JPH02192006A - Magnetic head and production thereof - Google Patents
Magnetic head and production thereofInfo
- Publication number
- JPH02192006A JPH02192006A JP63302816A JP30281688A JPH02192006A JP H02192006 A JPH02192006 A JP H02192006A JP 63302816 A JP63302816 A JP 63302816A JP 30281688 A JP30281688 A JP 30281688A JP H02192006 A JPH02192006 A JP H02192006A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- oxygen
- thin films
- ferrite
- metal magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010409 thin film Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 21
- 239000001301 oxygen Substances 0.000 claims abstract description 21
- 238000000151 deposition Methods 0.000 claims description 4
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 23
- 239000013078 crystal Substances 0.000 abstract description 15
- 239000000696 magnetic material Substances 0.000 abstract description 9
- 239000010408 film Substances 0.000 abstract description 8
- 239000002131 composite material Substances 0.000 abstract description 4
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract 3
- 239000000853 adhesive Substances 0.000 abstract 2
- 239000007769 metal material Substances 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 38
- 239000002184 metal Substances 0.000 description 38
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000002542 deteriorative effect Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229910000702 sendust Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- XWHPIFXRKKHEKR-UHFFFAOYSA-N iron silicon Chemical compound [Si].[Fe] XWHPIFXRKKHEKR-UHFFFAOYSA-N 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は磁気ヘッドとその製造方法に係り、特にビデオ
・テープレコーダ、ディジタル・オーディオ・テープレ
コーダ、フロッピーｆイスク等に用いられる磁気ヘッド
とその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic head and a method of manufacturing the same, and in particular a magnetic head and a method of manufacturing the same used in video tape recorders, digital audio tape recorders, floppy discs, etc. Regarding.
一般に磁気ヘッドは高い飽和磁束密度と高い透磁率が要
求される。高い飽和磁束密度を実現できる材料としては
センダスト（登録商標）、アモルファス合金等の金属磁
性材料が、また、高い透磁率を有する材料としては磁性
フェライトが知られている。Generally, magnetic heads are required to have high saturation magnetic flux density and high magnetic permeability. Metal magnetic materials such as Sendust (registered trademark) and amorphous alloy are known as materials that can achieve a high saturation magnetic flux density, and magnetic ferrite is known as a material that has high magnetic permeability.
しかし、金属磁性材料は抵抗が小であるため、渦電流に
よる透磁率の低下が生じ、また、磁性フエライ１〜は飽
和磁束密度が小さい。このため、これらの材料を複合す
ることにより、良好な特性を実現した複合体構造の磁気
ヘッドがある。However, since metal magnetic materials have low resistance, their magnetic permeability decreases due to eddy currents, and the magnetic ferrites 1 to 1 have a low saturation magnetic flux density. For this reason, there are magnetic heads with a composite structure that achieve good characteristics by combining these materials.
従来の技術
従来の金属磁性材料と磁性フェライトとの複合体構造の
磁気ヘッドは第８図に示すように磁性フェライトよりな
るコア半体９ａ、９ｂの互いに対向する面に金属磁性体
層１０ａ、１０ｂをコア半体９ａ、９ｂに直接形成し、
ギャップ材１１を介して、コア半体９ａ、９ｂをつき合
わせガラス等の接合剤１２により接合した構成であった
。2. Description of the Related Art A conventional magnetic head having a composite structure of a metal magnetic material and a magnetic ferrite has metal magnetic layers 10a and 10b on mutually opposing surfaces of core halves 9a and 9b made of magnetic ferrite, as shown in FIG. are directly formed on the core halves 9a and 9b,
The core halves 9a and 9b were bonded together via a gap material 11 using a bonding agent 12 such as laminated glass.
発明が解決しようとする課題
しかるに、従来の磁気ヘッドはフェライトと金属磁性体
膜との付着性密着性が悪い為、コアと金属磁性薄膜との
間に疑似ギャップが生じ、磁気ヘッドの特性を劣化させ
てしまったり、またコアは酸化物系のフェライトが用い
られるため、コアから金属磁性薄膜に酸素が移動して金
属磁性薄膜を酸化してしまい疑似ギャップとして作用す
る磁気特性性の劣化層が生じてしまい、又金属性磁性膜
はその下地の結晶配向に大きく影響され、配向の悪い下
地上に形成した金属磁性体は配向が悪い磁気特性の劣化
層が生じ疑似ギ〜・ツブが生じてしまう等の問題点があ
った。Problems to be Solved by the Invention However, in conventional magnetic heads, the adhesion between the ferrite and the metal magnetic film is poor, resulting in a pseudo gap between the core and the metal magnetic thin film, which deteriorates the characteristics of the magnetic head. Also, since the core is made of oxide ferrite, oxygen moves from the core to the metal magnetic thin film and oxidizes the metal magnetic thin film, creating a layer with degraded magnetic properties that acts as a pseudo gap. In addition, a metallic magnetic film is greatly affected by the crystal orientation of the underlying layer, and a metallic magnetic material formed on a poorly oriented substrate will result in a layer with poor orientation and deteriorated magnetic properties, resulting in pseudo-girds and bumps. There were problems such as.
本発明はＦ記の点に鑑みてなされたもので、疑似ギャッ
プの生じにくい複合型の磁気ヘッドとその製造方法を提
供することを目的とする。The present invention has been made in view of point F, and it is an object of the present invention to provide a composite magnetic head in which pseudo gaps are less likely to occur, and a method for manufacturing the same.
課題を解決するための手段
本発明はギャップ材を磁性体層が形成された二つの磁気
コアを突き合わせて挟持してなる磁気ヘッドにおいて、
前記磁気コアと前記磁性体層との間に酸素に対して安定
で、かつ、結晶に配向性を有し尚かつ金属磁性膜の付着
力・密着性を向上させる材料で薄膜を具備してなる。Means for Solving the Problems The present invention provides a magnetic head in which a gap material is sandwiched between two magnetic cores each having a magnetic layer formed thereon.
A thin film is provided between the magnetic core and the magnetic layer using a material that is stable against oxygen, has crystal orientation, and improves the adhesion and adhesion of the metal magnetic film. .
作用
薄膜は酸素に対して安定である材料で形成されるため、
磁気コアの酸素を遮断し、磁性体層への酸素拡散を防止
する。また、結晶に配向性をイ］′？ｌるため、薄膜上
に積層される磁性体層の結晶の配向性も向上させること
ができる。又金属磁性体層と下地との密着性も向上させ
ることができる。Because the working thin film is formed of a material that is stable to oxygen,
Blocks oxygen from the magnetic core and prevents oxygen from diffusing into the magnetic layer. Also, do you want to add orientation to the crystal? Therefore, the crystal orientation of the magnetic layer laminated on the thin film can also be improved. Furthermore, the adhesion between the metal magnetic layer and the underlying layer can also be improved.
実施例
第１図は本発明の一実施例の平面図を示−Ｊｏ図中、１
ａ、、１ｂｔ、ｔ：１７半休、２ａ、２ｂは薄膜、３ａ
、３ｂは金属磁性体層、４ａ、４ｂはギャップ材を示す
。Embodiment FIG. 1 shows a plan view of an embodiment of the present invention.
a,, 1bt, t: 17 half-off, 2a, 2b are thin films, 3a
, 3b is a metal magnetic layer, and 4a and 4b are gap materials.
コア半体１ａ、ｌｂは酸化物系磁性材であるフェライト
よりなり、高い透磁率を有する。薄膜２ａ、２ｂは薄膜
形成時に配向性よく膜を形成する物質で構成する。例え
ば、鉄（Ｆｅ）、ニッケル（Ｎ ｉ ） 、クロム（Ｏ
ｒ）、モリブデン（Ｎｏ）、チタン（Ｔ ｉ ） 、タ
ンタル（Ｔａ）、コバルト（Ｃｏ）、鉄−ニッケル（Ｆ
ｅ−Ｎｉ＞合金、鉄ケイ素（Ｆｅ−３ｉ ）合金等の物
質を蒸着して構成する。The core halves 1a and lb are made of ferrite, which is an oxide-based magnetic material, and have high magnetic permeability. The thin films 2a and 2b are made of a substance that forms a film with good orientation during thin film formation. For example, iron (Fe), nickel (N i ), chromium (O
r), molybdenum (No), titanium (T i ), tantalum (Ta), cobalt (Co), iron-nickel (F
It is constructed by depositing a material such as an e-Ni> alloy or an iron-silicon (Fe-3i) alloy.
金属磁性体層３ａ、３ｂはセンダスト（登録商標）等の
飽和磁束密度の高い金属磁性材よりなる。The metal magnetic layers 3a and 3b are made of a metal magnetic material having a high saturation magnetic flux density, such as Sendust (registered trademark).
磁気ヘッドの製造方法を第２図〜第７図と共に説明する
。A method of manufacturing a magnetic head will be explained with reference to FIGS. 2 to 7.
まず、コア半休１ａ、ｌｂを形成するフェライトブロッ
ク５ａ、５ｂを用意し、第２図に示すようにブロック５
ａにコイルを巻回するための溝６と、ブロック５ａ、５
ｂにヘッドトラック幅を規制する溝７ａ、７ｂとを形成
する。次に第３図に示すようにフェライトブロック５ａ
、５ｂの互いに対向する面に前出のＦｅ、Ｎ ｉ ＳＣ
ｒ、Ｍｏ、Ｔ Ｉ 、Ｔ ａ ＳＣＯ−、Ｆ ｅ Ｎ
＋ １Ｆ ｅ Ｓ を等の結晶の配向性がよく、酸
化物となじみゃすく、センダスト等の金属磁性体層の付
着力を向上させ酸素に対して比較的安定な金属もしくは
合金の薄膜２ａ、２ｂをスパッタリング等の蒸着法によ
り膜厚的１０〜１０００ （入〕形成する。なお、スパ
ッタガスはアルゴン（Ａｒ）もしくはアルゴン（Ａｒ）
に数％の酸素０２又は窒素（Ｎ２）を添加しＩＣものを
用いる。First, ferrite blocks 5a and 5b forming core half-holes 1a and lb are prepared, and as shown in FIG.
a groove 6 for winding the coil, and blocks 5a, 5
Grooves 7a and 7b for regulating the head track width are formed in b. Next, as shown in FIG. 3, the ferrite block 5a
, 5b, the above-mentioned Fe, N i SC
r, Mo, T I , T a SCO-, F e N
Thin films 2a, 2b of metals or alloys that have good crystal orientation such as +1F e S, are compatible with oxides, improve the adhesion of metal magnetic layers such as sendust, and are relatively stable against oxygen. A film with a thickness of 10 to 1,000 mm is formed by a vapor deposition method such as sputtering.The sputtering gas is argon (Ar) or argon (Ar).
A few percent of oxygen 02 or nitrogen (N2) is added to make an IC.
次に第４図に示すようにセンダスト（ＦｅＡＬ−８ｉ
）等の高透磁率の金属磁性体層３ａ。Next, as shown in Figure 4, Sendust (FeAL-8i
) etc., a metal magnetic layer 3a with high magnetic permeability.
３ｂをスパッタリング等の蒸着法にＪ：り形成し、さら
に第５図に示すように金属磁性体層３ａ。3b is formed by a vapor deposition method such as sputtering, and then a metal magnetic layer 3a is formed as shown in FIG.
３ｂ上にギャップを形成するためのギャップ材４ａ、４
ｂを形成する。Gap materials 4a, 4 for forming a gap on 3b
form b.
次に第６図に示すように、ブロック５ａ、５ｂの薄膜２
ａ、２ｂ、金属磁性体層３ａ、３ｂ、ｌ！ギャップ材ａ
、４ｂが形成された面を互いにつき合わせ、第７図に示
すように、溝７ａ、７ｂにガラス等の接合剤８を封入す
ることにより両ブロック５ａ、５ｂを接合する。接合し
た後第７図に破線で示すように切断することによりヘッ
ドチップを得る。Next, as shown in FIG. 6, the thin film 2 of the blocks 5a and 5b is
a, 2b, metal magnetic layers 3a, 3b, l! Gap material a
, 4b are brought into contact with each other, and as shown in FIG. 7, the two blocks 5a, 5b are bonded by filling the grooves 7a, 7b with a bonding agent 8 such as glass. After bonding, the head chips are obtained by cutting as shown by broken lines in FIG.
薄膜２ａ、２ｂのＦｅ、Ｎｉ、ＭＯ，ＴＴａ、Ｃｏ１Ｆ
ｅ−Ｎ ｉ合金、Ｆｅ−８ｉ合金智の金属又は合金は安
定で配向性に優れており、また、これらの金属又は合金
は酸化物との付着性にも優れている。一方、フェライト
は不安定な酸化物であり、金属磁性体層３ａ、３ｂに酸
素が移動してしまい金属磁性体１３ａ、３ｂを劣化させ
又フエライ１〜自体も劣化づる。また、酸化物の為金属
磁性体層３ａ、３ｂとの付着性も悪い物質である。Fe, Ni, MO, TTa, Co1F of thin films 2a and 2b
Metals or alloys such as e-Ni alloy and Fe-8i alloy are stable and have excellent orientation, and these metals or alloys also have excellent adhesion with oxides. On the other hand, ferrite is an unstable oxide, and oxygen moves to the metal magnetic layers 3a, 3b, deteriorating the metal magnetic layers 13a, 3b and also deteriorating the ferrite 1~ itself. Further, since it is an oxide, it has poor adhesion to the metal magnetic layers 3a and 3b.
しかし、本実施例のように金属磁性体膜どフェライトコ
アとの間にＦｅ、Ｎ ｉ、ＭＯ，Ｔｉ。However, as in this embodiment, Fe, Ni, MO, and Ti are used between the metal magnetic film and the ferrite core.
Ｔａ、Ｃｏ、Ｆｅ−Ｎ ｉ合金、Ｆｅ−３ｉ合金等の金
属又は合金の薄膜２ａ、 ２ｂを形成することにより、
薄膜２ａ、２ｂの材料は酸化物との付着性に優れるため
、フェライトコア１ａ、１ｂと金属磁性体層３ａ、３ｂ
との付着性を向上させることができる。このため、フェ
ライトコア１ａ。By forming thin films 2a and 2b of metal or alloy such as Ta, Co, Fe-Ni alloy, Fe-3i alloy,
Since the materials of the thin films 2a and 2b have excellent adhesion with oxides, the ferrite cores 1a and 1b and the metal magnetic layers 3a and 3b
It is possible to improve adhesion with. For this reason, the ferrite core 1a.
１ｂと金属磁性体層３ａ、３ｂとの間に生じる疑似ギャ
ップを低減できる。The pseudo gap that occurs between 1b and the metal magnetic layers 3a and 3b can be reduced.
さらに、薄膜２ａ、２ｂの材料の金属又は合金は安定で
あり、フェライトコア１ａ、１ｂからの酸素の拡散を遮
断するため、金属磁性体層３ ａ 。Furthermore, the metal or alloy of the material of the thin films 2a, 2b is stable and blocks the diffusion of oxygen from the ferrite cores 1a, 1b.
３ｂの劣化を防止でき、金属磁性体層３ａ、３ｂ及びフ
ェライトの劣化ににる疑似ギャップの発生を防止できる
。3b can be prevented from deteriorating, and the generation of pseudo gaps due to deterioration of the metal magnetic layers 3a, 3b and ferrite can be prevented.
また、一般に、結晶の配向性は下地の状態により左右す
る。一方、金属磁性体層３ａ、３ｂの配向性、特に最初
の約１０００〜２０００人の初期生成膜の配向性が疑似
ギャップ効果を決定している。しかし、フェライトコア
１ａ、１ｂは配向性に問題ががある（特に多結晶のフェ
ライトコアを用いた場合）。したがって、通常この上に
形成される金属磁性体層３ａ、３ｂの結晶の配向性はふ
ぞろいになり、磁気特性を劣化してしまうが、薄膜２ａ
。Further, in general, the orientation of crystals depends on the state of the underlying material. On the other hand, the orientation of the metal magnetic layers 3a and 3b, especially the orientation of the initially formed film of about 1,000 to 2,000 people, determines the pseudo gap effect. However, the ferrite cores 1a and 1b have a problem in orientation (especially when a polycrystalline ferrite core is used). Therefore, the crystal orientation of the metal magnetic layers 3a and 3b formed thereon is usually uneven, deteriorating the magnetic properties, but the thin film 2a
.
２ｂを設けることにより、薄膜２ａ、 ２ｂの材料は結
晶の配向性に優れるため、フェライトコアに蒸着した場
合でもその配向性を失うことなく、したがって、薄１１
２ａ、２ｂＪ：に形成される金属磁性体層３ａ、３ｂの
結晶の配向性も良くなり、磁気特性を向上できる。By providing the thin films 2a and 2b, the materials of the thin films 2a and 2b have excellent crystal orientation, so even when deposited on the ferrite core, the materials do not lose their orientation.
The crystal orientation of the metal magnetic layers 3a, 3b formed in 2a, 2bJ: also improves, and the magnetic properties can be improved.
なお、以上のことはスパッタリングの際ガス中に酸素（
０２）又は窒素（Ｎ２）を添加又は酸素（０２）中で行
なうとその効果が顕著なものとなる。これは、スパッタ
リングを、０２を添加したＡｒガス中又は、０２ガス中
で行なうことにより、薄膜２ａ、２ｂの結晶が微細化し
、金属磁性体の磁気特性が向上する。Note that the above is because oxygen (
02) or by adding nitrogen (N2) or in oxygen (02), the effect becomes remarkable. By performing sputtering in Ar gas added with O2 or in O2 gas, the crystals of the thin films 2a and 2b are made finer, and the magnetic properties of the metal magnetic material are improved.
なお、本実施例では薄膜２ａ、２ｂにＦｅ１Ｎｉ、Ｃｒ
、ＭＯｌＴｉ、”ｌａ、Ｃｏ等の金属やＦｅ−Ｎ ｉ
、 Ｆｅ−８ｉ等の合金を用いたが、これに限ることは
なく、結晶の配向性が良く、酸素に対して安定な物質で
あればよく、例えば、熱的、化学的に安定な５ｉ０２、
Ｔａ２０５、ＡＬ２０３、ＴｉＯ２等の酸化物やＡＱ、
ＡＵ、Ｐｔ等の不活性な金属でもＪ：い。なお、Ｓ！０
２．１−ａｚ Ｏｓ 、ＡＬ２０３、Ｔ ｉ ０２等の
酸化物は熱化学的に安定な物質であるため、金属磁性体
層３ａ、３ｂへの酸素の拡散の心配はない。In this example, the thin films 2a and 2b are made of Fe1Ni, Cr.
, MOLTi, "la, Co, etc., and Fe-N i
, Fe-8i and other alloys were used, but the material is not limited to this, and any material that has good crystal orientation and is stable against oxygen may be used. For example, thermally and chemically stable 5i02,
Oxides such as Ta205, AL203, TiO2, AQ,
Even inert metals such as AU and Pt can be used. In addition, S! 0
Since oxides such as 2.1-az Os, AL203, and Ti02 are thermochemically stable substances, there is no fear of oxygen diffusion into the metal magnetic layers 3a and 3b.
発明の効果
上述の如く、フェライトコアと金属磁性体層との間に薄
膜を蒸着することにより、薄膜は酸素に対して安定であ
るため、フェライトコア中の酸素と反応せず、また、金
属磁性体層への酸素の拡散を防止し、疑似ギャップを発
生させる劣化層の発生を防止し、また、結晶の配向性に
も優れる材料を用いるため、薄膜上に形成される磁性体
層の結晶の配向性が向上し、又付着力が向上ししたがっ
て、疑似ギャップが生じにくくなり磁気ヘッドの磁気特
性を向上させる等の特長を右する。Effects of the Invention As mentioned above, by depositing a thin film between the ferrite core and the metal magnetic layer, the thin film is stable against oxygen, so it does not react with the oxygen in the ferrite core, and the metal magnetic layer This prevents the diffusion of oxygen into the magnetic layer, prevents the generation of a degraded layer that causes a pseudo gap, and uses a material that has excellent crystal orientation. The orientation is improved and the adhesion is improved, so that pseudo gaps are less likely to occur and the magnetic characteristics of the magnetic head are improved.
第１図は本発明の一実施例の平面図、第２図、第３図、
第４図、第５図、第６図、第７図は本発明の一実施例の
製造方法を説明するための図、第８図は従来の一例の平
面図である。
１ａ、１ｂ・・・コア半休、２ａ、２ｂ・・・簿膜、３
ａ、３ｂ・・・金属磁性体層、４ａ、４ｂ・・・ギャッ
プ材。FIG. 1 is a plan view of an embodiment of the present invention, FIG. 2, FIG.
4, 5, 6, and 7 are diagrams for explaining a manufacturing method according to an embodiment of the present invention, and FIG. 8 is a plan view of a conventional example. 1a, 1b...core half-break, 2a, 2b...book membrane, 3
a, 3b...metal magnetic layer, 4a, 4b... gap material.
Claims (2)
アを突き合わせて挟持してなる磁気ヘッドにおいて、 前記磁気コアと前記磁性体層との間に酸素に対し安定で
、かつ、結晶に配向性を有する材料で薄膜を具備してな
る磁気ヘッド。(1) In a magnetic head in which two magnetic cores each having a magnetic layer formed in the gap are butted and sandwiched, there is a material between the magnetic core and the magnetic layer that is stable against oxygen and is not crystalline. A magnetic head comprising a thin film made of an oriented material.
、 前記第１の工程により蒸着された前記薄膜上に前記磁性
体層を蒸着する第２の工程とを具備してなる請求項１記
載の磁気ヘッドの製造方法。(2) A first step of depositing the thin film on the magnetic core; and a second step of depositing the magnetic layer on the thin film deposited in the first step. 1. The method of manufacturing a magnetic head according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63302816A JPH02192006A (en) | 1988-11-30 | 1988-11-30 | Magnetic head and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63302816A JPH02192006A (en) | 1988-11-30 | 1988-11-30 | Magnetic head and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02192006A true JPH02192006A (en) | 1990-07-27 |
Family
ID=17913442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63302816A Pending JPH02192006A (en) | 1988-11-30 | 1988-11-30 | Magnetic head and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02192006A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02276012A (en) * | 1989-01-13 | 1990-11-09 | Sanyo Electric Co Ltd | Magnetic head |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613311A (en) * | 1984-06-18 | 1986-01-09 | Sony Corp | Magnetic head |
| JPS62145510A (en) * | 1985-12-18 | 1987-06-29 | Sony Corp | Magnetic head |
| JPS62295204A (en) * | 1986-06-13 | 1987-12-22 | Alps Electric Co Ltd | Magnetic head |
| JPS6332709A (en) * | 1986-05-21 | 1988-02-12 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Magnetic conversion head |
| JPS6339106A (en) * | 1986-08-02 | 1988-02-19 | Sony Corp | Magnetic head |
| JPS63124208A (en) * | 1986-11-14 | 1988-05-27 | Hitachi Maxell Ltd | Magnetic head |
-
1988
- 1988-11-30 JP JP63302816A patent/JPH02192006A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613311A (en) * | 1984-06-18 | 1986-01-09 | Sony Corp | Magnetic head |
| JPS62145510A (en) * | 1985-12-18 | 1987-06-29 | Sony Corp | Magnetic head |
| JPS6332709A (en) * | 1986-05-21 | 1988-02-12 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Magnetic conversion head |
| JPS62295204A (en) * | 1986-06-13 | 1987-12-22 | Alps Electric Co Ltd | Magnetic head |
| JPS6339106A (en) * | 1986-08-02 | 1988-02-19 | Sony Corp | Magnetic head |
| JPS63124208A (en) * | 1986-11-14 | 1988-05-27 | Hitachi Maxell Ltd | Magnetic head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02276012A (en) * | 1989-01-13 | 1990-11-09 | Sanyo Electric Co Ltd | Magnetic head |
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