JPH02127044U - - Google Patents
Info
- Publication number
- JPH02127044U JPH02127044U JP3429589U JP3429589U JPH02127044U JP H02127044 U JPH02127044 U JP H02127044U JP 3429589 U JP3429589 U JP 3429589U JP 3429589 U JP3429589 U JP 3429589U JP H02127044 U JPH02127044 U JP H02127044U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- resistors
- sensitivity
- type semiconductor
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第1図〜第3図は本考案による一実施例を示し
、第1図は圧力センサの底面図、第2図は圧力セ
ンサの断面図、第3図は回路図である。
1…ハウジング、2a,2b…端子、3…セン
サチツプ、4a,4b…チツプ抵抗、5…ワイヤ
、6…圧力ポート、R5,R6…抵抗。
1 to 3 show an embodiment of the present invention, in which FIG. 1 is a bottom view of a pressure sensor, FIG. 2 is a sectional view of the pressure sensor, and FIG. 3 is a circuit diagram. DESCRIPTION OF SYMBOLS 1... Housing, 2a, 2b... Terminal, 3... Sensor chip, 4a, 4b... Chip resistance, 5... Wire, 6... Pressure port, R5, R6... Resistor.
Claims (1)
、圧力センサ内部に、2個以上のチツプ抵抗を設
けることを特徴とする拡散型半導体圧力センサ。 A diffusion type semiconductor pressure sensor characterized in that two or more chip resistors are provided inside the pressure sensor as temperature compensation resistors for sensitivity and bridge imbalance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3429589U JPH02127044U (en) | 1989-03-28 | 1989-03-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3429589U JPH02127044U (en) | 1989-03-28 | 1989-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02127044U true JPH02127044U (en) | 1990-10-19 |
Family
ID=31538639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3429589U Pending JPH02127044U (en) | 1989-03-28 | 1989-03-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02127044U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61264765A (en) * | 1985-05-13 | 1986-11-22 | トランスアメリカ、デラバル、インコ−ポレイテツド | Wheat stone bridge type transducer with limited heat changes |
JPS6336059B2 (en) * | 1980-10-30 | 1988-07-19 | Basf Ag |
-
1989
- 1989-03-28 JP JP3429589U patent/JPH02127044U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6336059B2 (en) * | 1980-10-30 | 1988-07-19 | Basf Ag | |
JPS61264765A (en) * | 1985-05-13 | 1986-11-22 | トランスアメリカ、デラバル、インコ−ポレイテツド | Wheat stone bridge type transducer with limited heat changes |
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