと内槽
Ｂとに分離されており、内槽Ｂの流入口３から流
入したメツキ液４は、隔壁２を越えて外槽Ａにあ
ふれ出ると、その外槽Ａの排出口５から出てフイ
ルタ６を通つて流入口３に循環するようになつて
いる。 The present invention will be explained below with reference to examples. 1st
In the figures and FIG. 2, 1 is a cylindrical plating tank main body, the inside of which is separated into an outer tank A and an inner tank B by a partition wall 2. When the liquid 4 overflows over the partition wall 2 into the outer tank A, it exits from the outlet 5 of the outer tank A, passes through the filter 6, and circulates to the inlet 3.
メツキ槽本体１の外槽Ａの外壁にはナイロンボ
ール７から成る軸受を介してリング状のホルダ枠
８が回転自在に取り付けられており、このホルダ
枠８に90度の角度間隔でホルダ９が取付けられて
いる。 A ring-shaped holder frame 8 is rotatably attached to the outer wall of the outer tank A of the plating tank body 1 via a bearing made of nylon balls 7, and holders 9 are mounted on this holder frame 8 at angular intervals of 90 degrees. installed.
なお、１０はガラス原盤である。 Note that 10 is a glass master disk.
本実施例においては、上記ホルダ９に、信号カ
ツテイング面が下面となるようにビデオデイスク
用のガラス原盤１０を載せ、メツキ液４に浸す。
そして、Niメツキ反応が起ると泡が生じてくる
が、この時ホルダ枠８を回転させることにより、
その泡をガラス原盤１０の外側に逃がすことがで
きる。また、このメツキ時においては、信号カツ
テイング面が下面となるので、上部からのゴミな
どがその信号カツテイング面に付着するおそれは
全くない。 In this embodiment, a glass master disc 10 for a video disk is placed on the holder 9 with the signal cutting surface facing downward, and immersed in the plating liquid 4.
Then, when the Ni plating reaction occurs, bubbles are generated, but at this time, by rotating the holder frame 8,
The bubbles can be released to the outside of the glass master disk 10. Further, during this plating, since the signal cutting surface is the lower surface, there is no possibility that dust or the like from above will adhere to the signal cutting surface.
以上のように、本考案による装置を使用すれ
ば、無電解メツキ時における泡やゴミによりメツ
キ膜にむらが生じるようなことは防止され、原盤
から無電解メツキによるスパツタを作る際に適し
ている。 As described above, by using the device according to the present invention, it is possible to prevent unevenness in the plating film caused by bubbles and dust during electroless plating, and it is suitable for making spatters by electroless plating from a master plate. .
第１図は本考案の一実施例の無電解メツキ用治
具装置の平面図、第２図は第１図の−線に沿
つた断面図である。
１……メツキ槽本体、２……隔壁、３……流入
口、４……メツキ液、５……排出口、６……フイ
ルタ、７……ナイロンボール、８……ホルダ枠、
９……ホルダ、１０……ガラス原盤。
FIG. 1 is a plan view of an electroless plating jig device according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along the - line in FIG. 1. 1... Plating tank body, 2... Partition wall, 3... Inlet, 4... Plating liquid, 5... Outlet, 6... Filter, 7... Nylon ball, 8... Holder frame,
9...Holder, 10...Glass master.
Claims (1)
液を溢れさせる筒状の内槽、メツキ液排出口を底
部に有し、前記内槽から溢れた前記メツキを受け
るように前記内槽の外側に隣接して配された円環
状の外槽からなるメツキ槽と、 前記円環状の外槽に軸受を介して回転自在に取
り付けられたリング状のホルダ枠、このホルダ枠
に取り付けられ、原盤を信号カツテイング面が下
面となるように保持するホルダからなる原盤保持
手段と、 を備えた無電解メツキ用治具装置。[Claims for Utility Model Registration] A cylindrical inner tank having a plating liquid inlet at the bottom and allowing the plating liquid to overflow from the upper edge, a plating liquid outlet at the bottom, and the plating liquid overflowing from the inner tank. a plating tank consisting of an annular outer tank arranged adjacent to the outside of the inner tank so as to receive the plating tank; a ring-shaped holder frame rotatably attached to the annular outer tank via a bearing; A jig device for electroless plating, comprising: master holding means comprising a holder attached to the holder frame and holding the master with the signal cutting surface facing downward;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7760981U JPH0238932Y2 (en) | 1981-05-29 | 1981-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7760981U JPH0238932Y2 (en) | 1981-05-29 | 1981-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57192954U JPS57192954U (en) | 1982-12-07 |
| JPH0238932Y2 true JPH0238932Y2 (en) | 1990-10-19 |
Family
ID=29873260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7760981U Expired JPH0238932Y2 (en) | 1981-05-29 | 1981-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238932Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005048209A (en) * | 2003-07-30 | 2005-02-24 | Hitachi Ltd | Electroless plating method, electroless plating device, method of fabricating semiconductor device, and fabrication device therefor |
-
1981
- 1981-05-29 JP JP7760981U patent/JPH0238932Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57192954U (en) | 1982-12-07 |
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