JPH02122346U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は異物検出装置の一実施例を示す斜視図
、第２図は第１図に示す異物検出装置の概略正面
図、第３図は第１図に示す照明手段を拡大して示
す斜視図、第４図ａは反射板が設けられており、
異物が被検査物の内部に存在する場合の反射光束
の状態を示す説明図、第４図ｂは反射板が設けら
れてなく異物が被検査物の表面に存在する場合の
反射光束の状態を示す説明図、第４図ｃは反射板
が設けられてなく異物が被検査物の内部に存在す
る場合の反射光束の状態を示す説明図、第５図ａ
は反射板が設けられてない場合に異物が存在しな
い被検査物からの反射光束に基づいて出力される
電気（電圧）信号の状態を示す説明図、第５図ｂ
は反射板が設けられている場合に出力される電気
（電圧）信号の状態を示す説明図、第５図ｃは異
物が存在しない被検査物の断面図、第６図ａ，ｂ
は、内部に異物が存在する被検査物からの反射光
束に基づいて出力される電気（電圧）信号の状態
を示す第５図ａ，ｂに相当する図、第６図ｃは異
物が存在する被検査物の断面図である。 １……被検査物、２……異物、３……照明手段
、４……反射板、５……イメージセンサカメラ。 FIG. 1 is a perspective view showing an embodiment of the foreign object detection device, FIG. 2 is a schematic front view of the foreign object detection device shown in FIG. 1, and FIG. 3 is an enlarged perspective view of the illumination means shown in FIG. 1. Figure 4a is equipped with a reflective plate,
An explanatory diagram showing the state of the reflected light flux when a foreign object exists inside the object to be inspected, and FIG. Fig. 4c is an explanatory drawing showing the state of the reflected light flux when no reflecting plate is provided and a foreign object is present inside the object to be inspected, Fig. 5a
is an explanatory diagram showing the state of the electric (voltage) signal output based on the reflected light flux from the object to be inspected without any foreign matter when no reflector is provided, FIG. 5b
is an explanatory diagram showing the state of the electric (voltage) signal output when a reflector is provided, Figure 5c is a cross-sectional view of the object to be inspected without foreign objects, and Figures 6a and b
5A and 5B are diagrams corresponding to FIGS. 5A and 5B showing the states of electrical (voltage) signals output based on the reflected light flux from an object to be inspected in which a foreign object is present, and FIG. 6C is a diagram in which a foreign object is present. FIG. 3 is a cross-sectional view of the object to be inspected. DESCRIPTION OF SYMBOLS 1...Object to be inspected, 2...Foreign object, 3...Illuminating means, 4...Reflector, 5...Image sensor camera.

Claims (1)

【実用新案登録請求の範囲】 (1) 被検査物の表面または内部に存在する異物
を検出する異物検出装置であつて、上記被検査物
に光を照射する照明手段と該照明手段の光の上記
被検査物からの反射光を受光するイメージセンサ
カメラとを備え、上記照明手段が上記イメージセ
ンサカメラのレンズの軸線を挟む位置に細隙を介
して配設された一対の棒状照明具を具備すること
を特徴とする異物検出装置。 (2) 上記被検査物を介して上記照明手段の反対
側に上記被検査物を透過した光を反射する反射板
を備える、請求項(1)記載の異物検出装置。[Claims for Utility Model Registration] (1) A foreign object detection device for detecting foreign objects existing on the surface or inside of an object to be inspected, which comprises an illumination means for irradiating light onto the object to be inspected, and a light source of the illumination means. an image sensor camera that receives reflected light from the object to be inspected, and the illumination means includes a pair of rod-shaped illumination devices disposed with a gap between them at positions sandwiching the axis of the lens of the image sensor camera. A foreign object detection device characterized by: (2) The foreign object detection device according to claim (1), further comprising a reflecting plate that reflects light transmitted through the object to be inspected on the opposite side of the illumination means via the object to be inspected.