JPH02164731A - Production of microlens array - Google Patents
Production of microlens arrayInfo
- Publication number
- JPH02164731A JPH02164731A JP32022788A JP32022788A JPH02164731A JP H02164731 A JPH02164731 A JP H02164731A JP 32022788 A JP32022788 A JP 32022788A JP 32022788 A JP32022788 A JP 32022788A JP H02164731 A JPH02164731 A JP H02164731A
- Authority
- JP
- Japan
- Prior art keywords
- sol
- gel
- microlens array
- convex lens
- transparent substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 239000010703 silicon Substances 0.000 claims abstract description 6
- -1 silicon alkoxide Chemical class 0.000 claims abstract description 5
- 238000001035 drying Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 239000000499 gel Substances 0.000 claims description 9
- 238000003980 solgel method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 13
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 abstract description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 abstract description 4
- 230000003301 hydrolyzing effect Effects 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- 239000008119 colloidal silica Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910002020 Aerosil® OX 50 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 241000700124 Octodon degus Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、微小な凸レンズを多数有するマイクロレンズ
アレイに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a microlens array having a large number of minute convex lenses.
［従来の技術］
従来のマイクロレンズアレイは［伊賀他、光学第１Ｏ巻
、６号（１９８１）４１４Ｊに記載されているように、
平板マイクロレンズアレイとして作製されている。つま
り、ガラス基板上に円形開口のパターンを用い、イオン
拡散を行うと、三次元的な屈折率分布を基板内に形成す
ることができ、中心から二乗分布近似で屈折率が減少す
るという屈折率分布形のマイクロレンズを作製している
ものである。また、分布屈折率レンズとしては、セルフ
ォックレンズという名称で市販されている。これは、ロ
ッド状ガラスの周辺からイオン交替を行い、中心軸から
二乗分布で屈折率を減少させたもので、そのロッド状レ
ンズを多数、周期的に束めることで、セルフォックレン
ズアレイとしたものである。[Prior Art] A conventional microlens array [as described in Iga et al., Optics Vol. 1O, No. 6 (1981) 414J]
It is fabricated as a flat microlens array. In other words, by using a pattern of circular apertures on a glass substrate and performing ion diffusion, a three-dimensional refractive index distribution can be formed within the substrate, and the refractive index decreases from the center using a square distribution approximation. A distributed microlens is being manufactured. Furthermore, the distributed refractive index lens is commercially available under the name Selfoc lens. This is achieved by ion replacement from the periphery of the rod-shaped glass, reducing the refractive index with a square distribution from the central axis.By periodically bundling a large number of rod-shaped lenses, it is possible to create a Selfoc lens array. This is what I did.
［発明が解決しようとする課題］
しかし、前述の従来技術では、平板マイクロレンズもセ
ルフォックレンズにしろ、イオン拡散（イオン交換）に
より屈折率分布を形成しているため、素子作製に要する
時間は数日から数週間必要であり、工業化するにはコス
ト高になり、生産性が低いという問題点を有する。[Problems to be Solved by the Invention] However, in the above-mentioned conventional technology, whether it is a flat microlens or a selfoc lens, the refractive index distribution is formed by ion diffusion (ion exchange), so the time required to manufacture the element is short. It requires several days to several weeks, and has the problems of high cost and low productivity for industrialization.
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは、生産性が高く容易に低コストで
製造できるマイクロレンズアレイを提供するところにあ
る。The present invention is intended to solve these problems, and its purpose is to provide a microlens array that has high productivity and can be easily manufactured at low cost.
［課題を解決するための手段１
本発明のマイクロレンズアレイは、少なくともシリコン
アルコキシドを厚相とし、ゾルをゲル化しガラス化する
ゾル−ゲル法において、ゾルを液滴にし、透明基板上の
マイクロレンズを形成したい場所に付け、ゾル液の表面
張力により、凸レンズ形状に保ち、ゲル化させ、乾燥し
ドライゲルとした後熱処理によりガラス化させることを
特徴とする。[Means for Solving the Problems 1] The microlens array of the present invention uses at least silicon alkoxide as a thick phase, and in the sol-gel method in which the sol is gelled and vitrified, the sol is made into droplets and the microlenses on a transparent substrate are formed. It is characterized by applying it to the desired location, keeping it in a convex lens shape due to the surface tension of the sol solution, gelling it, drying it to form a dry gel, and then vitrifying it by heat treatment.
［作 用］
本発明の構成を詳しく説明する。シリコンアルコキシド
は水と反応し加水分解され、シリカゾルを形成する。こ
の溶媒は水でも有機溶剤でも可能であるがいずれにして
も低粘度の流動性を有する液体である。シリカゾルを一
滴にして、ガラス等の透明基板上に付着させるとその表
面張力により半円弧状に保たれレンズ形状になる。シリ
カゾルはこのまま放置するとゲル化し、レンズ形状のシ
リカゲルに変化する。これを乾燥すると透明基板上に付
着したままのドライゲルとすることができ焼結すること
により透明基板上に透明にガラス化した半円弧状のレン
ズ形状のマイクロレンズを形成することができる。レン
ズの焦点距離を調整するためには、シリカゾルにグリセ
リンや、エチレングリコール、ポリエチレングリコール
等の増粘剤を添加することや、表面張力を変えるアルコ
ール類や水を添加することで接触角θを変えることが有
効である。また、ゾルの無機成分がシリコンのみである
と、ガラス化させる焼結温度が高いため使用できる透明
基板は、石英ガラスのみになるであろう、そこで、安価
で人手しやすい透明基板として、青板ガラスや白板ガラ
ス、あるいは透明プラスチック基板を使用するためには
、焼結温度を６００℃以下にする必要がある。その方法
としては、ホウ素、リン、ナトリウム、カリウム、等の
元素をゾルに、酸や塩の形で添加することが有効である
。[Function] The configuration of the present invention will be explained in detail. Silicon alkoxide reacts with water and is hydrolyzed to form silica sol. This solvent can be water or an organic solvent, but in either case it is a liquid with low viscosity and fluidity. When a drop of silica sol is deposited on a transparent substrate such as glass, its surface tension keeps it in a semicircular arc shape, forming a lens shape. If left as is, silica sol will gel and change into lens-shaped silica gel. When this is dried, it becomes a dry gel that remains attached to the transparent substrate, and by sintering, it is possible to form transparent vitrified semicircular arc lens-shaped microlenses on the transparent substrate. In order to adjust the focal length of the lens, the contact angle θ can be changed by adding thickeners such as glycerin, ethylene glycol, or polyethylene glycol to the silica sol, or by adding alcohol or water that changes the surface tension. This is effective. In addition, if the inorganic component of the sol is silicon only, the only transparent substrate that can be used is quartz glass because the sintering temperature for vitrification is high. In order to use glass, white glass, or transparent plastic substrates, the sintering temperature must be 600° C. or lower. An effective method for this is to add elements such as boron, phosphorus, sodium, potassium, etc. to the sol in the form of acids or salts.
以上のようにして、透明基板上に半円弧状のマイクロレ
ンズを形成することができる。In the manner described above, semicircular arc-shaped microlenses can be formed on the transparent substrate.
［実 施 例１ 以下に実施例によって本発明の詳細な説明する。[Implementation Example 1] The present invention will be explained in detail below by way of examples.
実施例１
エチルシリケート２０８ｇ （１モル）に０． １規定
に塩酸１８０ｍε加えよく撹拌し加水分解した。次に、
シリカ粒子Ａｅｒｏｓｉｌ ＯＸ５０ （Ｄｅｇｕｓ
ｓａ社）を９０ｇ添加しよく撹拌し均一にした０次に、
０．２規定のアンモニア水を加え、ゾルのｐＨ値を４．
５にした。得られたゾルを注射器に取り、１滴づつ、石
英ガラス基板上に一列に等間隔で付は半円弧上に表面張
力より保ち、−列のゾルによるマイクロレンズ状ゾルを
形成した。２時間後ゾルはゲル化し、密閉容器中に１時
間放置した。次に６０°Ｃの乾燥機に投入し容器のツク
にピンホールを開け、ガラス基板上に付着したドライゲ
ルを作製した。室温から１３００℃まで徐々に温度を上
げ１３００℃で境結しガラス化した６以上により、石英
ガラス基板上にマイクロレンズアレイを作製できた。Example 1 208g (1 mol) of ethyl silicate was mixed with 0. Hydrochloric acid (180 mε) was added to 1N, and the mixture was thoroughly stirred for hydrolysis. next,
Silica particles Aerosil OX50 (Degus
Next, add 90g of sa company) and stir well to make it homogeneous.
Add 0.2N ammonia water and adjust the pH value of the sol to 4.
I gave it a 5. The obtained sol was taken into a syringe and drop by drop was applied in a row on a quartz glass substrate at equal intervals, keeping it on a semicircular arc due to surface tension to form a microlens-shaped sol with a row of sol. After 2 hours, the sol turned into a gel and was left in a closed container for 1 hour. Next, the container was placed in a dryer at 60° C., a pinhole was made in the container, and a dry gel was produced that adhered to the glass substrate. By gradually raising the temperature from room temperature to 1300° C. and bonding and vitrifying at 1300° C., a microlens array could be fabricated on a quartz glass substrate.
実施例２
エチルシリケートをアンモニア水で加水分解して作製し
たコロイダルシリカを、ａ縮することにより、シリカ濃
度３０ｗｔ％、ｐＨ９，０で粒径０．２５μｍのコロイ
ダルシリカとした。このコロイダルシリカ３００ｇに２
規定の塩酸を添加しｐＨを１．５にした。これに、エチ
ルシリケート２０８ｇを加え、よく撹拌し、加水分解を
終了させた。この溶液に０．２規定のアンモニア水を添
加し、ｐＨを４．５に調整した。このゾルを注射器に取
り、−滴づつ、石英ガラス板上に、縦横に等間に付け、
マトリックス状にゾル滴をつけた。Example 2 Colloidal silica prepared by hydrolyzing ethyl silicate with aqueous ammonia was subjected to a-condensation to obtain colloidal silica with a silica concentration of 30 wt%, pH 9.0, and a particle size of 0.25 μm. 2 for 300g of this colloidal silica
Specified hydrochloric acid was added to adjust the pH to 1.5. To this, 208 g of ethyl silicate was added and stirred well to complete the hydrolysis. 0.2N aqueous ammonia was added to this solution to adjust the pH to 4.5. Take this sol in a syringe and apply it drop by drop at equal intervals vertically and horizontally on a quartz glass plate.
Sol droplets were applied in a matrix.
それぞれの液滴は表面張力により、接触角θで半円弧を
形成し、レンズ形状にさせた。２時間放置することで、
ゲル化し、適当な乾燥スピードにコントロールすること
で、クラックのないマイクロレンズ状のドライゲルとし
た。１３００’Ｃで焼結することで透明なマイクロレン
ズとすることができた。Each droplet formed a semicircular arc at a contact angle θ due to surface tension, giving it a lens shape. By leaving it for 2 hours,
By gelatinizing and controlling the drying speed to an appropriate level, a crack-free microlens-shaped dry gel was created. By sintering at 1300'C, a transparent microlens could be obtained.
［発明の効果］
以上述べたように、本発明によれば、ゾル−ゲル法のゾ
ルを小滴にし、透明基板上に付着するとゾルの表面張力
により半円弧状になり、レンズ形状を保つことができる
。この状態を維持しながらゲル化し乾燥、焼結すると、
ガラスのマイクロレンズが作製できる。このマイクロレ
ンズをアレイ状にならべるとマイクロレンズアレイにす
ることができる。[Effects of the Invention] As described above, according to the present invention, when the sol of the sol-gel method is made into small droplets and adhered to a transparent substrate, the surface tension of the sol causes the droplets to form a semicircular arc shape and maintain the lens shape. Can be done. While maintaining this state, it gels, dries, and sinters.
Glass microlenses can be made. A microlens array can be obtained by arranging these microlenses in an array.
このようにして得られるマイクロレンズアレイはファク
シミリや複写機に使用でき、その低コスト化に貢献する
であろう、また液晶プロジェクタ−に用い、その画素に
対応するようにマイクロレンズを配置すると高輝度化に
役立つものと考えなマイクロレンズアレイは、種々の光
学製品の高機能化、低コスト化に大きく貢献することに
なるであろう。The microlens array obtained in this way can be used in facsimile machines and copying machines, contributing to cost reduction.It can also be used in liquid crystal projectors, and if the microlenses are arranged to correspond to the pixels, high brightness can be achieved. Microlens arrays, which are considered to be useful for the advancement of optical technology, will greatly contribute to increasing the functionality and lowering costs of various optical products.
Claims (1)
ル化しガラス化するゾル−ゲル法において、ゾルを液滴
にし、透明基板上のマイクロレンズを形成したい場所に
付け、ゾル液の表面張力により、凸レンズ形状に保ち、
ゲル化させ、乾燥しドライゲルとした後熱処理によりガ
ラス化させることを特徴とするマイクロレンズアレイの
製造方法。In the sol-gel method, which uses at least silicon alkoxide as a raw material and gels and vitrifies the sol, the sol is made into droplets and applied to the desired location on a transparent substrate to form a microlens, and the surface tension of the sol liquid keeps it in the shape of a convex lens. ,
A method for producing a microlens array, which comprises gelling it, drying it to form a dry gel, and then vitrifying it by heat treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32022788A JPH02164731A (en) | 1988-12-19 | 1988-12-19 | Production of microlens array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32022788A JPH02164731A (en) | 1988-12-19 | 1988-12-19 | Production of microlens array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02164731A true JPH02164731A (en) | 1990-06-25 |
Family
ID=18119145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32022788A Pending JPH02164731A (en) | 1988-12-19 | 1988-12-19 | Production of microlens array |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02164731A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1364917A1 (en) * | 2001-03-01 | 2003-11-26 | Nippon Sheet Glass Co., Ltd. | Method for fabricating optical element |
-
1988
- 1988-12-19 JP JP32022788A patent/JPH02164731A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1364917A1 (en) * | 2001-03-01 | 2003-11-26 | Nippon Sheet Glass Co., Ltd. | Method for fabricating optical element |
| EP1364917A4 (en) * | 2001-03-01 | 2006-03-15 | Nippon Sheet Glass Co Ltd | Method for fabricating optical element |
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