JPH02120829U - - Google Patents
Info
- Publication number
- JPH02120829U JPH02120829U JP2920089U JP2920089U JPH02120829U JP H02120829 U JPH02120829 U JP H02120829U JP 2920089 U JP2920089 U JP 2920089U JP 2920089 U JP2920089 U JP 2920089U JP H02120829 U JPH02120829 U JP H02120829U
- Authority
- JP
- Japan
- Prior art keywords
- ray
- window portion
- shielding plate
- exposure
- defective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002950 deficient Effects 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2920089U JPH02120829U (zh) | 1989-03-14 | 1989-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2920089U JPH02120829U (zh) | 1989-03-14 | 1989-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120829U true JPH02120829U (zh) | 1990-09-28 |
Family
ID=31253205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2920089U Pending JPH02120829U (zh) | 1989-03-14 | 1989-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120829U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100389567B1 (ko) * | 1999-08-19 | 2003-06-27 | 엔이씨 일렉트로닉스 코포레이션 | 전자선노광마스크, 전자선노광방법, 반도체장치 제조방법및 전자선노광장치 |
-
1989
- 1989-03-14 JP JP2920089U patent/JPH02120829U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100389567B1 (ko) * | 1999-08-19 | 2003-06-27 | 엔이씨 일렉트로닉스 코포레이션 | 전자선노광마스크, 전자선노광방법, 반도체장치 제조방법및 전자선노광장치 |
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