JPH02120829U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案のＸ線露光用マスクを示す図で
、同図ａはその平面図、同図ｂは同図ａ図におけ
るＡ−Ａ′線での断面図、第２図は本考案におけ
る他のＸ線露光用マスクを示す図で、同図ａはそ
の平面図、同図ｂは同図ａ図におけるＡ−Ａ′線
での断面図、第３図は欠陥パターンを有するＸ線
露光用マスクを示す図で、同図ａはその平面図、
同図ｂは同図ａのＡ−Ａ′線での断面図、第４図
は欠陥Ｘ線透過膜を有するＸ線露光用マスクを示
す図で、同図ａはその平面図、同図ｂは同図ａの
Ａ−Ａ′線での断面図である。なお、Ｘ線露光用
マスクの表（オモテ）側は第１図ｂ〜第４図ｂに
おける紙面の地の側とする。 １は正常なパターンを有する露光領域、２は修
正不可能な欠陥パターンを有する露光領域、３は
破れたＸ線透過膜を有する露光領域、４はＸ線透
過膜が除去された露光領域、５はＸ線遮蔽板、６
は接着層、７は支持体、８はＸ線透過膜、９はＸ
線吸収体、１０はアライメント・マーク用小窓、
１１は正常なパターンを有する露光領域をもつ大
窓、１２は修正不可能な欠陥パターンを有する露
光領域をもつ大窓、１３は破れたＸ線透過膜を有
する露光領域をもつ大窓、１４は窓側壁を示す。 Figure 1 is a diagram showing the X-ray exposure mask of the present invention, Figure a is a plan view thereof, Figure b is a sectional view taken along line A-A' in Figure A, and Figure 2 is a diagram of the invention FIG. 3 is a diagram showing another X-ray exposure mask in FIG. This figure shows an exposure mask, and figure a is a plan view thereof;
Figure b is a cross-sectional view taken along line A-A' in figure a, Figure 4 is a diagram showing an X-ray exposure mask having a defective X-ray transmitting film, figure a is a plan view thereof, figure b is 1 is a sectional view taken along line AA' in FIG. The front side of the X-ray exposure mask is the bottom side of the paper in FIGS. 1b to 4b. 1 is an exposure area with a normal pattern, 2 is an exposure area with an uncorrectable defect pattern, 3 is an exposure area with a torn X-ray transparent film, 4 is an exposure area from which the X-ray transparent film has been removed, 5 is an X-ray shielding plate, 6
is an adhesive layer, 7 is a support, 8 is an X-ray transparent membrane, 9 is X
Line absorber, 10 is a small window for alignment mark,
11 is a large window with an exposure area having a normal pattern; 12 is a large window with an exposure area having an uncorrectable defect pattern; 13 is a large window with an exposure area having a broken X-ray transparent film; Showing the window side wall.

Claims (1)

【実用新案登録請求の範囲】 (1) 平板状支持体の一方の面にＸ線透過膜が積
層され、複数個のＸ線露光領域に対して該Ｘ線透
過膜上にＸ線吸収材からなる同一のパターンがそ
れぞれ形成され、かつ該平板状支持体の他方の面
から各Ｘ線露光領域に対応した窓部が穿設される
Ｘ線露光用マスクにおいて、欠陥パターン、また
は欠陥Ｘ線透過膜を有する窓部がＸ線遮蔽板によ
り遮蔽されていることを特徴とするＸ線露光用マ
スク。 (2) 上記欠陥パターン、または欠陥Ｘ線透過膜
を有する窓部を遮蔽したＸ線遮蔽板が、気密に遮
蔽されていることを特徴とする請求項１記載のＸ
線露光用マスク。 (3) 上記支持体窓部が谷状にテーパーを有して
穿設され、またその窓部の開口面積の小さい方の
面にＸ線透過膜が積層されており、かつその窓部
がＸ線遮蔽板により谷状窓部内において遮蔽され
ていることを特徴とする請求項１、または２記載
のＸ線露光用マスク。[Claims for Utility Model Registration] (1) An X-ray transparent film is laminated on one surface of a flat support, and an X-ray absorbing material is layered on the X-ray transparent film for a plurality of X-ray exposure areas. In an X-ray exposure mask in which identical patterns are formed and windows corresponding to each X-ray exposure area are formed from the other surface of the flat support, defective patterns or defective X-ray transmission An X-ray exposure mask characterized in that a window portion having a film is shielded by an X-ray shielding plate. (2) The X-ray shielding plate according to claim 1, wherein the X-ray shielding plate that shields the window portion having the defect pattern or the defective X-ray transparent film is airtightly shielded.
Mask for line exposure. (3) The window portion of the support body is formed with a taper in the shape of a valley, and an X-ray transparent membrane is laminated on the surface with a smaller opening area of the window portion, and the window portion is 3. The X-ray exposure mask according to claim 1, wherein the valley-shaped window portion is shielded by a ray shielding plate.