JPH0225429B2 - - Google Patents
Info
- Publication number
- JPH0225429B2 JPH0225429B2 JP8616984A JP8616984A JPH0225429B2 JP H0225429 B2 JPH0225429 B2 JP H0225429B2 JP 8616984 A JP8616984 A JP 8616984A JP 8616984 A JP8616984 A JP 8616984A JP H0225429 B2 JPH0225429 B2 JP H0225429B2
- Authority
- JP
- Japan
- Prior art keywords
- roll
- sealing device
- casing
- vacuum
- steel strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 19
- 229910000831 Steel Inorganic materials 0.000 description 16
- 239000010959 steel Substances 0.000 description 16
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 7
- 238000007747 plating Methods 0.000 description 7
- 229910052725 zinc Inorganic materials 0.000 description 7
- 239000011701 zinc Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000573 anti-seizure effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
本発明は、真空シール装置の改良に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to improvements in vacuum sealing devices.
帯鋼に真空蒸着メツキを施す場合、第１図、第
２図に示す真空シール装置が用いられる。第１図
ａはピンチロール型シール装置の破断側面図、第
１図ｂは同図ａのＡ−Ａ線断面図であり、ケーシ
ング０６内には帯鋼０５を挟持する如く上、下２
本のロール０１が回転自在に収納されている。そ
して、これらロール０１の両端面は図示の如くケ
ーシング０６の側壁に面しており、該両端面とケ
ーシング０６との間には僅かな隙間０２が形成さ
れ、この隙間０２から気体が流れるが、この隙間
０２を極力小さくすることでケーシング０６内の
真空度を高めることができる。尚、図示しない
が、ケーシング０６内は排気ダクトを介して空気
ポンプに連通している。 When performing vacuum deposition plating on a steel strip, a vacuum sealing device shown in FIGS. 1 and 2 is used. FIG. 1a is a cutaway side view of the pinch roll type sealing device, and FIG. 1b is a sectional view taken along the line A-A in FIG.
A roll 01 of books is rotatably stored. Both end faces of these rolls 01 face the side walls of the casing 06 as shown in the figure, and a slight gap 02 is formed between the both end faces and the casing 06, and gas flows through this gap 02. By making this gap 02 as small as possible, the degree of vacuum inside the casing 06 can be increased. Although not shown, the inside of the casing 06 communicates with an air pump via an exhaust duct.
然るに、ロール０１及びケーシング０６の側壁
が熱膨張すると前記隙間０２が増大し、このため
真空排気する真空ポンプの容量を高める必要が生
じる。そこで、従来はこれらロール０１及びケー
シング０６を水冷却することで熱膨張を抑え、隙
間０２の値を一定値に保つという方法で対処して
きた。 However, when the side walls of the roll 01 and the casing 06 thermally expand, the gap 02 increases, making it necessary to increase the capacity of the vacuum pump for evacuation. Conventionally, this problem has been dealt with by cooling the roll 01 and the casing 06 with water to suppress thermal expansion and keep the gap 02 at a constant value.
しかしながら、帯鋼０６に或る金属、例えば亜
鉛を用いて真空蒸着メツキする場合、帯鋼０５に
一旦蒸着された亜鉛が再蒸発し、蒸気となつてそ
の一部が温度の低いロール０１等に付着し、該ロ
ール０１とこれとの間に僅かの隙間を設けて設定
されるシールバー０３間に亜鉛が堆積し、この堆
積した亜鉛がロール０１の正常な回転を妨げると
しう問題があつた。更に、この堆積した亜鉛が帯
鋼０５の通過する際に剥れて該帯鋼０５に転写さ
れ、これが金属の塊となつて帯鋼０５によつて運
ばれ、次の真空シール装置のロールへ押し付けら
れて該ロールに付着し、その上を通過する帯鋼に
押し傷を与えるという問題も発生する。 However, when the steel strip 06 is vacuum-deposited with a certain metal, such as zinc, the zinc once deposited on the steel strip 05 reevaporates, becomes steam, and a part of it is transferred to the low-temperature roll 01, etc. There was a problem that zinc was deposited between the roll 01 and the seal bar 03, which is set with a slight gap between the roll 01 and the roll 01, and that the deposited zinc interfered with the normal rotation of the roll 01. . Furthermore, this deposited zinc is peeled off when the steel strip 05 passes and is transferred to the steel strip 05, which becomes a metal lump and is carried by the steel strip 05 to the next roll of the vacuum sealing device. There also arises the problem that the rollers are pressed and adhere to the rolls, causing pressure scratches on the steel strip that passes over them.
第２図ａはブライドル型シール装置の一部破断
側面図、第２図ｂは同図ａのＢ−Ｂ線断面図であ
り、該ブライドル型シール装置は図示の如く上、
下のロール０１に帯鋼０５を巻き付け、該ロール
０１に弓状のカバー０４を組み合わせて構成され
るが、この種シール装置においても前記と同様の
問題が発生する。 FIG. 2a is a partially cutaway side view of the bridle-type seal device, and FIG. 2b is a cross-sectional view taken along line B-B in FIG.
Although it is constructed by winding a steel band 05 around a lower roll 01 and combining the roll 01 with an arcuate cover 04, problems similar to those described above occur in this type of sealing device as well.
本発明は上記問題を有効に解決すべく成された
もので、その目的とする処は、真空度を高く保つ
て真空ポンプの小容量化を図ることができるとと
もに、再蒸発金属蒸気のロール等への付着及びロ
ールとカバー部材間での堆積を防いでロールの回
転及び製品への悪影響を除くことができる真空シ
ール装置を提供するにある。 The present invention has been made to effectively solve the above-mentioned problems, and its purpose is to maintain a high degree of vacuum and reduce the capacity of a vacuum pump. An object of the present invention is to provide a vacuum sealing device that can prevent roll rotation and adverse effects on products by preventing deposition on rolls and between rolls and cover members.
上記目的を達成すべく本発明は、ケーシング内
に回転自在に収納されたロールと、該ロールとの
間に僅かの隙間を設けて設置されるカバー部材と
で構成される真空シール装置において、前記ロー
ルの両端面にこれの軸方向に移動自在な側板を弾
接せしめるとともに、ロール及びカバー部材にこ
れらを加熱するヒータを設けた。 In order to achieve the above object, the present invention provides a vacuum sealing device comprising a roll rotatably housed in a casing and a cover member installed with a slight gap between the roll and the roll. Side plates movable in the axial direction are brought into elastic contact with both end faces of the roll, and a heater for heating the roll and cover member is provided.
以下に本発明の好適な一実施例を第３図及び第
４図に基づいて説明する。 A preferred embodiment of the present invention will be described below with reference to FIGS. 3 and 4.
第３図は本発明に係る真空シール装置の一部破
断側面図、第４図は第３図Ｃ−Ｃ線断面図であ
る。 FIG. 3 is a partially cutaway side view of the vacuum sealing device according to the present invention, and FIG. 4 is a sectional view taken along the line CC in FIG.
図示の真空シール装置はピンチロール型のもの
であり、各ケーシング６内には帯鋼７を挟持する
如くして上、下２本のロール１が回転自在に収納
されている。そして、各ロール１は中空状に成形
され、内部にはこれを加熱するヒータ２が内装さ
れている。又、各ロール１の両端部からは第４図
に示す如く回転軸１ａがケーシング６の側壁を貫
通して外方へ延出しており、該回転軸１ａの外周
には軸シール１４が摺接している。尚、第４図
中、１３は蛇腹状のダイトブーツである。 The illustrated vacuum sealing device is of a pinch roll type, and two rolls 1, an upper one and a lower one, are rotatably housed in each casing 6 so as to sandwich a steel strip 7 therebetween. Each roll 1 is formed into a hollow shape, and a heater 2 for heating the roll is installed inside. Further, as shown in FIG. 4, from both ends of each roll 1, a rotating shaft 1a extends outward through the side wall of the casing 6, and a shaft seal 14 is in sliding contact with the outer periphery of the rotating shaft 1a. ing. In addition, in FIG. 4, 13 is a bellows-shaped daite boot.
更に、ロール１の両側端面には第４図に示す如
く耐焼付性の高いカーボン、カーボン繊維ライニ
ングで成形された側板１１がスプリング１２にて
弾接されている。尚、上、下のロール１間、上記
側板１１外周部とケーシング６の内周部間にはそ
れぞれ隙間９，１０が形成されている。 Furthermore, as shown in FIG. 4, side plates 11 made of highly anti-seizure carbon or carbon fiber lining are elastically contacted by springs 12 on both end faces of the roll 1. Incidentally, gaps 9 and 10 are formed between the upper and lower rolls 1 and between the outer periphery of the side plate 11 and the inner periphery of the casing 6, respectively.
一方、ロール１の近傍にはこれとの間に僅かな
隙間４を形成してシールバー３が設置されてお
り、これは帯鋼７の進行方向（第３図矢印方向）
に移動自在に構成されており、該シールバー３の
移動で隙間４を調整することができるようになつ
ている。そして、このシールバー３には図示の如
くこれを加熱するためのヒータ５が設けられてい
る。尚、ケーシング６内は排気ダクト８を介して
図示しない真空ポンプに連通している。 On the other hand, a seal bar 3 is installed near the roll 1 with a slight gap 4 between it and the seal bar 3, which is located in the direction of movement of the steel strip 7 (in the direction of the arrow in FIG. 3).
The seal bar 3 is configured to be movable, and the gap 4 can be adjusted by moving the seal bar 3. As shown in the figure, this seal bar 3 is provided with a heater 5 for heating it. Note that the inside of the casing 6 communicates with a vacuum pump (not shown) via an exhaust duct 8.
而して、シールロール１、シールバー３をそれ
ぞれヒータ２，５にて帯鋼７に真空蒸着メツキを
施す金属の再蒸発温度以上に加熱すれば、シール
ロール１及びシールバー３へのメツキ金属の付着
及び隙間４でのメツキ金属の堆積が防止され、こ
の結果、ロール１の正常な回転が害されず、又帯
鋼７に押し傷が発生したりせず、製品欠陥の発生
が阻止される。 Therefore, if the seal roll 1 and the seal bar 3 are heated by the heaters 2 and 5, respectively, to a temperature higher than the re-evaporation temperature of the metal to which the strip steel 7 is vacuum evaporated and plated, the plating metal on the seal roll 1 and the seal bar 3 will be removed. The adhesion of metal and the accumulation of plating metal in the gap 4 are prevented, and as a result, the normal rotation of the roll 1 is not impaired, and the steel strip 7 is not damaged by pressure, and the occurrence of product defects is prevented. Ru.
又。ロール１には側板１１を常時弾接せしめた
ため、ロール１及びケーシング６の熱膨張に無関
係にシールロール１とケーシング６との間の隙間
を常に最小限に抑えることができ、この結果、真
空ポンプはその容量が小さくて済み、設備費及び
排気動力を削減することができる。 or. Since the side plate 11 is always in elastic contact with the roll 1, the gap between the seal roll 1 and the casing 6 can always be minimized regardless of the thermal expansion of the roll 1 and the casing 6, and as a result, the vacuum pump The capacity is small, and equipment costs and exhaust power can be reduced.
尚、具体的実験例を示すと、次の条件；
帯鋼：0.6mm厚さ×300mm巾の普通鋼
通板速度：15ｍ／min
シールロールの表面温度：300℃
シールバーの表面温度：300℃
高圧側シール装置の圧力：1.0torr
低圧側シール装置の圧力：0.07torr
メツキ膜厚さ：40ｇ／m2（亜鉛）
蒸着前の帯鋼温度：250℃
の下でメツキ作業を行つた結果、シールロール表
面及びシールバー表面には亜鉛の付着は認められ
なかつた。又、シール性能はロールが水冷されて
いた場合のそれよりも高いことが確認された。 In addition, to show a specific experimental example, the following conditions are as follows: Steel strip: 0.6 mm thick x 300 mm width ordinary steel Strip speed: 15 m/min Sealing roll surface temperature: 300°C Sealing bar surface temperature: 300°C Pressure of high-pressure side sealing device: 1.0torr Pressure of low-pressure side sealing device: 0.07torr Plating film thickness: 40g/m 2 (zinc) Strip steel temperature before vapor deposition: As a result of plating work at 250℃, the seal No zinc adhesion was observed on the roll surface or seal bar surface. It was also confirmed that the sealing performance was higher than that when the roll was water-cooled.
以上の説明で明らかな如く本発明によれば、ロ
ールの両端面にこれの軸方向に移動自在な側板を
弾接せしめるとともに、ロール及びカバー部材に
ヒータを設けてこれらをメツキ金属の再蒸発温度
以上に加熱したため、メツキ金属のロールへの付
着及びロールとカバー部材間での堆積を防いでロ
ールの正常回転を確保し、製品への悪影響を除く
ことができるとともに、高い真空度を保つて真空
ポンプの小容量化を図ることができる。 As is clear from the above description, according to the present invention, side plates movable in the axial direction are brought into elastic contact with both end faces of the roll, and a heater is provided on the roll and the cover member to keep them at the re-evaporation temperature of the plating metal. By heating to a higher temperature, it is possible to prevent the plating metal from adhering to the roll and depositing between the roll and the cover member, ensuring normal rotation of the roll, eliminating any negative effects on the product, and maintaining a high degree of vacuum. The capacity of the pump can be reduced.
第１図ａはピンチロール型シール装置の破断側
面図、第１図ｂは同図ａのＡ−Ａ線断面図、第２
図ａはブライドル型シール装置の破断側面図、第
２図ｂは同図ａのＢ−Ｂ線断面図、第３図は本発
明に係る真空シール装置の一部破断側面図、第４
図は第３図Ｃ−Ｃ線断面図である。
図面中、１はロール、２，５はヒータ、３はシ
ールバー、４，９，１０は隙間、６はケーシン
グ、７は帯鋼、１１は側板、１２はスプリングで
ある。
Fig. 1a is a broken side view of the pinch roll type sealing device, Fig. 1b is a sectional view taken along the line A-A in Fig.
Figure a is a cutaway side view of a bridle type sealing device, Figure 2b is a cross-sectional view taken along line B-B of Figure 2a, Figure 3 is a partially cutaway side view of the vacuum sealing device according to the present invention, and Figure 4.
The figure is a sectional view taken along the line C--C in FIG. 3. In the drawings, 1 is a roll, 2 and 5 are heaters, 3 is a seal bar, 4, 9, and 10 are gaps, 6 is a casing, 7 is a steel band, 11 is a side plate, and 12 is a spring.
Claims (1)
と、該ロールとの間に僅かの隙間を設けて設置さ
れるカバー部材とで構成される真空シール装置に
おいて、前記ロールの両端面にこれの軸方向に移
動自在な側板を弾接せしめるとともに、ロール及
びカバー部材にこれらを加熱するヒータを設けた
ことを特徴とする真空シール装置。1. In a vacuum sealing device consisting of a roll rotatably housed in a casing and a cover member installed with a slight gap between the roll and the roll, the axial direction of the roll is attached to both end surfaces of the roll. A vacuum sealing device characterized in that a movable side plate is brought into elastic contact with the roll and the cover member, and a heater is provided on the roll and the cover member to heat them.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59086169A JPS60234964A (en) | 1984-05-01 | 1984-05-01 | Vacuum sealing device |
| DE8585102965T DE3578437D1 (en) | 1984-03-19 | 1985-03-14 | DEVICE FOR VAPORIZATION. |
| DE198585102965T DE155643T1 (en) | 1984-03-19 | 1985-03-14 | DEVICE FOR VAPORIZATION. |
| EP85102965A EP0155643B1 (en) | 1984-03-19 | 1985-03-14 | Vacuum evaporation equipment |
| AU40012/85A AU553239B2 (en) | 1984-03-19 | 1985-03-15 | Preventing reevaporation and sealing strip in continuous metal vacuum evaporation |
| US06/713,743 US4649860A (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation coating equipment |
| CA000476897A CA1233016A (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation equipment |
| KR1019850001760A KR890004043B1 (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59086169A JPS60234964A (en) | 1984-05-01 | 1984-05-01 | Vacuum sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60234964A JPS60234964A (en) | 1985-11-21 |
| JPH0225429B2 true JPH0225429B2 (en) | 1990-06-04 |
Family
ID=13879250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59086169A Granted JPS60234964A (en) | 1984-03-19 | 1984-05-01 | Vacuum sealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60234964A (en) |
-
1984
- 1984-05-01 JP JP59086169A patent/JPS60234964A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60234964A (en) | 1985-11-21 |
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