JPH0199481U - - Google Patents
Info
- Publication number
- JPH0199481U JPH0199481U JP19687187U JP19687187U JPH0199481U JP H0199481 U JPH0199481 U JP H0199481U JP 19687187 U JP19687187 U JP 19687187U JP 19687187 U JP19687187 U JP 19687187U JP H0199481 U JPH0199481 U JP H0199481U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- nozzle
- cleaning chamber
- storage box
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Description
第１図は本考案の一実施例の断面図である。
１……キヤリア収納箱、２……洗浄室、３……
収納箱載置台、４……基体、５……洗浄用ノズル
、６……排液口、７……乾燥用ノズル、Ａ……洗
浄液、Ｂ……乾燥用空気。
FIG. 1 is a sectional view of an embodiment of the present invention. 1...Carrier storage box, 2...Cleaning room, 3...
Storage box mounting table, 4...Base, 5...Cleaning nozzle, 6...Drain port, 7...Drying nozzle, A...Cleaning liquid, B...Drying air.
Claims (1)
隙間を有するウエハキヤリア収納箱載置台と、前
記洗浄室の下面または側面に設けられ洗浄液及び
空気を洗浄室内にそれぞれ噴出する洗浄用ノズル
及び乾燥用ノズルとを含むことを特徴とするウエ
ハキヤリア収納箱洗浄装置。 A cleaning chamber, a wafer carrier storage box mounting table provided in the cleaning chamber and having a gap through which a cleaning solution passes, and a cleaning nozzle and a drying nozzle provided on the bottom or side surface of the cleaning chamber for spouting cleaning solution and air into the cleaning chamber, respectively. A wafer carrier storage box cleaning device comprising: a nozzle;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19687187U JPH0199481U (en) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19687187U JPH0199481U (en) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199481U true JPH0199481U (en) | 1989-07-04 |
Family
ID=31487461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19687187U Pending JPH0199481U (en) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199481U (en) |
-
1987
- 1987-12-24 JP JP19687187U patent/JPH0199481U/ja active Pending