JPS6237932U - - Google Patents
Info
- Publication number
- JPS6237932U JPS6237932U JP12913085U JP12913085U JPS6237932U JP S6237932 U JPS6237932 U JP S6237932U JP 12913085 U JP12913085 U JP 12913085U JP 12913085 U JP12913085 U JP 12913085U JP S6237932 U JPS6237932 U JP S6237932U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- plate
- suction plate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図は本考案の実施例の構成を示す断面図、
第２図は吸着状態を示す断面図、第３図は従来の
ウエハ固定装置の例を示す説明図である。
１：吸着テーブル、２：吸引孔、３：吸着板、
４：リツプ部、５：ウエハ。
FIG. 1 is a sectional view showing the configuration of an embodiment of the present invention;
FIG. 2 is a sectional view showing a suction state, and FIG. 3 is an explanatory view showing an example of a conventional wafer fixing device. 1: Suction table, 2: Suction hole, 3: Suction plate,
4: Lip part, 5: Wafer.
Claims (1)
テーブルの真空吸着面を多孔質材料にてなる吸着
板で形成し、同吸着板の周囲を、前記吸着板上面
のレベル面より高くなる状態に軟質のリツプ部で
囲繞したことを特徴とするウエハ吸着装置。 The vacuum suction surface of the wafer suction table that communicates with the suction hole for vacuum suction is formed of a suction plate made of a porous material, and the periphery of the suction plate is made soft so that it is higher than the level surface of the upper surface of the suction plate. A wafer suction device characterized by being surrounded by a lip portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12913085U JPS6237932U (en) | 1985-08-23 | 1985-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12913085U JPS6237932U (en) | 1985-08-23 | 1985-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237932U true JPS6237932U (en) | 1987-03-06 |
Family
ID=31025428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12913085U Pending JPS6237932U (en) | 1985-08-23 | 1985-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237932U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167145A (en) * | 1985-01-19 | 1986-07-28 | Mazda Motor Corp | Cylinder-head structure of dohc multicylinder engine |
| JPH10144775A (en) * | 1996-11-05 | 1998-05-29 | Samsung Electron Co Ltd | Pedestal of semiconductor device manufacturing equipment |
| JP2005175207A (en) * | 2003-12-11 | 2005-06-30 | Sharp Corp | Manufacturing method of semiconductor device, reinforcement member for grinding and bonding method thereof |
| JP2008114349A (en) * | 2006-11-07 | 2008-05-22 | Disco Abrasive Syst Ltd | Wafer grinding method and device |
| JP2016502112A (en) * | 2012-12-26 | 2016-01-21 | ベンタナ メディカル システムズ， インコーポレイテッド | Specimen processing system and method for holding glass slide |
-
1985
- 1985-08-23 JP JP12913085U patent/JPS6237932U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61167145A (en) * | 1985-01-19 | 1986-07-28 | Mazda Motor Corp | Cylinder-head structure of dohc multicylinder engine |
| JPH0238785B2 (en) * | 1985-01-19 | 1990-08-31 | Mazda Motor | |
| JPH10144775A (en) * | 1996-11-05 | 1998-05-29 | Samsung Electron Co Ltd | Pedestal of semiconductor device manufacturing equipment |
| JP2005175207A (en) * | 2003-12-11 | 2005-06-30 | Sharp Corp | Manufacturing method of semiconductor device, reinforcement member for grinding and bonding method thereof |
| JP4574980B2 (en) * | 2003-12-11 | 2010-11-04 | シャープ株式会社 | Semiconductor device manufacturing method, grinding reinforcing member, and method of attaching the same |
| JP2008114349A (en) * | 2006-11-07 | 2008-05-22 | Disco Abrasive Syst Ltd | Wafer grinding method and device |
| JP2016502112A (en) * | 2012-12-26 | 2016-01-21 | ベンタナ メディカル システムズ， インコーポレイテッド | Specimen processing system and method for holding glass slide |