JPH02214481A - Apparatus for driving ultrasonic motor - Google Patents
Apparatus for driving ultrasonic motorInfo
- Publication number
- JPH02214481A JPH02214481A JP1031761A JP3176189A JPH02214481A JP H02214481 A JPH02214481 A JP H02214481A JP 1031761 A JP1031761 A JP 1031761A JP 3176189 A JP3176189 A JP 3176189A JP H02214481 A JPH02214481 A JP H02214481A
- Authority
- JP
- Japan
- Prior art keywords
- detection circuit
- current
- piezoelectric body
- phase difference
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 49
- 230000010355 oscillation Effects 0.000 claims description 19
- 230000007257 malfunction Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、圧電体を用いて駆動力を発生する超音波モー
タに係わり、特に弾性体を励振させる圧電体を駆動する
超音波モータの駆動装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an ultrasonic motor that generates driving force using a piezoelectric body, and more particularly to an ultrasonic motor drive device that drives a piezoelectric body that excites an elastic body. .
従来の技術
超音波モータの駆動装置は、動作条件および温度等の環
境の変化により駆動条件が変化しても駆動電圧の周波数
として常にステータの機械共振によって定まる周波数の
最適駆動周波数を追尾し、駆動効率の低下を防止し、安
定な回転状態を維持する機能が必要である。Conventional technology Ultrasonic motor drive devices always track and drive the optimal drive frequency, which is a frequency determined by the mechanical resonance of the stator, as the frequency of the drive voltage, even if the drive conditions change due to changes in operating conditions and the environment such as temperature. A function is required to prevent a decline in efficiency and maintain stable rotational conditions.
このような超音波モータの駆動装置として、圧電体に流
れる機械系振動に比例した電流を検出し、さらにこの電
流と圧電体に印加される電圧との位相差を検出し、回転
速度を安定にするために前記電流および位相差を一定に
保つように発振周波数を可変できる可変発振器（以下Ｖ
ＣＯと記す）と、この可変発振器の発振周波数で前記圧
電体を駆動させる駆動回路とで構成されているものが考
えられている。As a drive device for such an ultrasonic motor, it detects a current proportional to the mechanical vibration flowing through the piezoelectric body, and also detects the phase difference between this current and the voltage applied to the piezoelectric body to stabilize the rotation speed. In order to do this, a variable oscillator (hereinafter referred to as V
It has been considered that the piezoelectric element is composed of a variable oscillator (denoted as CO) and a drive circuit that drives the piezoelectric body at the oscillation frequency of this variable oscillator.
発明が解決しようとする課題
しかし、このような超音波モータの駆動装置においては
、モータに過負荷がかかると圧電体の機械系振動に比例
した電流と圧電体に印加される電圧との位相差を一定に
保つように発振周波数を可変するため、圧電体に過大の
入力が入り圧電体の発熱が過大となり、また圧電体の特
性劣化が生じる。Problems to be Solved by the Invention However, in such an ultrasonic motor drive device, when an overload is applied to the motor, a phase difference between the current proportional to the mechanical vibration of the piezoelectric body and the voltage applied to the piezoelectric body occurs. Since the oscillation frequency is varied so as to keep the oscillation frequency constant, an excessive input is applied to the piezoelectric body, causing the piezoelectric body to generate excessive heat and deteriorating the characteristics of the piezoelectric body.
また、超音波モータの駆動は、ステータの共振特性の共
振点（電気入力が最大の点）よりも高い周波数にある反
共振点く電気入力が最小の点）近傍、もしくは***振点
より高い周波数でモータを起動して最適駆動点へ周波数
をスィーブするのが望ましい。しかしながら、温度等の
環境の変化によりステータの共振特性もしくはｖＣＯの
温度変化によりモータ起動時の周波数が共振周波数に近
（なると、瞬間的に圧電体に過大の入力が入り圧電体の
破損が生じるという問題点があった。In addition, the ultrasonic motor is driven near the anti-resonance point (the point where the electrical input is minimum), which is at a higher frequency than the resonance point (the point where the electrical input is maximum) of the resonance characteristics of the stator, or at a frequency higher than the anti-resonance point. It is desirable to start the motor at and sweep the frequency to the optimum driving point. However, due to changes in the environment such as temperature, the frequency at the time of starting the motor approaches the resonant frequency due to changes in the resonant characteristics of the stator or the temperature of the vCO. There was a problem.
本発明は、上記問題点を解決するもので、過負荷時やモ
ータ起動時の圧電体への電気入力を常に設定値以下に制
御することができる超音波モータの駆動装置を提供する
ものである。The present invention solves the above-mentioned problems, and provides an ultrasonic motor drive device that can always control the electrical input to the piezoelectric body to below a set value during overload or motor startup. .
課題を解決するための手段
このような従来の課題を解決するために本発明は、超音
波モータを構成する圧電体の機械系振動に比例した電流
を検出する電流検出回路と、前記圧電体に印加される電
圧を検出する電圧検出回路と、前記電流検出回路からの
、信号と前記電圧検出回路からの信号の位相差を検出す
る位相差検出回路と、この位相差検出回路の出力と前記
電流検出回路の出力により、前記圧電体に流れる機械系
振動に比例した電流と前記位相差をそれぞれ一定とする
よう発振周波数を可変とする可変発振器と、前記可変発
振器からの信号に基づいて前記圧電体に駆動用電圧を供
給する駆動回路とを備え、前記可変発振器の発振周波数
が圧電体の共振周波数を越えないよう前記位相差検出回
路の出力信号と位相下限値とを比較し、位相下限値を越
えると前記可変発振器の発振周波数を高いほうへ変化さ
せる位相制限回路、または前記電流検出回路の出力信号
と電流上限値とを比較し、電流上限値を越えると前記可
変発振器の発振周波数を高いほうへ変化させる電流制限
回路を設けたものである。Means for Solving the Problems In order to solve these conventional problems, the present invention provides a current detection circuit that detects a current proportional to the mechanical vibration of a piezoelectric body constituting an ultrasonic motor, and a a voltage detection circuit that detects an applied voltage; a phase difference detection circuit that detects a phase difference between a signal from the current detection circuit and a signal from the voltage detection circuit; and an output of the phase difference detection circuit and the current. a variable oscillator that varies the oscillation frequency so that the current proportional to the mechanical vibration flowing through the piezoelectric body and the phase difference are constant by the output of the detection circuit; and a drive circuit that supplies a drive voltage to the variable oscillator, and compares the output signal of the phase difference detection circuit with a phase lower limit value so that the oscillation frequency of the variable oscillator does not exceed the resonance frequency of the piezoelectric body, and determines the phase lower limit value. A phase limiting circuit that changes the oscillation frequency of the variable oscillator to a higher one when the current upper limit value is exceeded, or an output signal of the current detection circuit that changes the oscillation frequency of the variable oscillator to a higher one when the current upper limit value is exceeded. A current limiting circuit is provided to change the current to .
作用
上記構成により本発明では、圧電体の機械系振動に比例
した電流と圧電体に印加される電圧との位相差レベルが
位相下限値を越えると可変発振器の発振周波数を高いほ
うへ変化させ、または・、圧電体の機械系振動に比例し
た電流の電流レベルが電流上限値を越えると可変発振器
の発振周波数を高いほうへ変化させる。According to the above structure, the present invention changes the oscillation frequency of the variable oscillator to a higher level when the phase difference level between the current proportional to the mechanical vibration of the piezoelectric body and the voltage applied to the piezoelectric body exceeds the lower phase limit value. Or, if the current level of the current proportional to the mechanical vibration of the piezoelectric body exceeds the current upper limit value, the oscillation frequency of the variable oscillator is changed to a higher value.
ここで、前記位相差レベルは、前記電流検出回路の出力
と圧電体に印加される電圧を検出する電圧検出回路の出
力との位相差を検出する位相差検出回路内の前記位相差
の積分値であり、前記電流レベルは、圧電体の機械系振
動に比例した電流を検出する電流検出回路の出力の積分
値である。Here, the phase difference level is an integral value of the phase difference in a phase difference detection circuit that detects a phase difference between the output of the current detection circuit and the output of a voltage detection circuit that detects the voltage applied to the piezoelectric body. The current level is an integral value of the output of a current detection circuit that detects a current proportional to the mechanical vibration of the piezoelectric body.
この位相差レベルおよび電流レベルは、超音波モータの
駆動周波数に対して第３図に示すような関係にあり、こ
の時の圧電体への電気入力は同図のようになっている。The phase difference level and current level have a relationship as shown in FIG. 3 with respect to the driving frequency of the ultrasonic motor, and the electrical input to the piezoelectric body at this time is as shown in the diagram.
即ち、超音波モータの駆動周波数に対して位相下限値お
よび電流上限値を制限したい電気入力に応じて任意の値
に決定し、本発明の構成で発振周波数を変化させること
により圧電体への電気入力を常に設定値以下にするので
、過負荷時や起動時のモータ駆動を安定にすることがで
きる。That is, the phase lower limit value and current upper limit value for the driving frequency of the ultrasonic motor are determined to arbitrary values according to the electrical input that is desired to be limited, and by changing the oscillation frequency with the configuration of the present invention, electricity to the piezoelectric material can be controlled. Since the input is always kept below the set value, motor drive can be stabilized during overload or startup.
実施例
以下本発明の実施例について、図面を参照して説明する
。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings.
第１図は本発明の実施例における駆動装置の回路図であ
る。FIG. 1 is a circuit diagram of a driving device in an embodiment of the present invention.
図において、１．２それぞれ超音波モータを構成する第
１の圧電体１と第２の圧電体２である。In the figure, 1.2 is a first piezoelectric body 1 and a second piezoelectric body 2, each of which constitutes an ultrasonic motor.
３５は圧電体２と、圧電体２に直列に接続された抵抗２
４と、一方の端子を前記圧電体２の抵抗２４との接続点
と反対側の端子２０ａに接続されたコンデンサ２６と、
前記コンデンサの他方の端子に一方の端子を接続し、も
う一方の端子を前記抵抗２４の圧電体２との接続点と反
対側の端子１９ａに接続された抵抗２５と、抵抗３０〜
３３と演算増幅器３４とで構成された差動増幅回路４２
とを備えており、圧電体に流れる機械振動に比例する電
流を検出する電流検出回路である。35 is a piezoelectric body 2 and a resistor 2 connected in series to the piezoelectric body 2
4, a capacitor 26 having one terminal connected to a terminal 20a of the piezoelectric body 2 on the opposite side to the connection point with the resistor 24;
A resistor 25 has one terminal connected to the other terminal of the capacitor, and the other terminal is connected to the terminal 19a of the resistor 24 opposite to the connection point with the piezoelectric body 2, and the resistors 30 to 30.
33 and an operational amplifier 34.
It is a current detection circuit that detects a current proportional to mechanical vibration flowing through a piezoelectric body.
６３は位相制限回路であり、コンパレータ６２゜基準電
圧源６１より構成され、前記基準電圧源６１より位相差
検出回路３７の出力レベルが大きいとコンパレータ６２
の出力はＯｖ、逆に前記基準電圧源６１より前記位相差
検出回路３７の出力レベルが小さくなると前記コンパレ
ータ６２の出力は５ｖになるよう動作する。この時、基
準電圧源６１の基準電圧はあらかじめ設定した位相下限
値である。Reference numeral 63 denotes a phase limiting circuit, which is composed of a comparator 62° and a reference voltage source 61. When the output level of the phase difference detection circuit 37 is higher than the reference voltage source 61, the comparator 62
The output of the comparator 62 is Ov, and conversely, when the output level of the phase difference detection circuit 37 is lower than that of the reference voltage source 61, the output of the comparator 62 is 5V. At this time, the reference voltage of the reference voltage source 61 is a preset lower phase limit value.
６６は電流制限回路であり、コンパレータ６５゜基準電
圧源６４より構成され、前記基準電圧源６４より電流レ
ベル検出回路５１の出力レベルが小さいとコンパレータ
６５の出力はＯＶ、逆に前記基準電圧源６４より前記電
流レベル検出回路５１の出力レベルが大きくなると前記
コンパレータ６５の出力は５ｖになるよう動作する。こ
の時、基準電圧源６４の基準電圧は、あらかじめ設定し
た電流上限値である。Reference numeral 66 denotes a current limiting circuit, which is composed of a comparator 65° and a reference voltage source 64. When the output level of the current level detection circuit 51 is lower than the reference voltage source 64, the output of the comparator 65 is OV, and conversely, the output level of the reference voltage source 64 is lower than the output level of the current level detection circuit 51. When the output level of the current level detection circuit 51 becomes higher, the output of the comparator 65 operates to become 5V. At this time, the reference voltage of the reference voltage source 64 is a preset current upper limit value.
ここで、前記位相下限値および電流上限値は、第３図に
示す超音波モータの駆動周波数に対する位相差、電流レ
ベル、入力の関係から決定でき、例えば電気入力を７Ｗ
以下にしたいときは位相下限値は位相差８０度に相当す
る電圧４Ｖ（位相差０度をＯＶ、位相差１００度を５ｖ
とする）に設定し、電流上限値は同図より７．７ｖに設
定する。Here, the phase lower limit value and current upper limit value can be determined from the relationship between the phase difference, current level, and input with respect to the driving frequency of the ultrasonic motor shown in FIG.
If you want to set it below, set the phase lower limit to 4V, which corresponds to a phase difference of 80 degrees (OV for a phase difference of 0 degrees, 5V for a phase difference of 100 degrees.
), and the current upper limit value is set to 7.7V from the same figure.
７０は加算回路であり、オペアンプおよび抵抗（図示せ
ず）より構成され誤差増幅器４３．誤差増幅器５６１位
相制限回路６３．電流制限回路６６のそれぞれの出力電
圧の加算をする。Reference numeral 70 denotes an adder circuit, which is composed of an operational amplifier and a resistor (not shown), and includes an error amplifier 43. Error amplifier 561 phase limiting circuit 63. The respective output voltages of the current limiting circuit 66 are added.
第２図は可変発振器４４ （ＶＣＯと称す）の発振周波
数可変特性であり、第１図のに点の電圧により第２図の
ような周波数変化をする。FIG. 2 shows the oscillation frequency variable characteristics of the variable oscillator 44 (referred to as VCO), and the frequency changes as shown in FIG. 2 depending on the voltage at the point in FIG.
つぎに、第２図、第３図を用いて第１図の動作説明をす
る。Next, the operation of FIG. 1 will be explained using FIGS. 2 and 3.
第１図において、ＶＣＯ４４の出力を駆動回路２２を介
して９０度位相差で交流電圧を圧電体１および圧電体２
を含む端子２１ａ−２０ａ、端子１９ａ−２０ａに印加
すると、電流検出回路３５で圧電体の機械系振動に比例
した電流を検出し、電圧検出回路３６では圧電体に印加
した電圧を検出して、位相−足回路６７で前記電流検出
回路３５と電圧検出回路３６との位相差を一定にするよ
うに、また、電流−足回路６８で前記電流検出回路３５
の電流振幅を一定にするようにＶＣＯ４４を加算回路７
０を介して変化させている。In FIG. 1, the output of the VCO 44 is transmitted to the piezoelectric body 1 and the piezoelectric body 2 by an alternating current voltage with a phase difference of 90 degrees through the drive circuit 22.
When applied to terminals 21a-20a and terminals 19a-20a containing the voltage, the current detection circuit 35 detects a current proportional to the mechanical vibration of the piezoelectric body, and the voltage detection circuit 36 detects the voltage applied to the piezoelectric body, A phase foot circuit 67 maintains the phase difference between the current detection circuit 35 and the voltage detection circuit 36, and a current foot circuit 68 adjusts the phase difference between the current detection circuit 35 and the voltage detection circuit 36.
The adder circuit 7 connects the VCO 44 to keep the current amplitude constant.
It is changed through 0.
ここで、モータ駆動に過負荷などの異常が生じてないと
きは、位相制限回路６３および電流制限回路６６の出力
はそれぞれＯＶなの、で、位相−足回路６７と電流−足
回路６８の出力（Ｇ点とＨ点の電圧）の加算でＶＣＯ４
４を第２図の関係でコントロールする。Here, when there is no abnormality such as overload in the motor drive, the outputs of the phase limiting circuit 63 and the current limiting circuit 66 are OV, so the outputs of the phase-leg circuit 67 and the current-leg circuit 68 ( By adding the voltages at point G and point H), VCO4
4 is controlled according to the relationship shown in Figure 2.
ところが、過負荷や起動時に圧電体に過大入力が入るな
どの異常が生じると位相差検出回路３７の出力レベルが
位相下限値を越えるか、または、電流検出レベル検出回
路５１の出力レベルが電流上限値を越えるため、位相制
限回路６３、または、電流制限回路６６の動作により１
点または１点に５Ｖが出力され、加算回路７０でのＧ、
Ｈ，Ｉ。However, if an abnormality occurs such as overload or excessive input to the piezoelectric body during startup, the output level of the phase difference detection circuit 37 will exceed the phase lower limit value, or the output level of the current detection level detection circuit 51 will exceed the current upper limit value. 1 due to the operation of the phase limiter 63 or the current limiter 66.
5V is output to a point or one point, and G in the adder circuit 70,
H,I.
Ｊ各点の電圧加算の結果は５Ｖを越え、第２図の関係に
よりＶＣＯ４４の発振周波数は瞬時に高（なるため、第
３図の関係により、圧電体への過大入力を瞬時に防止す
ることができる。The result of voltage addition at each point J exceeds 5V, and the oscillation frequency of the VCO 44 instantly becomes high due to the relationship shown in Figure 2. Therefore, due to the relationship shown in Figure 3, excessive input to the piezoelectric material can be instantly prevented. Can be done.
発明の効果
以上のように本発明は、圧電体の機械系振動に比例した
電流と印加電圧との位相差が設定下限値を越えたか、ま
たは、圧電体の機械系振動に比例した電流が設定上限値
を越えたかによって、モータを駆動する発振周波数を瞬
時に高いほうへ変化させる位相制限回路、電流制限回路
を設けることにより、モータへの過負荷時や起動時の圧
電体への異常入力を防止し、特性劣化の少ないモータの
提供、かつ、安定したモータ駆動を得ることができる。Effects of the Invention As described above, the present invention provides the following advantages: when the phase difference between the current proportional to the mechanical system vibration of the piezoelectric body and the applied voltage exceeds the set lower limit value, or when the current proportional to the mechanical system vibration of the piezoelectric body is set. By providing a phase limiting circuit and a current limiting circuit that instantly change the oscillation frequency that drives the motor to a higher level depending on whether the upper limit is exceeded, abnormal input to the piezoelectric body is prevented when the motor is overloaded or when starting up. It is possible to provide a motor with less characteristic deterioration and to obtain stable motor drive.
第１図は本発明の実施例における超音波モータの駆動装
置のブロック図、第２図はｖＣＯの発振周波数可変特性
図、第３図は超音波モータの駆動周波数に対する圧電体
の機械系振動に比例する電流と電圧の位相差、電流振幅
、入力の関係を示す図である。
１．２・・・・・・圧電体、２２・・・・・・駆動回路
、３５・・・・・・電流検出回路、３６・・・・・・電
圧検出回路、４４・・・・・・可変発振器（ＶＣＯ）
、６３・・・・・・位相制限回路、６６・・・・・・電
流制限回路、６７・・・・・・位相一定回路、６８・・
・・・・電流一定回路、７０・・・・・・加算回路。
代理人の氏名 弁理士 粟野重孝 ほか１名区
坂藁優−￥Fig. 1 is a block diagram of an ultrasonic motor drive device according to an embodiment of the present invention, Fig. 2 is a vCO oscillation frequency variable characteristic diagram, and Fig. 3 is a graph showing mechanical system vibration of a piezoelectric body with respect to the driving frequency of an ultrasonic motor. FIG. 3 is a diagram showing the relationship between proportional current and voltage phase difference, current amplitude, and input. 1.2... Piezoelectric body, 22... Drive circuit, 35... Current detection circuit, 36... Voltage detection circuit, 44...・Variable oscillator (VCO)
, 63... Phase limiting circuit, 66... Current limiting circuit, 67... Phase constant circuit, 68...
... Constant current circuit, 70... Addition circuit. Name of agent: Patent attorney Shigetaka Awano and 1 other person Yu Sakawara - ¥
Claims (2)
比例した電流を検出する電流検出回路と、前記圧電体に
印加される電圧を検出する電圧検出回路と、前記電流検
出回路からの信号と前記電圧検出回路からの信号の位相
差を検出する位相差検出回路と、この位相差検出回路の
出力と前記電流検出回路の出力により、前記圧電体に流
れる機械系振動に比例した電流と前記位相差をそれぞれ
一定とするよう発振周波数を可変とする可変発振器と、
前記可変発振器からの信号に基づいて前記圧電体に駆動
用電圧を供給する駆動回路とを備え、前記可変発振器の
発振周波数が圧電体の共振周波数を越えないよう前記位
相差検出回路の出力信号と位相下限値とを比較し、位相
下限値を越えると前記可変発振器の発振周波数を高いほ
うへ変化させる位相制限回路を設けた超音波モータの駆
動装置。(1) A current detection circuit that detects a current proportional to the mechanical vibration of a piezoelectric body that constitutes an ultrasonic motor, a voltage detection circuit that detects a voltage applied to the piezoelectric body, and a signal from the current detection circuit. and a phase difference detection circuit that detects a phase difference between the signals from the voltage detection circuit; and an output of the phase difference detection circuit and the output of the current detection circuit to detect a current proportional to the mechanical system vibration flowing through the piezoelectric body and the voltage detection circuit. a variable oscillator whose oscillation frequency is variable so as to keep each phase difference constant;
a drive circuit that supplies a driving voltage to the piezoelectric body based on a signal from the variable oscillator, and an output signal of the phase difference detection circuit so that the oscillation frequency of the variable oscillator does not exceed the resonant frequency of the piezoelectric body. An ultrasonic motor driving device comprising a phase limiting circuit that compares a phase lower limit value and changes the oscillation frequency of the variable oscillator to a higher side when the phase lower limit value is exceeded.
比例した電流を検出する電流検出回路と、前記圧電体に
印加される電圧を検出する電圧検出回路と、前記電流検
出回路からの信号と前記電圧検出回路からの信号の位相
差を検出する位相差検出回路と、この位相差検出回路の
出力と前記電流検出回路の出力により、前記圧電体に流
れる機械系振動に比例した電流と前記位相差をそれぞれ
一定とするよう発振周波数を可変とする可変発振器と、
前記可変発振器からの信号に基づいて前記圧電体に駆動
用電圧を供給する駆動回路とを備え、前記可変発振器の
発振周波数が圧電体の共振周波数を越えないよう前記電
流検出回路の出力信号と電流上限値とを比較し、電流上
限値を越えると前記可変発振器の発振周波数を高いほう
へ変化させる電流制限回路を設けた超音波モータの駆動
装置。(2) A current detection circuit that detects a current proportional to the mechanical vibration of a piezoelectric body that constitutes an ultrasonic motor, a voltage detection circuit that detects a voltage applied to the piezoelectric body, and a signal from the current detection circuit. and a phase difference detection circuit that detects a phase difference between the signals from the voltage detection circuit; and an output of the phase difference detection circuit and the output of the current detection circuit to detect a current proportional to the mechanical system vibration flowing through the piezoelectric body and the voltage detection circuit. a variable oscillator whose oscillation frequency is variable so as to keep each phase difference constant;
a drive circuit that supplies a drive voltage to the piezoelectric body based on a signal from the variable oscillator, and the output signal of the current detection circuit and the current An ultrasonic motor drive device comprising a current limiting circuit that compares the current with an upper limit value and changes the oscillation frequency of the variable oscillator to a higher value when the current upper limit value is exceeded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1031761A JPH02214481A (en) | 1989-02-10 | 1989-02-10 | Apparatus for driving ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1031761A JPH02214481A (en) | 1989-02-10 | 1989-02-10 | Apparatus for driving ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02214481A true JPH02214481A (en) | 1990-08-27 |
Family
ID=12340014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1031761A Pending JPH02214481A (en) | 1989-02-10 | 1989-02-10 | Apparatus for driving ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02214481A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622869A (en) * | 1985-06-26 | 1987-01-08 | Matsushita Electric Ind Co Ltd | Supersonic motor drive device |
| JPS6323572A (en) * | 1986-07-14 | 1988-01-30 | Canon Inc | Drive circuit for oscillatory wave motor |
| JPS6356178A (en) * | 1986-08-26 | 1988-03-10 | Matsushita Electric Ind Co Ltd | Driving of ultrasonic motor |
| JPS63209482A (en) * | 1987-02-24 | 1988-08-31 | Canon Inc | Controlling circuit of oscillatory wave motor |
-
1989
- 1989-02-10 JP JP1031761A patent/JPH02214481A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS622869A (en) * | 1985-06-26 | 1987-01-08 | Matsushita Electric Ind Co Ltd | Supersonic motor drive device |
| JPS6323572A (en) * | 1986-07-14 | 1988-01-30 | Canon Inc | Drive circuit for oscillatory wave motor |
| JPS6356178A (en) * | 1986-08-26 | 1988-03-10 | Matsushita Electric Ind Co Ltd | Driving of ultrasonic motor |
| JPS63209482A (en) * | 1987-02-24 | 1988-08-31 | Canon Inc | Controlling circuit of oscillatory wave motor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4888514A (en) | Driving apparatus for ultrasonic motor | |
| EP0261810B1 (en) | Drive method for ultrasonic motor providing enhanced stability of rotation | |
| US5130619A (en) | Drive control apparatus for an ultrasonic motor | |
| KR100228610B1 (en) | Method for driving and driving circuit of an ultrasonic motor | |
| US4853578A (en) | Driving apparatus for ultrasonic motor | |
| JP2737420B2 (en) | Ultrasonic motor drive system | |
| JPH02214481A (en) | Apparatus for driving ultrasonic motor | |
| JPH09182467A (en) | Drive of oscillatory actuator | |
| JP2533936B2 (en) | Ultrasonic motor drive | |
| RU2025882C1 (en) | Device for control over piezoelectric motor | |
| JP2506895B2 (en) | Ultrasonic motor controller | |
| JP2605333B2 (en) | Ultrasonic motor drive | |
| JP2794692B2 (en) | Ultrasonic motor drive circuit | |
| JP3260041B2 (en) | Ultrasonic motor driving method and driving circuit | |
| JPH01148080A (en) | Controller for ultrasonic motor | |
| JP2780262B2 (en) | Drive circuit for vibration wave motor | |
| JP2574293B2 (en) | Ultrasonic motor driving method | |
| JPS63234881A (en) | Driving device for ultrasonic motor | |
| JPH04322179A (en) | Method of driving ultrasonic motor | |
| JP2819437B2 (en) | Ultrasonic motor drive controller | |
| JP2506896B2 (en) | Ultrasonic motor drive | |
| JPH08308267A (en) | Drive device for ultrasonic motor | |
| JPH04140077A (en) | Drive control of ultrasonic motor | |
| JPS63154076A (en) | Drive circuit for oscillatory wave motor | |
| JPH02197273A (en) | Driving device for ultrasonic motor |