JPH02175531A - Handling device for substrate and sheet material - Google Patents
Handling device for substrate and sheet materialInfo
- Publication number
- JPH02175531A JPH02175531A JP33061688A JP33061688A JPH02175531A JP H02175531 A JPH02175531 A JP H02175531A JP 33061688 A JP33061688 A JP 33061688A JP 33061688 A JP33061688 A JP 33061688A JP H02175531 A JPH02175531 A JP H02175531A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- substrate
- substrates
- sheet material
- objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 68
- 239000000463 material Substances 0.000 title abstract description 10
- 238000010521 absorption reaction Methods 0.000 abstract 4
- 230000003028 elevating effect Effects 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 235000001630 Pyrus pyrifolia var culta Nutrition 0.000 description 1
- 240000002609 Pyrus pyrifolia var. culta Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
■ 発明の目的
（１）産業上の利用分野
この発明は、ガラス基板、プリント基板、セラミックス
基板等の基板や、フィルム、各種カード、フロッピーデ
ィスク等のシート状物体のハンドリング装置に関するも
のである。[Detailed Description of the Invention] ■ Purpose of the Invention (1) Industrial Application Field This invention is applicable to the handling of substrates such as glass substrates, printed circuit boards, and ceramic substrates, as well as sheet-like objects such as films, various cards, and floppy disks. It is related to the device.
（２）従来の技術
従来、前記基板やシート状物体を多重積層して上面よ９
１枚づつ取出す様になしだハンドリング装置においては
、第５図に示す様に収納カセットに基板やシート状物体
を積層収納しおき、との収納カセットの上方に設置され
た昇降機に収納カセットと対向する様に吸着パッドを取
付け、収納カセットにおいても昇降機を備え、積層収容
した基板やシート状物体の最上面が常に一定位置にある
様にセンサーで収納カセットの昇降機を制御しながら上
下誘導される吸着パッドで最上層の基板やシート状物体
を吸着させ、更に次層以下の基板やシート状物体を係止
機構でもって側面よシ抑圧しながら最上層の基板やノー
ト状物体を剥離させ、次層口が最上層に付着してズした
シするのを防止しているものである。(2) Conventional technology Conventionally, the above-mentioned substrates and sheet-like objects are laminated in multiple layers so that the upper surface
In a nashi handling device that takes out one board at a time, as shown in Figure 5, substrates and sheet-like objects are stacked and stored in a storage cassette, and an elevator installed above the storage cassette faces the storage cassette. A suction pad is attached to the storage cassette, and the storage cassette is also equipped with an elevator, and the suction is guided up and down while controlling the elevator of the storage cassette with a sensor so that the top surface of the laminated substrates and sheet-like objects is always in a fixed position. The top layer substrate or sheet-like object is adsorbed by the pad, and the top layer substrate or notebook-like object is peeled off while holding down the substrates and sheet-like objects below the next layer from the side using the locking mechanism. This prevents the mouth from adhering to the top layer and causing it to drip.
（３）発明が解決しようとする問題点
しかしながら、前記ハンドリング装置においては基板や
シート状物体の肉厚が厚い場合は、積層収納した最上層
を除いて次層口よシ以下を係止機構で押圧係止させなが
ら最上層のみを吸着パッドで吸着処理し得るが、基板や
シート状物体の肉厚が薄い場合は、最上層と次層口以下
とを区分して係止をなし得ないものであり、最上層まで
抑圧係止した状態では吸着剥離がなし難く、捷だガラス
基板、セラミックス基板等においてはひび割れ、カケ等
を発生し易い難点があった。(3) Problems to be Solved by the Invention However, in the above-mentioned handling device, when the thickness of the substrate or sheet-like object is thick, the locking mechanism is not provided for the next layer from the opening to the bottom except for the top layer that is stacked and stored. Only the top layer can be suctioned using a suction pad while being pressed and locked, but if the thickness of the substrate or sheet-like object is thin, it is not possible to separate and lock the top layer and the next layer below. However, when the uppermost layer is pressed and locked, it is difficult to peel off by adsorption, and cracks, chips, etc. are likely to occur in a rolled glass substrate, a ceramic substrate, etc.
本発明は、上記従来の問題点に鑑みてなされたものであ
り、その目的は、基板やシート状物体の吸着面に対して
傾斜状に吸着パッドを対向誘導させ、更に最上層の基板
やシート状物体の剥離時に次層口との間隙にエアを吹込
みする剥離機構を設けることによって厚物から薄物まで
安定した状態でひび割れ等を発生することなく１枚づつ
吸着処理し得るハンドリング装置を提供するにある。The present invention has been made in view of the above-mentioned conventional problems, and its purpose is to guide a suction pad in an inclined manner to the suction surface of a substrate or sheet-like object, and furthermore, to By providing a peeling mechanism that blows air into the gap between the next layer and the next layer when peeling a shaped object, we provide a handling device that can pick up and process thick to thin objects one by one without causing cracks or the like in a stable state. There is something to do.
■ 発明の構成
（１）問題点を解決するための手段
上記目的を達成するだめに、本発明は収納カセットに積
層収納した基板やシート状物体を真空圧を利用した吸着
パッドで１枚づつ吸着して収納カセットから取出すハン
ドリング装置であって、基板やシート状物体を積層収容
する収納カセットと、基板やシート状物体を１枚づつ吸
着するための吸着機構と、吸着される基板やシート状物
体を下面の基板やシート状物体より剥離するための剥離
機構とを備え、
前記吸着機構が、収納カセットと上下対向した昇降機に
装架され、収納カセットに積層収納された基板やシート
状物体の上面に対して傾斜対向に配設された吸着パッド
を有し、
収納カセットに積層した基板やシート状物体の上面へ吸
着パッドを下降させて最上層の基板やシート状物体を傾
斜状に吸着上昇させながら次層の基板やシート状物体よ
り剥離させる様になしたノ・ンドリンク装置を構成する
ものである。■ Structure of the Invention (1) Means for Solving Problems In order to achieve the above object, the present invention adsorbs substrates and sheet-like objects stacked and stored in a storage cassette one by one using a suction pad using vacuum pressure. A handling device that takes out substrates and sheet-like objects from storage cassettes, and includes a storage cassette that stores substrates and sheet-like objects in a stacked manner, a suction mechanism that suctions the substrates and sheet-like objects one by one, and the substrates and sheet-like objects to be suctioned. and a peeling mechanism for peeling the substrates and sheet-like objects from the lower surface of the substrates and sheet-like objects, and the adsorption mechanism is mounted on an elevator that vertically faces the storage cassette, and the adsorption mechanism is mounted on an elevator that vertically faces the storage cassette, and the upper surface of the substrates and sheet-like objects stacked and stored in the storage cassette. The device has a suction pad arranged at an angle opposite to the storage cassette, and the suction pad is lowered to the top surface of the substrates or sheet-like objects stacked in the storage cassette, and the uppermost layer of substrates or sheet-like objects is suctioned up in an inclined manner. However, it constitutes a non-linking device designed to peel off the next layer from the substrate or sheet-like object.
また、前記剥離機構が、吸着パッドで吸着される当該最
上層の基板やシート状物体と次層の基板やシート状物体
との間隙へエアまたは熱風を噴気するために吸着パッド
の近傍に設けられた噴気ノズルを備えた構成をも含むも
のである。Further, the peeling mechanism is provided near the suction pad in order to blow air or hot air into the gap between the uppermost layer substrate or sheet-like object and the next layer substrate or sheet-like object to be adsorbed by the suction pad. This also includes a configuration equipped with a jet nozzle.
（２）作用
本発明になるハンドリング装置においては、収納カセッ
トに基板やシート状物体を積層しておき、この収納カセ
ットを上下誘導機構によって上昇させながらセンサで感
知して一定高さ位置に最上層の基板やシート状物体をセ
ットし、その後吸着機構を下降させ、傾斜状に対向させ
た吸着パッドで最上層の基板やシート状物体を吸着して
傾斜状に持上げながら最上層と次層との間隙へ噴気ノズ
ルよシェアや熱風を噴気して次層が付着しない様に剥離
させ、最上層の基板やシート状物体のみを吸着上昇させ
るものである。(2) Function In the handling device according to the present invention, substrates and sheet-like objects are stacked on a storage cassette, and while the storage cassette is raised by a vertical guidance mechanism, a sensor detects the stack and places the top layer at a certain height. After setting the substrate or sheet-like object, the suction mechanism is lowered, and the top layer substrate or sheet-like object is suctioned by the suction pads facing each other in an inclined manner. A steam nozzle blows shear or hot air into the gap to peel off the next layer without adhering to it, and only the top layer of the substrate or sheet-like object is lifted up.
（３）実施例
以下、添付図面により本発明の好適な実施例を説明する
。(3) Embodiments Hereinafter, preferred embodiments of the present invention will be explained with reference to the accompanying drawings.
第１図に示す様に、ハンドリング装置１０は、基板やシ
ート状物体の収納カセット１２、この収納カセット１２
の上方に設置された吸着機構１４、剥離機構１６等を備
えている。As shown in FIG. 1, the handling device 10 includes a storage cassette 12 for substrates and sheet-like objects,
It is equipped with an adsorption mechanism 14, a peeling mechanism 16, etc. installed above the .
そして、収納カセット１２は、機枠１８にモタ２０と連
動する様に軸支されたネジ軸２２で誘導される上下誘導
台盤２４の上面に固定されている。この収納カセット１
２内に基板やシート状物体２６を積層収容するものであ
る。また基板やシト状物体２６の最上層を規制するため
収納カセット１２の側方に位置決めセンサ２８が設置さ
れている。即ち、最上層の基板やシート状物体２６ａが
吸着処理されるごとに位置決めセンサ２８が感知して、
モータ２０でネジ軸２２を回転させながら台盤２４を上
昇させ、最上層の基板やシート状物体２６ａが一定位置
にある様に制御するものである。The storage cassette 12 is fixed to the upper surface of a vertical guiding platform 24 guided by a screw shaft 22 that is pivotally supported on the machine frame 18 so as to be interlocked with the motor 20. This storage cassette 1
2 accommodates substrates and sheet-like objects 26 in a stacked manner. Further, a positioning sensor 28 is installed on the side of the storage cassette 12 in order to regulate the top layer of the substrate or sheet-like object 26. That is, each time the top layer substrate or sheet-like object 26a is adsorbed, the positioning sensor 28 senses,
The base plate 24 is raised while the screw shaft 22 is rotated by the motor 20, and control is performed so that the uppermost layer substrate or sheet-like object 26a is at a fixed position.
吸着機構１４は、収納カセット１２の上方に架設された
昇降機３０と、第２図乃至第４図に示す様に昇降機３０
の下面より伸縮自在に垂下されたロッド３２と、このロ
ッド３２の下端に固定された逆り型状の取付盤３４と、
最上層の基板やシート状物体２６ａの上面に対して外側
斜下方へ傾斜した状態で取付盤３４の下面に装架された
２組の吸着パッド３６．３６とを有している。この吸着
パッド３６．３６は電磁弁３８ａを介して真空ポンプ４
０に連通されている。The suction mechanism 14 includes an elevator 30 installed above the storage cassette 12 and an elevator 30 as shown in FIGS. 2 to 4.
A rod 32 is extendably suspended from the lower surface of the rod 32, and an inverted mounting plate 34 is fixed to the lower end of the rod 32.
It has two sets of suction pads 36 and 36 mounted on the lower surface of the mounting plate 34 in a state that is inclined outwardly and downwardly with respect to the upper surface of the uppermost substrate or sheet-like object 26a. This suction pad 36.36 is connected to the vacuum pump 4 via the solenoid valve 38a.
It is connected to 0.
また、剥離機構１６は、逆り型状の取付盤３４の１端の
垂直板に吸着パッド３６．３６の下方へ向けて固定され
た噴気ノズル４２を有している。Further, the peeling mechanism 16 has a blow nozzle 42 fixed to a vertical plate at one end of the inverted mounting plate 34 so as to face downward from the suction pad 36.36.
この噴気ノズル４２は電磁弁３８ｂを介して圧縮ポンプ
４４に連通されている。This jet nozzle 42 is communicated with a compression pump 44 via a solenoid valve 38b.
そこで、第１図に示す様に位置決めセンサ２８の位置ま
で最上層の基板やシート状物体２６ａが上昇すると、昇
降機３０のロッド３２が伸長して２組の吸着パッドの内
の斜下段の吸着パッド３６が第２図に示す様に最上層の
基板やシート状物体２６ａに当着する。そこで、電磁弁
３８ａが開弁されて真空ポンプ４０の吸入負圧が吸着パ
ッド３６．３６に作用しながら第３図に示す様に最上層
の基板やシート状物体を持上げ、同時に電磁弁３８ｂが
開弁されて圧縮ポンプ４４内で圧縮されたエアまたは熱
風が噴気ノズル４２より第４図に示す様に最上層の基板
やシート状物体２６ａと第２層との間隙へ噴射されるも
のである。Therefore, when the uppermost substrate or sheet-like object 26a rises to the position of the positioning sensor 28 as shown in FIG. 36 comes into contact with the uppermost substrate or sheet-like object 26a as shown in FIG. Therefore, the solenoid valve 38a is opened and the suction negative pressure of the vacuum pump 40 acts on the suction pad 36.36 to lift the top layer substrate or sheet-like object as shown in FIG. When the valve is opened, air or hot air compressed in the compression pump 44 is injected from the jet nozzle 42 into the gap between the uppermost layer substrate or sheet-like object 26a and the second layer as shown in FIG. .
従って、最上層の基板やシート状物体２６ａの持上げ中
に次層目が付着したり、動いたり、或いはひび割れする
ことなく安定した状態に保持される。２組の吸着パッド
３６．３６に吸着された基板やシート状物体２６ａはロ
ッド３２の縮長と共に上昇し、次の工程へと移送されて
電磁弁３８ａ。Therefore, during lifting of the top layer substrate or sheet-like object 26a, the next layer is held in a stable state without adhesion, movement, or cracking. The substrate or sheet-like object 26a attracted to the two sets of suction pads 36, 36 rises as the rod 32 contracts, and is transferred to the next process, where it is attached to the electromagnetic valve 38a.
３８ｂの閉弁と共に吸着パッド３６．３６の吸入負圧、
噴気ノズル４２のエア噴射は停止し、次のハンドリング
へと待機するものである。When the valve 38b is closed, the suction negative pressure of the suction pad 36.36,
Air injection from the jet nozzle 42 is stopped and the next handling is on standby.
■ 発明の詳細
な説明した様に、本発明においてはガラス基板、プリン
ト基板、セラミックス基板、或いはフィルム、各種カー
ド、フロッピーディスク等を、一定の量の積層状態より
１枚づつ剥離して他の工程へと移行させるハンドリング
を安定した状態で吸着処理し、取出し時のひび割れの様
な破損、積層状態の乱れを防止し、抑圧機構を用いるこ
となく厚物から薄物まで高能率に処理し得るものである
０■ As explained in detail about the invention, in the present invention, glass substrates, printed circuit boards, ceramic substrates, films, various cards, floppy disks, etc. are separated one by one from a certain amount of laminated state and then subjected to other steps. This system performs suction processing in a stable state during handling, prevents damage such as cracks during removal, and disturbs the laminated state, and can process thick to thin materials with high efficiency without using a suppression mechanism. Some 0
第１図は本発明の実施例に係る基板やシート状物体のハ
ンドリング装置の正面図、第２図乃至第４図はその吸着
動作を示した正面図、第５図は従来型のハンドリング装
置の正面図である。
１０−ｍ−ハンドリング装置、１２−ｍ−収納セット、
１４−ｍ−吸着機構、１６剥離機構、２６基板やシート
状物体、３６一−−吸着パッド、４２−ｍ−噴気ノズル
特 許 出 願 人 株式会社 上野製作所代理人
弁理士 穴 見 之 武 義同 大兄 健策FIG. 1 is a front view of a handling device for substrates and sheet-like objects according to an embodiment of the present invention, FIGS. 2 to 4 are front views showing its suction operation, and FIG. 5 is a front view of a conventional handling device. It is a front view. 10-m-handling device, 12-m-storage set,
14-m-Adsorption mechanism, 16-Peeling mechanism, 26-Substrate or sheet-like object, 36--Suction pad, 42-m-Blow nozzle Patent Applicant: Ueno Seisakusho Co., Ltd. Agent
Patent Attorney Takeshi Anami Kensaku Ooie
Claims (1)
真空圧を利用した吸着パッドで１枚づつ吸着して収納カ
セットから取出すハンドリング装置であつて、 基板やシート状物体を積層収容する収納カセットと、基
板やシート状物体を１枚づつ吸着するための吸着機構と
、吸着される基板やシート状物体を下面の基板やシート
状物体より剥離するための剥離機構とを備え、 前記吸着機構が、収納カセットと上下対向した昇降機に
装架され、収納カセットに積層収納された基板やシート
状物体の上面に対して傾斜対向に配設された吸着パッド
を有し、 収納カセットに積層した基板やシート状物体の上面へ吸
着パッドを下降させて最上層の基板やシート状物体を傾
斜状に吸着上昇させながら次層の基板やシート状物体よ
り剥離させることを特徴とする、基板やシート状物体の
ハンドリング装置。 ２ 前記剥離機構が、吸着パッドで吸着される当該最上
層の基板やシート状物体と次層の基板やシート状物体と
の間隙へエアまたは熱風を噴気するために吸着パッドの
近傍に設けられた噴気ノズルを備えたことを特徴とする
、前記特許請求の範囲第１項記載の基板やシート状物体
のハンドリング装置。[Scope of Claims] 1. A handling device that picks up substrates and sheet-like objects stacked in a storage cassette one by one with a suction pad using vacuum pressure and takes them out from the storage cassette, the handling device being capable of stacking the substrates and sheet-like objects. It is equipped with a storage cassette for storing, a suction mechanism for suctioning substrates or sheet-like objects one by one, and a peeling mechanism for peeling the suctioned substrates or sheet-like objects from the substrate or sheet-like object on the lower surface, The suction mechanism is mounted on an elevator vertically facing the storage cassette, and has a suction pad disposed obliquely and opposite to the upper surface of the substrates or sheet-like objects stacked and stored in the storage cassette, A substrate characterized in that a suction pad is lowered to the top surface of a laminated substrate or sheet-like object, and the uppermost layer substrate or sheet-like object is suctioned upward in an inclined manner while being peeled off from the next layer of substrates or sheet-like objects. and sheet-like object handling equipment. 2. The peeling mechanism is provided near the suction pad in order to blow air or hot air into the gap between the uppermost layer substrate or sheet-like object and the next layer substrate or sheet-like object to be adsorbed by the suction pad. A handling device for substrates or sheet-like objects according to claim 1, characterized in that the device is equipped with a jet nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33061688A JPH02175531A (en) | 1988-12-26 | 1988-12-26 | Handling device for substrate and sheet material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33061688A JPH02175531A (en) | 1988-12-26 | 1988-12-26 | Handling device for substrate and sheet material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02175531A true JPH02175531A (en) | 1990-07-06 |
Family
ID=18234654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33061688A Pending JPH02175531A (en) | 1988-12-26 | 1988-12-26 | Handling device for substrate and sheet material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02175531A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012216447A (en) * | 2011-04-01 | 2012-11-08 | Ckd Corp | Carrier device for electrode foil and device for manufacturing laminate battery |
| CN111101108A (en) * | 2018-10-26 | 2020-05-05 | 东泰高科装备科技有限公司 | Substrate fixing structure, clamp and clamping system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122571A (en) * | 1978-03-15 | 1979-09-22 | Matsushita Electric Works Ltd | Lumber withdrawing apparatus |
| JPS5521373A (en) * | 1978-07-31 | 1980-02-15 | Natl House Ind Co Ltd | Apparatus for feeding plate material |
-
1988
- 1988-12-26 JP JP33061688A patent/JPH02175531A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122571A (en) * | 1978-03-15 | 1979-09-22 | Matsushita Electric Works Ltd | Lumber withdrawing apparatus |
| JPS5521373A (en) * | 1978-07-31 | 1980-02-15 | Natl House Ind Co Ltd | Apparatus for feeding plate material |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012216447A (en) * | 2011-04-01 | 2012-11-08 | Ckd Corp | Carrier device for electrode foil and device for manufacturing laminate battery |
| CN111101108A (en) * | 2018-10-26 | 2020-05-05 | 东泰高科装备科技有限公司 | Substrate fixing structure, clamp and clamping system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4171847B2 (en) | Solder ball mounting device | |
| JP5259434B2 (en) | Board acquisition device and board acquisition method | |
| JPH02175531A (en) | Handling device for substrate and sheet material | |
| JPH07237751A (en) | Plate transferring device | |
| JP2003048620A (en) | Taking-out hand for plate member | |
| JP3963576B2 (en) | Film component laminating apparatus and laminating method | |
| JPS59182135A (en) | Device for handling sheet | |
| JPH0964152A (en) | Wafer separation apparatus | |
| KR20080092525A (en) | Rework device for semiconductor wafer | |
| JP4704365B2 (en) | Article placement device | |
| JP3867564B2 (en) | Method and apparatus for separating stacked workpieces | |
| JPH0332220B2 (en) | ||
| JP2662090B2 (en) | Control method of single sheet | |
| JP2998133B2 (en) | Lead frame supply device | |
| JPH0577947A (en) | Thin plate casting device | |
| JPH10167483A (en) | Sheet feeding device | |
| JP3266075B2 (en) | Substrate loading device | |
| JPS61174036A (en) | Ceramic substrate feeder | |
| JPS6011861Y2 (en) | Plate separation device | |
| JPS6219631Y2 (en) | ||
| JPH0692513A (en) | Directly-piled base feeding device | |
| JP2022012102A (en) | Method and device for taking out thin sheet | |
| JP2000150621A (en) | Device and method for supplying resin substrate | |
| JPH04286556A (en) | Workpiece carry-out device | |
| JPH04180635A (en) | Method of supplying lead frame in semiconductor manufacturing device |