JPH02137747U - - Google Patents

Info

Publication number
JPH02137747U
JPH02137747U JP4612589U JP4612589U JPH02137747U JP H02137747 U JPH02137747 U JP H02137747U JP 4612589 U JP4612589 U JP 4612589U JP 4612589 U JP4612589 U JP 4612589U JP H02137747 U JPH02137747 U JP H02137747U
Authority
JP
Japan
Prior art keywords
electrode
emitter
ion beam
hole
gas phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4612589U
Other languages
English (en)
Other versions
JPH0644008Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4612589U priority Critical patent/JPH0644008Y2/ja
Publication of JPH02137747U publication Critical patent/JPH02137747U/ja
Application granted granted Critical
Publication of JPH0644008Y2 publication Critical patent/JPH0644008Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Description

【図面の簡単な説明】
第１図は本考案ガスフエーズ型集束イオンビー
ム装置の要部である第１の電極の斜視図、第２図
乃至第４図はガスフエーズ型集束イオンビーム装
置の従来例を示すもので、第２図はガスフエーズ
型集束イオンビーム装置の縦断面図、第３図はイ
オンガンの拡大断面図、第４図は第１の電極の斜
視図である。 符号の説明、２……第１の電極、１５……ビー
ムを通す孔、１８……ガス抜き孔。

Claims (1)

  1. 【実用新案登録請求の範囲】 エミツタからイオンビームを引き出す引出し電
    極の反エミツタ側に設けられたコンデンサレンズ
    を成す第１の電極と、第２の電極との少なくとも
    いずれか一方に、ビームを通す孔とは別にガス抜
    き孔を形成してなる。 ことを特徴とするガスフエーズ型集束イオンビー
    ム装置。
JP4612589U 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置 Expired - Fee Related JPH0644008Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4612589U JPH0644008Y2 (ja) 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4612589U JPH0644008Y2 (ja) 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置

Publications (2)

Publication Number Publication Date
JPH02137747U true JPH02137747U (ja) 1990-11-16
JPH0644008Y2 JPH0644008Y2 (ja) 1994-11-14

Family

ID=31560927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4612589U Expired - Fee Related JPH0644008Y2 (ja) 1989-04-19 1989-04-19 ガスフェーズ型集束イオンビーム装置

Country Status (1)

Country Link
JP (1) JPH0644008Y2 (ja)

Also Published As

Publication number Publication date
JPH0644008Y2 (ja) 1994-11-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees