JPH02216609A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPH02216609A JPH02216609A JP3507089A JP3507089A JPH02216609A JP H02216609 A JPH02216609 A JP H02216609A JP 3507089 A JP3507089 A JP 3507089A JP 3507089 A JP3507089 A JP 3507089A JP H02216609 A JPH02216609 A JP H02216609A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- oxygen
- magnetic recording
- film
- coercive force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000001301 oxygen Substances 0.000 claims abstract description 37
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000004544 sputter deposition Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052786 argon Inorganic materials 0.000 claims abstract description 3
- 239000007789 gas Substances 0.000 claims abstract description 3
- 239000000956 alloy Substances 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- 239000010408 film Substances 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052799 carbon Inorganic materials 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 2
- 229910000531 Co alloy Inorganic materials 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 8
- 229910018979 CoPt Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910002441 CoNi Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、磁気記録媒体に係り、特にＣｒ下地膜を有し
てなるＣｏ系合金のスパッタ型長手方向記録の磁気記録
媒体に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic recording medium, and more particularly to a Co-based alloy sputter-type longitudinal recording magnetic recording medium having a Cr underlayer.
（従来の技術）
最近、高密度記録の可能な磁気記録媒体としてＣｏ系合
金を用いたものがよく使われている。特に、Ｃｒ下地膜
のＣｏ系媒体を用いたリジッドディスク等の磁気記録媒
体においては、保磁力Ｈｃを増加させるなめにＣｒ下地
膜に種々の元素を添加する方法が検討されている。この
方法によると、Ｇｄ、Ｃｅ、Ｃｕ、Ｓｌ等の元素をＣｒ
下地膜に添加すると約１ａｔ％添加すると、添加しない
場合に比べて保磁力は１００〜２０００ｅ程度増加する
のが見られ、それ以上では逆に保磁力Ｈｃは減少する傾
向があることが知られている。（第１２回日本応用磁気
学会学術講演概要集“ＣｏＮ １Ｃｒ ／ Ｃｒハード
ディスクの下地Ｃｒ層への添加元素の影響”）
（発明が解決しようとする課題）
しかし、高密度磁気記録媒体としては１００〜２０００
ｅ程度の保磁力Ｈｃが増加しただけでは不十分であり、
また、この様な媒体を作製するために添加元素をｆａｔ
％付近に制御するのは非常に難しかった。(Prior Art) Recently, Co-based alloys have been frequently used as magnetic recording media capable of high-density recording. In particular, in magnetic recording media such as rigid disks using Co-based media with a Cr underlayer, methods of adding various elements to the Cr underlayer are being considered in order to increase the coercive force Hc. According to this method, elements such as Gd, Ce, Cu, and Sl can be replaced with Cr.
It is known that when added to the base film at about 1 at%, the coercive force increases by about 100 to 2000e compared to when it is not added, and that if it exceeds this, the coercive force Hc tends to decrease. There is. (Summary of the 12th Japanese Society of Applied Magnetics Academic Lectures “Influence of additive elements on the underlying Cr layer of CoN 1Cr/Cr hard disks”) (Problem to be solved by the invention) However, as a high-density magnetic recording medium, 2000
It is not enough that the coercive force Hc increases by about e,
In addition, in order to produce such a medium, additive elements are added in fat.
It was very difficult to control it to around %.
（課題を解決するための手段）
本発明は、上記課題を解決するためになされたものであ
り、記録媒体基体上にＣｒ下地膜を有するＣｏ系合金磁
気記録媒体において、前記Ｃｒ下地膜に４〜５０ａｔ％
の酸素を含有してなることを特徴とする磁気記録媒体と
その製造方法を提供しようとするものである。(Means for Solving the Problems) The present invention has been made to solve the above problems, and provides a Co-based alloy magnetic recording medium having a Cr underlayer on a recording medium substrate. ~50at%
An object of the present invention is to provide a magnetic recording medium characterized in that it contains oxygen, and a method for manufacturing the same.
（実施例）
第１図は本発明になる磁気記録媒体１００の構成を示す
断面図である。同図において１は例えばガラス基板から
なる記録媒体基体であり、２は４〜５０ａｔ％の酸素を
含有するＣｒ下地膜であり記録媒体基体１上に形成され
ている。３はＣｏ系合金からなる磁性層であり、前記Ｃ
ｒ下地ＷＡ２の上に形成されている。４はカーボン等か
らなる保護膜であり、前記磁性層３の上に形成されてい
る。(Example) FIG. 1 is a sectional view showing the structure of a magnetic recording medium 100 according to the present invention. In the figure, 1 is a recording medium base made of, for example, a glass substrate, and 2 is a Cr base film containing 4 to 50 at% oxygen, which is formed on the recording medium base 1. 3 is a magnetic layer made of a Co-based alloy, and the C
r It is formed on the base WA2. 4 is a protective film made of carbon or the like, and is formed on the magnetic layer 3.
上述の様に４〜５０ａｔ％の酸素を含有するＣｒ下地膜
を形成したことで、従来の酸素を含有しないものに比較
して２００〜８０００ｅ程度保磁力Ｈｃの大きな磁気記
録媒体が得られた。By forming a Cr underlayer containing 4 to 50 at % oxygen as described above, a magnetic recording medium with a coercive force Hc larger by about 200 to 8000e compared to a conventional one not containing oxygen was obtained.
この理由を以下に示す。The reason for this is shown below.
結晶性の磁性層の場合、結晶粒を単磁区粒子に近づける
ことにより保磁力Ｈｃを増加させ得ることは良く知られ
ている事実である。It is a well-known fact that in the case of a crystalline magnetic layer, the coercive force Hc can be increased by making the crystal grains closer to single-domain grains.
本発明者は、上記の事実から、もしＣｒ下地膜の結晶粒
を微細化することができ、その上に結晶性の磁性層を形
成したとしたら、その磁性層ら微細化し高保磁力の磁気
記録媒体が形成できるのではないかと考えた。Based on the above facts, the present inventors believe that if the crystal grains of the Cr underlayer can be made finer and a crystalline magnetic layer is formed thereon, the magnetic layer can be made finer to achieve high coercive force magnetic recording. I thought it might be possible to form a medium.
そして、鋭意研究を重ねた結果、Ｃｒの結晶はｂｃｃ構
造であり、酸素を含有しない場合は結晶性が良く結晶粒
も大きいが、酸素を含有させていくとＣｒ単体の結晶粒
は微細化し、単磁区粒子に近づき、それに伴いその上に
形成された結晶性の磁性層の結晶粒も微細化するという
ことを見出し、保磁力Ｈｃが増大することを確かめるこ
とができせな時のＣｏＰｔ／Ｃｒ０Ｍの表面の粒子ｍ造
を示す走査下表の通りである。As a result of extensive research, we found that Cr crystals have a BCC structure, and when oxygen is not included, the crystallinity is good and the crystal grains are large, but when oxygen is added, the crystal grains of Cr alone become finer. We found that as the grains approach single-domain grains, the crystal grains of the crystalline magnetic layer formed on them also become finer. The table below shows the structure of the particles on the surface.
とじた時のＣｏＰｔ／Ｃｒ０１１の表面の粒子構造を示
す走査型電子顕微鏡写真である。It is a scanning electron micrograph showing the particle structure of the surface of CoPt/Cr011 when it is closed.
同図より、酸素含有量が多い方がＣｏＰｔの結晶粒が微
細化しているのがわかる。From the figure, it can be seen that the CoPt crystal grains become finer when the oxygen content is higher.
この様に、酸素により結晶粒の微細化が可能であること
が確認されたので、高保磁力を有する磁気記録媒体を作
製することを目的として実験を行なった。Since it was thus confirmed that crystal grains can be made finer by oxygen, experiments were conducted with the aim of producing a magnetic recording medium having a high coercive force.
次に本発明になる磁気記録媒体１００の製造方法を説明
する。Next, a method for manufacturing the magnetic recording medium 100 according to the present invention will be explained.
ガラス暴板面上に、ＤＣマグネトロンスパッタ装置を用
いて、Ｃｒ下地膜及び磁性膜であるＣｏ系合金としてＣ
ｏＰｔ （ＰｔｌＯａｔ％）のスパッタリングを行ない
膜厚的０．２５μｍの金属膜（Ｃｒ膜： ０．２μｍ
、ＣｏＰｔ膜：０．０５μｍ）を成膜する。なお、この
時のスパッタ条件はこの後、例えばカーボン等の保護膜
を前記磁性膜上に成膜する。Using a DC magnetron sputtering device, a Cr base film and a Co-based alloy, which is a magnetic film, are deposited on the surface of the glass substrate.
A metal film (Cr film: 0.2 μm) with a thickness of 0.25 μm was formed by sputtering oPt (PtlOat%).
, CoPt film: 0.05 μm). Note that the sputtering conditions at this time are such that a protective film of, for example, carbon is then formed on the magnetic film.
本発明者は、上記の様な条件のもとて実験を行ない、Ｃ
ｒ下地膜を有するＣｏ系合金磁気記録媒体の前記Ｃｒ下
地膜に酸素を含ませることによって第３図に示すような
結果を得た。The inventor conducted experiments under the conditions described above, and found that C.
The results shown in FIG. 3 were obtained by including oxygen in the Cr underlayer of a Co-based alloy magnetic recording medium having an r underlayer.
第３図はスパッタ中の酸素分圧の変化に伴う保磁力Ｈｃ
（１０）及びＣｒ膜中の酸素含有量（２０）の変化を示
すグラフである。Figure 3 shows the coercive force Hc associated with changes in oxygen partial pressure during sputtering.
(10) and a graph showing changes in oxygen content (20) in a Cr film.
スパッタを用いてＣｒ下地膜を成膜する際に、従来の様
に酸素を導入しない場合は保磁力Ｈｃは１００ｉ）Ｏｅ
程度であるのに対しアルゴン及び酸素混合ガス雰囲気中
の、酸素分圧を１〜２０％とすることにより、Ｃｒ下地
膜中の酸素含有量を４〜５０ａｔ％と直線的に増加させ
ることができた。When forming a Cr base film using sputtering, if oxygen is not introduced as in the conventional case, the coercive force Hc is 100i) Oe
On the other hand, by setting the oxygen partial pressure in the argon and oxygen mixed gas atmosphere to 1 to 20%, the oxygen content in the Cr base film can be linearly increased to 4 to 50 at%. Ta.
保磁力は、酸素分圧１％付近（即ち酸素含有量４ａｔ％
付近）とした時に成膜を行なった時の値が１２０００ｅ
となり、そして、酸素分圧を７゜５％付近（即ち酸素含
有量が２０ａｔ％付近）で成膜を行なった時の値が約１
８０００ｅとなり、酸素を含有しない時の値に比べ８０
００ｅも高い値を得ることができた。また、７．５％以
上の酸素分圧で成膜を行なうと徐々に保磁力は減少して
いったが、酸素分圧２０％付近（即ち酸素含有量５０ａ
ｔ％付近）までは１２０００ｅ程度の保磁力は保てるこ
とが確認できた。即ち、酸素分圧１〜２０％（即ち酸素
含有量４〜５０ａｔ％）において１２０００ｅ以上の保
磁力を有する高密度記録用の磁気記録媒体を製造するこ
とが可能となったのである。The coercive force is around 1% oxygen partial pressure (i.e. oxygen content 4at%).
The value at the time of film formation was 12000e
Then, when the film is formed at an oxygen partial pressure of around 7°5% (that is, the oxygen content is around 20 at%), the value is about 1.
8000e, which is 80 compared to the value without oxygen.
00e was also able to obtain a high value. Furthermore, when the film was formed at an oxygen partial pressure of 7.5% or more, the coercive force gradually decreased, but it was found that the coercive force gradually decreased when the film was formed at an oxygen partial pressure of 7.5% or more.
It was confirmed that a coercive force of about 12,000e can be maintained up to about t%. In other words, it has become possible to produce a magnetic recording medium for high-density recording that has a coercive force of 12,000 e or more at an oxygen partial pressure of 1 to 20% (that is, an oxygen content of 4 to 50 at%).
なお、ここでは記録媒体基体の材料としてガラスを用い
たが、ＮｉＰメツキされたＡＩ基板を用いても同様の効
果が期待できる。Although glass was used here as the material for the recording medium substrate, the same effect can be expected even if a NiP-plated AI substrate is used.
また、ここでは磁性膜としてＣｏＰｔｌＯａｔ％のもの
を用いたが、ＣｏＰｔの場合ｐｔの含有量を更に増加す
れば保磁力Ｈｃを更に大きくすることができる。Furthermore, although CoPtlOat% was used as the magnetic film here, in the case of CoPt, the coercive force Hc can be further increased by further increasing the pt content.
また、本発明はＣｏＰｔを磁性層にした場合に限るもの
ではなく、下地を有するＣｏＮｉ、Ｃ。Furthermore, the present invention is not limited to the case where CoPt is used as the magnetic layer, but CoNi or C having an underlying layer is used.
Ｃｒ、ＣｏＮｉＣｒ、ＣｏＣｒＴａなどＣｏを主成分と
する合金であれば同様の効果が期待できるのはもちろん
のことである。Of course, similar effects can be expected from alloys containing Co as a main component, such as Cr, CoNiCr, and CoCrTa.
（発明の効果）
上述の様に、本発明においては、記録媒体基体上にＣｒ
下地膜を有するＣｏ系合金磁気記録媒体において、前記
Ｃｒ下地膜に４〜５０ａｔ％の酸素を含有してなること
を特徴とする磁気記録媒体としたので、保磁力Ｈｃを高
めることができ高密度記録に対応した磁気記録媒体の提
供を可能とする。(Effects of the Invention) As described above, in the present invention, Cr is coated on the recording medium substrate.
In the Co-based alloy magnetic recording medium having a base film, the magnetic recording medium is characterized in that the Cr base film contains 4 to 50 at% oxygen, so that the coercive force Hc can be increased and the density can be increased. It is possible to provide a magnetic recording medium compatible with recording.
第１図は本発明による磁気記録媒体の構成を水変化させ
た時のＣｏＮｉＣｒＯ膜の表面の粒子構造を示す走査型
電子顕微鏡写真、第３図はスパッタ中の酸素分圧の変化
に伴う保磁力Ｈｃ及びＣｒＪｌｌ中の酸素含有量の変化
を示すグラフ。
１・・・記録媒体基体、２・・・Ｃｒ下地膜、３・・・
磁性層、４・・・保護膜、１０・・・保磁力、２０・・
・酸素含有量、１００・・・磁気記録媒体。
囁１町
特許出願人 日本ビクター株式会社
代表者 埋木 邦人
＄３１Fig. 1 is a scanning electron micrograph showing the particle structure of the surface of a CoNiCrO film when the composition of the magnetic recording medium according to the present invention is changed with water, and Fig. 3 shows the coercive force due to changes in oxygen partial pressure during sputtering. Graph showing changes in oxygen content in Hc and CrJll. DESCRIPTION OF SYMBOLS 1... Recording medium base, 2... Cr base film, 3...
Magnetic layer, 4... Protective film, 10... Coercive force, 20...
- Oxygen content, 100...Magnetic recording medium. Whisper 1 Town Patent Applicant Representative of Victor Japan Co., Ltd. Japanese Umiki $31
Claims (2)
磁気記録媒体において、前記Ｃｒ下地膜に４〜５０ａｔ
％の酸素を含有してなることを特徴とする磁気記録媒体
。(1) In a Co-based alloy magnetic recording medium having a Cr underlayer on a recording medium substrate, the Cr underlayer has a concentration of 4 to 50 atm.
A magnetic recording medium characterized by containing % of oxygen.
成する工程とその下地膜上にＣｏ系合金薄膜磁気記録媒
体をスパッタにより形成する工程とからなる磁気記録媒
体の製造方法において、 前記Ｃｒ下地膜を酸素分圧を１〜２０％からなるアルゴ
ン及び酸素混合ガス雰囲気中においてスパッタにより形
成することを特徴とする磁気記録媒体の製造方法。(2) A method for manufacturing a magnetic recording medium comprising the steps of forming a Cr base film on a recording medium substrate by sputtering and forming a Co-based alloy thin film magnetic recording medium on the base film by sputtering, A method for manufacturing a magnetic recording medium, characterized in that a ground film is formed by sputtering in an argon and oxygen mixed gas atmosphere having an oxygen partial pressure of 1 to 20%.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3507089A JPH02216609A (en) | 1989-02-16 | 1989-02-16 | Magnetic recording medium and its production |
| US07/927,715 US5316631A (en) | 1989-02-16 | 1992-08-11 | Method for fabricating a magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3507089A JPH02216609A (en) | 1989-02-16 | 1989-02-16 | Magnetic recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02216609A true JPH02216609A (en) | 1990-08-29 |
Family
ID=12431749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3507089A Pending JPH02216609A (en) | 1989-02-16 | 1989-02-16 | Magnetic recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02216609A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0260388A (en) * | 1988-08-26 | 1990-02-28 | Matsushita Electric Ind Co Ltd | Still picture transmission equipment |
| JPH0536054A (en) * | 1991-07-31 | 1993-02-12 | Nec Corp | Magnetic recording medium and production thereof |
| US5436047A (en) * | 1991-09-24 | 1995-07-25 | International Business Machines Corporation | Thin film magnetic recording disk comprising a metallic disk blank, a substantially non-magnetic Ni-Cr-O film having a textured surface and a magnetic film |
| US5774783A (en) * | 1995-03-17 | 1998-06-30 | Fujitsu Limited | Magnetic recording medium |
-
1989
- 1989-02-16 JP JP3507089A patent/JPH02216609A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0260388A (en) * | 1988-08-26 | 1990-02-28 | Matsushita Electric Ind Co Ltd | Still picture transmission equipment |
| JPH0536054A (en) * | 1991-07-31 | 1993-02-12 | Nec Corp | Magnetic recording medium and production thereof |
| US5436047A (en) * | 1991-09-24 | 1995-07-25 | International Business Machines Corporation | Thin film magnetic recording disk comprising a metallic disk blank, a substantially non-magnetic Ni-Cr-O film having a textured surface and a magnetic film |
| US5774783A (en) * | 1995-03-17 | 1998-06-30 | Fujitsu Limited | Magnetic recording medium |
| USRE38587E1 (en) | 1995-03-17 | 2004-09-14 | Fujitsu Limited | Magnetic recording medium |
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